Fixture for light-relaxation evaporation coating product

Abstract

The utility model discloses a light-emitting evaporation coating product clamp which comprises a clamp body, the clamp body comprises a bottom ring, a middle bearing ring and an inner-layer check ring, the bottom ring, the middle bearing ring and the inner-layer check ring are fixedly connected in sequence, the bottom ring and the middle bearing ring are distributed in a stepped mode, and the inner-layer check ring is fixedly connected to the inner circle of the upper portion of the middle bearing ring. And hollow grooves are formed in the inner-layer check ring along the circumference at specific intervals in a concave and hollow manner. According to the fixture for the light-relaxation evaporation coating product, the hollowed-out grooves are formed in the inner-layer check ring along the circumference at specific intervals in a concave and hollowed-out mode, light-relaxation evaporation coating of a specific product is met, or a film layer is coated at a special position of the edge of the product, and the hollowed-out position can be customized according to the product; and the clamp body can be directly transformed on a standard part, and is simple and convenient to manufacture.

Description

Technical Field

[0001] The utility model relates to the technical field of coating fixtures, in particular to a light-off evaporation coating product fixture. Background Art

[0002] With the increasingly close combination of optical thin film technology and semiconductor technology, in order to improve the utilization rate of wafers, the feature alignment marking symbols for post-alignment are arranged at the outermost edge of the wafer, and this marking symbol needs to be coated; thus, the influence of the fixture edge on its edge needs to be considered, so it is necessary to design a unilateral hollowing to meet the requirement that the outermost special area can be coated with a film layer. Content of the Utility Model

[0003] To solve the above technical problems, the utility model designs a light-off evaporation coating product fixture to meet the light-off evaporation coating of specific products or coat a film layer at a special position on the edge of the product.

[0004] The utility model adopts the following technical scheme:

[0005] A light-off evaporation coating product fixture includes a fixture body, the fixture body includes a bottom ring, an intermediate receiving ring and an inner retaining ring, the bottom ring, the intermediate receiving ring and the inner retaining ring are fixedly connected in sequence, the bottom ring and the intermediate receiving ring are distributed in a stepped manner, the inner retaining ring is fixedly connected to the inner circle of the upper part of the intermediate receiving ring, and the upper edge of the inner retaining ring is concave and hollowed out at specific intervals along the circumference to form a hollow groove.

[0006] Preferably, the position of the hollow groove is set according to the requirements of the non-contact position of the product by considering deformation and the special area at the edge.

[0007] Preferably, a bottom groove is arranged in the inner circle of the bottom of the bottom ring, and the inner diameter of the bottom groove matches the outer diameter of the intermediate receiving ring. It is used to carry the same fixture. Since multiple fixtures can be placed on one umbrella rack and an operator needs to carry multiple fixtures at a time, multiple fixtures need to be stacked, and the bottom groove is used for stacking multiple fixtures to facilitate handling.

[0008] Preferably, a steel stamp is engraved on the upper plane position of the bottom ring. It is convenient for production line operation management.

[0009] Preferably, the width of the inner retaining ring is 0.65 mm.

[0010] Preferably, the fixture body is integrally cast from stainless steel.

[0011] Preferably, the overall outer contour of the fixture body is circular.

[0012] The beneficial effects of the utility model are as follows: the utility model designs a Guangchi evaporation coating product fixture, which meets the Guangchi evaporation coating requirements of specific products, or coats a film layer at a special position on the edge of the product, and the hollow position can be customized according to the product; and the fixture body can be directly modified on the standard part, which is easy to manufacture. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the utility model;

[0014] Figure 2 yes Figure 1 A cross-sectional view in the AA direction;

[0015] In the figure: 1. bottom ring, 2. middle receiving ring, 3. inner retaining ring, 4. hollow groove, 5. bottom groove. DETAILED DESCRIPTION

[0016] The technical solution of the present invention is further described in detail below through specific embodiments and in conjunction with the accompanying drawings:

[0017] Example: As attached Figure 1 As shown, a fixture for Guangchi evaporation coating products includes a fixture body, which includes a bottom ring 1, an intermediate receiving ring 2 and an inner retaining ring 3. The bottom ring, the intermediate receiving ring and the inner retaining ring are fixedly connected in sequence, the bottom ring and the intermediate receiving ring are distributed in a stepped manner, the inner retaining ring is fixedly connected to the upper inner ring of the intermediate receiving ring, and the circumference of the inner retaining ring is hollowed out at specific intervals to form a hollow groove 4. The position of the hollow groove is set according to the non-contact position requirements of the product by considering deformation and special edge areas.

[0018] The inner circle of the bottom ring is provided with a bottom groove 5, and the inner diameter of the bottom groove matches the outer diameter of the intermediate receiving ring. It is used to carry the same clamp. Since an umbrella stand can hold multiple clamps, the operator needs to carry multiple clamps at a time, and multiple clamps need to be stacked. The bottom groove is used to stack multiple clamps for easy handling.

[0019] The upper plane of the bottom ring is engraved with a steel stamp. This facilitates production line operation management. The width of the inner retaining ring is 0.65mm. The clamp body is made of stainless steel and cast in one piece. The overall outer contour of the clamp body is circular.

[0020] The beneficial effects of the utility model are as follows: the utility model designs a Guangchi evaporation coating product fixture, which meets the Guangchi evaporation coating requirements of specific products, or coats a film layer at a special position on the edge of the product, and the hollow position can be customized according to the product; and the fixture body can be directly modified on the standard part, which is easy to manufacture.

[0021] The above-described embodiments are only a preferred solution of the present utility model, and do not impose any form of limitation on the present utility model. There are other variations and modifications without exceeding the technical solutions recorded in the claims.

Claims

1. A Guangchi evaporation coating product fixture, including a fixture body, characterized in that: The clamp body comprises a bottom ring, an intermediate receiving ring and an inner retaining ring, which are fixedly connected in sequence, the bottom ring and the intermediate receiving ring are distributed in a stepped manner, the inner retaining ring is fixedly connected to the upper inner ring of the intermediate receiving ring, and the circumference of the inner retaining ring is hollowed out at specific intervals to form hollow grooves.

2. According to claim 1, a fixture for optical evaporation coating products, characterized in that: The position of the hollow groove is set according to the non-contact position requirements of the product by taking into account deformation and special edge areas.

3. The Guangchi evaporation coating product fixture according to claim 1 is characterized in that: The bottom inner circle of the bottom ring is provided with a bottom groove, and the inner diameter of the bottom groove matches the outer diameter of the middle receiving ring.

4. The Guangchi evaporation coating product fixture according to claim 1 is characterized in that: A steel stamp is engraved on the upper plane of the bottom ring.

5. The Guangchi evaporation coating product fixture according to claim 1 is characterized in that: The width of the inner retaining ring is 0.65 mm.

6. The Guangchi evaporation coating product fixture according to claim 1 is characterized in that: The clamp body is integrally cast from stainless steel.

7. The Guangchi evaporation coating product fixture according to claim 1 is characterized in that: The overall outer contour of the clamp body is circular.

Images