Drainage system and furnace tube equipment

Abstract

The utility model provides a drainage system and furnace tube equipment, the drainage system includes: diversion chamber, intake pipe, exit pipe, liquid outlet pipe, water tank and main discharge pipe, intake pipe, exit pipe and liquid outlet pipe are all connected with diversion chamber, liquid outlet pipe is also connected with water tank, main discharge pipe is connected with water tank; a pressure measuring instrument is arranged on the main discharge pipe, and the pressure control condition can be obtained in time through the pressure measuring instrument, so that processing is conducted in time when pressure control is abnormal, and pressure control failure is avoided. Furthermore, the drainage system further comprises an auxiliary drainage pipe connected with the water tank, a drainage valve is arranged on the auxiliary drainage pipe, opening of the drainage valve is controlled by the pressure measuring instrument, and the auxiliary drainage pipe can be used for standby application when drainage of the main drainage pipe is not smooth, so that unsmooth drainage is avoided, and the drainage effect is improved. That is to say, treatment can be carried out in time when pressure control is abnormal through the auxiliary discharge pipe.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, and particularly relates to a drainage system and a furnace tube device. Background Art

[0002] In the process of integrated circuit manufacturing, it is often necessary to form an oxide layer. In the existing process, there are many ways to grow the oxide layer, and processes such as thermal oxidation and CVD (chemical vapor deposition) are very commonly used processes. In the thermal oxidation process, the wet oxide process is often used. The characteristic of this process is that the growth rate of the oxide layer is fast, and this type of oxidation process will be adopted for processes with low requirements for the density of the oxide layer.

[0003] In the wet oxide process, it is necessary to control the pressure of the reaction chamber. In the wet oxide process, a large amount of water vapor is generated during the ignition reaction of hydrogen (H2) and oxygen (O2), which will directly affect the pressure of the reaction chamber. Therefore, the treatment after water vapor condensation becomes the key to pressure control in the wet oxide process. In the prior art, sometimes the pressure control fails, resulting in the equipment stopping working and causing losses to production. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a drainage system and a furnace tube device to solve the problem that in the existing wet oxide process, the pressure control fails, resulting in the equipment stopping working and causing production losses.

[0005] To solve the above technical problems, the utility model provides a drainage system, which includes: a shunt chamber, an inlet pipe, an outlet pipe, a liquid outlet pipe, a water tank, a main external discharge pipe and an auxiliary external discharge pipe; wherein, the inlet pipe, the outlet pipe and the liquid outlet pipe are all connected to the shunt chamber, the liquid outlet pipe is also connected to the water tank, and the main external discharge pipe and the auxiliary external discharge pipe are both connected to the water tank; a pressure measuring instrument is arranged on the main external discharge pipe, a drainage valve is arranged on the auxiliary external discharge pipe, and the opening of the drainage valve is controlled by the pressure measuring instrument.

[0006] Optionally, in the drainage system, the drainage system further includes a main machine platform, the pressure measuring instrument and the drainage valve are both connected to the main machine platform, the pressure value detected by the pressure measuring instrument is provided to the main machine platform, and the main machine platform controls the opening of the drainage valve according to the pressure value.

[0007] Optionally, in the drainage system, the pressure measuring instrument is connected to the main machine platform through a first dry contact, and the drainage valve is connected to the main machine platform through a second dry contact.

[0008] Optionally, in the drainage system, the drainage system further includes an alarm device, and the main console also controls the alarm device to give an alarm according to the pressure value.

[0009] Optionally, in the drainage system, the pressure gauge is a differential pressure gauge.

[0010] Optionally, in the drainage system, the intake pipe and the outlet pipe are both connected to the top of the shunt chamber, and the liquid outlet pipe is connected to the bottom of the shunt chamber.

[0011] Optionally, in the drainage system, the liquid outlet pipe has an outlet extending into the water tank, the main external drainage pipe has a first port extending into the water tank, the auxiliary external drainage pipe has a second port extending into the water tank, and both the first port and the second port are closer to the top of the water tank than the outlet.

[0012] Optionally, in the drainage system, the drainage system further includes a condenser, and the intake pipe is connected to the shunt chamber through the condenser.

[0013] Optionally, in the drainage system, a first pressure controller is provided on the intake pipe, and a second pressure controller is provided on the outlet pipe.

[0014] The present utility model further provides a furnace tube device, which includes: a reaction chamber and the drainage system as described above. The reaction chamber has an exhaust port, and the exhaust port is connected to the intake pipe of the drainage system.

[0015] The inventor's research found that the reason for the failure of pressure control in the existing wet oxygen oxidation process is that the external drainage pipeline has been in a humid and oxygen-rich environment, resulting in risks such as microorganisms and rust, thus causing poor drainage, further leading to pressure control failure, and causing the equipment to stop working and production losses.

[0016] Therefore, in the drainage system and the furnace tube equipment provided by the present utility model, the drainage system includes: a shunt chamber, an intake pipe, an outlet pipe, a liquid outlet pipe, a water tank, and a main external drain pipe. The intake pipe, the outlet pipe, and the liquid outlet pipe are all connected to the shunt chamber. The liquid outlet pipe is further connected to the water tank, and the main external drain pipe is connected to the water tank. A pressure measuring instrument is provided on the main external drain pipe, and the pressure control situation can be obtained in a timely manner through the pressure measuring instrument, so as to process in a timely manner when the pressure control is abnormal and avoid pressure control failure. Further, the drainage system further includes an auxiliary external drain pipe connected to the water tank, and a drain valve is provided on the auxiliary external drain pipe. The opening of the drain valve is controlled by the pressure measuring instrument. The auxiliary external drain pipe can be used as a backup when the main external drain pipe has poor drainage, thereby avoiding poor drainage, that is, the auxiliary external drain pipe can make timely treatment when the pressure control is abnormal, thereby improving the pressure control of the wet oxygen oxidation process and avoiding equipment shutdown and production capacity loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 FIG. is a schematic structural diagram of the drainage system according to an embodiment of the present utility model.

[0018] Figure 2 FIG. is a schematic connection diagram of the main machine platform, the pressure measuring instrument, and the drain valve according to an embodiment of the present utility model.

[0019] Figure 3 FIG. is a schematic structural diagram of the furnace tube equipment according to an embodiment of the present utility model.

[0020] Among them, the reference numerals are explained as follows:

[0021] 100 - drainage system; 110 - shunt chamber; 120 - intake pipe; 121 - first pressure controller; 130 - outlet pipe; 131 - second pressure controller; 140 - liquid outlet pipe; 141 - outlet; 150 - water tank; 151 - liquid; 160 - main external drain pipe; 161 - pressure measuring instrument; 162 - first port; 170 - auxiliary external drain pipe; 171 - drain valve; 172 - second port; 180 - main machine platform; 181 - first dry node; 182 - second dry node; 190 - alarm device; 200 - condenser; 300 - reaction chamber; 301 - exhaust port. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The following further describes in detail the drainage system and the furnace tube equipment proposed by the present utility model in conjunction with the accompanying drawings and specific embodiments. According to the following description and the claims, the advantages and features of the present utility model will be clearer. It should be noted that the drawings are all in a very simplified form and use non-precise scales, only for conveniently and clearly assisting in explaining the purpose of the embodiments of the present utility model.

[0023] The terms used in this utility model are only for the purpose of describing specific embodiments and are not intended to limit this utility model. Unless otherwise defined in this application document, the technical terms or scientific terms used in this utility model should have the ordinary meaning understood by those with ordinary skills in the field to which this utility model belongs. The "first", "second" and similar words used in the specification and claims of this utility model do not denote any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "a" or "an" do not denote a quantity limitation, but mean that there is at least one. "Plurality" or "several" means two or more. Unless otherwise indicated, words such as "front part", "rear part", "lower part" and / or "upper part" are only for convenience of description and are not limited to a position or a spatial orientation. Words such as "comprising" or "including" mean that the elements or objects appearing before "comprising" or "including" cover the elements or objects listed after "comprising" or "including" and their equivalents, and do not exclude other elements or objects. Words such as "connected" or "coupled" are not limited to physical or mechanical connections, and may include electrical connections, whether direct or indirect. The singular forms of "a", "the" and "said" used in the specification and appended claims of this utility model are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any and all possible combinations of one or more of the associated listed items.

[0024] Please refer to Figure 1 and Figure 2 , wherein, Figure 1 is a schematic structural diagram of the drainage system according to an embodiment of this utility model; Figure 2 is a schematic connection diagram of the main machine platform, the pressure measuring instrument and the drain valve according to an embodiment of this utility model. As Figure 1 shown, this utility model provides a drainage system 100, and the drainage system 100 includes: a shunt chamber 110, an intake pipe 120, an outlet pipe 130, a liquid outlet pipe 140, a water tank 150, a main external drain pipe 160 and an auxiliary external drain pipe 170; wherein, the intake pipe 120, the outlet pipe 130 and the liquid outlet pipe 140 are all connected to the shunt chamber 110, the liquid outlet pipe 140 is also connected to the water tank 150, and the main external drain pipe 160 and the auxiliary external drain pipe 170 are both connected to the water tank 150; a pressure measuring instrument 161 is provided on the main external drain pipe 160, a drain valve 171 is provided on the auxiliary external drain pipe 170, and the opening of the drain valve 171 is controlled by the pressure measuring instrument 161.

[0025] Specifically, a mixed gas can be introduced into the intake pipe 120, and the mixed gas enters the shunt chamber 110 through the intake pipe 120. In the shunt chamber 110, part of the mixed gas is discharged through the outlet pipe 130, such as acidic gas; part of the mixed gas, such as water vapor, turns into liquid and enters the water tank 150 through the liquid outlet pipe 140.

[0026] Under normal circumstances, the liquid in the water tank 150 is discharged through the main external discharge pipe 160. Generally, it enters the plant drainage. However, since the main external discharge pipe 160 has been in a humid and oxygen-rich environment, risks such as microorganisms and rusting have occurred, which may cause poor drainage, and then may cause pressure control failure, and cause the equipment to stop working and production losses. In the embodiment of the present application, a pressure measuring instrument 161 is provided on the main external discharge pipe 160. When the pressure control is abnormal due to poor drainage, it can be obtained in time through the pressure measuring instrument 161. Correspondingly, it can be processed in time to make the pressure control normal. Further, when the pressure is not within the control range, the pressure measuring instrument 161 controls the drain valve 171 provided on the auxiliary external discharge pipe 170 to open. Thus, the liquid in the water tank 150 can be discharged through the auxiliary external discharge pipe 170, so that the pressure returns to normal. In the embodiment of the present application, by using the auxiliary external discharge pipe 170 as a backup drainage device, poor drainage is avoided, the pressure control of the wet oxygen oxidation process is improved, and equipment stop and production capacity loss are avoided.

[0027] Please refer to Figure 2 , further, the drainage system 100 further includes a main machine platform 180. The pressure measuring instrument 161 and the drain valve 171 are both connected to the main machine platform 180. The pressure value detected by the pressure measuring instrument 161 is provided to the main machine platform 180, and the main machine platform 180 controls the opening of the drain valve 171 according to the pressure value. Specifically, the main machine platform 180 receives the pressure value sent by the pressure measuring instrument 161 and determines whether the pressure value is within the pressure control range. For example, it can be judged by a comparator. When the pressure value exceeds the pressure control range, the main machine platform 180 controls the drain valve 171 to open. For example, the main machine platform 180 provides an opening or connection signal to the drain valve 171 to make the drain valve 171 open.

[0028] In the embodiment of the present application, the pressure measuring instrument 161 is a differential pressure gauge; the drain valve 171 is a WV valve. In other embodiments of the present application, the pressure measuring instrument 161 can also be other pressure detection devices, such as pressure sensors, etc.; the drain valve 171 can also be other types of valves.

[0029] Among them, the pressure measuring instrument 161 is connected to the main platform 180 through the first dry contact 181, and the drain valve 171 is connected to the main platform 180 through the second dry contact 182. The pressure measuring instrument 161 and the drain valve 171 are connected to the main platform 180 through the dry contacts on the main platform 180, and the connection is simple and highly reliable.

[0030] Furthermore, the drainage system 100 further includes an alarm device 190, and the main platform 180 also controls the alarm device 190 to give an alarm according to the pressure value. Specifically, when the pressure value exceeds the pressure control range, the main platform 180 controls the drain valve 171 to open, and at the same time, controls the alarm device 190 to give an alarm. Among them, the alarm device 190 can be independently arranged relative to the main platform 180 or integrally arranged on the main platform 180.

[0031] Please continue to refer to Figure 1 , in the embodiment of the present application, the intake pipe 120 and the outlet pipe 130 are both connected to the top of the shunt chamber 110, and the liquid outlet pipe 140 is connected to the bottom of the shunt chamber 110. This facilitates the inflow and outflow of gas and the outflow of liquid.

[0032] Furthermore, the liquid outlet pipe 140 has an outlet 141 extending into the water tank 150, the main external drain pipe 160 has a first port 162 extending into the water tank 150, and the auxiliary external drain pipe 170 has a second port 172 extending into the water tank 150. Both the first port 162 and the second port 172 are closer to the top of the water tank 150 than the outlet 141. That is, in the embodiment of the present application, both the first port 162 and the second port 172 are higher than the outlet 141, so as to better achieve pressure control.

[0033] Furthermore, the outlet 141 extends into the liquid 151 in the water tank 150, and both the first port 162 and the second port 172 are higher than the liquid 151. Among them, the liquid 151 can enter the main external drain pipe 160 and / or the auxiliary external drain pipe 170 through the side wall openings of the main external drain pipe 160 and / or the auxiliary external drain pipe 170 to achieve drainage. Thereby, the pressure control effect can be further improved.

[0034] Such as Figure 1As shown, the drainage system 100 further includes a condenser 200, and the intake pipe 120 is connected to the shunt chamber 110 through the condenser 200. Among them, the condenser 200 can be arranged on the intake pipe 120, and the gas in the intake pipe 120 enters the shunt chamber 110 after being condensed by the condenser 200, so as to accelerate the separation of the mixed gas in the intake pipe 120, discharge the water vapor more quickly, and better achieve pressure control.

[0035] In the embodiment of the present application, a first pressure controller 121 is arranged on the intake pipe 120, and a second pressure controller 131 is arranged on the outlet pipe 130. The pressures on the intake pipe 120 and the outlet pipe 130 can be obtained through the first pressure controller 121 and the second pressure controller 131, further improving the pressure control of the wet oxygen oxidation process.

[0036] In summary, through the auxiliary external discharge pipe 170, it can be used as a backup when the main external discharge pipe 160 has poor drainage, thus avoiding poor drainage, improving the pressure control of the wet oxygen oxidation process, and avoiding equipment shutdown and production capacity loss.

[0037] Furthermore, the present application also provides a furnace tube device. Please refer to Figure 3 which is a schematic structural diagram of the furnace tube device of the embodiment of the present utility model. As Figure 3 shown, the furnace tube device includes: a reaction chamber 300 and the drainage system 100 as described above. The reaction chamber 300 has an exhaust port 301, and the exhaust port 301 is connected to the intake pipe 120 of the drainage system 100. Here, the mixed gas after the reaction in the reaction chamber 300 enters the intake pipe 120 through the exhaust port 301, and then passes through the shunt chamber 110 and is discharged through the outlet pipe 130 or discharged through the liquid outlet pipe 140 and the subsequent water tank 150, main external discharge pipe 160 or auxiliary external discharge pipe 170. Thus, the pressure of the reaction chamber 300 and the entire furnace tube device is controlled, the production efficiency and reliability are improved, and the manufacturing cost is reduced.

[0038] The above description is only a description of the preferred embodiment of the present utility model, and does not limit the scope of the present utility model in any way. Any changes and modifications made by those of ordinary skill in the field of the present utility model according to the above disclosure shall fall within the protection scope of the claims.

Claims

1. A drainage system, characterized in that: The drainage system includes: a diverter chamber, an air inlet pipe, an air outlet pipe, a liquid outlet pipe, a water tank, a main external drain pipe and an auxiliary external drain pipe; wherein the air inlet pipe, the air outlet pipe and the liquid outlet pipe are all connected to the diverter chamber, the liquid outlet pipe is also connected to the water tank, and the main external drain pipe and the auxiliary external drain pipe are both connected to the water tank; a pressure measuring instrument is provided on the main external drain pipe, and a drain valve is provided on the auxiliary external drain pipe, and the opening of the drain valve is controlled by the pressure measuring instrument.

2. The drainage system according to claim 1, characterized in that: The drainage system also includes a main station, the pressure measuring instrument and the drainage valve are both connected to the main station, the pressure value detected by the pressure measuring instrument is provided to the main station, and the main station controls the opening of the drainage valve according to the pressure value.

3. The drainage system according to claim 2, characterized in that: The pressure measuring instrument is connected to the main machine via a first road trunk node, and the drain valve is connected to the main machine via a second road trunk node.

4. The drainage system according to claim 2, characterized in that: The drainage system also includes an alarm device, and the host station also controls the alarm device to sound an alarm according to the pressure value.

5. The drainage system according to any one of claims 1 to 4, characterized in that: The pressure measuring instrument is a differential pressure gauge.

6. The drainage system according to any one of claims 1 to 4, characterized in that: The air inlet pipe and the air outlet pipe are both connected to the top of the diversion chamber, and the liquid outlet pipe is connected to the bottom of the diversion chamber.

7. The drainage system according to any one of claims 1 to 4, characterized in that: The liquid outlet pipe has an outlet extending into the water tank, the main external discharge pipe has a first port extending into the water tank, and the auxiliary external discharge pipe has a second port extending into the water tank. The first port and the second port are both closer to the top of the water tank than the outlet.

8. The drainage system according to any one of claims 1 to 4, characterized in that: The drainage system further comprises a condenser, and the air inlet pipe is connected to the diversion chamber via the condenser.

9. The drainage system according to any one of claims 1 to 4, characterized in that: The air inlet pipe is provided with a first pressure controller, and the air outlet pipe is provided with a second pressure controller.

10. A furnace tube device, characterized in that: The furnace tube equipment comprises: a reaction chamber and a drainage system according to any one of claims 1 to 9, wherein the reaction chamber has an exhaust port, and the exhaust port is connected to an air inlet pipe of the drainage system.

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