Ejector pin lifting mechanism

Abstract

The utility model relates to the technical field of semiconductor manufacturing, in particular to an ejector pin lifting mechanism. The ejector pin lifting mechanism comprises a plurality of ejector pin mechanisms and a supporting plate, each ejector pin mechanism comprises an ejector pin, a counter weight and a leveling mechanism, and the ejector pins are used for being inserted into the counter weights; the counter weight is of a clamping structure and is used for clamping and fixing the ejector pin; the leveling mechanism is connected with the bottom of the heavy punch and is used for adjusting the position of the ejector pin; the bottom of the leveling mechanism is connected with the supporting plate; the ejector pin mechanisms ascend and descend along with vertical movement of the supporting plate. According to the utility model, the heavy punch is designed into a clamping structure, so that the weak stress concentration point of the ejector pin is eliminated, the ejector pin is more stable and not easy to separate in the lifting process, the height of the ejector pin can be independently adjusted through the leveling mechanism, the levelness of a wafer on the ejector pin is ensured, the wafer is prevented from being damaged in the processing process, and the production efficiency is improved. And the reliability and the stability of the whole production line are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, and more specifically, to a thimble lifting mechanism. Background Art

[0002] In today's semiconductor manufacturing industry, thin film deposition equipment plays a crucial role. In thin film deposition equipment, the wafer lifting methods are mainly divided into the following two types: one is fixed lifting, in which the lifting of the heating plate drives the lifting of the thimble; the other is active lifting, in which the thimble has an independent lifting mechanism and can complete the lifting action independently.

[0003] Figure 1 Discloses the overall structural schematic diagram of the prior art thimble lifting mechanism. Figure 2 Discloses the partial structural schematic diagram of the prior art thimble lifting mechanism, such as Figure 1 and Figure 2 As shown, in the existing thimble independent lifting mechanism, due to the improper selection of the connection method between the thimble and the weight, weak points appear at the stress concentration parts of the thimble. When the equipment runs for a long time and repeatedly performs process operations, the probability of breakage at these weak points of the thimble increases significantly, thus increasing the failure rate of the equipment.

[0004] In order to better improve the reliability of the thin film deposition equipment, there is an urgent need for a new thimble lifting mechanism to solve the problem of thimble breakage.

[0005] In the current lifting mechanism device, in addition to the weak points of the thimble being prone to breakage, there is also a common problem: the existing structure cannot adjust the height of a single thimble, so the problem of wafer tilt caused by inconsistent heights of three thimbles cannot be eliminated. Once the wafer tilts too much, scribing may occur during the movement of the wafer, and even fragments may be generated. Summary of the Utility Model

[0006] The purpose of the utility model is to provide a thimble lifting mechanism to solve the problem that the thimble lifting mechanism of the prior art is prone to cause breakage at the stress concentration weak points of the thimble.

[0007] Another purpose of the utility model is to provide a thimble lifting mechanism to solve the problem that the thimble lifting mechanism of the prior art is prone to cause the thimble to separate from the weight.

[0008] Another purpose of the utility model is to provide a thimble lifting mechanism to solve the problem that the thimble lifting mechanism of the prior art cannot adjust the height of a single thimble.

[0009] To achieve the above object, the present utility model provides a thimble lifting mechanism, which includes a plurality of thimble mechanisms and a support plate. The thimble mechanism includes a thimble, a weight, and a leveling mechanism:

[0010] The thimble is used to insert into the weight.

[0011] The weight is a clamping structure for clamping and fixing the thimble.

[0012] The leveling mechanism is connected to the bottom of the weight and is used to adjust the position of the thimble.

[0013] The bottom of the leveling mechanism is connected to the support plate.

[0014] The plurality of thimble mechanisms rise and fall as the support plate moves up and down.

[0015] In some embodiments, the weight includes a locking nut, a weight body, and a thimble jaw:

[0016] A cavity structure is provided along the axial direction inside the weight body for accommodating the locking nut and the thimble jaw.

[0017] The cavity structure of the weight body includes a first cavity and a second cavity that communicate with each other from top to bottom. The inner diameter of the first cavity is larger than that of the second cavity.

[0018] The side wall of the first cavity is a threaded structure and is in threaded connection with the locking nut.

[0019] The second cavity is used to install the thimble jaw.

[0020] The thimble jaw clamps towards the axial direction under the locking force of the locking nut.

[0021] In some embodiments, the head of the thimble jaw is composed of a plurality of independent and separated wedge-shaped surface structures.

[0022] The bottom of the locking nut is provided with a downward inclined surface structure that is adapted to the wedge-shaped surface structure of the thimble jaw.

[0023] When the locking nut is tightened, the inclined surface structure exerts a force towards the axial direction on the wedge-shaped surface structure of the thimble jaw, so that the plurality of wedge-shaped surface structures of the thimble jaw closely fit to form a clamping force.

[0024] In some embodiments, a first positioning protrusion is provided at the center position of the bottom of the second cavity.

[0025] A concave hole is provided at the center position of the bottom of the thimble jaw, and the inner diameter of the concave hole matches the outer diameter of the first positioning protrusion.

[0026] In some embodiments, a plurality of second positioning protrusion portions are provided on the side wall of the bottom of the second cavity;

[0027] A plurality of corresponding grooves are circumferentially provided at the bottom of the ejector pin jaw;

[0028] The shapes, numbers, and distribution positions of the grooves match those of the second positioning protrusion portions.

[0029] In some embodiments, the connection surface between the bottom of the plumb bob and the leveling mechanism is spherical.

[0030] In some embodiments, the leveling mechanism includes a plumb bob support, an adjusting bolt, a wedge block, and a base:

[0031] The plumb bob support is used to carry the plumb bob;

[0032] A third cavity is provided inside the base for installing the wedge block and the plumb bob support;

[0033] The top of the wedge block is a wedge-shaped surface, which matches the inclined surface at the bottom of the plumb bob support;

[0034] A threaded hole is provided in the middle of the wedge block;

[0035] The adjusting bolt passes through the through hole on the side wall of the base and is screwed into the threaded hole to be threadedly connected to the wedge block.

[0036] In some embodiments, the inclination direction of the wedge-shaped surface at the top of the wedge block is the same as or opposite to the screwing direction of the adjusting bolt.

[0037] In some embodiments, the plumb bob support includes a top and a bottom in sequence from top to bottom:

[0038] The cross-sectional dimension of the top is larger than the dimension of the third cavity, and it contacts the base and is integrally supported by the base;

[0039] The bottom is accommodated in the third cavity;

[0040] A part or all of the bottom is provided with an inclined surface structure.

[0041] In some embodiments, a recessed structure is provided at the edge of the support plate:

[0042] The leveling mechanism is installed inside the recessed structure of the support plate.

[0043] A thimble lifting mechanism provided by the present utility model designs the heavy hammer as a clamping structure, thereby eliminating the weak stress concentration point of the thimble itself, making the thimble more stable during the lifting process and not easily detaching. Through the leveling mechanism, the height of the thimble can be independently adjusted, thereby ensuring the levelness of the wafer on the thimble, ensuring that the wafer is not damaged during the processing, and improving the reliability and stability of the entire production line at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] The above and other features, properties, and advantages of the present utility model will become more apparent from the following description in conjunction with the drawings and embodiments. In the drawings, the same reference numerals always represent the same features, where:

[0045] Figure 1 The overall structural schematic diagram of the thimble lifting mechanism of the prior art is disclosed;

[0046] Figure 2 The partial structural schematic diagram of the thimble lifting mechanism of the prior art is disclosed;

[0047] Figure 3 The partial structural schematic diagram of the thimble lifting mechanism according to an embodiment of the present utility model is disclosed;

[0048] Figure 4 The partial cross-sectional schematic diagram of the thimble lifting mechanism according to an embodiment of the present utility model is disclosed;

[0049] Figure 5 The heavy hammer structural schematic diagram of the thimble lifting mechanism according to an embodiment of the present utility model is disclosed;

[0050] Figure 6 The heavy hammer cross-sectional schematic diagram of the thimble lifting mechanism according to an embodiment of the present utility model is disclosed;

[0051] Figure 7 The leveling mechanism schematic diagram of the thimble lifting mechanism according to an embodiment of the present utility model is disclosed;

[0052] Figure 8 The leveling mechanism cross-sectional schematic diagram of the thimble lifting mechanism according to an embodiment of the present utility model is disclosed.

[0053] The meanings of the reference numerals in the drawings are as follows:

[0054] 1 thimble;

[0055] 2 heavy hammer;

[0056] 21 locking nut;

[0057] 22 heavy hammer body;

[0058] 221 first cavity;

[0059] 222 Second cavity;

[0060] 23 Thimble jaws;

[0061] 3 Leveling mechanism;

[0062] 31 Plumb bob support;

[0063] 32 Adjusting bolt;

[0064] 33 Wedge block;

[0065] 34 Base;

[0066] 341 Third cavity;

[0067] 4 Support plate. Detailed implementation mode

[0068] In order to make the purpose, technical solutions and advantages of the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model.

[0069] In the description of this specification, the descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0070] Figure 3 Disclosed is a partial structural schematic diagram of a thimble lifting mechanism according to an embodiment of the present utility model, Figure 4 Disclosed is a partial cross-sectional schematic diagram of a thimble lifting mechanism according to an embodiment of the present utility model, as Figure 3 and Figure 4 shown, the thimble lifting mechanism for a thin film deposition device proposed by the present utility model includes a plurality of thimble mechanisms and a support plate 4:

[0071] The thimble mechanism includes a thimble 1, a plumb bob 2 and a leveling mechanism 3:

[0072] The thimble 1, its bottom is inserted into the interior of the plumb bob 2, and the top is used to support the wafer;

[0073] The plumb bob 2, which is a clamping structure, is used to clamp and fix the thimble 1;

[0074] The leveling mechanism 3 is connected to the bottom of the plumb bob 2 and is used to adjust the height position of the ejector pin 1;

[0075] The bottom of the leveling mechanism 3 is connected to the support plate 4;

[0076] The plurality of ejector pin mechanisms rise and fall as the support plate moves up and down.

[0077] Wherein, a concave structure is provided at the edge of the support plate 4, and the leveling mechanism 3 is installed inside the concave structure of the support plate 4.

[0078] The ejector pin 1 is inserted into the plumb bob 2, the bottom of the plumb bob 2 is connected to the leveling mechanism 3, and the leveling mechanism 3 is placed in the concave structure of the support plate 4. The entire ejector pin mechanism rises and falls as the support plate 4 moves up and down.

[0079] In this embodiment, the number of ejector pin mechanisms is 3, which are respectively distributed at three edge positions of the support plate 4.

[0080] For the ejector pin lifting mechanism proposed by the present utility model, by adding a leveling mechanism 3 between the plumb bob 2 and the support plate 4, the heights of the three ejector pins can be independently adjusted, and finally the precise adjustment of the flatness of the wafer on the ejector pins can be realized.

[0081] Figure 5 Disclosed is a schematic diagram of the plumb bob structure of the ejector pin lifting mechanism according to an embodiment of the present utility model, Figure 6 Disclosed is a schematic cross-sectional view of the plumb bob of the ejector pin lifting mechanism according to an embodiment of the present utility model, as Figure 5 and Figure 6 shown, the plumb bob mainly includes: a locking nut 21, a plumb bob body 22, and an ejector pin jaw 23:

[0082] A cavity structure is provided inside the plumb bob body 22 along the axial direction for accommodating the locking nut 21 and the ejector pin jaw 23;

[0083] The cavity structure of the plumb bob body 22 includes a first cavity 221 and a second cavity 222 that communicate with each other from top to bottom. The inner diameter of the first cavity 221 is larger than that of the second cavity 222;

[0084] The side wall of the first cavity 221 is a threaded structure and is in threaded connection with the locking nut 21;

[0085] The second cavity 222 is used for installing the ejector pin jaw 23;

[0086] The ejector pin jaw 23 clamps towards the axial direction under the locking force of the locking nut 21.

[0087] Furthermore, the head of the ejector pin jaw 23 is composed of a plurality of mutually independent and separated wedge-shaped surface structures;

[0088] The locking nut 21 has an inclined surface structure at the bottom, which is adapted to the wedge-shaped surface structure of the thimble jaw 23;

[0089] When the locking nut 21 is tightened, the inclined surface structure exerts a force on the wedge-shaped surface structure of the thimble jaw 23 in the direction of the axis, so that the multiple wedge-shaped surface structures of the thimble jaw 23 are closely attached to form a clamping force.

[0090] Furthermore, a first positioning protrusion is provided at the center of the bottom of the second cavity 222;

[0091] A concave hole is provided at the center of the bottom of the thimble jaw 23, and the inner diameter of the concave hole matches the outer diameter of the first positioning protrusion, ensuring stable and precise positioning and installation between the thimble jaw 23 and the weight body 22.

[0092] Furthermore, several second positioning protrusions are provided on the side wall of the bottom of the second cavity 222;

[0093] On the peripheral side wall of the bottom of the thimble jaw 23, several corresponding grooves are circumferentially provided in the vertical direction along the axis;

[0094] The grooves match the shape, quantity, and distribution position of the second positioning protrusions, ensuring stable and precise positioning and installation between the thimble jaw 23 and the weight body 22.

[0095] The present utility model proposes a thimble lifting mechanism, which designs the weight 2 as a clamping structure. After the thimble 1 is inserted into the weight 2, by rotating the locking nut 21, the thimble jaw 23 will firmly fix the thimble 1, ensuring the fixation of the thimble 1. This design makes the thimble 1 itself have no weak stress concentration points, guarantees its anti-loosening performance, and improves the repeatability of installation. After the installation is completed, the inspection process is also more convenient.

[0096] Figure 7 Disclosed is a schematic diagram of a leveling mechanism of a thimble lifting mechanism according to an embodiment of the present utility model, Figure 8 Disclosed is a cross-sectional schematic diagram of a leveling mechanism of a thimble lifting mechanism according to an embodiment of the present utility model, as Figure 7 and Figure 8 shown, the leveling mechanism 3 includes a weight support 31, an adjusting bolt 32, a wedge 33, and a base 34:

[0097] The weight support 31 is used to carry the weight 2;

[0098] A third cavity 341 is provided inside the base 34 for installing the wedge 33 and the weight support 31;

[0099] The top of the wedge block 33 is a wedge-shaped surface, which matches the inclined surface at the bottom of the weight carrier 31;

[0100] A threaded hole is provided in the middle of the wedge block 33;

[0101] The adjusting bolt 32 passes through the through hole on the side wall of the base 34 and is screwed into the threaded hole of the wedge block 33, and is threadedly connected to the wedge block 33.

[0102] Furthermore, the weight carrier 31 includes a top and a bottom from top to bottom in sequence:

[0103] The cross-sectional dimension of the top is larger than the dimension of the third cavity, and it contacts the base 34, and the weight is borne by the base 34 as a whole;

[0104] The bottom is accommodated in the third cavity 341;

[0105] Specifically, the structure of the weight carrier 31 presents an inverted stepped shape. Its top is designed to cover the base 34 to ensure stable support and positioning, while its bottom is precisely fitted into the third cavity 341 of the base 34.

[0106] Furthermore, a part or all of the bottom is provided with an inclined surface structure.

[0107] Furthermore, the inclination direction of the wedge-shaped surface at the top of the wedge block 33 is opposite to the screwing-in direction of the adjusting bolt 32.

[0108] As Figure 7 shown, the inclination direction of the wedge-shaped surface gradually decreases from right to left, while the screwing-in direction of the adjusting bolt 32 is opposite to it, that is, it is screwed in from left to right.

[0109] When the weight 2 is placed in the weight carrier 31, by rotating the adjusting bolt 32, the distance between the wedge block 33 and the head of the adjusting bolt 32 gradually shortens, and the weight carrier 31 rises under the action of the wedge block 33, so that the height of the weight 2 placed in the weight carrier 31 and the ejector pin 1 connected thereto will also rise accordingly.

[0110] Obviously, the inclination direction of the wedge-shaped surface can also be the same as the screwing-in direction of the adjusting bolt, that is, the inclination direction of the wedge-shaped surface gradually decreases from left to right. At this time, when the adjusting bolt 32 is screwed in, the weight carrier 31 drops under the action of the wedge block 33, and when the adjusting bolt 32 is screwed out, the weight carrier 31 rises under the action of the wedge block 33.

[0111] Furthermore, the connection surface between the bottom of the weight 2 and the adjusting mechanism 3 is spherical, which is convenient for ensuring the position accuracy after the ejector pin 1 reciprocates up and down.

[0112] More specifically, the connection surface between the weight carrier 31 and the weight body 22 is spherical.

[0113] A thimble lifting mechanism provided by the utility model designs the heavy hammer as a clamping structure, thereby eliminating the weak stress concentration point of the thimble itself, making the thimble more stable during the lifting process and not easy to disengage. The height of the thimble can be independently adjusted through the leveling mechanism, thereby ensuring the levelness of the wafer on the thimble, ensuring that the wafer is not damaged during the processing, and improving the reliability and stability of the entire production line at the same time.

[0114] As shown in this application and the claims, unless the context clearly indicates an exception, words such as "a", "an", "one" and / or "the" are not specifically singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of the clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0115] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by terms such as "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model.

[0116] In the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through other features between them. Moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the horizontal height of the first feature is lower than that of the second feature.

[0117] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and defined, the terms "installation", "connection" and "coupling" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a direct connection, or an indirect connection through an intermediate medium, and it may be the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0118] The above embodiments are provided for those skilled in the art to implement or use the present utility model. Those skilled in the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the present utility model. Therefore, the protection scope of the present utility model is not limited by the above embodiments, but should be the maximum scope that conforms to the innovative features mentioned in the claims.

Claims

1. A ejector lifting mechanism, characterized in that: It includes several ejector mechanisms and support plates, wherein the ejector mechanism includes an ejector, a heavy hammer and a leveling mechanism: The ejector pin is used to be inserted into the heavy hammer; The weight is a clamping structure used to clamp and fix the ejector pin; The leveling mechanism is connected to the bottom of the weight and is used to adjust the position of the ejector pin; The bottom of the leveling mechanism is connected to the support plate; The plurality of ejector pin mechanisms rise and fall as the support plate moves up and down.

2. The ejector lifting mechanism according to claim 1, characterized in that: The heavy hammer comprises a locking nut, a heavy hammer body and an ejector clamp: A cavity structure is provided inside the weight hammer body along the axial direction for accommodating a locking nut and an ejector clamping claw; The cavity structure of the weight body includes, from top to bottom, a first cavity and a second cavity that are interconnected, and the inner diameter of the first cavity is greater than the inner diameter of the second cavity; The side wall of the first cavity is a threaded structure, which cooperates with the locking nut to be threadedly connected; The second cavity is used to install the ejector clamp; The ejector clamping jaw is clamped toward the axial direction under the locking force of the locking nut.

3. The ejector lifting mechanism according to claim 2, characterized in that: The head of the ejector clamp is composed of a plurality of wedge-shaped surface structures that are independent and separated from each other; The locking nut has a downward inclined surface structure at the bottom, which is adapted to the wedge-shaped surface structure of the ejector clamp; When the locking nut is tightened, the inclined surface structure applies a force pointing in the axial direction to the wedge surface structure of the ejector clamping jaw, so that the multiple wedge surface structures of the ejector clamping jaw are closely fitted to form a clamping force.

4. The ejector lifting mechanism according to claim 2, characterized in that: A first positioning protrusion is provided at the center of the bottom of the second cavity; A concave hole is arranged at the center of the bottom of the ejector clamping jaw, and the inner diameter of the concave hole matches the outer diameter of the first positioning protrusion.

5. The ejector lifting mechanism according to claim 2, characterized in that: The side wall of the bottom of the second cavity is provided with a plurality of second positioning protrusions; A plurality of corresponding grooves are arranged circumferentially on the bottom of the ejector clamp; The groove matches the second positioning protrusion in shape, quantity and distribution position.

6. The ejector lifting mechanism according to claim 1, characterized in that: The connection surface between the bottom of the weight and the leveling mechanism is in a spherical shape.

7. The ejector lifting mechanism according to claim 1, characterized in that: The leveling mechanism includes a weight support, an adjusting bolt, a wedge block and a base: The weight support is used to carry the weight; A third cavity is provided inside the base for mounting a wedge block and a weight support seat; The top of the wedge is a wedge-shaped surface, which matches the inclined surface at the bottom of the weight support seat; A threaded hole is provided in the middle of the wedge block; The adjusting bolt passes through the through hole of the side wall of the base and is screwed into the threaded hole of the wedge block to be threadedly connected with the wedge block.

8. The ejector lifting mechanism according to claim 7, characterized in that: The inclination direction of the wedge surface at the top of the wedge block is the same as or opposite to the screwing direction of the adjusting bolt.

9. The ejector lifting mechanism according to claim 7, characterized in that: The weight support seat includes a top and a bottom from top to bottom: The cross-sectional dimension of the top is larger than the dimension of the third cavity, and is in contact with the base, and the weight is borne by the base as a whole; The bottom portion is accommodated in the third cavity; A part or the whole of the bottom is configured as an inclined structure.

10. The ejector lifting mechanism according to claim 1, characterized in that: The edge of the support plate is provided with a concave structure: The leveling mechanism is installed inside the recessed structure of the support plate.

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