O-shaped ring mounting and protecting device for establishing target core of sputtering target material

Abstract

The utility model relates to the technical field of target core building equipment, in particular to an O-shaped ring mounting and protecting device for building a target core of a sputtering target material, and aims to solve the problems that an existing O-shaped ring is easy to damage during mounting and is time-consuming during mounting. The installation protection device comprises a circular ring, the inner diameter of the circular ring is larger than the outer diameter of the target core, the outer portion of the circular ring is of a stepped shaft structure and is divided into a first section and a second section, the outer diameter of the first section is small, and the outer diameter of the second section is large. The outer diameter of the first section is 2.5-3mm larger than that of the target core; the outer diameter of the second section is larger than that of the part with the smaller outer diameter by millimeter; an O-shaped ring needing to be installed is installed outside the first section, the target core is sleeved with the circular ring, the circular ring is rapidly moved to the position, where the O-shaped ring needs to be installed, of the target core, the O-shaped ring is put down, and finally the circular ring is detached.

Description

Technical Field

[0001] The utility model relates to the technical field of target core establishment equipment, in particular to an O-ring installation protection device for establishing a target core of a sputtering target. Background Art

[0002] Target core establishment refers to the installation and maintenance of the inner magnetic core of the sputtering target of a winding type vacuum coating equipment. An O-ring is a sealing ring, which needs to be reinstalled onto a tubular target core after maintenance. Since external threads are provided on the outside of the target core, the O-ring is easily scratched by the external threads.

[0003] The method of the prior art is to wrap the external threads of the target core with a dust-free cloth. The operator needs to hold the dust-free cloth with one hand to prevent it from falling off, put on the O-ring with the other hand, and then slowly smooth it to the groove. If the operation is a little careless, the dust-free cloth does not completely cover the threads, or an unskilled employee operates, it is easy to cause damage to the O-ring, and the entire installation time is relatively long. It takes 1-2 minutes for a skilled employee and 3-5 minutes for an unskilled employee. Summary of the Invention

[0004] In view of this, the purpose of the present utility model is to provide an O-ring installation protection device for establishing a target core of a sputtering target, so as to solve the problems that the existing O-ring installation is easy to damage the O-ring and time-consuming.

[0005] Based on the above purpose, the present utility model provides an O-ring installation protection device for establishing a target core of a sputtering target, including a circular ring, the inner diameter of which is larger than the outer diameter of the target core, and the external is a stepped shaft structure, which is divided into a first section and a second section. The outer diameter of the first section is small, and the outer diameter of the second section is large; the outer diameter of the first section is 2.5-3 millimeters larger than the outer diameter of the target core; the outer diameter of the second section is larger than the outer diameter of the part with a smaller outer diameter by millimeters; the O-ring to be installed is installed on the outside of the first section. The circular ring is sleeved on the outside of the target core, the circular ring is quickly moved to the position of the target core where the O-ring needs to be installed, the O-ring is put down, and finally the circular ring is removed.

[0006] As a further improvement of the present application, the cross-section of the O-ring is circular, and a positioning groove is further provided on the outside of the circular ring. The positioning groove is arranged on the first section close to the second section, and the bottom of the positioning groove is arc-shaped, and the arc radius is equal to the circular radius of the cross-section of the O-ring.

[0007] As a further improvement of the present application, the depth of the positioning groove is less than the arc radius of its bottom.

[0008] As a further improvement of the present application, the length of the first section is approximately one-third of the length of the second section, and the overall length of the circular ring is 21-25 millimeters.

[0009] As a further improvement of the present application, a discharge chute is provided outside the first section, and a discharge rope is provided in the discharge chute; the length direction of the discharge chute is parallel to the axis of the ring, one end of the discharge rope is fixedly connected to one end of the discharge chute close to the free end of the first section, the free end of the discharge rope is placed on the outer wall of the second section, the O-ring to be installed is stuck outside the discharge rope, and when the O-ring to be installed needs to be removed, pulling up the free end of the discharge rope can assist in removing it.

[0010] As a further improvement of the present application, the number of the discharge chutes is multiple, and one discharge rope is provided in each discharge chute.

[0011] As a further improvement of the present application, the multiple discharge chutes are evenly arranged outside the first section.

[0012] As a further improvement of the present application, more than three centering grooves are provided inside the second section, a swing rod is provided in the centering groove, one end of the swing rod is connected to the centering groove through a pin shaft, a return torsion spring is provided on the pin shaft, a positioning wheel is provided at the free end of the swing rod, and the positioning wheel has the freedom to rotate around its own axis; without external force, under the action of the return torsion spring, the outer edge of the positioning wheel extends out of the centering groove, and when the second section is sleeved on the outside of the target core, the outer edge of the positioning wheel contacts the outside of the target core to maintain the centering of the second section.

[0013] As a further improvement of the present application, the centering grooves are evenly arranged inside the second section.

[0014] The beneficial effects of the present utility model: The installation of the O-ring is assisted by the installation protection device of the present application, which increases the reliability and safety of the O-ring installation, reduces the installation operation loss of the O-ring maintenance, and at the same time allows anyone to complete the installation quickly and safely within 10 seconds. The installation efficiency is greatly improved, and the O-ring is effectively protected. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present utility model or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only those of the present utility model, and for those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 It is a schematic structural diagram of an O-ring installation protection device for a sputtering target core in an embodiment of the present utility model;

[0017] Figure 2Schematic diagram of the structure of the O-ring, which is the protected object of the O-ring installation protection device established for the target core of a sputtering target in an embodiment of the present utility model;

[0018] Figure 3 Top view structure diagram of the O-ring installation protection device established for the target core of a sputtering target in an embodiment of the present utility model;

[0019] Figure 4 Schematic diagram of the structure of the further improved O-ring installation protection device established for the target core of a sputtering target in an embodiment of the present utility model.

[0020] The markings in the figure are:

[0021] 1. Ring; 11. First section; 111. Discharge chute; 112. Discharge rope; 12. Second section; 121. Centering groove; 122. Swing rod; 123. Return torsion spring; 2. Positioning groove; 3. O-ring. Detailed implementation manners

[0022] To make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below in conjunction with specific embodiments.

[0023] It should be noted that unless otherwise defined, the technical terms or scientific terms used in the present utility model should have the ordinary meanings understood by those with ordinary skills in the field to which the present utility model belongs. The "first", "second" and similar terms used in the present utility model do not indicate any order, quantity or importance, but are only used to distinguish different components. The terms such as "including" or "comprising" mean that the elements or objects appearing before this term cover the elements or objects listed after this term and their equivalents, without excluding other elements or objects. The terms such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms such as "upper", "lower", "left" and "right" are only used to represent relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0024] As Figures 1 - 3As shown in the figure, a protection device for installing an O-ring on the core of a sputtering target includes a circular ring 1 with an inner diameter larger than the outer diameter of the target core. The outer part has a stepped shaft structure, which is divided into a first section 11 and a second section 12. The outer diameter of the first section 11 is small, and the outer diameter of the second section 12 is large. The outer diameter of the first section 11 is 2.5 - 3 mm larger than the outer diameter of the target core. The outer diameter of the second section 12 is 3 mm larger than the outer diameter of the part with a smaller outer diameter. The O-ring 3 to be installed is installed outside the first section 11. The circular ring 1 is sleeved outside the target core. The circular ring 1 is quickly moved to the position where the O-ring 3 needs to be installed on the target core, the O-ring 3 is placed down, and finally the circular ring 1 is removed.

[0025] With the assistance of the installation protection device of the present application for installing the O-ring 3, the O-ring 3 is sleeved outside the first section 11, completely avoiding the scraping of the O-ring 3 by the outer wall of the target core, avoiding the damage of the O-ring 3, increasing the reliability and safety of the installation of the O-ring 3, reducing the maintenance and installation operation loss of the O-ring 3, and allowing anyone to quickly and safely complete the installation within 10 seconds. The installation efficiency is greatly improved, and the O-ring 3 is effectively protected.

[0026] The cross-section of the O-ring 3 is circular. A positioning groove 2 is also provided outside the circular ring 1. The positioning groove 2 is arranged on the first section 11 on the side close to the second section 12. The bottom of the positioning groove 2 is arc-shaped, and the radius of the arc is equal to the radius of the circle of the cross-section of the O-ring.

[0027] The depth of the positioning groove 2 is less than the radius of the arc at its bottom.

[0028] The length of the first section 11 is approximately one-third of the length of the second section 12, and the overall length of the circular ring 1 is 21 - 25 mm.

[0029] As Figure 4 shown, as a further improvement of the present application, in order to facilitate the unloading of the O-ring 3, a unloading groove 111 is provided outside the first section 11, and a unloading rope 112 is arranged in the unloading groove 111. The length direction of the unloading groove 111 is parallel to the axis of the circular ring 1. One end of the unloading rope 112 is fixedly connected to one end of the unloading groove 111 close to the free end of the first section 11, and the free end of the unloading rope 112 is placed on the outer wall of the second section 12. The O-ring 3 to be installed is stuck outside the unloading rope 112. When the O-ring 3 to be installed needs to be unloaded, pulling up the free end of the unloading rope 112 can assist in unloading.

[0030] Further, in order to avoid excessive pulling in a single direction, which may cause excessive pulling of the fixed position of the O-ring 3, the number of the discharge grooves 111 is multiple, and each of the discharge grooves 111 is provided with a discharge rope 112. Pulling at multiple points not only facilitates discharging but also protects the O-ring 3 during the discharging process.

[0031] In order to avoid positions that are not pulled, the multiple discharge grooves 111 are evenly arranged outside the first section 11.

[0032] In order to maintain centering and avoid direct contact between the inner wall of the ring 1 and the outer wall of the target core after eccentricity, which may cause scratches on the ring 1 or the target core, more than three centering grooves 121 are provided inside the second section 12. A swing rod 122 is arranged in each centering groove 121. One end of the swing rod 122 is connected in the centering groove 121 through a pin shaft. A return torsion spring 123 is arranged on the pin shaft. A positioning wheel 124 is arranged at the free end of the swing rod 122, and the positioning wheel 124 has the freedom to rotate around its own axis. Without external force, under the action of the return torsion spring 123, the outer edge of the positioning wheel 124 extends out of the centering groove 121. When the second section 12 is sleeved on the outside of the target core, the outer edge of the positioning wheel 124 contacts the outside of the target core to maintain the centering of the second section 12.

[0033] After centering, it can effectively avoid direct contact between the inner wall of the ring 1 and the outer wall of the target core, and also speeds up the moving speed of the ring 1.

[0034] In order to ensure good centering, the centering grooves 121 are evenly arranged inside the second section 12.

[0035] Those of ordinary skill in the art should understand that the discussion of any of the above embodiments is only exemplary and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples; under the concept of the present invention, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations in different aspects of the present invention as described above, which are not provided in detail for the sake of brevity.

[0036] The present invention is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A sputtering target core O-ring installation protection device, characterized in that: include The ring (1) has an inner diameter greater than the outer diameter of the target core, and an outer portion thereof is a stepped shaft structure, and is divided into a first section (11) and a second section (12), wherein the first section (11) has a smaller outer diameter, and the second section (12) has a larger outer diameter; The outer diameter of the first section (11) is 2.5-3 mm larger than the outer diameter of the target core; the outer diameter of the second section (12) is 3 mm larger than the outer diameter of the portion with a smaller outer diameter; The O-ring (3) to be installed is installed on the outside of the first section (11), and the circular ring (1) is sleeved on the outside of the target core. The circular ring (1) is quickly moved to the position of the target core where the O-ring (3) needs to be installed, and the O-ring (3) is lowered, and finally the circular ring (1) is removed.

2. The O-ring installation protection device for the sputtering target core according to claim 1, characterized in that: The cross section of the O-ring (3) is circular, and a positioning groove (2) is also provided on the outside of the circular ring (1). The positioning groove (2) is arranged on a side of the first section (11) close to the second section (12), and the bottom of the positioning groove (2) is arc-shaped, and the radius of the arc is equal to the radius of the circle of the cross section of the O-ring.

3. The O-ring installation and protection device for the sputtering target core according to claim 2, characterized in that: The depth of the positioning groove (2) is smaller than the arc radius of its bottom.

4. The O-ring installation and protection device for the sputtering target core according to claim 1, characterized in that: The length of the first section (11) is approximately one third of the length of the second section (12), and the overall length of the ring (1) is 21-25 mm.

5. The O-ring installation and protection device for the sputtering target core according to claim 1, characterized in that: A discharge chute (111) is provided outside the first section (11), and a discharge rope (112) is provided inside the discharge chute (111); The length direction of the discharge trough (111) is parallel to the axis of the circular ring (1); one end of the discharge rope (112) is fixedly connected to one end of the discharge trough (111) close to the free end of the first section (11); the free end of the discharge rope (112) is placed on the outer wall of the second section (12); the O-ring (3) to be installed is stuck on the outside of the discharge rope (112); when the O-ring (3) to be installed needs to be removed, the free end of the discharge rope (112) can be pulled up to assist in the removal.

6. The O-ring installation and protection device for the sputtering target core according to claim 5, characterized in that: There are a plurality of discharge troughs (111), and each of the discharge troughs (111) is provided with a discharge rope (112).

7. The O-ring installation and protection device for the sputtering target core according to claim 6, characterized in that: The plurality of discharge chutes (111) are evenly arranged outside the first section (11).

8. The O-ring installation and protection device for the sputtering target core according to claim 1, characterized in that: The second section (12) is provided with more than three centering grooves (121) inside, and a swing rod (122) is provided inside the centering groove (121), one end of the swing rod (122) is connected to the centering groove (121) through a pin shaft, and a return torsion spring (123) is provided on the pin shaft, and a positioning wheel (124) is provided at the free end of the swing rod (122), and the positioning wheel (124) has the freedom to rotate around its own axis; In the absence of external force, under the action of the return torsion spring (123), the outer edge of the positioning wheel (124) extends out of the centering groove (121), and when the second section (12) is sleeved onto the outside of the target core, the outer edge of the positioning wheel (124) contacts the outside of the target core, thereby maintaining the centering of the second section (12).

9. The O-ring installation and protection device for the sputtering target core according to claim 8, characterized in that: The centering grooves (121) are evenly arranged inside the second section (12).

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