Ion source adapting mechanism for ion implanter

Abstract

The utility model provides an ion source adapting mechanism for an ion implanter, which comprises a bearing assembly component, an adapting bracket component, an operation temperature control component, an air source adapting component, an adapting operation component and an adapting guide component, the ion source adapting mechanism is provided with the adapting operation assembly and the adapting guide assembly, so that the whole device is simple and quick to mount and dismount, daily maintenance and overhaul are facilitated, the operating temperature control assembly can effectively control the working temperature of the arcing cavity, the working stability and reliability of the ion source are ensured, and the service life of the ion source is prolonged. An outer guide cylinder and an inner matching cylinder in the matching guide assembly are matched with an outer guide rod and an inner guide block respectively, accurate guiding and positioning are provided for matching or detaching operation of the bearing substrate and the supporting tube shell, deviation and damage in the operation process are avoided, and the precision of ion implantation operation is improved while the assembly precision is improved.

Description

Technical Field

[0001] The utility model relates to integrated circuit production equipment, in particular to an ion source connection mechanism for an ion implanter. Background Art

[0002] Patent document CN203983227U discloses an ion source, which includes an ion generation chamber surrounded by a top plate, side plates and a bottom plate. The top plate consists of a receiving groove and a pair of sliding plates that can move relative to each other in the receiving groove. The bottom of the receiving groove has a slit, and the top of the receiving groove has an opening to expose the slit. The sliding plates move relative to each other to control the size of the exposed slit. The width of the slit for extracting the ion beam in this ion source is precisely adjustable. The ion implanter using this ion source can always maintain the stability of the extracted ion beam, thereby meeting the stringent requirements of the ion implantation process and improving the product yield. Such an ion source needs to be installed in an ion implanter using a connection mechanism and cooperate with other mechanisms for ion implantation operations. The commonly used connection mechanism uses a connecting piece for locking and fixing, but it is prone to inaccurate positioning during installation, affecting the accuracy of ion implantation operations. Therefore, it is necessary to optimize its structure to overcome the above defects. Summary of the Utility Model

[0003] The purpose of the utility model is to provide an ion source connection mechanism for an ion implanter to improve its assembly accuracy and further improve the accuracy of ion implantation.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] An ion source connection mechanism for an ion implanter, which includes:

[0006] A carrying and assembling component, which is adapted to the shape of the body of the ion implanter, has an assembling space inside, and can be installed in the body through a connecting piece;

[0007] A transfer and support component, which is installed in the carrying and assembling component and is adapted to the shape of the body of the ion implanter. It can be installed in the body together with the carrying and assembling component and is embedded inside the body. The transfer and support component has an assembling space for setting the ion source arc starting chamber, so that the arc starting chamber is embedded inside the body together with the transfer and support component;

[0008] An operating temperature control component, which is installed in the transfer and support component, corresponds to the position of the arc starting chamber, and is connected to a heat exchange liquid supply device. The heat exchange liquid supply device conveys heat exchange liquid to the operating temperature control component to regulate the operating temperature of the arc starting chamber;

[0009] Gas source adapter assembly, which is installed in the carrier assembly, cooperates with the adapter support assembly, and is connected to the arc starting chamber and the ion source gas supply equipment. The ion source gas supply equipment transports ion source gas into the arc starting chamber through the gas source adapter assembly;

[0010] Adapter operation assembly, which is installed in the carrier assembly. The carrier assembly and the adapter support assembly can be mated or detached in the machine body through the adapter operation assembly;

[0011] Adapter guiding assembly, which is installed in the carrier assembly and the adapter operation assembly, and can guide the mating or detaching operation process of the carrier assembly and the adapter support assembly in the machine body.

[0012] Specifically, the carrier assembly includes:

[0013] Carrier substrate, which is made of a circular plate and is adapted to the shape of the mating notch of the machine body. A set of mounting through holes are provided at its edge, and the carrier substrate can be fixedly connected to the machine body through the mating connecting bolts. A clearance through hole adapted to the shape of the operation temperature control assembly is provided in the middle;

[0014] Sealing gasket, which is located inside the carrier substrate. A sealing groove is provided on the inner wall of the carrier substrate. The sealing groove extends along the circumference of the carrier substrate and is recessed axially into the carrier substrate. The sealing gasket is embedded in the sealing groove and protrudes backward from the carrier substrate, and can seal the mating surface between the carrier substrate and the machine body.

[0015] The adapter support assembly includes:

[0016] Support pipe shell, which is joined to the inner wall of the carrier substrate and extends backward from the carrier substrate. It can be installed in the machine body together with the carrier substrate and is embedded inside the machine body;

[0017] Support boss, which is formed on the outer wall of the support pipe shell and protrudes outward from the support pipe shell. The power connection structure of the arc starting chamber can be installed on the support boss;

[0018] Support end plate, which is joined to the inner end of the support pipe shell to seal the opening at the inner end of the support pipe shell, forming an operation temperature control assembly installation space in the support pipe shell and an arc starting chamber installation space on the support end plate.

[0019] The operation temperature control assembly includes:

[0020] Heat exchange core, which passes through the clearance through hole and extends into the support pipe shell, is locked by a locking member, and abuts against the support end plate. It can exchange heat with the arc starting chamber, and is connected to the heat exchange liquid supply equipment through a pipeline. The operation temperature of the support end plate and the arc starting chamber is regulated by the heat exchange core.

[0021] The gas source adapter assembly includes:

[0022] An adapter end, which is installed in the carrier substrate through a sealing structure, with its outer end protruding forward from the carrier substrate and communicating with the ion source gas supply device through a pipeline, and its inner end protruding backward from the carrier substrate;

[0023] An adapter air pipe, which is joined to the inner end of the adapter end and extends towards the arc starting cavity. A positioning notch is provided on the side of the support end plate. The end of the adapter air pipe penetrates through the positioning notch and then communicates with the arc starting cavity.

[0024] The mating operation assembly includes:

[0025] Operation handles, of which there are a pair. Each operation handle is respectively installed on the outer wall of the carrier substrate and protrudes forward from the carrier substrate. The carrier substrate and the support tube shell can be mated or detached through the operation handles.

[0026] The mating guide assembly includes:

[0027] A mating suspension, which is installed on the operation handle and extends towards the outside of the carrier substrate;

[0028] External guide cylinders, of which there are a pair. Each external guide cylinder is respectively installed at the end of the mating suspension. They are arranged horizontally and are adapted to the shape of the external guide rods on the machine body. The external guide cylinders are sleeved on the external guide rods and can guide the mating or detaching operation process of the carrier substrate and the support tube shell;

[0029] Mating inner cylinders, of which there are a pair. Each mating inner cylinder is respectively installed on the inner wall of the carrier substrate and is arranged vertically. They are adapted to the shape of the internal guide blocks on the machine body. The mating inner cylinders are sleeved on the ends of the internal guide blocks and can assist in guiding the mating process of the carrier substrate and the support tube shell and assist in positioning their mating states.

[0030] The advantages of the present utility model are as follows:

[0031] The provided mating operation assembly and mating guide assembly of the ion source mating mechanism make the installation and disassembly of the whole device simple and fast, facilitating daily maintenance and repair. The operation of the temperature control assembly can effectively control the working temperature of the arc starting cavity, ensuring the stability and reliability of the ion source operation. The external guide cylinders and mating inner cylinders in the mating guide assembly cooperate with the external guide rods and internal guide blocks respectively, providing precise guidance and positioning for the mating or detaching operation of the carrier substrate and the support tube shell, avoiding deviations and damages during the operation process, improving its assembly accuracy while enhancing the accuracy of ion implantation operation. Description of the Drawings

[0032] Figure 1 This is one of the structural schematic diagrams of the ion source matching mechanism for an ion implanter proposed by the utility model;

[0033] Figure 2 This is the second structural schematic diagram of the ion source matching mechanism. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0035] like Figure 1 , Figure 2 As shown, the ion source matching mechanism for an ion implanter proposed by the utility model includes a bearing assembly component, a transfer support component, an operating temperature control component, a gas source transfer component, a matching operation component and a matching guide component. The bearing assembly component is adapted to the body shape of the ion implanter, has an assembly space inside, and can be installed in the body through a connecting piece. The transfer support component is installed in the bearing assembly component and is adapted to the body shape of the ion implanter. It can be installed in the body together with the bearing assembly component and embedded in the body. The transfer support component has an assembly space for setting an ion source arc starting chamber, so that the arc starting chamber is embedded in the body together with the transfer support component. The operating temperature control component is installed in the transfer support component, and its position is aligned with the arc starting chamber. The heat exchange liquid supply device delivers heat exchange liquid to the operating temperature control component, so that it can regulate the operating temperature of the arc starting chamber. The gas source adapter component is installed in the load-bearing assembly component, which cooperates with the adapter support component and is connected with the arc starting chamber and the ion source gas supply device. The ion source gas supply device delivers ion source gas to the arc starting chamber through the gas source adapter component; the matching operation component is installed in the load-bearing assembly component, and the load-bearing assembly component and the adapter support component can be matched or disassembled in the machine body through the matching operation component; the matching guide component is installed in the load-bearing assembly component and the matching operation component, and can guide the matching or disassembly operation process of the load-bearing assembly component and the adapter support component in the machine body.

[0036] In this embodiment, the bearing and assembly component includes a bearing substrate 110 and a sealing gasket 120. The bearing substrate is made of a circular plate and is adapted to the shape of the mating notch of the machine body. A set of mounting through holes are provided at its edge, and the bearing substrate can be fixedly connected to the machine body through mating connecting bolts. A clearance through hole adapted to the shape of the operating temperature control component is provided in the middle. The sealing gasket is located inside the bearing substrate. A sealing groove is provided on the inner wall of the bearing substrate. The sealing groove extends along the circumference of the bearing substrate and recesses inward along the axial direction of the bearing substrate. The sealing gasket is embedded in the sealing groove and protrudes backward from the bearing substrate, and can seal the mating surface between the bearing substrate and the machine body.

[0037] In this embodiment, a positioning end 111 is further provided on the inner wall of the bearing substrate. The positioning end cooperates with the cover plate of the arc starting cavity through an elastic pressing structure to assist in positioning the arc starting cavity.

[0038] The transfer and support component includes a support tube shell 210, a support boss 220, and a support end plate 230. The support tube shell is joined to the inner wall of the bearing substrate and extends backward from the bearing substrate. It can be installed in the machine body together with the bearing substrate and is embedded inside the machine body. The support boss is formed on the outer wall of the support tube shell and protrudes outward from the support tube shell. The power connection structure of the arc starting cavity can be installed on the support boss. The support end plate is joined to the inner end of the support tube shell to seal the opening at the inner end of the support tube shell, forming an assembly space for the operating temperature control component in the support tube shell and an assembly space for the arc starting cavity on the support end plate.

[0039] The operating temperature control component includes a heat exchange core 300. The heat exchange core passes through the clearance through hole and extends into the support tube shell, is locked by a locking member, and abuts against the support end plate. It can exchange heat with the arc starting cavity and is connected to a heat exchange liquid supply device through a pipeline. The heat exchange core regulates the operating temperature of the support end plate and the arc starting cavity. A heat exchange coil is provided inside the heat exchange core, and its structure adopts the prior art, so no further description is given.

[0040] The gas source transfer component includes a transfer end 410 and a transfer gas pipe 420. The transfer end is installed in the bearing substrate through a sealing structure. Its outer end extends forward from the bearing substrate and is connected to an ion source gas supply device through a pipeline. Its inner end extends backward from the bearing substrate. The transfer gas pipe is joined to the inner end of the transfer end and extends toward the arc starting cavity. A positioning notch is provided on the side of the support end plate. The end of the transfer gas pipe penetrates through the positioning notch and is connected to the arc starting cavity.

[0041] The mating operation component includes operation handles 500. There are a pair of operation handles, and each operation handle is respectively installed on the outer wall of the bearing substrate and protrudes forward from the bearing substrate. The bearing substrate and the support tube shell can be mated or detached through the operation handles.

[0042] The mating guiding assembly includes a mating suspension 610, an external guide cylinder 620, and a mating inner cylinder 630. The mating suspension is installed on the operating handle and extends outward from the bearing substrate. There are a pair of external guide cylinders, and each external guide cylinder is respectively installed at the end of the mating suspension. They are arranged horizontally and are adapted to the shape of the external guide rod on the machine body. The external guide cylinder is sleeved on the external guide rod and can guide the mating or detachment operation process of the bearing substrate and the support tube shell. There are a pair of mating inner cylinders, and each mating inner cylinder is respectively installed on the inner wall of the bearing substrate and is arranged vertically. It is adapted to the shape of the internal guide block on the machine body. The mating inner cylinder is sleeved on the end of the internal guide block and can assist in guiding the mating process of the bearing substrate and the support tube shell and assist in positioning their mating states.

[0043] In this embodiment, a linear bearing 621 is provided inside the external guide cylinder, and the external guide rod passes through the linear bearing, making the guiding process of the bearing substrate and the support tube shell smoother.

[0044] In the description of the present utility model, it should be noted that when terms indicating orientation or positional relationship such as "upper", "lower", "inner", "outer", "left", "right", etc. appear, they should be understood as based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present utility model is usually placed during use, or the orientation or positional relationship commonly understood by those skilled in the art. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a limitation to the present utility model. In addition, when terms such as "first" and "second" appear, they are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, terms such as "installation", "setting", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. An ion source matching mechanism for an ion implanter, characterized in that: include: A load-bearing assembly component, which is adapted to the shape of the body of the ion implanter, has an assembly space inside, and can be installed in the body through a connector; The adapter support assembly is installed in the bearing assembly and is adapted to the shape of the body of the ion implanter. It can be installed in the body together with the bearing assembly and embedded in the body. The adapter support assembly has an assembly space for arranging the arc starting chamber of the ion source, so that the arc starting chamber is embedded in the body together with the adapter support assembly. An operating temperature control component is installed in the adapter support component, corresponds to the position of the arc starting cavity, and is connected to a heat exchange fluid supply device, which delivers heat exchange fluid to the operating temperature control component to adjust the operating temperature of the arc starting cavity; A gas source adapter assembly is installed in the bearing assembly, cooperates with the adapter support assembly, and is connected to the arc starting chamber and the ion source gas supply device. The ion source gas supply device delivers ion source gas to the arc starting chamber through the gas source adapter assembly; A matching operation component, which is installed in the load-bearing assembly component, and can be used to match or detach the load-bearing assembly component and the transfer support component in the machine body; A matching guide component is installed in the load-bearing assembly component and the matching operation component, and can guide the matching or detaching operation process of the load-bearing assembly component and the transfer support component in the machine body.

2. The ion source matching mechanism for an ion implanter according to claim 1, characterized in that: The load-bearing assembly components include: The carrier substrate is made of a circular plate and is adapted to the shape of the matching recess of the body. A group of mounting through holes are opened on the edge of the carrier substrate, and a position avoidance opening adapted to the shape of the operating temperature control component is opened in the middle thereof; The sealing gasket is located inside the carrier substrate. A sealing groove is provided on the inner wall of the carrier substrate. The sealing groove extends along the circumference of the carrier substrate and is recessed axially toward the inside of the carrier substrate. The sealing gasket is embedded in the sealing groove and protrudes toward the rear of the carrier substrate.

3. The ion source matching mechanism for an ion implanter according to claim 2, characterized in that: The transfer bracket assembly includes: A supporting tube shell, which is connected to the inner wall of the carrier substrate and extends to the rear of the carrier substrate, and can be installed in the body together with the carrier substrate and embedded in the body; A supporting boss is formed on the outer wall of the supporting tube shell and protrudes outward from the supporting tube shell. The power connection structure of the arc starting cavity can be installed on the supporting boss; The supporting end plate is connected to the inner end of the supporting tube shell to seal the inner end opening of the supporting tube shell, forming an assembly space for the operating temperature control component in the supporting tube shell, and forming an assembly space for the arc starting cavity on the supporting end plate.

4. The ion source matching mechanism for an ion implanter according to claim 3, characterized in that: Operating temperature control components include: The heat exchange core body extends into the support tube shell through the avoidance opening, is locked by a locking piece, and abuts against the support end plate, and is connected with the heat exchange liquid supply device through a pipeline.

5. The ion source matching mechanism for an ion implanter according to claim 3, characterized in that: The gas source adapter kit includes: A transfer end, which is installed in the carrier substrate through a sealing structure, with its outer end extending forward of the carrier substrate and connected to the ion source gas supply device through a pipeline, and its inner end extending backward of the carrier substrate; The adapter air pipe is connected with the inner end of the adapter terminal and extends toward the arc starting cavity. A positioning notch is provided on the side of the support end plate. The end of the adapter air pipe passes through the positioning notch and is connected with the arc starting cavity.

6. The ion source matching mechanism for an ion implanter according to claim 3, characterized in that: The docking operation components include: An operating handle is provided in pair, each operating handle is respectively installed on the outer wall of the supporting substrate and protrudes toward the front of the supporting substrate.

7. The ion source matching mechanism for an ion implanter according to claim 6, characterized in that: The mating guide assembly includes: A matching suspension, which is mounted on the operating handle and extends outward of the supporting substrate; External guide tubes, a pair of which are provided, each external guide tube is installed at the end of the matching suspension, arranged in the transverse direction, and adapted to the shape of the external guide rod on the body, and the external guide tube is sleeved on the external guide rod; A pair of matching inner cylinders are provided, each matching inner cylinder is respectively installed on the inner wall of the supporting base plate and arranged vertically, and is adapted to the shape of the internal guide block on the machine body, and the matching inner cylinder is sleeved on the end of the internal guide block.

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