Silicon wafer support plate calibration platform

Abstract

The utility model provides a silicon wafer carrier plate calibration platform which comprises two supporting rods arranged at an interval, a scissor-type folding frame is arranged between the two supporting rods, and a plurality of translation plates arranged at equal intervals are fixedly arranged on the scissor-type folding frame. The telescopic movement of the scissor-type folding frame drives the plurality of translation plates to mutually open or close in a translation manner; a plurality of calibration positioning blocks are adjustably and fixedly arranged at the bottom of the translation plate in the length direction of the translation plate, and the size of the calibration positioning blocks is equal to the size of a film coating window of the carrier plate. The distance between the calibration positioning blocks can be adjusted through the shear fork type folding frame, and finally the distance between the two manufactured coating windows is adjusted, so that the distance between the coating windows can be adjusted to a proper distance, the situation that the distance between silicon wafers in the coating windows is too close or too far to affect the coating effect can be prevented, and the size accuracy of the coating windows is guaranteed.

Description

Technical Field

[0001] The utility model relates to the field of calibration of silicon wafer carriers, and particularly relates to a calibration platform for silicon wafer carriers. Background Art

[0002] Solar cells are usually made from silicon wafers through processes such as cleaning and texturing, PVD (Physical Vapor Deposition) coating, and screen printing. In the PVD coating process, the silicon wafer needs to be placed on a carrier plate, and the carrier plate acts as a carrier to hold the silicon wafer, and then a thin film is coated on the silicon wafer through a coating device. For example, Chinese patent document CN205258601U discloses a silicon wafer carrier plate for bottom coating.

[0003] In the prior art, the manufacturing steps of the carrier plate are as follows: a plurality of vertical plates arranged in a crisscross pattern are provided on a bottom plate, and a plurality of coating windows are formed by surrounding the vertical plates. The distance between two vertical plates is measured with a caliper to ensure that the size of the coating window formed by surrounding the vertical plates meets the requirements. If the size of the coating window is too small, the silicon wafer cannot be inserted. If the size of the coating window is too large, the silicon wafer is likely to shake in the coating window, resulting in abnormal problems such as the silicon wafer being knocked or even chipped, seriously affecting the yield and production efficiency of the battery chips. Summary of the Utility Model

[0004] Aiming at the deficiencies in the prior art, the purpose of the present utility model is to propose a calibration platform for silicon wafer carriers to solve the problems mentioned in the above background art section.

[0005] The present utility model is realized through the following technical solutions:

[0006] A calibration platform for silicon wafer carriers includes two support rods arranged at intervals. A scissor-type folding frame is arranged between the two support rods. The scissor-type folding frame is fixedly provided with a plurality of translation plates arranged at equal intervals. The telescopic movement of the scissor-type folding frame drives the plurality of translation plates to open or close towards each other in a translational manner. Along the length direction of the bottom of the translation plate, a plurality of calibration positioning blocks are fixedly provided in an adjustable manner, and the size of the calibration positioning block is equal to the size of the coating window of the carrier plate.

[0007] Further, the calibration positioning block is in the shape of a cuboid or a cube.

[0008] Further, the number of the calibration positioning blocks is equal to the number of the coating windows of the carrier plate.

[0009] Further, it further includes a plurality of ejector rods. The ejector rods are threadedly connected to the support rods, and one end of the ejector rod abuts against the scissor-type folding frame.

[0010] Further, the scissor - type folding frame includes a number of first inclined plates and second inclined plates arranged cross -wise. The middle parts of the first inclined plate and the second inclined plate are hinged to each other through a first rotating shaft, and the end parts are hinged to each other through a second rotating shaft. Moreover, the first rotating shaft is fixedly connected to the middle part of the translation plate, and the second rotating shaft is slidably connected to the end part of the translation plate.

[0011] Further, the translation plate is provided with a guiding groove, and the second rotating shaft is fixedly connected with a pulley embedded in the guiding groove.

[0012] Further, the translation plate is made of a transparent material.

[0013] Further, the scissor - type folding frame is made of a transparent material.

[0014] Further, it further includes a first bolt. The translation plate is provided with a first long slot, and the first bolt passes through the first long slot and then is connected to the calibration positioning block.

[0015] The beneficial effects of the present utility model are as follows: A calibration platform for a silicon wafer carrier plate includes two support rods arranged at intervals. A scissor - type folding frame is arranged between the two support rods. The scissor - type folding frame is fixedly provided with a number of translation plates arranged at equal intervals. The telescopic movement of the scissor - type folding frame drives the several translation plates to open or close towards each other in a translational manner. The bottom of the translation plate is fixedly provided with a number of calibration positioning blocks that are adjustable along the length direction thereof, and the size of the calibration positioning block is the same as the size of the coating window of the carrier plate. When in use, by adjusting the distance between the calibration positioning blocks on the translation plate, and then adjusting the distance between the two translation plates. After placing the calibration platform of the present utility model on the bottom plate, draw a line around the calibration positioning block on the bottom plate, and then paste or weld the vertical plate along the drawn line. In another way, the vertical plate is directly pasted or welded around the calibration positioning block. The distance between the two coating windows after manufacturing can be adjusted through the scissor - type folding frame, so that the distance between the coating windows can be adjusted to a suitable distance, which can prevent the distance between the coating windows of the silicon wafer from being too close or too far, affecting the coating effect, and ensuring the accuracy of the size of the coating window. Description of the Drawings

[0016] Figure 1 is a perspective view of the present utility model.

[0017] Figure 2 is a perspective view of the silicon wafer carrier plate.

[0018] Among them, the above - mentioned drawings include the following reference numerals:

[0019] 1. Support rod; 2. Scissor-type folding frame; 21. First inclined plate; 22. Second inclined plate; 23. First rotating shaft; 24. Second rotating shaft; 25. Pulley; 3. Translation plate; 31. First long groove; 32. Guide groove; 4. Calibration positioning block; 5. Thrust rod; a. Wafer carrier; a1. Bottom plate; a2. Vertical plate; a3. Coating window. Detailed implementation mode

[0020] To make the purpose, technical solution and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present utility model. It should be noted here that the description of these embodiments is used to help understand the present utility model, but does not constitute a limitation on the present utility model. In addition, the technical features involved in the various embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0021] Refer to Figure 1 As shown in the figure, a wafer carrier calibration platform includes two support rods 1 arranged at intervals. A scissor-type folding frame 2 is arranged between the two support rods 1. A plurality of translation plates 3 are fixedly arranged on the scissor-type folding frame 2 at equal intervals. The telescopic movement of the scissor-type folding frame 2 drives the plurality of translation plates 3 to open or close relative to each other in a translational manner; a plurality of calibration positioning blocks 4 are fixedly arranged at the bottom of the translation plate 3 in an adjustable manner along its length direction. The size of the calibration positioning block 4 is the same as the size of the coating window a3 of the carrier.

[0022] During use, by adjusting the distance between the calibration positioning blocks 4 on the translation plate 3, and then adjusting the distance between the two translation plates 3, when placing the calibration platform of the present utility model on the bottom plate a1, draw a line around the calibration positioning blocks 4 on the bottom plate a1, and then paste or weld the vertical plate a2 along the drawn line. In another way, the vertical plate a2 is directly pasted or welded around the calibration positioning blocks 4. The distance between the two coating windows a3 after manufacturing can be adjusted through the scissor-type folding frame 2, so that the distance between the coating windows a3 can be adjusted to a suitable distance, which can prevent the wafer from being affected by the too close or too far distance between the coating windows a3 during coating, and ensure the accurate size of the coating windows a3.

[0023] The calibration positioning block 4 is in the shape of a cuboid or a cube, so as to be adapted to the size of the coating window a3.

[0024] The number of calibration positioning blocks 4 is the same as the number of coating windows a3 of the carrier. The vertical plate a2 is positioned at multiple points through the plurality of calibration positioning blocks 4 to ensure the flatness of the vertical plate a2.

[0025] The scissor folding frame 2 includes a number of first inclined plates 21 and second inclined plates 22 arranged crosswise. The middle parts of the first inclined plate 21 and the second inclined plate 22 are hinged to each other through a first rotating shaft 23, and the ends are hinged to each other through a second rotating shaft 24. Moreover, the first rotating shaft 23 is fixedly connected to the middle part of the translation plate 3, and the second rotating shaft 24 is slidably connected to the end of the translation plate 3. The translation plate 3 is provided with a guiding groove 32, and a pulley 25 embedded in the guiding groove 32 is fixedly connected to the second rotating shaft 24. By connecting with the translation plate 3 through three rotating shafts, the movement of the translation plate 3 is made more stable.

[0026] It further includes a number of ejector rods 5. The ejector rods 5 are threadedly connected to the support rods 1, and one end of the ejector rod 5 abuts against the scissor folding frame 2. Refer to Figure 1 As shown, the number of the ejector rods 5 is eight. One end of the ejector rod 5 abuts against the first inclined plate 21 and the second inclined plate 22, so that the scissor folding frame 2 is locked through the ejector rod 5 after adjustment. One end of the ejector rod 5 abuts against the first inclined plate 21 and the second inclined plate 22, so that the scissor folding frame 2 cannot perform telescopic work, thereby keeping the distance between the calibration positioning blocks 4 fixed.

[0027] Both the translation plate 3 and the scissor folding frame 2 are made of a transparent material. The transparent material can adopt existing materials such as acrylic plates and transparent plastic plates. The translation plate 3 and the scissor folding frame 2 are made of a transparent material to facilitate observing the positional relationship between the calibration positioning blocks 4 and the vertical plate a2.

[0028] It further includes a first bolt (not shown in the figure). The translation plate 3 is provided with a first long groove 31, and the first bolt passes through the first long groove 31 and is connected to the calibration positioning block 4. The first bolt is preferably a countersunk head bolt, which can prevent the bolt head of the first bolt from interfering with the pulley 25, so that the calibration positioning block 4 is adjustably fixed to the translation plate 3 along the length direction of the translation plate 3.

[0029] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0030] In the description of the present utility model, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features.

[0031] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, the present utility model may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A silicon wafer carrier calibration platform, characterized in that: The invention comprises two support rods (1) arranged at intervals, a scissor-type folding frame (2) is arranged between the two support rods (1), the scissor-type folding frame (2) is fixedly provided with a plurality of equally spaced translation plates (3), the telescopic movement of the scissor-type folding frame (2) drives the plurality of translation plates (3) to open or approach each other in a translation manner; a plurality of calibration positioning blocks (4) are fixedly provided at the bottom of the translation plate (3) in an adjustable manner along the length direction thereof, the size of the calibration positioning blocks (4) being equal to the size of the coating window (a3) ​​of the carrier plate.

2. The silicon wafer carrier calibration platform according to claim 1, characterized in that: The calibration positioning block (4) is in the shape of a cuboid or a cube.

3. The silicon wafer carrier calibration platform according to claim 1, characterized in that: The number of the calibration positioning blocks (4) is equal to the number of the coating windows (a3) ​​of the carrier plate.

4. The silicon wafer carrier calibration platform according to claim 1, characterized in that: It also comprises a plurality of push rods (5), wherein the push rods (5) are threadedly connected to the support rods (1), and one end of the push rods (5) supports the scissor-type folding frame (2).

5. The silicon wafer carrier calibration platform according to claim 1, characterized in that: The scissor-type folding frame (2) comprises a plurality of first inclined plates (21) and second inclined plates (22) arranged crosswise, wherein the middle portions of the first inclined plates (21) and the second inclined plates (22) are hinged to each other via a first rotating shaft (23), and the ends thereof are hinged to each other via a second rotating shaft (24), and the first rotating shaft (23) is fixedly connected to the middle portion of the translation plate (3), and the second rotating shaft (24) is slidably connected to the ends of the translation plate (3).

6. The silicon wafer carrier calibration platform according to claim 5, characterized in that: The translation plate (3) is provided with a guide groove (32), and the second rotating shaft (24) is fixedly connected with a pulley (25) embedded in the guide groove (32).

7. A silicon wafer carrier calibration platform according to any one of claims 1 to 6, characterized in that: The translation plate (3) is made of a transparent material.

8. A silicon wafer carrier calibration platform according to any one of claims 1 to 6, characterized in that: The scissor-type folding frame (2) is made of a transparent material.

9. A silicon wafer carrier calibration platform according to any one of claims 1 to 6, characterized in that: It also comprises a first bolt, the translation plate (3) is provided with a first long slot (31), and the first bolt passes through the first long slot (31) and is connected to the calibration positioning block (4).

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