Linear rapid tape-out laser direct writing exposure equipment

Abstract

The utility model discloses linear type rapid tape-out laser direct writing exposure equipment. Comprising a base, a guide rail installation part arranged in the middle of the top of the base, a first feeding mechanism and a second feeding mechanism which are arranged on the two side walls of the guide rail installation part and used for alternately feeding and discharging battery pieces, and a conveying belt arranged above the first feeding mechanism and the second feeding mechanism and used for conveying the battery pieces. The device adopts a mode of lifting and feeding and discharging battery pieces above the conveying belt, the risk of piece falling is avoided, the reliability of tape-out transmission is ensured, the space required by transmission can be saved by adopting a linear tape-out mode, in addition, the linear tape-out upper and lower plates, the first feeding mechanism and the second feeding mechanism are subjected to interactive exposure, and the production efficiency is improved. Rapid exposure tape-out of a product can be realized, and the productivity of equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of battery chip exposure, in particular to a linear fast-sheet laser direct writing exposure device. Background Technique

[0002] Photovoltaic technology has become a mainstream technology in the development of sustainable energy. Among them, the manufacturing of battery chips is a complex and highly precise process. In this process, the laser direct writing exposure link plays a crucial role in the production of battery chips.

[0003] In the existing technical solutions, a suction cup or a suction nozzle is mainly installed on a robotic arm to adsorb the battery chip for sheet flow. However, there is a possibility of unstable adsorption and chip dropping during the sheet flow process of the suction nozzle, and the robotic arm needs to leave a certain movement space during the sheet flow transmission, with a large stroke range, and fast sheet flow cannot be achieved.

[0004] Therefore, the utility model provides a linear fast-sheet laser direct writing exposure device to solve the problems existing in the above background technique. Content of the Utility Model

[0005] To achieve the above object, the utility model provides the following technical solutions:

[0006] A linear fast-sheet laser direct writing exposure device includes a base, a rail mounting member arranged at the middle position on the top of the base, a first feeding mechanism and a second feeding mechanism oppositely arranged on both side walls of the rail mounting member for alternately loading and unloading battery chips, and a conveyor belt arranged above the first feeding mechanism and the second feeding mechanism for transmitting battery chips;

[0007] Among them, the first feeding mechanism includes a mounting plate arranged above the rail mounting member and below the conveyor belt, a tray fixedly connected to the top of the mounting plate for receiving battery chips, a vertical plate fixedly connected to the bottom of the mounting plate, a horizontal conveying component arranged on the side wall of the rail mounting member for driving the vertical plate to move along the battery chip transmission direction, and a vertical driving component arranged on the outer wall of the vertical plate for driving the vertical plate to move up and down.

[0008] As a further solution of the utility model: There are two conveyor belts, and the battery chips are placed on the top of the conveyor belts for transmission.

[0009] As a further solution of the utility model: The upper surface of the tray is provided with belt grooves having the same number as the conveyor belts. The conveyor belts are located directly above the belt grooves, and the diameter of the belt grooves is larger than that of the conveyor belts.

[0010] As a further solution of the utility model: the interior of the tray is a hollow structure, the bottom of the tray is connected with a suction pipe, the other end of the suction pipe is externally connected with an air pump, and a plurality of suction holes are equidistantly distributed on the upper surface of the tray.

[0011] As a further solution of the utility model: the horizontal conveying component includes a Y-axis guide rail arranged along the transmission direction of the conveyor belt on the outer wall of the guide rail mounting member, a fixed seat is slidably connected to the outer wall of the Y-axis guide rail, a linear motor for driving the fixed seat to slide horizontally is arranged on the outer wall of the guide rail mounting member, hard limit baffles for restricting the position of the fixed seat are arranged at both ends of the outer wall of the guide rail mounting member, guide rail grooves are opened on both sides of the surface of the fixed seat away from the linear motor, a sliding seat is fixedly connected to the inner wall of the guide rail groove, Z-axis guide rails are fixedly connected to both sides of the surface of the vertical plate close to the fixed seat, and the Z-axis guide rails are clamped in the inner wall of the sliding seat and slide relative to the inner wall of the sliding seat.

[0012] As a further solution of the utility model: the vertical driving component includes a servo motor, a lead screw, and a nut. One end of the lead screw is connected to the output end of the servo motor, and the other end is in threaded connection with the inner wall of the nut. An installation groove is opened at the middle position of the surface of the vertical plate close to the hard limit baffle, and the nut is fixedly installed on the inner wall of the installation groove.

[0013] As a further solution of the utility model: it further includes two groups of fixing members fixedly connected to the outer wall of the feeding port of the support member, and alignment cameras for aligning the battery cells above the tray are arranged on the opposite surfaces of the two groups of fixing members.

[0014] As a further solution of the utility model: an exposure lens for exposing the battery cells after alignment by the alignment camera is fixedly installed at the top of the support member.

[0015] As a further solution of the utility model: the first feeding mechanism and the second feeding mechanism have the same structure.

[0016] As a further solution of the utility model: when the first feeding mechanism and the second feeding mechanism move relative to each other, the height of the upper surface of the tray of one feeding mechanism is lower than the height of the lower surface of the mounting plate of the other feeding mechanism.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] This device uses a method of lifting and loading / unloading the solar cells above the conveyor belt, which avoids the risk of dropping the chips and ensures the reliability of the wafer transfer. The use of a linear wafer transfer method can save the space required for transfer. In addition, the upper and lower plates of the linear wafer transfer, and the upper and lower double-table interaction exposure of the first feeding mechanism and the second feeding mechanism can achieve rapid exposure and wafer transfer of the product, improve the production capacity of the device, and improve the subsequent exposure accuracy by performing flying alignment on the solar cells above the tray through the alignment camera. Description of the Drawings

[0019] Figure 1 It is a schematic structural diagram of a linear rapid wafer transfer laser direct writing exposure device.

[0020] Figure 2 It is a schematic exploded view structural diagram of a linear rapid wafer transfer laser direct writing exposure device.

[0021] Figure 3 It is a schematic structural diagram of the first feeding mechanism in a linear rapid wafer transfer laser direct writing exposure device.

[0022] Figure 4 It is a schematic structural diagram of the vertical plate and the mounting plate in a linear rapid wafer transfer laser direct writing exposure device.

[0023] In the figure: 1, base; 2, support; 3, guide rail mounting; 4, first feeding mechanism; 5, second feeding mechanism; 6, fixing piece; 7, alignment camera; 8, exposure lens; 9, conveyor belt; 10, solar cell; 11, hard limit baffle; 12, linear motor; 13, Y-axis guide rail; 14, fixed seat; 16, guide rail groove; 17, sliding seat; 18, vertical plate; 19, mounting plate; 20, tray; 21, belt groove; 22, Z-axis guide rail; 23, mounting groove. Detailed Description of the Invention

[0024] The following further details the present invention in conjunction with the accompanying drawings and specific embodiments.

[0025] Please refer to Figure 1 - Figure 2 , a linear rapid wafer transfer laser direct writing exposure device, including a base 1, a guide rail mounting 3 disposed at the middle position of the top of the base 1, a first feeding mechanism 4 and a second feeding mechanism 5 oppositely disposed on both side walls of the guide rail mounting 3 for alternately loading and unloading the solar cells 10, and a conveyor belt 9 disposed above the first feeding mechanism 4 and the second feeding mechanism 5 for transferring the solar cells 10. The first feeding mechanism 4 and the second feeding mechanism 5 have the same structure.

[0026] It further includes two groups of fixing pieces 6 fixedly connected to the outer wall of the feeding port of the support 2. Opposite surfaces of the two groups of fixing pieces 6 are both provided with alignment cameras 7 for aligning the solar cells 10 above the tray 20.

[0027] An exposure lens 8 for exposing the solar cell 10 after alignment by the alignment camera 7 is fixedly installed at the top of the support member 2.

[0028] Please refer to Figure 3 - Figure 4 , wherein, the first feeding mechanism 4 includes a mounting plate 19 disposed above the guide rail mounting member 3 and below the conveyor belt 9, a tray 20 fixedly connected to the top of the mounting plate 19 for receiving the solar cell 10, a vertical plate 18 fixedly connected to the bottom of the mounting plate 19, a horizontal conveying assembly disposed on the side wall of the guide rail mounting member 3 for driving the vertical plate 18 to move along the transmission direction of the solar cell 10, and a vertical driving assembly disposed on the outer wall of the vertical plate 18 for driving the vertical plate 18 to move up and down.

[0029] The horizontal conveying assembly includes a Y-axis guide rail 13 fixedly connected to the outer wall of the guide rail mounting member 3 and disposed along the transmission direction of the conveyor belt 9. A fixed seat 14 is slidably connected to the outer wall of the Y-axis guide rail 13. A linear motor 12 for driving the fixed seat 14 to slide horizontally is disposed on the outer wall of the guide rail mounting member 3. Hard limit baffles 11 for restricting the position of the fixed seat 14 are disposed at both ends of the outer wall of the guide rail mounting member 3. Guide grooves 16 are formed on both sides of the side of the fixed seat 14 away from the linear motor 12. A sliding seat 17 is fixedly connected to the inner wall of the guide groove 16. Z-direction guide rails 22 are fixedly connected to both sides of the side of the vertical plate 18 close to the fixed seat 14. The Z-direction guide rails 22 are clamped in the inner wall of the sliding seat 17 and slide relative to the inner wall of the sliding seat 17.

[0030] The vertical driving assembly includes a servo motor, a lead screw, and a nut. One end of the lead screw is connected to the output end of the servo motor, and the other end is threadedly connected to the inner wall of the nut. An installation groove 23 is formed at the middle position of the side of the vertical plate 18 close to the hard limit baffle 11. The nut is fixedly installed on the inner wall of the installation groove 23.

[0031] There are two conveyor belts 9, and the solar cell 10 is placed on the top of the conveyor belt 9 for transmission.

[0032] The upper surface of the tray 20 is provided with belt grooves 21 having the same number as the conveyor belt 9. The conveyor belt 9 is located directly above the belt grooves 21, and the diameter of the belt grooves 21 is larger than that of the conveyor belt 9.

[0033] The inside of the tray 20 is a hollow structure. An air suction pipe is connected to the bottom of the tray 20, and the other end of the air suction pipe is externally connected to an air pump. A plurality of equally spaced air suction holes are formed on the upper surface of the tray 20.

[0034] When the first feeding mechanism 4 and the second feeding mechanism 5 move relative to each other, the height of the upper surface of the tray 20 of one feeding mechanism is lower than the height of the lower surface of the mounting plate 19 of the other feeding mechanism.

[0035] Keep the conveyor belt 9 moving at a constant speed, and place the solar cells 10 on the upper part of the conveyor belt 9 in sequence for conveying. At the initial position, the tray 20 in the first feeding mechanism 4 moves below the alignment camera 7. When two solar cells 10 above the conveyor belt 9 move above the tray 20, start the servo motor. Drive the lead screw to rotate through the servo motor, and then drive the nut and the vertical plate 18 to move upward (not shown in the figure), further drive the Z-direction guide rail 22 to slide upward on the inner wall of the slide seat 17, and at the same time drive the mounting plate 19 and the tray 20 to move upward. The conveyor belt 9 above the tray 20 falls into the belt groove 21. At this time, the solar cell 10 above the conveyor belt 9 is lifted by the tray 20. Then connect the suction pipe at the bottom of the tray 20 to the air pump, and adsorb the solar cell 10 through the suction holes on the surface of the tray 20, completing the feeding function of the tray 20 for the solar cell 10. Utilizing the self-gravity of the solar cell 10 and the adsorption of the suction holes, the solar cell 10 can be closely attached to the upper surface of the tray 20, preventing the situation of unstable adsorption and dropping of the piece;

[0036] The tray 20 lifts the solar cell 10. Since the tray 20 is below the alignment camera 7, the alignment camera 7 aligns the solar cell 10 above the tray 20 to improve the subsequent exposure accuracy. The alignment camera 7 adopts the method of flying alignment, that is, during the process of the conveyor belt 9 carrying the solar cell 10 moving at a constant speed, the alignment camera 7 performs flying shooting alignment.

[0037] After the alignment is completed, start the linear motor 12. Drive the fixed seat 14 to move towards the exposure lens 8 through the linear motor 12. The fixed seat 14 slides on the outer wall of the Y-axis guide rail 13, further driving the slide seat 17 and the Z-direction guide rail 22 to move synchronously, and at the same time driving the tray 20 and the solar cell 10 to move below the exposure lens 8 to expose the solar cell 10;

[0038] When the fixed seat 14 in the first feeding mechanism 4 moves towards the exposure lens 8, at this time, the upper surface height of the tray 20 in the second feeding mechanism 5 is lower than the lower surface height of the mounting plate 19 in the first feeding mechanism 4. The tray 20 in the second feeding mechanism 5 moves relative to the tray 20 in the first feeding mechanism 4 until the fixed seat 14 in the first feeding mechanism 4 moves below the exposure lens 8. At this time, the tray 20 in the second feeding mechanism 5 moves below the alignment camera 7, waiting for the next feeding operation. By setting the hard limit baffle 11, the movement of the fixed seat 14 to the end position can be protected;

[0039] After the tray 20 in the first feeding mechanism 4 completes the exposure work on the solar cell 10 below the exposure lens 8, drive the tray 20 to move downward through the vertical drive assembly. The conveyor belt 9 is separated from the inside of the belt groove 21, and the solar cell 10 falls back above the conveyor belt 9 again. The conveyor belt 9 conveys the solar cell 10 to realize the discharging work of the exposed solar cell 10.

[0040] Repeat the above process successively. Compared with the mainstream robotic arm solution, this device uses a method of lifting and loading / unloading the solar cells 10 above the conveyor belt 9, avoiding the risk of dropping the chips and ensuring the reliability of the wafer transfer. The use of the linear wafer flow method can save the space required for transfer. In addition, for the upper and lower plates of the linear wafer flow, the first feeding mechanism 4 and the second feeding mechanism 5 perform double-tabletop interactive exposure up and down, which can achieve rapid exposure and wafer flow of the product, improving the production capacity of the device.

[0041] The above is only a preferred specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution and the inventive concept of the present utility model, makes equivalent substitutions or changes, and should be covered within the protection scope of the present utility model.

Claims

1. A linear fast-flow laser direct writing exposure device, characterized in that: It comprises a base, a guide rail mounting member arranged at the middle position of the top of the base, a first feeding mechanism and a second feeding mechanism arranged at two side walls of the guide rail mounting member for alternately loading and unloading battery cells, and a conveyor belt arranged above the first feeding mechanism and the second feeding mechanism for conveying battery cells; Among them, the first feeding mechanism includes a mounting plate arranged above the guide rail mounting member and below the conveyor belt, a tray fixedly connected to the top of the mounting plate for receiving the battery cells, a vertical plate fixedly connected to the bottom of the mounting plate, a horizontal conveying component arranged on the side wall of the guide rail mounting member for driving the vertical plate to move along the battery cell transmission direction, and a vertical driving component arranged on the outer wall of the vertical plate for driving the vertical plate to move up and down.

2. The linear fast-flow laser direct writing exposure device according to claim 1, characterized in that: Two conveyor belts are provided, and the battery sheets are placed on the top of the conveyor belts for transmission.

3. The linear fast-flow laser direct writing exposure device according to claim 1, characterized in that: The upper surface of the tray is provided with belt grooves having the same number as the conveyor belts. The conveyor belts are located directly above the belt grooves, and the diameter of the belt grooves is larger than that of the conveyor belts.

4. The linear fast-flow laser direct writing exposure device according to claim 1, characterized in that: The interior of the tray is a hollow structure, the bottom of the tray is connected to an air suction pipe, the other end of the air suction pipe is externally connected to an air pump, and the upper surface of the tray is provided with a plurality of equally spaced air suction holes.

5. The linear fast-flow laser direct writing exposure device according to claim 1, characterized in that: The horizontal conveying assembly includes a Y-axis guide rail fixedly connected to the outer wall of the guide rail mounting member and arranged along the transmission direction of the conveyor belt, the outer wall of the Y-axis guide rail is slidably connected to a fixed seat, the outer wall of the guide rail mounting member is provided with a linear motor that drives the fixed seat to slide horizontally, hard limit baffles are provided at both ends of the outer wall of the guide rail mounting member to limit the position of the fixed seat, guide rail grooves are provided on both sides of a side of the fixed seat away from the linear motor, a slide is fixedly connected to the inner wall of the guide rail groove, and a Z-guide rail is fixedly connected to both sides of a side of the vertical plate close to the fixed seat, and the Z-guide rail is clamped on the inner wall of the slide and slides relative to the inner wall of the slide.

6. The linear fast-flow laser direct writing exposure device according to claim 1, characterized in that: The vertical drive assembly includes a servo motor, a screw rod, and a nut. One end of the screw rod is connected to the output end of the servo motor, and the other end is threadedly connected to the inner wall of the nut. An installation groove is opened in the middle position of one side of the vertical plate close to the hard limit baffle, and the nut is fixedly installed on the inner wall of the installation groove.

7. The linear fast-flow laser direct writing exposure device according to claim 1, characterized in that: It also includes two groups of fixing members fixedly connected to the outer wall of the support member feed port, and the opposite surfaces of the two groups of fixing members are provided with alignment cameras for flying alignment of the battery cells above the tray.

8. The linear fast-flow laser direct writing exposure device according to claim 7, characterized in that: An exposure lens for exposing the battery sheet after being aligned by the alignment camera is fixedly installed on the top of the support member.

9. The linear fast-flow laser direct writing exposure device according to claim 1, characterized in that: The first feeding mechanism and the second feeding mechanism have the same structure.

10. The linear fast-flow laser direct writing exposure device according to claim 9, characterized in that: When the first feeding mechanism and the second feeding mechanism move relatively, the height of the upper surface of the tray of one feeding mechanism is lower than the height of the lower surface of the mounting plate of the other feeding mechanism.

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