Efficient coating tray

Abstract

The utility model discloses an efficient film coating tray, which relates to the technical field of trays and comprises an external tray, a plurality of placing grooves are uniformly formed in the top of the external tray, bearing base plates are fixedly mounted on two sides of the bottom of each placing groove, first magnets are arranged on the bearing base plates, and internal trays are arranged in the placing grooves. Second magnets are arranged on the two sides of the bottom of the built-in tray, a clamping groove is formed in the built-in tray, and an ejection mechanism is arranged in the external tray. The bearing base plate is arranged at the bottom of the containing groove of the external tray, the first magnet is installed on the bearing base plate and connected with the second magnet at the bottom of the internal tray in a magnetic attraction mode, stable installation of the internal tray is achieved, synchronous ejection of a plurality of silicon wafers is achieved through the ejection mechanism arranged in the external tray, and the service life of the silicon wafers is prolonged. The silicon wafer taking-out process is greatly simplified, the automation level is improved, manual intervention is reduced, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of trays, and more specifically, to an efficient coating tray. Background Art

[0002] With the rapid development of the photovoltaic industry, heterojunction solar cells have gradually become the focus of market attention due to their advantages such as high efficiency and low attenuation. In the manufacturing process of heterojunction cells, the PECVD (Plasma Enhanced Chemical Vapor Deposition) coating process is one of the key steps, which directly affects the photoelectric conversion efficiency and performance stability of the cells.

[0003] During the PECVD coating process, the fixing and removal methods of silicon wafers are directly related to the coating quality, production efficiency, and convenience of equipment maintenance. The existing methods for removing silicon wafers often rely on manual operations, which are not only time-consuming and laborious but also prone to introducing contamination and damage risks. At the same time, in a continuous production environment, the rapid replacement of trays is crucial for maintaining production efficiency. In response to the above problems, this device was invented. Summary of the Utility Model

[0004] In order to overcome the above defects of the prior art, the utility model provides an efficient coating tray to solve the problems mentioned in the above background art.

[0005] To achieve the above object, the utility model provides the following technical solution: An efficient coating tray includes an external tray. A plurality of placement grooves are evenly formed at the top of the external tray. Two sides of the bottom of each placement groove are fixedly installed with a bearing backing plate. A first magnet is arranged on the bearing backing plate. An internal tray is arranged in the placement groove. Second magnets are arranged on two sides of the bottom of the internal tray. A card slot is formed in the internal tray. The card slot is a stepped structure, including a first step and a second step from top to bottom in sequence. A top-out mechanism is arranged inside the external tray.

[0006] Further, lifting handles are fixedly installed on both sides of the top of the internal tray.

[0007] Further, the distance between the two bearing backing plates is less than the length of the internal tray.

[0008] Further, the ejection mechanism includes ejection components equal in number to the placement grooves. Each ejection component includes two shelf plates fixedly installed on the inner wall of the top of the external tray. A guide rod is fixedly installed between the two shelf plates. A bidirectional screw is rotatably installed between the two shelf plates. Moving seats are threadedly connected to both sides of the bidirectional screw. The ejection component further includes an ejection plate disposed in the placement groove. Connecting seats are fixedly installed on both sides of the bottom of the ejection plate. A support rod is movably connected between the moving seat and the connecting seat arranged on the same side.

[0009] Further, the adjacent two bidirectional screws arranged coaxially are fixedly connected.

[0010] Further, a stepper motor is fixedly installed on one of the shelf plates, and the output shaft of the stepper motor is connected to the bidirectional screw.

[0011] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0012] 1. By arranging a receiving cushion plate at the bottom of the placement groove of the external tray and installing a first magnet thereon, which is magnetically connected to the second magnet at the bottom of the internal tray, the present utility model realizes the stable installation of the internal tray, not only ensuring the stability of the silicon wafer during the coating process, but also enabling the rapid replacement of the internal tray, thereby improving the production efficiency and flexibility;

[0013] 2. Through the ejection mechanism arranged inside the external tray, the present utility model drives the synchronous rotation of the bidirectional screws through a stepper motor, drives the moving seats to move on the guide rods, and connects the ejection plates through the support rods to realize the synchronous ejection of the silicon wafers, greatly simplifying the process of taking out the silicon wafers, improving the automation level, reducing manual intervention, and enhancing the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings.

[0015] Figure 1 It is the overall structural schematic diagram provided by the present utility model;

[0016] Figure 2 It is the structural schematic diagram of the internal tray provided by the present utility model;

[0017] Figure 3 It is the bottom view of the structure of the internal tray provided by the present utility model;

[0018] Figure 4 It is the structural schematic diagram of the external tray provided by the present utility model;

[0019] Figure 5 This is a cross-sectional view of the external tray provided by the utility model.

[0020] Description of reference numerals:

[0021] 1. External tray; 2. Placement slot; 3. Receiving pad; 4. Magnet No. 1; 5. Internal tray; 6. Magnet No. 2; 7. Card slot; 701. First step; 702. Second step; 8. Ejector assembly; 801. Stepper motor; 802. Shelf; 803. Guide rod; 804. Bidirectional screw; 805. Moving seat; 806. Ejector plate; 807. Connecting seat; 808. Support rod; 9. Lifting handle. DETAILED DESCRIPTION

[0022] The following is a specific embodiment of the present invention. People familiar with the technology can easily understand the other advantages and functions of the present invention from the contents disclosed in this specification. Obviously, the described embodiment is a part of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] In order to enable those skilled in the art to better understand the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0024] Example:

[0025] See attached Figures 1-4 The embodiment of the invention is an efficient coating tray, comprising an external tray 1, a plurality of placement slots 2 are evenly arranged on the top of the external tray 1. In the present embodiment, 9 placement slots 2 are arranged on the top of the external tray 1 in a 3×3 arrangement. Receiving pads 3 are fixedly installed on both sides of the bottom of the placement slots 2. An internal tray 5 is arranged in the placement slots 2. The distance between the two receiving pads 3 is less than the length of the internal tray 5, so as to realize the reception of the internal tray 5. A No. 1 magnet 4 is arranged on the receiving pad 3. A No. 2 magnet 6 is arranged on both sides of the bottom of the internal tray 5. The magnetic properties of the No. 1 magnet 4 and the No. 2 magnet 6 are opposite, so as to realize the stable installation and rapid replacement of the internal tray 5, and improve the production efficiency and flexibility.

[0026] Among them, the external tray 1 and the internal tray 5 are both made of ceramic materials, which not only ensures high temperature resistance but also reduces the overall weight.

[0027] See attached Figure 2 and Figure 3, a card slot 7 is provided on the built-in tray 5. The card slot 7 is a stepped structure, which sequentially includes a first step 701 and a second step 702 from top to bottom. The side length of the first step 701 is greater than that of the second step 702, facilitating the placement and positioning of the silicon wafer, improving the coating accuracy. Lifting handles 9 are fixedly installed on both sides of the top of the built-in tray 5, facilitating the operator to move the built-in tray 5.

[0028] Refer to the appendix Figure 4 and Figure 5 , a jacking mechanism is arranged inside the external tray 1. The jacking mechanism includes jacking components 8 with the same number as the placement slots 2. That is, in this embodiment, 9 jacking components 8 are provided. The jacking component 8 includes two shelf plates 802 fixedly installed on the inner wall of the top of the external tray 1. Around the same placement slot 2, the two receiving pads 3 and the two shelf plates 802 are vertically arranged. A guide rod 803 is fixedly installed between the two shelf plates 802. A bidirectional screw 804 is rotatably installed between the two shelf plates 802. Moving seats 805 are threadedly connected to both sides of the bidirectional screw 804, and the guide rod 803 passes through the moving seats 805 on both sides. The jacking component 8 further includes a jacking plate 806 arranged in the placement slot 2. The top of the jacking plate 806 contacts the silicon wafer. Connecting seats 807 are fixedly installed on both sides of the bottom of the jacking plate 806. A strut 808 is movably connected between the moving seat 805 and the connecting seat 807 arranged on the same side. During the rotation of the bidirectional screw 804, the moving seats 805 on both sides move towards each other, and the upward movement of the jacking plate 806 is realized under the connection action of the strut 808, realizing the jacking operation of the silicon wafer.

[0029] The adjacent two coaxial bidirectional screws 804 are fixedly connected. That is, in this embodiment, the 9 bidirectional screws 804 actually form three groups, and at the same time, the adjacent two are driven by a pulley and a belt, so as to realize the synchronous rotation of the 9 bidirectional screws 804. A stepper motor 801 is fixedly installed on one of the shelf plates 802, and the output shaft of the stepper motor 801 is connected to the bidirectional screw 804. When in use, the stepper motor 801 is turned on to realize the synchronous rotation of the 9 bidirectional screws 804.

[0030] The present utility model realizes the stable placement of the silicon wafer through the magnetic attraction connection between the external tray 1 and the built-in tray 5. At the same time, the silicon wafers in the built-in tray 5 can be synchronously ejected through the jacking mechanism in the external tray 1 under the drive of the stepper motor 801, facilitating the automatic removal and operation of the silicon wafers.

[0031] Finally: The above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A highly efficient coating tray, characterized in that: The invention comprises an external tray (1), wherein a plurality of placement grooves (2) are evenly arranged on the top of the external tray (1), receiving pads (3) are fixedly installed on both sides of the bottom of the placement grooves (2), and a No. 1 magnet (4) is arranged on the receiving pads (3), an internal tray (5) is arranged in the placement grooves (2), and No. 2 magnets (6) are arranged on both sides of the bottom of the internal tray (5), a card slot (7) is arranged on the internal tray (5), and the card slot (7) is a step structure, which comprises a first step (701) and a second step (702) from top to bottom, and an ejection mechanism is arranged inside the external tray (1).

2. The high-efficiency coating tray according to claim 1, characterized in that: Lifting handles (9) are fixedly mounted on both sides of the top of the built-in tray (5).

3. The high-efficiency coating tray according to claim 1, characterized in that: The distance between the two receiving pads (3) is smaller than the length of the built-in tray (5).

4. The high-efficiency coating tray according to claim 1, characterized in that: The ejection mechanism comprises ejection assemblies (8) of the same number as the placement slots (2), the ejection assemblies (8) comprising two frame plates (802) fixedly mounted on the inner wall of the top of the external tray (1), a guide rod (803) fixedly mounted between the two frame plates (802), a bidirectional screw rod (804) rotatably mounted between the two frame plates (802), both sides of the bidirectional screw rod (804) being threadedly connected to a movable seat (805), the ejection assembly (8) further comprising an ejection plate (806) arranged in the placement slot (2), both sides of the bottom of the ejection plate (806) being fixedly mounted with connecting seats (807), and a support rod (808) being movably connected between the movable seat (805) and the connecting seat (807) arranged on the same side.

5. The high-efficiency coating tray according to claim 4, characterized in that: Two adjacent bidirectional screw rods (804) arranged coaxially are fixedly connected.

6. The efficient coating tray according to claim 4, characterized in that: A stepper motor (801) is fixedly mounted on one of the frame plates (802), and an output shaft of the stepper motor (801) is connected to the bidirectional screw rod (804).

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