Internal pipeline purging device for special gas equipment

Abstract

The utility model discloses an internal pipeline purging device for special gas equipment, which comprises a three-way pipe, a special gas pipe and a replacement pipe, one end of the three-way pipe is provided with a gas cylinder interface, the other two ends of the three-way pipe are respectively communicated with the special gas pipe and the replacement pipe, the special gas pipe is provided with a high-pressure supply diaphragm valve, and the replacement pipe is provided with a nitrogen diaphragm valve; according to the internal pipeline purging device for the special gas equipment, a special gas vacuumizing pipeline and a nitrogen replacement pipeline are separated, so that residual special gas in the pipeline can be effectively taken away when nitrogen enters the pipeline again after each vacuumizing, the use and operation times of high-purity nitrogen required by purging are greatly reduced, the gas use cost is reduced, the time is saved, and the working efficiency is improved. And the degassing effect is good, and the safety degree is improved.

Description

Technical Field

[0001] The utility model relates to gas equipment technology, and specifically to a purging device for internal pipelines of special gas equipment. Background Art

[0002] In the production processes of industries such as semiconductors and photovoltaics, a large amount of special gases are necessarily used; the supply of special gases is carried out by dedicated special gas equipment; among dozens of special gases, typical special gases include: toxic, corrosive, natural, and explosive gases such as silane, ammonia, chlorine, borane, and phosphine; after each use of a special gas cylinder, the pipeline needs to be purged with nitrogen to meet the condition for safe removal of the gas cylinder.

[0003] After the special gas cylinder is used up, during the process of purging (nitrogen replacement) the pipeline, the pipeline for vacuum pumping and the pipeline for nitrogen entry are shared; vacuum pumping is carried out using a vacuum generator (Venturi effect), but because the suction force of the vacuum generator can only reach about -13 to -14 Psi, it cannot completely extract the special gas inside the pipeline; moreover, when purging nitrogen enters the pipeline, the residual special gas inside will be squeezed to the front end of the pipeline, resulting in the presence of residual special gas during the next vacuum pumping; therefore, in order to achieve the purpose of thoroughly cleaning the special gas, it is necessary to repeatedly perform at least 200 times (industry standard) of vacuum pumping and nitrogen replacement operations; a large amount of high-purity nitrogen and time are consumed.

[0004] For special gas equipment with a relatively large usage volume, the loss of time is very serious; especially after about 200 times of nitrogen replacement, there may still be residual special gas in the pipeline, leading to safety accidents during the gas cylinder separation operation. Content of the Utility Model

[0005] To solve the defects of the above-mentioned existing technologies, the utility model provides a purging device for internal pipelines of special gas equipment, which separates the pipelines for special gas vacuum pumping and nitrogen replacement, and realizes that each time after vacuum pumping and then nitrogen enters again, it can effectively carry away the residual special gas in the pipeline, greatly reducing the use of high-purity nitrogen required for purging and saving time.

[0006] To achieve the above technical purpose, the utility model adopts the following technical scheme: a purging device for internal pipelines of special gas equipment, including a tee pipe, a special gas pipe, and a replacement pipe. One end of the tee pipe is provided with a gas cylinder interface, and the other two ends of the tee pipe are respectively communicated with the special gas pipe and the replacement pipe. A high-pressure supply diaphragm valve is provided on the special gas pipe, and a nitrogen diaphragm valve is provided on the replacement pipe.

[0007] Preferably, a pressure reducing valve is provided on the special gas pipe, and the pressure reducing valve is located below the high-pressure supply diaphragm valve.

[0008] Preferably, airflow direction marks are provided on the high-pressure supply diaphragm valve, the nitrogen diaphragm valve, and the pressure reducing valve.

[0009] Preferably, the special gas pipe is connected to an exhaust pipe, and the exhaust pipe is located below the pressure reducing valve.

[0010] Preferably, a nitrogen interface is provided at the end of the replacement pipe.

[0011] In summary, the following technical effects are achieved by the present utility model:

[0012] The internal pipe purging device of the special gas equipment of the present utility model separates the pipes for evacuating the special gas and replacing it with nitrogen, so that every time nitrogen enters again after evacuation, the residual special gas in the pipe can be effectively carried away, greatly reducing the use and operation times of high-purity nitrogen required for purging, reducing the gas consumption cost and saving time, and having good degassing effect and improved safety. Description of the Drawings

[0013] Figure 1 is a three-dimensional structural schematic diagram of the internal pipe purging device of the special gas equipment of the present utility model;

[0014] Explanation of the reference numerals in the drawings of the specification: 1. Gas cylinder interface; 2. Three-way pipe; 3. Special gas pipe; 4. High-pressure supply diaphragm valve; 5. Pressure reducing valve; 6. Replacement pipe; 7. Nitrogen diaphragm valve. Detailed Embodiment

[0015] The following further details the present utility model with reference to the drawings.

[0016] This specific embodiment is only an interpretation of the present utility model and does not limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without creative contributions as needed, but as long as it is within the scope of the claims of the present utility model, it is protected by the patent law.

[0017] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

[0018] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality of" means two or more, unless otherwise specifically defined.

[0019] In the present utility model, unless otherwise clearly defined and limited, the terms such as "installed", "connected", "connected to", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0020] In the present utility model, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0021] Embodiment 1:

[0022] As Figure 1 shown, a purging device for the internal pipeline of a special gas equipment includes a tee pipe 2, a special gas pipe 3 and a replacement pipe 6. One end of the tee pipe 2 is provided with a gas cylinder interface 1. The other two ends of the tee pipe 2 are respectively communicated with the special gas pipe 3 and the replacement pipe 6. A high-pressure supply diaphragm valve 4 is provided on the special gas pipe 3, and a nitrogen diaphragm valve 7 is provided on the replacement pipe 6; a pressure reducing valve 5 is provided on the special gas pipe 3, and the pressure reducing valve 5 is located below the high-pressure supply diaphragm valve 4; an exhaust pipe is communicated with the special gas pipe 3, and the exhaust pipe is located below the pressure reducing valve 5; a nitrogen interface is provided at the end of the replacement pipe 6.

[0023] Flow direction marks are provided on the high-pressure supply diaphragm valve 4, the nitrogen diaphragm valve 7 and the pressure reducing valve 5; the flow direction marks can facilitate the user to identify the valve information and avoid miscontrolling the valve.

[0024] Among them, the diaphragm valve, also known as the control valve, is the main type of actuator. By receiving the control signal output by the regulating control unit and relying on power operation, it changes the fluid flow rate; the pressure reducing valve 5 is a valve that reduces the inlet pressure to a required outlet pressure through regulation and relies on the energy of the medium itself to automatically maintain the stability of the outlet pressure.

[0025] Workflow: After the use of the gas cylinder is completed, evacuate and purge the pipeline; the specific steps are as follows:

[0026] 1. Connect the exhaust pipeline to the vacuum generator, open the high-pressure supply diaphragm valve 4, and discharge the special gas from the special gas pipe 3 through the exhaust pipeline.

[0027] 2. Open the nitrogen diaphragm valve 7 to send the nitrogen for purging into the replacement pipe 6; at this time, the nitrogen flowing into the replacement pipe 6 will pass through the tee 2, and most of the residual special gas in the special gas pipe 3 will be pushed in the direction of the high-pressure supply diaphragm valve 4.

[0028] 3. When the high-pressure supply diaphragm valve 4 is opened again, the special gas accumulated on the side of the high-pressure supply diaphragm valve 4 will be preferentially discharged to enhance the purging effect.

[0029] The internal pipeline purging device of the special gas equipment in this embodiment separates the pipelines for evacuating the special gas and nitrogen replacement, so that every time nitrogen enters again after evacuation, it can effectively carry away the residual special gas in the pipeline, greatly reducing the use and operation times of high-purity nitrogen required for purging, reducing the gas consumption cost and saving time, with good degassing effect and improved safety.

[0030] Theoretically, more than 75% of high-purity nitrogen can be saved. The nitrogen usage cost for each replacement of the special gas cylinder drops from 320 yuan to about 80 yuan. Calculated based on a medium-sized semiconductor factory that needs to use about 50 special gas equipment and each equipment replaces the special gas cylinder 30 times a year, the annual gas consumption cost can be saved by about 360,000 yuan. Moreover, the time is reduced from the original 4 to 5 hours to 1.2 hours. Considering that the replacement of special gas cylinders belongs to a high-risk operation type. Greatly shortening the purging time can also reasonably arrange the cylinder replacement work, which can be concentrated during the normal 8-hour working hours. There is no longer a need to report to the relevant safety responsible person and the direct superior of the unit or apply for special operations when replacing cylinders at night. In addition to reducing the gas consumption cost and time, this design also brings a huge improvement in the purging effect of the residual special gas. It greatly reduces the probability of safety accidents caused by residual special gas at the interface when separating the cylinder connection port.

[0031] The above description is only a preferred embodiment of the present invention, and does not impose any form of limitation on the present invention. Any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention shall fall within the scope of the technical solution of the present invention.

Claims

1. A device for purging the internal pipeline of a special gas equipment, characterized in that: It comprises a three-way pipe, a special gas pipe and a replacement pipe. One end of the three-way pipe is provided with a gas cylinder interface, and the other two ends of the three-way pipe are respectively connected with the special gas pipe and the replacement pipe. The special gas pipe is provided with a high-pressure supply diaphragm valve, and the replacement pipe is provided with a nitrogen diaphragm valve.

2. The internal pipeline purging device of special gas equipment according to claim 1 is characterized in that: The special gas pipe is provided with a pressure reducing valve, and the pressure reducing valve is located below the high-pressure supply diaphragm valve.

3. The internal pipeline purging device of special gas equipment according to claim 2 is characterized in that: The high-pressure supply diaphragm valve, the nitrogen diaphragm valve and the pressure reducing valve are all provided with air flow direction marks.

4. The internal pipeline purging device of special gas equipment according to claim 2 is characterized in that: The special gas pipe is connected with an exhaust pipeline, and the exhaust pipeline is located below the pressure reducing valve.

5. The internal pipeline purging device of special gas equipment according to claim 1 is characterized in that: A nitrogen interface is provided at the end of the replacement tube.

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