Probe station chip CP test device

Abstract

The utility model provides a probe station chip CP testing device, which belongs to the technical field of testing and comprises a bottom plate, the lower surface of the bottom plate is fixedly connected with a support, the upper surface of the bottom plate is fixedly connected with a supporting column, the upper surface of the supporting column is fixedly connected with a workbench, and the center of the workbench is provided with a through groove. The limiting column and the threaded column are arranged on the upper surface of the bottom plate, the limiting column and the threaded column penetrate through the workbench, the annular plate is rotationally connected to the side face of the workbench, the adapter column is fixedly connected to the side face of the annular plate, and the camera is fixedly connected through the movable frame. The vertical displacement of the fixed plate can be controlled by rotating the threaded column, the deflection of the switching column is controlled by rotating the annular plate, and the position of the camera is regulated and controlled by controlling the sliding of the moving frame on the switching column.

Description

Technical Field

[0001] The utility model belongs to the technical field of testing, and particularly relates to a probe table chip CP testing device. Background Art

[0002] In physics and related laboratory techniques, a probe table is a device specifically used for testing and measuring semiconductor devices, microelectronic components or other small electronic devices. It is usually used in research and development fields, such as the design, manufacturing and performance evaluation of microelectronic devices.

[0003] As disclosed in the prior art with the publication number CN215067130U, there is a probe table chip CP testing device, which includes a carrier table and a probe table arranged on the carrier table. A pressing member for pressing the chip is installed on the probe table. An installation frame is arranged on the carrier table, and a test rack body that can rotate along it is installed on the installation frame. A camera that can be adjusted up and down along it is installed on a side surface of the test rack body close to the probe table. The probe table and the camera are both connected to a PLC controller.

[0004] The existing probe table chip CP testing device still has the following deficiencies:

[0005] 1. If the existing device adopts a fixed installation frame, the shooting range of the camera will be restricted, which will have a greater impact on chip testing.

[0006] 2. The probe table in the existing device is only a planar design and cannot fix the chip placed above it. Therefore, during the process of moving the probe, the position of the chip is easily affected, thus affecting the test and observation results. Summary of the Utility Model

[0007] The purpose of the utility model is to solve the problems in the prior art that the shooting range of the camera is restricted, the chip placed above it cannot be fixed, and the position of the chip is easily affected during the process of moving the probe, and a probe table chip CP testing device is proposed.

[0008] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0009] A probe table chip CP testing device includes: a bottom plate, a bracket is fixedly connected to the lower surface of the bottom plate, a column is fixedly connected to the upper surface of the bottom plate, a workbench is fixedly connected to the upper surface of the column, a through groove is arranged in the middle of the upper surface of the workbench, a probe machine is arranged on the upper surface of the workbench, probes are fixedly connected to the side surfaces of the two probe machines close to each other, the two probe machines are arranged on both sides of the through groove, a moving component and an installation frame component are arranged on the upper surface of the bottom plate, and a clamping component is arranged on the upper surface of the moving component.

[0010] Preferably, the moving component includes a slide rail. Two slide rails are fixedly connected to the upper surface of the base plate. A moving table is slidably connected within the slide rail. An elevating column is fixedly connected to the upper surface of the moving table.

[0011] Preferably, the clamping component includes a placement plate. The placement plate is fixedly connected to the upper surface of the elevating column. Six clamping blocks are arranged in a circular array on the upper surface of the placement plate. The clamping blocks are slidably connected to the upper surface of the placement plate. A transmission shaft is fixedly connected to the upper surface of the clamping block. A circular rotating plate is arranged on the upper surface of the clamping block. Six sliding grooves are arranged in a circular array on the upper surface of the circular rotating plate. The transmission shaft penetrates and is slidably connected within the sliding groove.

[0012] Preferably, the mounting frame component includes a lifting structure and a rotating structure. The lifting structure includes two limit columns and a threaded column. The limit columns are fixedly connected to the upper surface of the base plate. The threaded column is rotatably connected to the upper surface of the base plate.

[0013] Preferably, the threaded column is arranged between the two limit columns. The limit columns penetrate and are slidably connected with a fixing plate. The fixing plate is threadedly connected to the threaded column.

[0014] Preferably, the rotating structure includes a circular plate. The circular plate is rotatably connected to the side surface of the fixing plate. Two adapter columns are fixedly connected to the outer side surface of the circular plate. The adapter columns penetrate and are slidably connected with a moving frame. A camera is fixedly connected to the lower surface of the moving frame.

[0015] Compared with the prior art, the present utility model has the following advantages:

[0016] 1. In the present utility model, by arranging the limit columns and the threaded column on the upper surface of the base plate, the limit columns and the threaded column penetrate through the workbench. A circular plate is rotatably connected to the side surface of the workbench, and adapter columns are fixedly connected to the side surface of the circular plate. A camera is fixedly connected through the moving frame. By rotating the threaded column, the up and down displacement of the fixing plate can be controlled. And by rotating the circular plate, the deflection of the adapter columns can be controlled. Then, by controlling the sliding of the moving frame on the adapter columns, the position of the camera can be adjusted.

[0017] 2. In the present utility model, by arranging the clamping component on the elevating column, through the rotation of the circular rotating plate, the sliding of the transmission shaft within the sliding groove is controlled, thereby controlling the outward expansion and inward contraction of the clamping blocks, and finally realizing the clamping of the chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a front view structural schematic diagram of a probe table chip CP testing device proposed by the present utility model;

[0019] Figure 2 isFigure 1 Enlarged view of part A;

[0020] Figure 3 The following is a schematic rear view structure of a probe table chip CP test device proposed by the present utility model;

[0021] Figure 4 The following is a schematic top view structure of the placement plate of a probe table chip CP test device proposed by the present utility model.

[0022] In the figure: 1 bottom plate, 2 support, 3 pillar, 4 workbench, 5 through groove, 6 probe machine, 7 probe, 8 slide rail, 9 moving table, 10 lifting column, 11 placement plate, 12 clamping block, 13 transmission shaft, 14 annular rotating plate, 15 sliding groove, 16 limiting column, 17 threaded column, 18 fixing plate, 19 annular plate, 20 adapter column, 21 moving frame, 22 camera. Specific embodiments

[0023] The technical solutions in the present utility model will be further described below with reference to the accompanying drawings and embodiments.

[0024] Refer to Figures 1 - 4 , a probe table chip CP test device, comprising: a bottom plate 1, a support 2 is fixedly connected to the lower surface of the bottom plate 1, a pillar 3 is fixedly connected to the upper surface of the bottom plate 1, a workbench 4 is fixedly connected to the upper surface of the pillar 3, a through groove 5 is provided in the middle of the workbench 4, a probe machine 6 is provided on the upper surface of the workbench 4, probes 7 are fixedly connected to the adjacent sides of the two probe machines 6, the two probe machines 6 are arranged on both sides of the through groove 5, a moving component and a mounting frame component are provided on the upper surface of the bottom plate 1, and a clamping component is provided on the upper surface of the moving component;

[0025] The moving component includes slide rails 8, the two slide rails 8 are fixedly connected to the upper surface of the bottom plate 1, a moving table 9 is slidably connected in the slide rails 8, and a lifting column 10 is fixedly connected to the upper surface of the moving table 9;

[0026] The clamping component includes a placement plate 11, the placement plate 11 is fixedly connected to the upper surface of the lifting column 10, six clamping blocks 12 are arranged in an annular array on the upper surface of the placement plate 11, the clamping blocks 12 are slidably connected to the upper surface of the placement plate 11, a transmission shaft 13 is fixedly connected to the upper surface of the clamping blocks 12, an annular rotating plate 14 is provided on the upper surface of the clamping blocks 12, six sliding grooves 15 are arranged in an annular array on the upper surface of the annular rotating plate 14, the transmission shaft 13 penetrates and is slidably connected in the sliding grooves 15, by rotating the annular rotating plate 14, the sliding of the transmission shaft 13 in the sliding grooves 15 is controlled, so as to control the outward expansion and inward contraction of the clamping blocks 12, and finally the clamping of the chip is realized;

[0027] The mounting frame assembly includes a lifting structure and a rotating structure. The lifting structure includes two limit posts 16 and a threaded post 17. The limit posts 16 are fixedly connected to the upper surface of the bottom plate 1, and the threaded post 17 is rotatably connected to the upper surface of the bottom plate 1. By rotating the threaded post 17, the up and down displacement of the fixing plate 18 can be controlled;

[0028] The threaded post 17 is arranged between the two limit posts 16. The limit posts 16 penetrate through and are slidably connected to a fixing plate 18, and the fixing plate 18 is threadedly connected to the threaded post 17. The rotating structure includes an annular plate 19. The annular plate 19 is rotatably connected to the side surface of the fixing plate 18. Two adapter posts 20 are fixedly connected to the outer side surface of the annular plate 19. The adapter posts 20 penetrate through and are slidably connected to a moving frame 21. A camera 22 is fixedly connected to the lower surface of the moving frame 21. By rotating the annular plate 19, the deflection of the adapter posts 20 can be controlled, and then by controlling the sliding of the moving frame 21 on the adapter posts 20, the position of the camera 22 can be adjusted.

[0029] The functional principle of the present utility model can be described through the following operation methods:

[0030] By arranging the limit posts 16 and the threaded post 17 on the upper surface of the bottom plate 1, the limit posts 16 and the threaded post 17 penetrate through a workbench 4. An annular plate 19 is rotatably connected to the side surface of the workbench 4, and two adapter posts 20 are fixedly connected to the side surface of the annular plate 19. A camera 22 is fixedly connected through a moving frame 21. By rotating the threaded post 17, the up and down displacement of the fixing plate 18 can be controlled, and by rotating the annular plate 19, the deflection of the adapter posts 20 can be controlled, and then by controlling the sliding of the moving frame 21 on the adapter posts 20, the position of the camera 22 can be adjusted;

[0031] By arranging a clamping assembly on the lifting column 10, through the rotation of the annular rotating plate 14, the sliding of the transmission shaft 13 in the sliding groove 15 is controlled, so as to control the expansion and contraction of the clamping block 12, and finally the clamping of the chip is realized.

[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model and not to limit them. Although the present utility model has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present utility model can be modified or equivalently replaced without departing from the purpose and scope of the technical solutions of the present utility model, and they should all be covered within the scope of the claims of the present utility model.

Claims

1. A probe station chip CP testing device, characterized in that: It comprises a base plate (1), the lower surface of which is fixedly connected to a bracket (2), the upper surface of which is fixedly connected to a pillar (3), the upper surface of which is fixedly connected to a workbench (4), a through slot (5) is provided in the middle of the workbench (4), a probe machine (6) is provided on the upper surface of the workbench (4), two adjacent sides of the probe machines (6) are fixedly connected with probes (7), the two probe machines (6) are provided on both sides of the through slot (5), a moving assembly and a mounting frame assembly are provided on the upper surface of the base plate (1), and a clamping assembly is provided on the upper surface of the moving assembly.

2. A probe station chip CP testing device according to claim 1, characterized in that, in: The moving assembly comprises a slide rail (8), two of the slide rails (8) are fixedly connected to the upper surface of the base plate (1), a moving platform (9) is slidably connected inside the slide rail (8), and a lifting column (10) is fixedly connected to the upper surface of the moving platform (9).

3. A probe station chip CP testing device according to claim 2, characterized in that, in: The clamping assembly comprises a placing plate (11), the placing plate (11) is fixedly connected to the upper surface of the lifting column (10), the upper surface of the placing plate (11) is provided with six clamping blocks (12) in an annular array, the clamping blocks (12) are slidably connected to the upper surface of the placing plate (11), the upper surface of the clamping blocks (12) is fixedly connected to a transmission shaft (13), the upper surface of the clamping blocks (12) is provided with an annular rotating plate (14), the upper surface of the annular rotating plate (14) is provided with six sliding grooves (15) in an annular array, and the transmission shaft (13) passes through and is slidably connected in the sliding groove (15).

4. A probe station chip CP testing device according to claim 1, characterized in that, in: The mounting frame assembly comprises a lifting structure and a rotating structure, wherein the lifting structure comprises two limiting columns (16) and a threaded column (17), wherein the limiting columns (16) are fixedly connected to the upper surface of the base plate (1), and the threaded column (17) is rotatably connected to the upper surface of the base plate (1).

5. A probe station chip CP testing device according to claim 4, characterized in that, in: The threaded column (17) is arranged between two limiting columns (16); the limiting column (16) penetrates and is slidably connected with a fixing plate (18); the fixing plate (18) is threadedly connected to the threaded column (17).

6. A probe station chip CP testing device according to claim 5, characterized in that, in: The rotating structure comprises an annular plate (19), wherein the annular plate (19) is rotatably connected to the side of a fixed plate (18), and the outer side of the annular plate (19) is fixedly connected to two adapter columns (20), and the adapter columns (20) penetrate and are slidably connected to a movable frame (21), and the lower surface of the movable frame (21) is fixedly connected to a camera (22).

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