Thermal field heat preservation device and single crystal furnace
By installing a thermal field insulation device in the insulation barrel jacket of the single crystal furnace, the carbon-carbon sleeve and insulation filler are used to slow down heat dissipation, the problem of reducing energy consumption in the prior art is solved, and the low-cost energy consumption reduction effect is achieved.
Patent Information
- Application Number
- CN202422004268.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-19
- Publication Date
- 2025-06-20
- Estimated Expiration
- 2034-08-19
AI Technical Summary
The method of reducing the energy consumption of single crystal furnaces in the prior art is costly, and it is difficult to achieve the dual goals of large-scale development and environmental protection.
A thermal field insulation device is provided, including a carbon-carbon sleeve, an insulation filler and a cover plate. By filling the insulation filler in the annular cavity of the carbon-carbon sleeve, the heat dissipation rate of the insulation barrel is slowed down and the energy consumption of the single crystal furnace is reduced.
The device is simple in structure and low in manufacturing cost. It can effectively reduce the energy consumption of a single crystal furnace. It also has the flexibility to adjust the insulation effect and adapt to different needs.
Smart Images
Figure CN223003068U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a thermal field heat preservation device and a single crystal furnace. Background Art
[0002] As a key device for producing single crystal silicon, the energy consumption problem of the single crystal furnace has attracted increasing attention. High energy consumption not only directly increases the operating costs of enterprises, but also restricts the large-scale development of the industry to a certain extent. And from the perspective of environmental protection, reducing the energy consumption of the single crystal furnace helps to reduce greenhouse gas emissions and relieve the pressure on the environment, meeting the trends and requirements of sustainable development.
[0003] In the prior art, generally, the energy consumption of the single crystal furnace is reduced through the following several methods. The first method is to optimize the thermal field structure of the single crystal furnace to improve the thermal efficiency and reduce heat loss, thereby reducing the energy consumption. The second method is to adopt more efficient and stable heating technologies, such as induction heating, microwave heating, etc., to improve the energy utilization efficiency. The third method is to use an intelligent control system to achieve precise control and optimization of the growth process of the single crystal furnace, improve the production efficiency, and reduce the energy consumption. The fourth method is to use a heat recovery system to recover and reuse the heat dissipated by the single crystal furnace, thereby achieving the effect of reducing the energy consumption.
[0004] However, the above methods for reducing the energy consumption of the single crystal furnace all have the problem of high cost. Summary of the Utility Model
[0005] In order to solve at least one problem mentioned in the background art, the utility model provides a thermal field heat preservation device and a single crystal furnace, which can reduce the energy consumption of the single crystal furnace and have a low cost.
[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0007] In the first aspect, the utility model provides a thermal field heat preservation device for sleeving outside the heat preservation barrel of a single crystal furnace, including a carbon-carbon sleeve, a heat preservation filler, and a cover plate. The barrel wall of the carbon-carbon sleeve has an annular cavity, the top of the cavity has an opening, the heat preservation filler is filled in the cavity, the outer shape of the cover plate matches the outer shape of the opening, and the cover plate is detachably covered on the opening.
[0008] As an optional implementation manner, the heat preservation filler is silicon dioxide particles.
[0009] As an optional implementation manner, the outer shape of the heat preservation filler is spherical, and the radius of the heat preservation filler is 1 mm - 5 mm.
[0010] As an optional implementation manner, the connection between the side wall and the bottom wall of the cavity is in an arc structure, and the radius of the arc structure is 1 mm - 5 mm.
[0011] As an alternative embodiment, the thickness of the side wall of the cavity is 2 mm - 10 mm.
[0012] As an alternative embodiment, the thickness of the bottom wall of the cavity is 5 mm - 10 mm.
[0013] As an alternative embodiment, the thickness of the cover plate is 2 mm - 10 mm.
[0014] As an alternative embodiment, both the shape of the opening and the cover plate are annular.
[0015] As an alternative embodiment, the side wall of the cavity includes an inner side wall and an outer side wall. The top end of the inner side wall has a first annular mounting groove on the side facing the outer side wall, and the top end of the outer side wall has a second annular mounting groove on the side facing the inner side wall. The two sides of the cover plate along its radial direction are respectively clamped in the first annular mounting groove and the second annular mounting groove.
[0016] In a second aspect, the present utility model further provides a single crystal furnace, including the thermal field heat preservation device in any one of the first aspects, and the thermal field heat preservation device is sleeved outside the heat preservation barrel of the single crystal furnace.
[0017] The thermal field heat preservation device provided by the present utility model is used to be sleeved outside the heat preservation barrel of the single crystal furnace, and includes a carbon-carbon sleeve, heat preservation filler, and a cover plate. The barrel wall of the carbon-carbon sleeve has an annular cavity, the top of the cavity has an opening, the heat preservation filler is filled in the cavity, the shape of the cover plate matches the shape of the opening, and the cover plate is detachably covered on the opening. When the thermal field heat preservation device provided by the present utility model is in use, heat preservation filler can be filled into the cavity of the carbon-carbon sleeve, the opening at the top of the cavity is covered by the cover plate, and then the carbon-carbon sleeve is sleeved outside the heat preservation barrel of the single crystal furnace. The heat preservation barrel of the single crystal furnace is heat-preserved through the carbon-carbon sleeve and the heat preservation filler therein, so that the heat dissipation speed of the heat preservation barrel can be slowed down, the energy consumption of the single crystal furnace can be reduced, and the thermal field heat preservation device provided by the present utility model has a simple structure and low manufacturing cost. In addition, the thermal field heat preservation device provided by the present utility model can also adjust the overall heat preservation effect of the thermal field heat preservation device within a certain range by increasing or decreasing the amount of heat preservation filler filled in the cavity, so as to adapt to different heat preservation needs. Description of the Drawings
[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.
[0019] Figure 1Schematic structural diagram of the thermal field insulation device provided by an embodiment of the present utility model;
[0020] Figure 2 Cross-sectional view of one side of the thermal field insulation device provided by an embodiment of the present utility model.
[0021] Explanation of reference numerals:
[0022] 100 - Thermal field insulation device;
[0023] 110 - Carbon-carbon sleeve;
[0024] 111 - Cavity;
[0025] 112 - Inner wall;
[0026] 1121 - First annular installation groove;
[0027] 113 - Outer wall;
[0028] 1131 - Second annular installation groove;
[0029] 114 - Bottom wall;
[0030] 120 - Thermal insulation filler;
[0031] 130 - Cover plate. Detailed implementation manners
[0032] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.
[0033] In the application, the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal", etc. is based on the orientation or positional relationship shown in the accompanying drawings. These terms are mainly used to better describe the present utility model and its embodiments, and are not used to limit that the indicated devices, elements or components must have a specific orientation, or be constructed and operated in a specific orientation.
[0034] Moreover, in addition to being able to represent the orientation or positional relationship, some of the above terms may also be used to represent other meanings. For example, the term "upper" may also be used to represent a certain attachment relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in the present utility model can be understood according to the specific circumstances.
[0035] In addition, the terms "installed", "set up", "equipped with", "connected", and "linked" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or there can be internal communication between two devices, components, or parts. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0036] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, components, or parts (the specific types and structures may be the same or different), and do not indicate or imply the relative importance and quantity of the indicated devices, components, or parts. Unless otherwise specified, the meaning of "a plurality" is two or more.
[0037] In the prior art, the energy consumption of single crystal furnaces is generally reduced in the following ways. The first way is to optimize the thermal field structure of the single crystal furnace to improve the thermal efficiency and reduce heat loss, thereby reducing energy consumption. The second way is to adopt more efficient and stable heating technologies, such as induction heating, microwave heating, etc., to improve the energy utilization efficiency. The third way is to use an intelligent control system to achieve precise control and optimization of the growth process of the single crystal furnace, improve production efficiency, and reduce energy consumption. The fourth way is to use a heat recovery system to recover and reuse the heat dissipated by the single crystal furnace, thereby achieving the effect of reducing energy consumption. Among them, optimizing the thermal field structure requires re-designing the overall structure of the single crystal furnace. Induction heating and microwave heating require corresponding heating equipment, and using an intelligent control system and a heat recovery system both require corresponding supporting equipment. It can be seen that these energy consumption reduction methods all have relatively high costs.
[0038] In view of this, the present utility model provides a thermal field heat preservation device 100, which includes a carbon-carbon sleeve 110, a heat preservation filler 120, and a cover plate 130. The barrel wall of the carbon-carbon sleeve 110 has an annular cavity 111. The top of the cavity 111 has an opening. The heat preservation filler 120 is filled in the cavity 111. The outer shape of the cover plate 130 matches the outer shape of the opening, and the cover plate 130 is detachably covered on the opening.
[0039] When the thermal field heat preservation device 100 is in use, it can insulate the heat preservation barrel of the single crystal furnace through the carbon-carbon sleeve 110 and the heat preservation filler 120 therein, thereby slowing down the heat dissipation speed of the heat preservation barrel and reducing the energy consumption of the single crystal furnace. Moreover, the structure of the thermal field heat preservation device 100 is simple and the manufacturing cost is low. In addition, the thermal field heat preservation device 100 can also adjust the overall heat preservation effect of the thermal field heat preservation device 100 within a certain range by increasing or decreasing the amount of the heat preservation filler 120 filled in the cavity 111, so as to adapt to different heat preservation needs.
[0040] Figure 1 This is a schematic structural view of the thermal field heat preservation device 100 provided by the embodiment of the present utility model; Figure 2 This is a cross-sectional view of one side of the thermal field heat preservation device 100 provided by the embodiment of the present utility model. Reference can be made to Figure 1 and Figure 2 The embodiment of the present utility model provides a thermal field heat preservation device 100, which is used to be sleeved outside the heat preservation barrel of a single crystal furnace. The thermal field heat preservation device 100 includes a carbon-carbon sleeve 110, a heat preservation filler 120 and a cover plate 130. The barrel wall of the carbon-carbon sleeve 110 has an annular cavity 111, the top of the cavity 111 has an opening, the heat preservation filler 120 is filled in the cavity 111, the outer shape of the cover plate 130 matches the outer shape of the opening, and the cover plate 130 is detachably covered on the opening.
[0041] Among them, the carbon-carbon sleeve 110 is a sleeve made of a carbon fiber reinforced composite material. The sleeve made of this material has the advantages of high structural strength, high temperature resistance and light weight, and is suitable for use in a high-temperature single crystal furnace.
[0042] When the thermal field heat preservation device 100 provided by the embodiment of the present utility model is in use, the heat preservation filler 120 can be filled into the cavity 111 of the carbon-carbon sleeve 110, and the cover plate 130 is covered at the opening at the top of the cavity 111, and then the carbon-carbon sleeve 110 is sleeved outside the heat preservation barrel of the single crystal furnace. The heat preservation barrel of the single crystal furnace is heat-preserved through the carbon-carbon sleeve 110 and the heat preservation filler 120 inside the carbon-carbon sleeve 110, so as to slow down the heat dissipation speed of the heat preservation barrel, reduce the energy consumption of the single crystal furnace, and the thermal field heat preservation device 100 provided by the embodiment of the present utility model has a simple structure and low manufacturing cost. In addition, the thermal field heat preservation device 100 provided by the embodiment of the present utility model can also adjust the overall heat preservation effect of the thermal field heat preservation device 100 within a certain range by increasing or decreasing the amount of the heat preservation filler 120 filled in the cavity 111, so as to adapt to different heat preservation needs.
[0043] In addition, the thermal field heat preservation device 100 provided by the embodiment of the present utility model can also be used in cooperation with the soft felt wrapped outside the heat preservation barrel of the single crystal furnace. For example, the soft felt is wrapped outside the heat preservation barrel, and the thermal field heat preservation device 100 is sleeved outside the soft felt. Different installation methods can be adopted at different heights of the heat preservation barrel to realize the adjustment of the thermal field, and the energy consumption and cost can be reduced to the greatest extent.
[0044] Such as Figure 2As shown, in the above embodiment, the heat insulation filler 120 may be silica particles. Among them, silica has a low thermal conductivity, which can effectively reduce heat transfer. Moreover, silica has stable chemical properties and will not react with other substances. At the same time, silica also has the advantages of high temperature resistance, low cost, corrosion resistance, etc. The granular silica can make the filling of silica more sufficient, further reducing heat transfer.
[0045] It should be noted that the filling of silica particles in the cavity 111 should not be too full. It can be understood that the silica particles will expand to a certain extent when heated. If too many silica particles are filled, it may cause the silica particles in the cavity 111 to expand and squeeze the inner wall of the cavity 111 after expansion, resulting in deformation and damage of the carbon-carbon sleeve 110, or pushing open the top cover plate 130.
[0046] As Figure 2 shown, in the above embodiment, the outer shape of the heat insulation filler 120 can be designed as a sphere, and the radius of the heat insulation filler 120 is 1 mm - 5 mm. Designing the outer shape of the silica particles as a sphere can prevent the silica particles filled in the cavity 111 from agglomerating easily, which would make it inconvenient to take out the silica particles. The radius of the spherical silica particles should not be too large or too small. If it is too large, the gap between the particles will become larger, thus reducing the heat insulation effect of the spherical silica particles. If it is too small, agglomeration of the silica particles is likely to occur, making it difficult to take out.
[0047] In the above embodiment, the connection between the side wall and the bottom wall 114 of the cavity 111 can be designed as an arc structure, and the radius of the arc structure is 1 mm - 5 mm. This arc structure is consistent with the outer shape of the spherical silica particles, and the spherical silica particles can cooperate with it, thereby reducing the gap at the connection between the side wall and the bottom wall 114 of the cavity 111, improving the heat insulation effect of silica, and further reducing energy consumption. Specifically, the radius of this arc structure can be the same as the radius of the silica particles, so that the silica particles can be more fully filled at the arc structure, further reducing the gap between the arc structure and the spherical silica particles.
[0048] In the above embodiment, the thickness of the side wall of the cavity 111 can be 2 mm - 10 mm. It can be understood that if the thickness of the side wall of the cavity 111 is too large, it will lead to an increase in the overall mass and cost of the carbon-carbon sleeve 110. If the thickness of the side wall of the cavity 111 is too small, the overall structural strength of the carbon-carbon sleeve 110 may be insufficient, and it may occur that the silica particles in the cavity 111 expand when heated and squeeze the side wall of the carbon-carbon sleeve 110 to deform.
[0049] In the above embodiments, the thickness of the bottom wall 114 of the cavity 111 can be 5 mm - 10 mm. It can be understood that if the thickness of the bottom wall 114 of the cavity 111 is too large, the overall mass and cost of the carbon-carbon sleeve 110 will increase. If the thickness of the bottom wall 114 of the cavity 111 is too small, it is easily deformed by the extrusion of silicon dioxide particles.
[0050] In the above embodiments, the thickness of the cover plate 130 can be 2 mm - 10 mm. If the thickness of the cover plate 130 is too large, the weight and cost will increase. If the thickness of the cover plate 130 is too small, the heat preservation effect will be reduced. The cover plate 130 can also be made of carbon fiber reinforced composite material.
[0051] As Figure 1 shown, in the above embodiments, the outer shapes of the opening and the cover plate 130 can be annular. It can be understood that if the shape of the opening is annular, the silicon dioxide particles can be filled or taken out from any position at the top of the outer circumference of the carbon-carbon sleeve 110, which improves the convenience.
[0052] In the above embodiments, the side wall of the cavity 111 can include an inner side wall 112 and an outer side wall 113. The top end of the inner side wall 112 has a first annular installation groove 1121 facing the side of the outer side wall 113, and the top end of the outer side wall 113 has a second annular installation groove 1131 facing the side of the inner side wall 112. The two sides of the cover plate 130 along its own radial direction are respectively clamped in the first annular installation groove 1121 and the second annular installation groove 1131. The cover plate 130 can be effectively limited by the first annular installation groove 1121 and the second annular installation groove 1131 to prevent the cover plate 130 from shaking.
[0053] In addition, the embodiment of the present utility model further provides a single crystal furnace, including the thermal field heat preservation device 100 in the above embodiments. The thermal field heat preservation device 100 is sleeved outside the heat preservation barrel of the single crystal furnace. The thermal field heat preservation device 100 includes a carbon-carbon sleeve 110, a heat preservation filler 120, and a cover plate 130. The barrel wall of the carbon-carbon sleeve 110 has an annular cavity 111. The top of the cavity 111 has an opening. The heat preservation filler 120 is filled in the cavity 111. The outer shape of the cover plate 130 matches the outer shape of the opening. The cover plate 130 is detachably covered on the opening.
[0054] When the thermal field heat preservation device 100 is in use, heat preservation filler 120 can be filled into the cavity 111 of the carbon-carbon sleeve 110, and the cover plate 130 is used to cover the opening at the top of the cavity 111. Then, the carbon-carbon sleeve 110 is sleeved outside the heat preservation barrel of the single crystal furnace. The heat preservation barrel of the single crystal furnace is heat-preserved through the carbon-carbon sleeve 110 and the heat preservation filler 120 therein, so that the heat dissipation speed of the heat preservation barrel can be slowed down, the energy consumption of the single crystal furnace can be reduced, and the thermal field heat preservation device 100 in this embodiment has a simple structure and low manufacturing cost, reducing the energy-saving cost of the single crystal furnace. In addition, the thermal field heat preservation device 100 in this embodiment can also adjust the overall heat preservation effect of the thermal field heat preservation device 100 within a certain range by increasing or decreasing the amount of the heat preservation filler 120 filled in the cavity 111, so that the single crystal furnace provided in this embodiment has better adaptability.
[0055] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.
Claims
1. A thermal field insulation device, characterized in that: It is used to be mounted outside the insulation barrel of a single crystal furnace, and includes a carbon-carbon sleeve, an insulation filler and a cover plate. The cylinder wall of the carbon-carbon sleeve has an annular cavity, the top of the cavity has an opening, the insulation filler is filled in the cavity, the shape of the cover plate matches the shape of the opening, and the cover plate can detachably cover the opening.
2. The thermal field insulation device according to claim 1, characterized in that: The thermal insulation filler is silicon dioxide particles.
3. The thermal field insulation device according to claim 2, characterized in that: The thermal insulation filler has a spherical shape, and the radius of the thermal insulation filler is 1mm-5mm.
4. The thermal field insulation device according to claim 3, characterized in that: The connection between the side wall and the bottom wall of the cavity is in an arc structure, and the radius of the arc structure is 1mm-5mm.
5. The thermal field insulation device according to any one of claims 1 to 4, characterized in that: The side wall thickness of the cavity is 2mm-10mm.
6. The thermal field insulation device according to any one of claims 1 to 4, characterized in that: The bottom wall thickness of the cavity is 5mm-10mm.
7. The thermal field insulation device according to any one of claims 1 to 4, characterized in that: The thickness of the cover plate is 2mm-10mm.
8. The thermal field insulation device according to any one of claims 1 to 4, characterized in that: The opening and the cover plate are both annular in shape.
9. The thermal field insulation device according to any one of claims 1 to 4, characterized in that: The side wall of the cavity includes an inner wall and an outer wall, the top of the inner wall has a first annular mounting groove on the side facing the outer wall, the top of the outer wall has a second annular mounting groove on the side facing the inner wall, and the cover plate is respectively clamped in the first annular mounting groove and the second annular mounting groove on both sides along its own radial direction.
10. A single crystal furnace, characterized in that: It comprises the thermal field insulation device as described in any one of claims 1 to 9, and the thermal field insulation device is sleeved outside the insulation barrel of the single crystal furnace.