Wafer cleaning basket grabbing device

Abstract

The utility model discloses a wafer cleaning basket gripping device, which relates to the technical field of gripping devices and comprises a support and a basket mechanism, the basket mechanism comprises a cleaning basket body, a plurality of water inlet holes are formed in one side of the cleaning basket body at equal intervals, a floating plate is arranged at the top of the cleaning basket body, and a plurality of water outlet holes are formed in the other side of the cleaning basket body. A partition plate is fixedly connected to the middle of the inner wall of the cleaning flower basket body, a rotary draining mechanism is arranged at the bottom of the support, by arranging a fixing mechanism, when the cleaning flower basket is used, two movable plates can move in the opposite direction or the reverse direction by driving the movable plates to move upwards or downwards, and therefore clamping of the cleaning flower basket body can be completed; meanwhile, a clamping plate is arranged and can be clamped with the upper edge of the cleaning flower basket body, so that the contact area between the fixing mechanism and the cleaning flower basket body can be increased, meanwhile, the cleaning flower basket body can be clamped, and the cleaning flower basket body is prevented from falling off.

Description

Technical Field

[0001] The utility model relates to the technical field of grasping devices, and particularly relates to a wafer cleaning basket grasping device. Background Art

[0002] The wafer cleaning basket is an important tool for cleaning wafers in the semiconductor manufacturing process. Its design and material are crucial for ensuring the efficiency and cleanliness of wafer cleaning. The wafer cleaning basket, also known as the wafer cleaning rack, wafer carrier, etc., is mainly used for the loading of semiconductor wafers, glass, liquid crystal displays and other materials during the cleaning and etching processes. It can stably support and fix the wafer in the cleaning equipment, ensuring that the wafer is not damaged during the cleaning process and meeting the requirements of high cleanliness; the materials of the wafer cleaning basket are diverse, and common ones include polytetrafluoroethylene, polytetrafluoroethylene, polypropylene, etc. These materials have excellent corrosion resistance, high temperature resistance, low dissolution and precipitation characteristics, and can meet the stringent requirements in the semiconductor manufacturing process. For example, the PFA material basket can withstand strong acids, strong bases and various organic solvents, and has a low blank value of metal elements and will not contaminate the wafer. In the wafer processing process, a tank-type cleaning machine is required to clean the surface of the wafer, and the basket is an indispensable component in the tank-type cleaning machine, which can be used to effectively hold and position the wafer workpiece, thus facilitating the placement and removal of the wafer.

[0003] After retrieval, the Chinese patent with the publication number of CN114256114B discloses a tank-type cleaning machine basket with a self-limiting and stable clamping and conveying structure, including a bracket slidably installed on a conveying track, and a suspension seat is arranged below the end of the bracket; this tank-type cleaning machine basket with a self-limiting and stable clamping and conveying structure can conveniently clamp and position the wafer, and can perform stable shock-absorbing handling, avoiding collision and damage between wafers, and can use buoyancy to drive the wafer to rotate and adjust during the cleaning process, so as to achieve comprehensive cleaning and has high practicability.

[0004] However, there are still certain deficiencies in the existing technology during use. For example: when grasping the basket, the electric push rod moves up and down mainly, so that the clamping rod makes a circular motion around the rotating pin at the connection of the suspension seat and the clamping rod, and then the clamping rod is clamped with the upper edge of the basket to complete the fixation of the basket. When using this grasping method, the contact surface between the clamping rod and the basket is small, and it is impossible to ensure that the clamping rod is closely attached to the upper edge of the basket, resulting in the basket being prone to falling off and poor safety; for this reason, we propose a wafer cleaning basket grasping device.

[0005] When we combine the above problems, we will find that the existing wafer cleaning basket grasping devices on the market have poor clamping effects during use. When in use, it is very difficult to avoid the above-mentioned problems simultaneously. And even if it can be solved, it needs to be solved with the cooperation of external tools, thus failing to achieve the desired effect. Therefore, we propose a wafer cleaning basket grasping device. Summary of the Invention

[0006] The purpose of the present invention is to provide a wafer cleaning basket grasping device to solve the problems raised in the above-mentioned background technology.

[0007] To achieve the above purpose, the present invention provides the following technical solution: A wafer cleaning basket grasping device, including a bracket and a basket mechanism. The basket mechanism includes a cleaning basket body. A plurality of water inlet holes are equidistantly arranged on one side of the cleaning basket body. A floating plate is arranged on the top of the cleaning basket body. A partition plate is fixedly connected to the middle of the inner wall of the cleaning basket body. A rotary draining mechanism is arranged at the bottom of the bracket. The rotary draining mechanism is used to rotate the basket mechanism.

[0008] A fixing mechanism is arranged at the bottom of the rotary draining mechanism. The fixing mechanism includes a clamping unit and a driving unit. The clamping unit and the driving unit are used in cooperation. The fixing mechanism is used to clamp the basket mechanism.

[0009] Preferably, the rotary draining mechanism includes a suspension seat connected to the bottom end of the bracket. A rotary motor is fixedly connected to the bottom of the suspension seat. The output end of the rotary motor is fixedly connected to a transmission rod. The bottom end of the transmission rod is fixedly connected to a connecting plate. The fixing mechanism is arranged at the bottom of the connecting plate.

[0010] Preferably, a plurality of load-bearing plates are fixedly connected to the lower surface of the suspension seat. A limiting block is fixedly connected to the bottom of the load-bearing plate. A guiding sliding groove is opened on the upper surface of the connecting plate. A limiting ring groove is opened at the inner bottom end of the guiding sliding groove. The load-bearing plate is movably sleeved inside the guiding sliding groove. The limiting block is movably sleeved inside the limiting ring groove.

[0011] Preferably, the clamping unit includes a U-shaped frame. Four moving grooves are opened on the outer side of the U-shaped frame. A moving plate is arranged in the inner cavity of the moving groove. A limiting groove is opened on the front surface of the moving plate. A limiting plate is slidably sleeved inside the limiting groove. One end of the limiting plate is fixedly connected to the inner wall of the moving groove. A clamping plate is fixedly connected to the bottom of the moving plate.

[0012] Preferably, the number of the clamping plates is four. The four clamping plates are divided into two groups in pairs. Clamping plates are fixedly connected to the opposite surfaces of the two groups of clamping plates.

[0013] Preferably, the driving unit includes a driving block located in the middle of any two adjacent moving plates. A second receiving groove is formed on one side of the moving plate, and a first receiving groove is formed on one side of the driving block. The first receiving groove and the second receiving groove are arranged corresponding to each other. Two adjusting plates are arranged in the inner cavities of the first receiving groove and the second receiving groove. Positioning pins are fixedly sleeved on the outer sides of the driving block and the moving plate, and the positioning pins are rotatably connected with the adjusting plates. A pneumatic rod is fixedly connected to the top of the driving block, and the pneumatic rod is fixedly connected to the bottom of the connecting plate.

[0014] Preferably, the telescopic end of the pneumatic rod is movably sleeved with the U-shaped frame. A protective sleeve is arranged on the outer side of the pneumatic rod. The top of the protective sleeve is fixedly connected to the bottom of the connecting plate, and the bottom of the protective sleeve is fixedly connected to the top of the U-shaped frame. An adjusting gap is reserved between the driving block and the U-shaped frame.

[0015] Preferably, a limiting mechanism is arranged in the inner cavity of the cleaning flower basket body. The limiting mechanism includes four arc-shaped positioning plates. The four arc-shaped positioning plates are divided into two groups in pairs. The arc-shaped positioning plates are fixedly connected to the bottom of the inner cavity of the cleaning flower basket body, and arc-shaped clamping grooves are formed on the inner sides of the arc-shaped positioning plates.

[0016] Preferably, U-shaped plates are fixedly connected to both sides of the partition plate. Two elastic plates are arranged on the inner sides of the U-shaped plates. A plurality of waterproof springs are fixedly connected to the inner sides of the U-shaped plates and the elastic plates.

[0017] Preferably, a through groove is formed on the upper surface of the elastic plate, and a drainage groove is formed at the bottom end of the inner part of the cleaning flower basket body.

[0018] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0019] 1. By setting the fixing mechanism, when in use, by driving upward or downward, the two moving plates can move towards each other or in opposite directions, so as to complete the clamping of the cleaning flower basket body. At the same time, by setting the clamping plate, it can be engaged with the upper edge of the cleaning flower basket body, so as to increase the contact area between the fixing mechanism and the cleaning flower basket body and clamp the cleaning flower basket body to prevent the cleaning flower basket body from falling.

[0020] 2. The utility model is provided with a rotating draining mechanism. After the wafer is cleaned, the fixing mechanism can be driven to rotate by the rotating motor and the transmission rod, so that the wafer fixed inside the fixing mechanism can be rotated. Under the action of centrifugal force, the water droplets attached to the wafer can be shaken off, which is beneficial to the rapid drying of the wafer in subsequent processing.

[0021] 3. The utility model can clamp and limit the wafer by providing an arc-shaped clamping groove on the arc-shaped positioning plate, and can prevent the wafer from detaching from the inside of the arc-shaped clamping groove when water droplets attached to the wafer are shaken off by providing a U-shaped plate, a waterproof spring and an elastic plate, thereby further increasing the stability of wafer placement. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0023] Figure 2 This is a schematic diagram of the main cross-sectional structure of the utility model;

[0024] Figure 3 It is a three-dimensional structural diagram of the rotary drain mechanism and the fixing mechanism of the utility model;

[0025] Figure 4 This is a schematic diagram of the main cross-sectional structure of the cleaning basket body of the utility model;

[0026] Figure 5 This is a schematic diagram of the cross-sectional structure of the cleaning basket body of the utility model from top view;

[0027] Figure 6 It is a schematic diagram of the three-dimensional structure of the arc-shaped positioning plate of the utility model.

[0028] In the figure: 1, bracket; 2, flower basket mechanism; 201, flower basket body for cleaning; 202, water inlet hole; 203, floating plate; 204, partition plate; 3, rotary drain mechanism; 301, suspension seat; 302, rotary motor; 303, transmission rod; 304, connecting plate; 305, load-bearing plate; 306, limit block; 307, limit ring groove; 308, guide slide; 4, fixing mechanism; 41, clamping unit; 4101, U-shaped frame; 4102, moving groove; 4103, moving plate; 4104, limit groove; 410 5. Limiting plate; 4106. Clamping plate; 4107. Snap-on plate; 42. Driving unit; 4201. Driving block; 4202. First accommodating groove; 4203. Second accommodating groove; 4204. Adjusting plate; 4205. Positioning pin; 4206. Pneumatic rod; 4207. Protective sleeve; 4208. Adjusting gap; 5. Limiting mechanism; 501. Arc-shaped positioning plate; 502. Arc-shaped snap-on groove; 503. U-shaped plate; 504. Waterproof spring; 505. Elastic plate; 506. Through groove; 507. Drain groove. Detailed implementation mode

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0030] Embodiment 1: Please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 The present invention provides a technical solution: a wafer cleaning basket gripping device, including a bracket 1 and a basket mechanism 2. The basket mechanism 2 includes a cleaning basket body 201. A plurality of water inlet holes 202 are equidistantly arranged on one side of the cleaning basket body 201. A floating plate 203 is arranged on the top of the cleaning basket body 201. A partition plate 204 is fixedly connected to the middle of the inner wall of the cleaning basket body 201. A rotary water draining mechanism 3 is arranged at the bottom of the bracket 1. The rotary water draining mechanism 3 is used to rotate the basket mechanism 2. A fixing mechanism 4 is arranged at the bottom of the rotary water draining mechanism 3. The fixing mechanism 4 includes a clamping unit 41 and a driving unit 42. The clamping unit 41 and the driving unit 42 are used in cooperation. The fixing mechanism 4 is used to clamp the basket mechanism 2. By setting the fixing mechanism 4, the basket mechanism 2 can be clamped and connected, avoiding the dropping of the basket mechanism 2. By setting the rotary water draining mechanism 3, the fixing mechanism 4 can be rotated, thereby driving the basket mechanism 2 to rotate. In this way, the wafers in the basket mechanism 2 can be rotated, and the water droplets attached to the basket mechanism 2 can be thrown off, facilitating subsequent drying treatment.

[0031] As a further limitation of the present utility model, the rotary water draining mechanism 3 includes a suspension seat 301 connected to the bottom end of the bracket 1. A rotary motor 302 is fixedly connected to the bottom of the suspension seat 301. The output end of the rotary motor 302 is fixedly connected to a transmission rod 303. The bottom end of the transmission rod 303 is fixedly connected to a connecting plate 304. The fixing mechanism 4 is arranged at the bottom of the connecting plate 304. A plurality of load-bearing plates 305 are fixedly connected to the lower surface of the suspension seat 301. A limiting block 306 is fixedly connected to the bottom of the load-bearing plate 305. A guiding chute 308 is formed on the upper surface of the connecting plate 304. A limiting ring groove 307 is formed at the inner bottom end of the guiding chute 308. The load-bearing plate 305 is movably sleeved inside the guiding chute 308. The limiting block 306 is movably sleeved inside the limiting ring groove 307. When removing the water droplets on the wafers in the flower basket mechanism 2, by turning on the rotary motor 302, the connecting plate 304 can be driven to rotate under the action of the transmission rod 303, so as to drive the fixing mechanism 4 connected to the connecting plate 304 to rotate, and further make the wafers in the flower basket mechanism 2 rotate. In this way, under the action of centrifugal force, the water droplets on the wafers can be thrown off. At the same time, by arranging the load-bearing plate 305, the limiting block 306, the limiting ring groove 307 and the guiding chute 308, the fixing mechanism 4 can be supported, reducing the load on the rotary motor 302 and the transmission rod 303. At the same time, when the rotary motor 302 and the connecting plate 304 drive the connecting plate 304 to rotate, it plays a guiding and limiting role.

[0032] As a further limitation of the present utility model, the clamping unit 41 includes a U-shaped frame 4101. Four moving grooves 4102 are formed on the outer side of the U-shaped frame 4101. A moving plate 4103 is arranged in the inner cavity of the moving groove 4102. A limiting groove 4104 is formed on the front surface of the moving plate 4103. A limiting plate 4105 is slidably sleeved in the limiting groove 4104. One end of the limiting plate 4105 is fixedly connected to the inner wall of the moving groove 4102. A clamping plate 4106 is fixedly connected to the bottom of the moving plate 4103. There are four clamping plates 4106, and the four clamping plates 4106 are divided into two groups in pairs. Clamping plates 4107 are fixedly connected to the opposite surfaces of the two groups of clamping plates 4106. The driving unit 42 includes a driving block 4201. The driving block 4201 is located in the middle of any two adjacent moving plates 4103. A second receiving groove 4203 is formed on one side of the moving plate 4103. A first receiving groove 4202 is formed on one side of the driving block 4201. The first receiving groove 4202 and the second receiving groove 4203 are correspondingly arranged. Two adjusting plates 4204 are arranged in the inner cavities of the first receiving groove 4202 and the second receiving groove 4203. Positioning pins 4205 are fixedly sleeved on the outer sides of the driving block 4201 and the moving plate 4103. The positioning pins 4205 are rotatably connected to the adjusting plates 4204. A pneumatic rod 4206 is fixedly connected to the top of the driving block 4201. The pneumatic rod 4206 is fixedly connected to the bottom of the connecting plate 304. The telescopic end of the pneumatic rod 4206 is movably sleeved with the U-shaped frame 4101. A protective sleeve 4207 is arranged on the outer side of the pneumatic rod 4206. The top of the protective sleeve 4207 is fixedly connected to the bottom of the connecting plate 304. The bottom of the protective sleeve 4207 is fixedly connected to the top of the U-shaped frame 4101. An adjusting gap 4208 is reserved between the driving block 4201 and the U-shaped frame 4101. When the cleaning basket body 201 is fixed by the fixing mechanism 4, the driving block 4201 is driven to move upward by the pneumatic rod 4206. Under the connection of the adjusting plates 4204, the two moving plates 4103 can move towards each other inside the two moving grooves 4102, that is, move towards the position close to the cleaning basket body 201 until it is clamped and fixed. At this time, the upper surface of the clamping plate 4107 is engaged with the lower edge of the cleaning basket body 201, so as to complete the fixing of the cleaning basket body 201. The fixing method is relatively simple. In addition, by setting the positioning pins 4205, when the driving block 4201 moves upward or downward, the two sides of the adjusting plate 4204 can be adaptively adjusted, so that the two moving plates 4103 move towards and away from each other. At the same time, by setting the limiting groove 4104 and the limiting plate 4105, the limiting effect can be achieved when the moving plate 4103 moves, so that the moving plate 4103 moves horizontally.

[0033] The specific implementation manner of this embodiment is as follows: When the cleaning basket body 201 is fixed by the fixing mechanism 4, the air pressure rod 4206 drives the driving block 4201 to move upward. Under the connection of the adjusting plate 4204, the two moving plates 4103 can move towards each other inside the two moving grooves 4102, that is, move towards the position close to the cleaning basket body 201 until it is clamped and fixed. At this time, the upper surface of the clamping plate 4107 is engaged with the lower edge of the cleaning basket body 201, thus completing the fixation of the cleaning basket body 201. After the fixation is completed, the cleaning basket body 201 can be placed into the cleaning pool for cleaning. After the cleaning is completed, the device is driven by the bracket 1 to move upward to a position away from the cleaning pool. At this time, the rotating motor 302 is turned on, and under the action of the transmission rod 303, the connecting plate 304 can be driven to rotate, thereby driving the fixing mechanism 4 connected to the connecting plate 304 to rotate, and further causing the wafers in the flower basket mechanism 2 to rotate. In this way, under the action of centrifugal force, the water droplets on the wafers can be thrown off.

[0034] Embodiment 2: Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 , the present utility model provides a technical solution: A wafer cleaning basket grasping device. The present utility model makes corresponding improvements to the technical problems mentioned in the background technology. A limiting mechanism 5 is arranged inside the cleaning basket body 201. The limiting mechanism 5 includes four arc-shaped positioning plates 501. The four arc-shaped positioning plates 501 are divided into two groups with two in each group. The arc-shaped positioning plates 501 are fixedly connected to the bottom of the inner cavity of the cleaning basket body 201. An arc-shaped clamping groove 502 is opened on the inner side of the arc-shaped positioning plate 501. By providing the arc-shaped positioning plates 501 and the arc-shaped clamping grooves 502, the wafers can be clamped inside the arc-shaped clamping grooves 502 for preliminary limiting.

[0035] As a further limitation of the present utility model, U-shaped plates 503 are fixedly connected to both sides of the partition plate 204. Two elastic plates 505 are arranged inside the U-shaped plates 503. A plurality of waterproof springs 504 are fixedly connected to the inner sides of the U-shaped plates 503 and the elastic plates 505. A through groove 506 is formed on the upper surface of the elastic plate 505. A drainage groove 507 is formed at the inner bottom end of the cleaning basket body 201; the wafer can be limited by arranging the arc-shaped clamping groove 502, and the wafer can be limited by arranging the elastic plates 505 on the inner sides of the U-shaped plates 503 and the waterproof springs 504, so as to prevent the wafer from falling off the arc-shaped clamping groove 502 when the rotary draining mechanism 3 drives the fixing mechanism 4 and the basket mechanism 2 to rotate. By arranging the through groove 506, the accumulation of cleaning liquid is avoided, and a better draining effect is achieved. By arranging the drainage groove 507, it is convenient to drain the cleaning liquid from the cleaning basket body 201.

[0036] The specific implementation manner of this embodiment is as follows: When installing and fixing the wafer, place the wafer inside the two elastic plates 505 and press it down until it is clamped inside the arc-shaped clamping groove 502. The wafer can be limited by the arc-shaped clamping groove 502, and the wafer can be limited by arranging the elastic plates 505 on the inner sides of the U-shaped plates 503 and the waterproof springs 504, so as to prevent the wafer from falling off the arc-shaped clamping groove 502 when the rotary draining mechanism 3 drives the fixing mechanism 4 and the basket mechanism 2 to rotate. By arranging the through groove 506, the accumulation of cleaning liquid is avoided, and by arranging the drainage groove 507, it is convenient to drain the cleaning liquid from the cleaning basket body 201.

[0037] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or sequence between these entities or operations. Moreover, the terms "include", "comprise" or any other variation thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0038] Although the embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A wafer cleaning basket grabbing device, comprising a support (1) and a basket mechanism (2), the basket mechanism (2) comprising a cleaning basket body (201), a plurality of water inlet holes (202) being equidistantly provided on one side of the cleaning basket body (201), a floating plate (203) being provided on the top of the cleaning basket body (201), and a partition plate (204) being fixedly connected to the middle of the inner wall of the cleaning basket body (201), characterized in that: A rotating drain mechanism (3) is provided at the bottom of the bracket (1), and the rotating drain mechanism (3) is used to rotate the flower basket mechanism (2); A fixing mechanism (4) is provided at the bottom of the rotary draining mechanism (3); the fixing mechanism (4) comprises a clamping unit (41) and a driving unit (42); the clamping unit (41) and the driving unit (42) are used in coordination with each other; the fixing mechanism (4) is used to clamp the flower basket mechanism (2).

2. The wafer cleaning basket grabbing device according to claim 1, characterized in that: The rotary drain mechanism (3) comprises a suspension seat (301) connected to the bottom end of the bracket (1); a rotary motor (302) is fixedly connected to the bottom of the suspension seat (301); a transmission rod (303) is fixedly connected to the output end of the rotary motor (302); a connecting plate (304) is fixedly connected to the bottom end of the transmission rod (303); and the fixing mechanism (4) is arranged at the bottom of the connecting plate (304).

3. The wafer cleaning basket grabbing device according to claim 2, characterized in that: A plurality of load-bearing plates (305) are fixedly connected to the lower surface of the suspension seat (301); a limit block (306) is fixedly connected to the bottom of the load-bearing plate (305); a guide groove (308) is provided on the upper surface of the connecting plate (304); a limit ring groove (307) is provided at the inner bottom end of the guide groove (308); the load-bearing plate (305) is movably sleeved inside the guide groove (308); and the limit block (306) is movably sleeved inside the limit ring groove (307).

4. The wafer cleaning basket grabbing device according to claim 2, characterized in that: The clamping unit (41) comprises a U-shaped frame (4101), the outer side of the U-shaped frame (4101) is provided with four movable grooves (4102), the inner cavity of the movable groove (4102) is provided with a movable plate (4103), the front surface of the movable plate (4103) is provided with a limiting groove (4104), the inner part of the limiting groove (4104) is slidably sleeved with a limiting plate (4105), one end of the limiting plate (4105) is fixedly connected to the inner wall of the movable groove (4102), and the bottom of the movable plate (4103) is fixedly connected to a clamping plate (4106).

5. The wafer cleaning basket grabbing device according to claim 4, characterized in that: The number of the clamping plates (4106) is four, and the four clamping plates (4106) are divided into two groups in pairs, and the opposite surfaces of the two groups of clamping plates (4106) are fixedly connected with a clamping plate (4107).

6. The wafer cleaning basket grabbing device according to claim 4, characterized in that: The driving unit (42) comprises a driving block (4201), wherein the driving block (4201) is located in the middle of any two adjacent moving plates (4103), a second receiving groove (4203) is provided on one side of the moving plate (4103), and a first receiving groove (4202) is provided on one side of the driving block (4201), wherein the first receiving groove (4202) and the second receiving groove (4203) are arranged correspondingly, and the inner cavities of the first receiving groove (4202) and the second receiving groove (4203) are both provided with two adjustment plates (4204), and the outer sides of the driving block (4201) and the moving plate (4103) are both fixedly sleeved with positioning pins (4205), and the positioning pins (4205) are rotatably connected to the adjustment plates (4204), and the top of the driving block (4201) is fixedly connected with a pneumatic rod (4206), and the pneumatic rod (4206) is fixedly connected to the bottom of the connecting plate (304).

7. The wafer cleaning basket grabbing device according to claim 6, characterized in that: The telescopic end of the pneumatic rod (4206) is movably connected to the U-shaped frame (4101), and a protective sleeve (4207) is provided on the outer side of the pneumatic rod (4206). The top of the protective sleeve (4207) is fixedly connected to the bottom of the connecting plate (304), and the bottom of the protective sleeve (4207) is fixedly connected to the top of the U-shaped frame (4101). An adjustment gap (4208) is reserved between the driving block (4201) and the U-shaped frame (4101).

8. The wafer cleaning basket grabbing device according to claim 1, characterized in that: The inner cavity of the cleaning flower basket body (201) is provided with a limiting mechanism (5), the limiting mechanism (5) comprising four arc-shaped positioning plates (501), the four arc-shaped positioning plates (501) being grouped in pairs and divided into two groups, the arc-shaped positioning plates (501) being fixedly connected to the bottom of the inner cavity of the cleaning flower basket body (201), and the inner side of the arc-shaped positioning plates (501) is provided with an arc-shaped clamping groove (502).

9. The wafer cleaning basket grabbing device according to claim 8, characterized in that: Both sides of the partition plate (204) are fixedly connected to U-shaped plates (503), the inner side of the U-shaped plate (503) is provided with two elastic plates (505), and the inner sides of the U-shaped plate (503) and the elastic plates (505) are fixedly connected to a plurality of waterproof springs (504).

10. The wafer cleaning basket grabbing device according to claim 9, characterized in that: A through groove (506) is provided on the upper surface of the elastic plate (505), and a drainage groove (507) is provided at the inner bottom end of the cleaning basket body (201).

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