Semiconductor spraying single-shaft turntable device

By using the limiting assembly of the inverted T-block and the first limit screw in the semiconductor spraying turntable device, the multi-point clamping limit and rotation adjustment is achieved, which solves the problem of the reduced service life of the existing device when processing a variety of batch workpieces, optimizes the spraying effect and adapts to the needs of different workpieces.

CN223010892UActive Publication Date: 2025-06-24HEFEI SHENGTENG SEMICON TECH CO LTD
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Patent Information

Application Number
CN202422001428.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-19
Publication Date
2025-06-24
Estimated Expiration
2034-08-19

AI Technical Summary

Technical Problem

When handling multiple batches of workpieces, existing semiconductor spray turntable devices need to open multiple disordered threaded holes, resulting in disordered equipment and reduced service life.

Method used

A semiconductor sprayed single-axis turntable device is designed, and the limiting assembly is formed by an inverted T-shaped block and the first limiting screw. Combined with the turntable body, the center chuck and the brake servo motor to realize multi-point clamping limit and rotation adjustment.

Benefits of technology

Through multi-point clamping limit and rotation adjustment, the stability and uniformity of the workpiece during the spraying process are ensured, the spraying effect is optimized, and the clamping area is adjusted by expanding the pressing and holding components to adapt to the needs of different workpieces.

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Abstract

The utility model relates to the technical field of semiconductor spraying devices, and discloses a semiconductor spraying single-shaft turntable device, which comprises a cabinet, a turntable body, a band-type brake servo motor arranged in the cabinet, and a circle center chuck sleeved in the top of the cabinet, and the output end of the band-type brake servo motor is in transmission connection with the bottom of the circle center chuck. The band-type brake servo motor is electrically connected with an integrated control system, and a transmission shaft in transmission connection with the middle of the rotating disc body is clamped and installed in the circle center chuck. The limiting assemblies formed by the inverted-T-shaped blocks and the first limiting screws are combined with the rotating disc body, the circle center chuck, the band-type brake servo motor and the machine cabinet for use, the multifunctional rotating disc device can be formed, in the subsequent spraying operation process, the multiple limiting assemblies can move and adjust on the rotating disc body to carry out multi-point clamping and limiting on a workpiece to be machined, and the working efficiency is improved. And the stability of the workpiece in the rotation adjusting process is guaranteed, the workpiece can make contact with spraying paint in a circulating rotation state, and the spraying effect is optimized.
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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor spraying devices, in particular to a semiconductor spraying single-axis turntable device. Background Art

[0002] At present, in the semiconductor spraying process, the turntable device is a commonly used mechanical support equipment. Its principle is very simple. It is usually composed of a circular disk made of aluminum, a rotating motor, and a control switch. The circular disk will be set with equally spaced scale lines for placing large and small workpieces to find the center position of the workpiece on the disk with the scale lines. It is simple and convenient to use.

[0003] However, during actual use, the applicant found that the way on-site operators fixed the workpiece to be processed on the turntable was to open a threaded hole at an appropriate position on the turntable body, and then use the thread and pressure plate to press and limit the workpiece, thereby ensuring the stability of the workpiece to be processed. However, this method is only suitable for a single workpiece and a small number of workpieces. If it is to meet the needs of a variety of batches of workpieces, a number of disordered threaded holes need to be opened on the turntable body, which will be messy and will greatly reduce the service life of the turntable body. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a semiconductor spraying single-axis turntable device, which solves the problems raised by the above-mentioned background technology.

[0005] The utility model provides the following technical solutions: a semiconductor spraying single-axis turntable device, comprising a cabinet, a turntable body, a brake servo motor installed inside the cabinet, and a center chuck sleeved inside the top of the cabinet, wherein the output end of the brake servo motor is transmission-connected to the bottom of the center chuck, the brake servo motor is electrically connected to an integrated control system, a transmission shaft transmission-connected to the middle of the turntable body is clamped and installed in the center chuck, a plurality of inverted T-shaped grooves are provided inside the turntable body, and a plurality of the inverted T-shaped grooves are sleeved inside with limit components;

[0006] The limiting assembly includes an inverted T-shaped block and a first limiting screw. The inverted T-shaped block can be clamped in the corresponding inverted T-shaped groove, and an internal threaded hole is opened on the inner side of the middle part of the inverted T-shaped block. One end of the first limiting screw is threadedly connected to the internal threaded hole in the middle part of the inverted T-shaped block.

[0007] The interior of the turntable body is provided with a plurality of semi-open grooves and a plurality of heat dissipation holes, and the plurality of semi-open grooves and the plurality of heat dissipation holes are equidistantly distributed along the circumference of the turntable body. The inverted T-shaped block can prevent the workpiece from being deformed by high temperature during the spraying process and play a role in heat dissipation.

[0008] Preferably, a cabinet door is hingedly connected to the inner side of the front end of the cabinet. A limiting sleeve plate is sleeved on the inner side of the front end of the cabinet. A cabinet door lock is arranged between one side of the cabinet door and one side of the limiting sleeve plate, so as to cooperate with the cabinet to seal and protect the brake servo motor.

[0009] Preferably, an expansion pressing component is sleeved on the outer side of the other end of the first limiting screw. The expansion pressing component includes an annular hollow plate. A transmission gear is sleeved inside the annular hollow plate through bearings respectively. Yielding grooves are formed in the front and rear ends of the annular hollow plate, and a straight tooth plate capable of meshing with the transmission gear is clamped in each of the two yielding grooves. The bottom surface of the end of the straight tooth plate is coplanar with the bottom surface of the annular hollow plate, and the area of the overall structure of the expansion pressing component can be flexibly adjusted.

[0010] Preferably, sliding grooves are formed in the tops of the front and rear ends of the annular hollow plate. Threaded holes are formed in the inner sides of the middles of the two annular hollow plates, and a second limiting screw is threadedly connected in each of the two threaded holes. The other end of the second limiting screw penetrates through the corresponding sliding groove and extends to the outer side of the top of the annular hollow plate to utilize the second limiting screw to ensure the stability of the straight tooth plate after moving and adjusting inside the annular hollow plate.

[0011] Preferably, limiting plates are fixedly connected to the front and rear ends of the inner ring structure of the annular hollow plate. One end of the limiting plate can extend to the top surface of the corresponding straight tooth plate for fitting connection.

[0012] Preferably, a yielding space exists between the bottom of the limiting plate, the top of the transmission gear, and the top of the bearing to avoid structural interference. One end of the limiting plate is in contact with the inner wall of the outer ring structure of the annular hollow plate to improve the structural strength of the annular hollow plate.

[0013] Preferably, a magnet ring is nested inside the middle of the annular hollow plate. The magnet ring can magnetically connect to the surface of the other end of the first limiting screw, thereby improving the connection strength and temperature resistance between the annular hollow plate and the first limiting screw.

[0014] Compared with the prior art, the utility model has the following beneficial effects:

[0015] 1. The utility model combines the limiting component formed by the inverted T-shaped block and the first limiting screw with the turntable body, the center chuck, the brake servo motor, and the cabinet to form a multi-functional turntable device. During the subsequent spraying operation, multiple limiting components can move and adjust on the turntable body to perform multi-point clamping and limiting on the workpiece to be processed, ensuring the stability of the workpiece during the rotation and adjustment process, enabling the workpiece to contact the spraying paint in a state of cyclic rotation, and optimizing the spraying effect.

[0016] 2. After the magnet ring, the limiting plate, and the expansion pressing component provided by the utility model are assembled into the expansion auxiliary component, and then further combined with the above-mentioned turntable device, when needed, the expansion pressing component itself and the adjustable straight tooth plate inside the expansion pressing component can expand the clamping area corresponding to the first limiting screw, further expanding the use range of the overall device. Brief Description of the Drawings

[0017] Figure 1 It is a front view schematic diagram of the turntable body of the structure of the present utility model;

[0018] Figure 2 It is a front view schematic diagram of the structure of the present utility model;

[0019] Figure 3 It is a top view schematic diagram of the turntable body of the structure of the present utility model;

[0020] Figure 4 It is a top view schematic diagram of the semi-open slot of the structure of the present utility model;

[0021] Figure 5 It is an enlarged schematic diagram of the first limiting screw of the structure of the present utility model;

[0022] Figure 6 It is an enlarged schematic diagram of the inverted T-shaped block of the structure of the present utility model;

[0023] Figure 7 It is a front view schematic diagram of the expansion pressing component of the structure of the present utility model;

[0024] Figure 8 It is a partial cross-sectional view schematic diagram of the annular hollow plate of the structure of the present utility model;

[0025] Figure 9 It is a top view schematic diagram of the magnet ring of the structure of the present utility model.

[0026] In the figure: 1, cabinet; 2, brake servo motor; 3, turntable body; 4, inverted T-shaped groove; 5, inverted T-shaped block; 6, first limiting screw; 7, cabinet door; 8, heat dissipation hole; 9, expansion pressing component; 91, annular hollow plate; 92, transmission gear; 93, straight tooth plate; 94, second limiting screw; 10, magnet ring; 11, limiting plate; 12, semi-open slot; 13, center chuck. Detailed Embodiment

[0027] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

[0028] Example 1

[0029] Please refer to Figures 1-6 , a semiconductor spraying single-axis turntable device, including a cabinet 1, a turntable body 3, a brake servo motor 2 installed inside the cabinet 1, and a center chuck 13 sleeved inside the top of the cabinet 1. The output end of the brake servo motor 2 is drivingly connected to the bottom of the center chuck 13. The brake servo motor 2 is electrically connected to an integrated control system. A transmission shaft drivingly connected to the middle of the turntable body 3 is clamped and installed inside the center chuck 13. A plurality of inverted T-shaped grooves 4 are formed inside the turntable body 3, and a limiting component is sleeved inside each of the plurality of inverted T-shaped grooves 4;

[0030] The limiting component includes an inverted T-shaped block 5 and a first limiting screw 6. The inverted T-shaped block 5 can be clamped inside the corresponding inverted T-shaped groove 4, and an internal threaded hole is formed inside the middle of the inverted T-shaped block 5. One end of the first limiting screw 6 is threadedly connected to the internal threaded hole in the middle of the inverted T-shaped block 5;

[0031] A plurality of semi-open slots 12 and a plurality of heat dissipation holes 8 are formed inside the turntable body 3, and the plurality of semi-open slots 12 and the plurality of heat dissipation holes 8 are equidistantly distributed along the circumferential direction of the turntable body 3. The inverted T-shaped block 5 can prevent the workpiece from deforming due to high temperature during the spraying process and play a role in heat dissipation;

[0032] A cabinet door 7 is hingedly connected to the inner side of the front end of the cabinet 1. A limiting sleeve plate is sleeved inside the inner side of the front end of the cabinet 1. A cabinet door lock is arranged between one side of the cabinet door 7 and one side of the limiting sleeve plate, thereby cooperatively providing a sealing protection for the brake servo motor 2 by the cabinet 1.

[0033] Working principle: When in use, place the workpiece to be processed on the top surface of the middle part of the turntable body 3. Then push a inverted T-shaped block 5 so that the inverted T-shaped block 5 fits the surface of the edge structure of the workpiece under the guidance of the corresponding inverted T-shaped groove 4. Then turn the corresponding first limiting screw 6 so that the end of the other end of the first limiting screw 6 contacts and presses the surface of the edge structure of the workpiece. Thus, the remaining inverted T-shaped blocks 5 and first limiting screws 6 are all operated according to the above steps, and then the clamping and limiting of the workpiece are completed;

[0034] During the spraying process, the brake servo motor 2 can be started to drive the turntable body 3 and the workpiece placed on the top surface of the turntable body 3 to rotate in a cycle through the center chuck 13 and the transmission shaft, so that all parts of the workpiece are evenly sprayed;

[0035] Furthermore, the rotation control of the turntable body 3 is to connect the power line of the brake servo motor 2 to the integrated control system, and the integrated control system can be used to set the speed setting of the turntable, rotation adjustment, forward point rotation, reverse point rotation, input the specified angle at the adjustment angle, and then click the rotation adjustment, the turntable can rotate the corresponding angle, click the forward point rotation, the turntable will rotate slowly clockwise, click the reverse point rotation, the turntable will rotate counterclockwise;

[0036] Secondly, you can set an acceleration and deceleration time input parameter. The acceleration and deceleration time is the time required for the turntable to reach the specified speed, and the deceleration time is the time required for the turntable body 3 to stop from the specified speed. The acceleration and deceleration time is to make the start and stop of the turntable body 3 smoother. If the turntable body 3 needs to stop urgently during operation, you can set an emergency stop reset button. Press the button to stop urgently. To release the emergency stop, first press the emergency stop reset button, click the emergency stop reset button, and the emergency stop is eliminated.

[0037] Embodiment 2

[0038] See also Figures 1-9 A semiconductor spraying single-axis turntable device includes a cabinet 1, a turntable body 3, a brake servo motor 2 installed inside the cabinet 1, and a center chuck 13 mounted on the top of the cabinet 1. The output end of the brake servo motor 2 is connected to the bottom of the center chuck 13 by transmission. The brake servo motor 2 is electrically connected to an integrated control system. A transmission shaft connected to the middle of the turntable body 3 is clamped and installed in the center chuck 13. A plurality of inverted T-shaped slots 4 are provided inside the turntable body 3, and a limit assembly is mounted inside the plurality of inverted T-shaped slots 4.

[0039] The limiting assembly includes an inverted T-shaped block 5 and a first limiting screw 6. The inverted T-shaped block 5 can be clamped in the corresponding inverted T-shaped groove 4, and an internal threaded hole is opened on the inner side of the middle part of the inverted T-shaped block 5. One end of the first limiting screw 6 is threadedly connected to the internal threaded hole in the middle part of the inverted T-shaped block 5.

[0040] A plurality of semi-open grooves 12 and a plurality of heat dissipation holes 8 are provided inside the turntable body 3, and the plurality of semi-open grooves 12 and the plurality of heat dissipation holes 8 are equidistantly distributed along the circumference of the turntable body 3. The inverted T-shaped block 5 can prevent the workpiece from being deformed by high temperature during the spraying process and play a role in heat dissipation;

[0041] The front inner side of the cabinet 1 is hingedly connected with a cabinet door 7, and the inner side of the front inner side of the cabinet 1 is sleeved with a limit sleeve, and a cabinet door lock is provided between one side of the cabinet door 7 and one side of the limit sleeve, thereby cooperating with the cabinet 1 to seal and protect the brake servo motor 2;

[0042] An expansion pressing component 9 is sleeved on the outer side of the other end of the first limiting screw 6. The expansion pressing component 9 includes an annular hollow plate 91. Transmission gears 92 are respectively sleeved inside the annular hollow plate 91 through bearings. Yielding grooves are respectively formed in the front and rear ends of the annular hollow plate 91, and straight tooth plates 93 capable of meshing with the transmission gears 92 are clamped in the two yielding grooves. The bottom surface of the end of the straight tooth plate 93 is coplanar with the bottom surface of the annular hollow plate 91. The area of the overall structure of the expansion pressing component 9 can be flexibly adjusted. Sliding grooves are respectively formed in the tops of the front and rear ends of the annular hollow plate 91. Threaded holes are respectively formed in the inner sides of the middles of the two annular hollow plates 91, and second limiting screws 94 are respectively threadedly connected in the two threaded holes. The other ends of the second limiting screws 94 penetrate through the corresponding sliding grooves and extend to the outer sides of the tops of the annular hollow plates 91, so as to utilize the second limiting screws 94 to ensure the stability of the straight tooth plates 93 after being adjusted to move inside the annular hollow plates 91;

[0043] Limiting plates 11 are fixedly connected to the front and rear ends of the inner ring structure of the annular hollow plate 91. One end of the limiting plate 11 can extend to be in fitting connection with the top surface of the corresponding straight tooth plate 93. There is a yielding space between the bottom of the limiting plate 11 and the top of the transmission gear 92 and the top of the bearing to avoid structural interference. One end of the limiting plate 11 is in fitting connection with the inner wall of the outer ring structure of the annular hollow plate 91 to enhance the structural strength of the annular hollow plate 91. A magnet ring 10 is nested inside the middle of the annular hollow plate 91. The magnet ring 10 can magnetically connect to the surface of the other end of the first limiting screw 6, thereby enhancing the connection strength and temperature resistance between the annular hollow plate 91 and the first limiting screw 6.

[0044] Working principle: During use, place the workpiece to be processed on the top surface of the middle of the turntable body 3, then push a T-shaped block 5, so that the T-shaped block 5 fits the surface of the edge structure of the workpiece under the guidance of the corresponding T-shaped groove 4, and then turn the corresponding first limiting screw 6, so that the end of the other end of the first limiting screw 6 contacts and presses the surface of the edge structure of the workpiece. Thus, the remaining T-shaped blocks 5 and first limiting screws 6 are all operated according to the above steps, so as to complete the clamping and limiting of the workpiece. During the spraying process, the brake servo motor 2 can be started, so that the output end of the brake servo motor 2 drives the turntable body 3 and the workpiece placed on the top surface of the turntable body 3 to rotate in a cycle through the center chuck 13 and the transmission shaft, so that all parts of the workpiece can be evenly sprayed comprehensively;

[0045] When facing a workpiece with an edge step, the clamping area of ​​the first limit screw 6 can be expanded by expanding the pressing assembly 9 to meet the clamping and limiting requirements of the workpiece. Specifically, the two second limit screws 94 are turned to make the ends of the second limit screws 94 located at the top of the annular hollow plate 91 temporarily away from the annular hollow plate 91, and then the two spur plates 93 are pulled to make the two spur plates 93 move relatively under the meshing adjustment of the transmission gear 92. After reaching a suitable length, the two second limit screws 94 are locked again;

[0046] Then, before the first limit screw 6 is connected to the inverted T-shaped block 5, the expansion pressing assembly 9 is first assembled, and then the expansion pressing assembly 9 is adjusted up and down on the first limit screw 6 until the two straight tooth plates 93 contact the surface of the workpiece, and then the first limit screw 6 is normally screwed to perform the pressing and limiting operation;

[0047] Furthermore, the rotation control of the turntable body 3 is to connect the power line of the brake servo motor 2 to the integrated control system, and the integrated control system can be used to set the speed setting of the turntable, rotation adjustment, forward point rotation, reverse point rotation, input the specified angle at the adjustment angle, and then click the rotation adjustment, the turntable can rotate the corresponding angle, click the forward point rotation, the turntable will rotate slowly clockwise, click the reverse point rotation, the turntable will rotate counterclockwise;

[0048] Secondly, you can set an acceleration and deceleration time input parameter. The acceleration and deceleration time is the time required for the turntable to reach the specified speed, and the deceleration time is the time required for the turntable body 3 to stop from the specified speed. The acceleration and deceleration time is to make the start and stop of the turntable body 3 smoother. If the turntable body 3 needs to stop urgently during operation, you can set an emergency stop reset button. Press the button to stop urgently. To release the emergency stop, first press the emergency stop reset button, click the emergency stop reset button, and the emergency stop is eliminated.

[0049] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. At the same time, in the drawings of the present utility model, the fill pattern is only for distinguishing the layers, without any other limitation.

[0050] Although embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor spraying single-axis turntable device, comprising a cabinet (1), a turntable body (3), a brake servo motor (2) installed inside the cabinet (1), and a center chuck (13) sleeved on the top of the cabinet (1), wherein the brake servo motor (2) is electrically connected to an integrated control system, and is characterized in that: The output end of the holding brake servo motor (2) is transmission-connected to the bottom of the center chuck (13), and a transmission shaft transmission-connected to the middle of the turntable body (3) is clamped and installed in the center chuck (13). The turntable body (3) is provided with a plurality of inverted T-shaped grooves (4) inside, and the interiors of the plurality of inverted T-shaped grooves (4) are all equipped with limit assemblies; The limiting assembly comprises an inverted T-shaped block (5) and a first limiting screw (6); the inverted T-shaped block (5) can be snap-fitted into the inside of the corresponding inverted T-shaped slot (4); an internal threaded hole is provided on the inner side of the middle of the inverted T-shaped block (5); one end of the first limiting screw (6) is threadedly connected to the internal threaded hole in the middle of the inverted T-shaped block (5).

2. A semiconductor spraying single-axis turntable device according to claim 1, characterized in that: A plurality of semi-open grooves (12) and a plurality of heat dissipation holes (8) are provided inside the turntable body (3), and the plurality of semi-open grooves (12) and the plurality of heat dissipation holes (8) are evenly distributed along the circumference of the turntable body (3).

3. A semiconductor spraying single-axis turntable device according to claim 1, characterized in that: The inner side of the front end of the cabinet (1) is hingedly connected to a cabinet door (7), the inner side of the front end of the cabinet (1) is sleeved with a limit plate, and a cabinet door lock is provided between one side of the cabinet door (7) and one side of the limit plate.

4. A semiconductor spraying single-axis turntable device according to claim 1, characterized in that: An extension pressing assembly (9) is sleeved on the outer side of the other end of the first limiting screw (6), and the extension pressing assembly (9) includes an annular hollow plate (91), and the interior of the annular hollow plate (91) is respectively sleeved with a transmission gear (92) through a bearing, and the front and rear ends of the annular hollow plate (91) are provided with a clearance groove, and the two clearance grooves are both clamped with a straight tooth plate (93) that can be meshed with the transmission gear (92), and the bottom surface of the end of the straight tooth plate (93) is arranged coplanar with the bottom surface of the annular hollow plate (91).

5. A semiconductor spraying single-axis turntable device according to claim 4, characterized in that: The tops of the front and rear ends of the annular hollow plates (91) are provided with sliding grooves, the inner sides of the middle parts of the two annular hollow plates (91) are provided with threaded holes, and the two threaded holes are threadedly connected with second limit screws (94), and the other end of the second limit screw (94) passes through the corresponding sliding groove and extends to the outer side of the top of the annular hollow plate (91).

6. The semiconductor spraying single-axis turntable device according to claim 4, characterized in that: The front and rear ends of the inner ring structure of the annular hollow plate (91) are fixedly connected to a limiting plate (11), and one end of the limiting plate (11) can extend to the top surface of the corresponding spur plate (93) for fitting connection.

7. A semiconductor spraying single-axis turntable device according to claim 6, characterized in that: There is a clearance space between the bottom of the limit plate (11) and the top of the transmission gear (92) and the top of the bearing, and one end of the limit plate (11) is fitted and connected to the inner wall of the outer ring structure of the annular hollow plate (91).

8. The semiconductor spraying single-axis turntable device according to claim 4, characterized in that: A magnet ring (10) is embedded inside the middle of the annular hollow plate (91), and the magnet ring (10) can be magnetically connected to the other end surface of the first limit screw (6).