2D and 3D visual inspection system for chip DB and gold wire WB

Abstract

The utility model relates to a visual inspection system, and discloses a 2D and 3D visual inspection system for a chip DB and a gold thread WB. The 2D and 3D visual inspection system comprises a material box transplanting mechanism and a material disc inspection mechanism, the material box transplanting mechanism comprises a feeding mechanism and a discharging mechanism, and the material disc inspection mechanism is arranged between the feeding mechanism and the discharging mechanism; the material tray detection mechanism comprises a visual detection station and a material tray conveying station, a 2D visual detection camera and a 3D visual detection camera are arranged at the visual detection station, the ink dispensing machine is used for conducting ink dispensing marking on defective products, and the material tray pushing mechanism is used for pushing material trays in the material boxes to the material tray detection mechanism. The feeding and discharging mechanism and the detection mechanism are reasonably arranged, automatic feeding and discharging of the material boxes can be effectively achieved, good products and defective products can be automatically classified, and automatic operation in the whole detection process is fully achieved.

Description

Technical Field

[0001] The present invention relates to the field of vision detection, and particularly to a 2D and 3D vision detection system for chip DB and wire bonding WB. Background Art

[0002] DB is the abbreviation of "Die Bond", which means die bonding, that is, attaching the die to the Lead Frame. It can be understood as attaching the chip to the PCB board or other substrates through glue. WB is the abbreviation of "Wire Bond", which means wire bonding, that is, connecting wires on the die. It can be understood as connecting the chip and the PCB through gold wires or aluminum wires by equipment. These are two processes in the front-end of semiconductor packaging and testing.

[0003] DB and WB need to be tested to determine whether the products are qualified. In the prior art, automated detection for DB and WB is provided. For example, the patent application document with the publication number CN 113075231 A discloses an automated intelligent detection method and system for chip DB and wire bonding WB, which can use artificial intelligence methods to simulate the operations of inspectors, achieve automatic movement, automatic data collection, and automatic measurement results.

[0004] Regarding how to reasonably layout the hardware structure of such detection systems to better achieve automated operations in the entire detection process and automatically classify the qualified and unqualified products after detection, etc. are still technical problems that need to be continuously solved. Summary of the Invention

[0005] In view of the problem in the prior art of how to improve the degree of automation in the whole process of detecting a 2D and 3D vision detection system for chip DB and wire bonding WB, the present invention provides a 2D and 3D vision detection system for chip DB and wire bonding WB.

[0006] To solve the above technical problems, the present invention is solved by the following technical solutions:

[0007] A 2D and 3D vision detection system for chip DB and wire bonding WB includes a cassette transfer mechanism and a tray detection mechanism. The cassette transfer mechanism includes a loading mechanism and an unloading mechanism. The tray detection mechanism is arranged between the loading mechanism and the unloading mechanism. Both the loading mechanism and the unloading mechanism include a cassette loading / unloading rack and a cassette transport rack that are spaced apart in the horizontal direction. At the cassette loading / unloading rack, there are a cassette loading position and a cassette unloading position that are spaced apart in the vertical direction. On the loading mechanism and the unloading mechanism and between the cassette loading / unloading rack and the cassette transport rack, there are respectively formed a tray placing position and a tray receiving position;

[0008] The cartridge transport racks in the loading mechanism and the unloading mechanism are both provided with cartridge gripping mechanisms, which can move in the vertical and horizontal directions to transport the cartridges at the cartridge loading position to the tray receiving position and to transport the cartridges at the tray discharging position to the cartridge unloading position;

[0009] The tray detection mechanism includes a vision detection station and a tray conveying station. Along the conveying direction of the tray conveying track at the vision detection station, a 2D vision detection camera and a 3D vision detection camera are sequentially arranged;

[0010] At the tray conveying station, there is a tray conveying mechanism. The tray conveying mechanism includes a tray conveying track, and the tray discharging position and the tray receiving position are respectively located at the inlet and outlet ends of the tray conveying track; At the cartridge loading and unloading rack, there is a first tray pushing mechanism for pushing the single piece of the tray to be detected in the cartridge at the tray discharging position onto the tray conveying track, and at the tray conveying mechanism, there is a second tray pushing mechanism for pushing the tray after detection on the tray conveying track into the cartridge at the tray receiving position.

[0011] By reasonably arranging the loading and unloading mechanism and the detection mechanism, it can effectively achieve the automatic loading and unloading of cartridges, as well as the automatic classification of good and defective cartridge boxes. At the same time, it can also achieve the detection of trays, mark the defective trays after detection, and automatically separate them from the good trays, fully realizing the automated operation in the entire detection process.

[0012] Preferably, the cartridge loading position and the cartridge unloading position are both provided with cartridge placement grooves that are open at the upper end and the end facing the cartridge transport rack. On the cartridge loading and unloading rack, there is a cartridge barcode reader that can scan the cartridges at the cartridge loading position.

[0013] Preferably, a cartridge conveying mechanism is provided at the cartridge loading position. The cartridge conveying mechanism includes a cartridge loading rack, and the cartridge loading rack includes a cartridge conveying platform; On the cartridge loading rack, there are also a movable cartridge limiting plate and a fixed cartridge limiting plate that are perpendicular to the cartridge conveying platform and whose length direction is set along the cartridge conveying direction. The movable cartridge limiting plate is arranged parallel to the fixed cartridge limiting plate and can move towards or away from the fixed cartridge limiting plate. The movable cartridge limiting plate, the fixed cartridge limiting plate, and the cartridge conveying platform together form a cartridge placement groove;

[0014] The setting of the movable cartridge limiting plate can enable the width of the cartridge placement groove to be adjusted, thereby being applicable to cartridges of different models and widths, so that the cartridges can be transmitted to the required position in a better posture.

[0015] A cassette conveying belt is provided at the cassette conveying platform. The two ends of the cassette conveying platform along the conveying direction of the cassette conveying belt respectively form a cassette inlet end and a cassette outlet end, and the cassette outlet end is correspondingly arranged with the tray loading position or the tray unloading position. The setting of the cassette conveying belt can realize the automatic transmission of the cassette on the cassette conveying platform, so that it can automatically reach the tray loading position for loading or automatically reach the unloading position for unloading.

[0016] Preferably, the first tray pushing mechanism includes a fork mounting seat. A tray pushing fork is mounted at the fork mounting seat. One end of the tray pushing fork forms a fork extending end that can extend into the cassette to push out the single-piece tray in the cassette, and the other end forms a fork mounting end. A fork buffer assembly is also mounted on the fork mounting seat. The fork buffer assembly includes a fork slide rail arranged along the tray pushing direction in the length direction and a fork slide block that can slide along the fork slide rail. The tray pushing fork is mounted on the fork slide block. It also includes a buffer spring arranged along the length direction of the fork slide rail. The end of the buffer spring can abut against the fork slide block to buffer the movement of the tray pushing fork. By using the buffering method of combining the spring and the slide block for flexible pushing, it can effectively avoid damaging the tray when pushing out the tray.

[0017] Preferably, two tray suction plates that can move up and down and are used for sucking the trays on the tray conveying track are provided at the tray conveying track. The two tray suction plates are both arranged below the tray conveying track and are correspondingly arranged with the 2D vision inspection camera and the 3D vision inspection camera respectively. The tray suction plate corresponding to the 2D vision inspection camera is made of a transparent material and a backlight is provided below it. The setting of the backlight can make the backlight shine light from below the product, enabling the 2D vision inspection camera to take clearer pictures and obtain more accurate results.

[0018] Preferably, a 2D camera adjustment mechanism and a 3D camera adjustment mechanism for adjusting the positions of the 2D vision inspection camera and the 3D vision inspection camera are also provided at the vision inspection station. The 2D camera adjustment mechanism and the 3D camera adjustment mechanism include a 2D camera linear motor module and a 3D camera linear motor module that can respectively realize the movement of the 2D vision inspection camera and the 3D vision inspection camera in the length and width directions of the tray conveying track in the horizontal plane.

[0019] The settings of the 2D camera adjustment mechanism and the 3D camera adjustment mechanism can realize the adjustment of the positions of the 2D vision inspection camera and the 3D vision inspection camera, and then enable them to better collect images of the trays on the tray conveying track, and then perform more accurate inspections.

[0020] Preferably, the tray conveying mechanism includes a fixed conveying frame and a movable conveying frame that can move towards or away from the fixed conveying frame. The fixed conveying frame and the movable conveying frame respectively include a fixed track plate and a movable track plate. The fixed track plate and the movable track plate are arranged in parallel, and tray edge supports are constructed at the upper ends of their opposite side faces. The tray edge supports on the fixed track plate and the tray edge supports on the movable track plate together form a tray conveying track. The fixed track plate and the movable track plate can move relative to each other, so that it can be applied to the conveying and detection of trays with different widths.

[0021] Preferably, the tray conveying mechanism further includes a plurality of movable grippers that can move along the length direction of the tray conveying track and are used to clamp the edge part of the tray. The movable gripper includes two clamping plates that can move relative to each other. The movable gripper near the tray receiving position constitutes a second tray pushing mechanism. The movable gripper not only realizes the transportation of the tray between the two detection positions, but also has the function of clamping and pushing the detected tray into an empty tray.

[0022] Preferably, an inkjet positioning mechanism is provided at the tray conveying track. The inkjet positioning mechanism includes an inkjet positioning frame. An inkjet positioning plate that can block and position the tray on the tray conveying track is installed on the inkjet positioning frame. The inkjet positioning plate can move up and down along the height direction of the tray conveying track to the upper part or the lower part of the tray; the inkjet positioning frame includes a positioning frame bottom plate and a positioning plate support arranged on the positioning frame bottom plate. The positioning plate support is slidably arranged on the positioning frame bottom plate along the width direction of the tray conveying track, and the inkjet positioning plate is arranged on the positioning plate support. The setting of the inkjet positioning plate can effectively realize the positioning of the tray on the tray conveying track, so that it can reach the accurate inkjet position, and then achieve more accurate inkjet positioning.

[0023] Preferably, a tray support assembly is further provided on the positioning plate support. The tray support assembly includes a tray support rod that can support the bottom of the tray on the tray conveying track; the length direction of the tray support rod is arranged along the length direction of the tray conveying track, and the upper end face of the tray support rod is an arc surface. The setting of the tray support rod can support the middle part of the tray, preventing inaccurate detection results caused by the middle part of the tray sinking during the detection process. In addition, the setting of the arc surface of the tray support rod makes it in line contact with the tray, which can effectively prevent the tray support rod from scratching the tray.

[0024] Due to the adoption of the above technical solutions, the present invention has significant technical effects

[0025] (1) By reasonably arranging the loading and unloading mechanism and the detection mechanism, the automatic loading and unloading of the cartridge can be effectively realized;

[0026] (2) The good product cartridges and the defective product cartridges can be automatically classified, fully realizing the automatic operation in the whole detection process.

[0027] (3) It can detect the tray and separate defective products from good products, fully realizing automated operation throughout the detection process. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic structural diagram of Embodiment 1 of the present invention.

[0029] Figure 2 is Figure 1 a schematic structural diagram of the loading mechanism in the above.

[0030] Figure 3 is Figure 2 a schematic structural diagram of the cartridge transport rack in the above.

[0031] Figure 4 is Figure 3 a partial enlarged view of the above.

[0032] Figure 5 is Figure 2 a schematic structural diagram of the cartridge conveying mechanism in the above.

[0033] Figure 6 is Figure 5 a schematic structural diagram of the limit plate drive mounting rack in the above.

[0034] Figure 7 is Figure 5 a schematic structural diagram of the cartridge loading rack in the above.

[0035] Figure 8 is Figure 5 a schematic structural diagram of the tray pushing mechanism in the above.

[0036] Figure 9 is Figure 8 a schematic structural diagram of the lower part of the above.

[0037] Figure 10 is Figure 1 a schematic structural diagram of the tray detection mechanism in the above.

[0038] Figure 11 is Figure 10 a schematic structural diagram of the 2D camera adjustment mechanism in the above.

[0039] Figure 12 is Figure 10 a schematic structural diagram of the 3D camera adjustment mechanism in the above.

[0040] Figure 13 is Figure 10 a schematic structural diagram of the tray conveying mechanism in the above.

[0041] Figure 14 is Figure 13Partial enlarged view of the fixed conveyor rack or the movable conveyor rack.

[0042] Figure 15 is Figure 14 Schematic structural view of the rail guide plate in [].

[0043] Figure 16 is Figure 10 Schematic structural view of the jaw driving mechanism in [].

[0044] Figure 17 is Figure 10 Schematic structural view of the inkjet positioning mechanism in []. Detailed implementation manners

[0045] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0046] Embodiment 1

[0047] This embodiment provides a 2D and 3D vision detection system for chip DB and wire bonding WB, as Figures 1 - 17 shown, which includes a cassette transfer mechanism and a tray detection mechanism 3. The cassette transfer mechanism includes a loading mechanism 11 and an unloading mechanism 12, and the tray detection mechanism 3 is arranged between the loading mechanism 11 and the unloading mechanism 12.

[0048] As Figures 1 - 9 shown, both the loading mechanism 11 and the unloading mechanism 12 include a cassette loading / unloading rack 13 and a cassette transport rack 14 that are spaced apart in the horizontal direction. At the cassette loading / unloading rack 13, there are respectively a cassette loading position 101 and a cassette unloading position 102 that are spaced apart in the vertical direction. The cassette loading / unloading rack 13 includes a cassette conveying mechanism 17 provided at the cassette loading position 101. The cassette conveying mechanism 17 includes a cassette loading rack 105. The cassette loading / unloading rack 13 further includes a cassette unloading rack provided below the cassette loading rack 105. The cassette loading position 101 and the cassette unloading position 102 are respectively arranged at the cassette loading rack 105 and the cassette unloading rack. Both the cassette loading position 101 and the cassette unloading position 102 are provided with a cassette placement groove 112 that is open at the upper end and the end facing the cassette transport rack 14.

[0049] A tray placement position 15 and a tray receiving position 16 are respectively formed between the cassette loading / unloading rack 13 and the cassette transport rack 14 on the loading mechanism 11 and the unloading mechanism 12; a cassette gripping mechanism 104 is provided at the cassette transport rack 14 in both the loading mechanism 11 and the unloading mechanism 12. The cassette gripping mechanism 104 can move in the vertical and horizontal directions to transport the cassette at the cassette loading position 101 to the tray receiving position 16 and to transport the cassette at the tray placement position 15 to the cassette unloading position 102.

[0050] In this embodiment, the cartridge transport rack 14 includes a transport horizontal rack 201 and a transport vertical rack 202. The transport vertical rack 202 can move horizontally on the transport horizontal rack 201 towards or away from the cartridge loading and unloading rack 13. The cartridge gripping mechanism 104 includes a gripping claw mounting plate 203.

[0051] Among them, in order to realize the movement of the cartridge gripping mechanism 104 in the vertical and horizontal directions, a vertical rack driving mechanism and a vertical rack movement slide rail 215 are provided on the transport horizontal rack 201, and a mounting plate driving mechanism is provided on the transport vertical rack 202.

[0052] Among them, the vertical rack driving mechanism includes a vertical rack driving motor 216 and a vertical rack driving lead screw 217 connected to the motor shaft of the vertical rack driving motor 216. The bottom of the transport vertical rack 202 is connected to the vertical rack driving lead screw 217 through a vertical rack driving nut. The vertical rack movement slide rail 215 is arranged on both sides of the vertical rack driving lead screw 217. The mounting plate driving mechanism includes a mounting plate driving motor 218 and a mounting plate driving lead screw 219 connected to the motor shaft of the mounting plate driving motor 218. The gripping claw mounting plate 203 is connected to the mounting plate driving lead screw 219 through a mounting plate driving nut.

[0053] In this embodiment, an active gripping claw 204 and a fixed gripping claw 205 are arranged up and down on the gripping claw mounting plate 203. The active gripping claw 204 can move towards or away from the fixed gripping claw 205. The gripping claw mounting plate 203 is mounted on the transport vertical rack 202 and can make a vertical reciprocating movement on the transport vertical rack 202.

[0054] Among them, an active gripping claw driving mechanism is further provided on the gripping claw mounting plate 203. The active gripping claw driving mechanism includes a gripping claw driving cylinder 206 and a gripping claw slide rail 207 that are both vertically arranged. The end of the piston rod of the gripping claw driving cylinder 206 is mounted with a gripping claw mounting seat 208 that is slidably connected to the gripping claw slide rail 207. The active gripping claw 204 is fixed to the gripping claw mounting seat 208.

[0055] The fixed gripping claw 205 includes two parallel and spaced-apart supporting blocks 212. One end of the supporting block 212 is fixed to the gripping claw mounting plate 203, and the other end extends towards the cartridge transport rack 14. The upper end surface of the extending end of the supporting block 212 towards the cartridge transport rack 14 is configured with an L-shaped concave surface 213 for lifting the lower end of the cartridge. A rubber pad 214 is provided at the end surface of the active gripping claw 204 facing the fixed gripping claw 205.

[0056] During the process of the cartridge gripping mechanism 104 gripping the cartridge, first insert the lower fixed gripping claw 205 into the lower end face of the cartridge, and then move the upper movable gripping claw 204 downward so that the rubber pad 214 presses against the upper surface of the tray. The rubber pad 214 can not only increase buffering, reduce wear, but also increase friction and improve clamping stability. After the movable gripping claw 204 is clamped, under the combined action of the vertical frame driving mechanism and the mounting plate driving mechanism, first move the entire cartridge gripping mechanism 104 upward, and then move the cartridge out of the cartridge loading position 101 and move it to the tray discharging position 15 for single-piece tray discharging.

[0057] In addition, a hydraulic buffer 209 is provided at the end of the gripping claw slide rail 207 on the gripping claw mounting plate 203. The hydraulic buffer 209 includes a buffer body 210 fixed on the gripping claw mounting plate 203 and a buffer piston rod 211 with one end disposed inside the buffer body 210 and the other end facing the gripping claw mounting seat 208.

[0058] The buffer piston rod 211 can buffer and decelerate the movement of the gripping claw mounting seat 208 on the gripping claw slide rail 207, and is used for limiting when reaching the limit position to prevent the gripping claw mounting seat 208 from derailing or directly colliding with the tray rigidly when clamping the tray.

[0059] In this embodiment, the cartridge conveying mechanism 17 includes a cartridge conveying platform 106; on the cartridge loading rack 105, there are also provided a movable cartridge limiting plate 107 and a fixed cartridge limiting plate 108 that are perpendicular to the cartridge conveying platform 106 and whose length direction is set along the cartridge conveying direction. The movable cartridge limiting plate 107 and the fixed cartridge limiting plate 108 are arranged in parallel and can move towards or away from the fixed cartridge limiting plate 108. The movable cartridge limiting plate 107, the fixed cartridge limiting plate 108 and the cartridge conveying platform 106 together form a cartridge placement groove 112. By setting the movable cartridge limiting plate 107 and the fixed cartridge limiting plate 108, the adjustment of the width direction of the cartridge placement groove 112 can be realized, so that the cartridge placement groove 112 can be suitable for the conveying of cartridges with different models and widths, so as to ensure the running stability of the cartridge during the conveying process and the position and attitude accuracy of the cartridge when docking with the next station.

[0060] In order to realize the movement of the movable cartridge limiting plate 107, a limiting plate driving mechanism for driving the movable cartridge limiting plate 107 to move is installed on the cartridge loading rack 105. The limiting plate driving mechanism includes a limiting plate driving motor 109 and a limiting plate driving lead screw 110 connected to the motor shaft of the limiting plate driving motor 109. The movable cartridge limiting plate 107 is connected to the limiting plate driving lead screw 110 through a lead screw nut 111.

[0061] To better implement the installation of the limit plate driving mechanism, in this embodiment, a limit plate driving mounting frame 113 for installing the limit plate driving mechanism is installed on the cartridge loading rack 105. The limit plate driving mounting frame 113 includes two mounting frame support plates 114 fixed at the edge of the cartridge conveying platform 106 and arranged parallel to each other, and a mounting frame top plate 115 arranged on the tops of the two mounting frame support plates 114. The limit plate driving mechanism is arranged on the mounting frame top plate 115.

[0062] On the mounting frame top plate 115, there are also limit plate driving slide rails 116 arranged on both sides of the limit plate driving lead screw 110. The top of the movable cartridge limit plate 107 is connected with a limit plate driving seat 117. The limit plate driving lead screw 110 is connected to the middle of the limit plate driving seat 117. At both ends of the limit plate driving seat 117, there are driving seat sliding grooves 118 that cooperate with the limit plate driving slide rails 116 for sliding.

[0063] In this embodiment, in order to realize the automatic transportation of the cartridge on the cartridge conveying platform 106, a cartridge conveying belt 119 is arranged at the cartridge conveying platform 106. The two ends of the cartridge conveying platform 106 along the conveying direction of the cartridge conveying belt 119 respectively form a cartridge inlet end 120 and a cartridge outlet end 121.

[0064] Among them, the cartridge loading rack 105 includes a loading rack bottom plate 122 and two loading rack side plates 123. The loading rack bottom plate 122 and the two loading rack side plates 123 together form a belt transmission mechanism installation groove 124. A belt transmission mechanism is installed in the belt transmission mechanism installation groove 124. The belt transmission mechanism includes a belt transmission motor 125, a plurality of spaced belt input wheels 126 connected to the output shaft of the belt transmission motor 125, and belt output wheels 127 arranged corresponding to the belt input wheels 126 one by one. The cartridge conveying belt 119 is installed between the belt input wheel and the corresponding belt output wheel 127. There is a belt extension groove 128 on the cartridge conveying platform 106 for the cartridge conveying belt 119 to extend out. The upper end surface of the cartridge conveying belt 119 is higher than the upper end surface of the cartridge conveying platform 106.

[0065] And to ensure that the cartridge is in a stationary state when it is grabbed, at least one cartridge stop plate 129 is provided on the bottom plate 122 of the loading rack and at the cartridge outlet end 121. The cartridge stop plate 129 is arranged between adjacent belt input wheels 126 so that the cartridge stop plate 129 can stop the cartridge to be detected. In this state, the cartridge needs to be detected. Therefore, a cartridge code reader 4 capable of scanning the cartridge on the cartridge conveying platform 106 is provided on the side plate 123 of the loading rack. The cartridge is detected by the cartridge code reader 4. The cartridge with OK scanning flows to the next station through the cartridge grabbing mechanism 104, that is, the tray loading station; the cartridge with NG scanning is sent to the cartridge unloading rack by the cartridge grabbing mechanism 104 and discharged, and is processed manually. Therefore, setting the cartridge stop plate 129 to stop the cartridge to be detected can facilitate the stable scanning detection of the cartridge by the cartridge code reader 4 and also facilitate the cartridge grabbing mechanism 104 to grab the detected cartridge.

[0066] To facilitate the cartridge code reader 4 to better scan the cartridge, a mechanism for adjusting the cartridge code reader 4 is also provided. Specifically, a code reader mounting bracket 401 is installed on the side plate 123 of the loading rack. The code reader mounting bracket 401 includes a vertical long strip 402 fixed on the side plate 123 of the loading rack and a horizontal long strip 403 installed on the vertical long strip 402. Vertical long slots 404 and horizontal long slots 405 are respectively provided on the vertical long strip 402 and the horizontal long strip 403. One end of the horizontal long strip 403 is connected in the vertical long slot 404 through a fastening nut, and the cartridge code reader 4 is installed in the horizontal long slot 405 through a fastening nut. Through the settings of the vertical long slot 404 and the horizontal long slot 405, the position of the cartridge code reader 4 in the horizontal and vertical directions can be adjusted, and then the cartridge code reader 4 can better scan the cartridge.

[0067] Among them, at the cartridge loading and unloading rack 13, a first tray pushing mechanism 6 is provided for pushing the single piece of the tray to be detected in the cartridge at the tray loading position 15 onto the tray conveying track 51. At the tray conveying mechanism 5, a second tray pushing mechanism is provided for pushing the tray after detection on the tray conveying track 51 into the cartridge at the tray receiving position 16.

[0068] In this embodiment, the first tray pushing mechanism 6 includes a fork mounting base 601. A tray pushing fork 602 is mounted at the fork mounting base 601. One end of the tray pushing fork 602 forms a fork extending end 603 that can extend into the cartridge to push out the single-piece tray in the cartridge, and the other end forms a fork mounting end 604. A fork buffer assembly is also mounted on the fork mounting base 601. The fork buffer assembly includes a fork slide rail 605 whose length direction is arranged along the tray pushing direction and a fork slide block 606 that can slide along the fork slide rail 605. The tray pushing fork 602 is mounted on the fork slide block 606. It also includes a buffer spring 607 whose length direction is arranged along the length direction of the fork slide rail 605. The end of the buffer spring 607 can abut against the fork slide block 606 to buffer the movement of the tray pushing fork 602. The setting of the buffer spring 607 can enable the tray pushing fork 602 to have a certain buffering effect when extending into the cartridge to push out the tray. Since the tray is very thin, if it is pushed directly in a rigid manner, it is easy to cause the deformation of the tray, which will then affect the subsequent detection effect. By using the buffering method of combining the spring and the slide block for flexible pushing, it can effectively avoid damaging the tray when pushing out the tray.

[0069] To facilitate the installation of the buffer spring 607 and further guide the fork slide block 606, the fork buffer assembly further includes a guide post 608 with one end fixed to the fork mounting base 601 and the other end inserted into the fork slide block 606. A slide hole 609 is provided on the end face of the fork slide block 606 away from the fork extending end 603. The guide post 608 is slidably connected in the slide hole 609, and the buffer spring 607 is sleeved on the guide post 608.

[0070] The tray pushing fork 602 is formed in a U-shaped plate shape, and the U-shaped open end is the fork extending end 603. The tray pushing fork 602 with this structure can both use the double side arms of the U-shaped plate to extend into the cartridge to push out the tray in a wider cartridge, and use the single side arm of the U-shaped plate to extend into the cartridge to push out the tray in a smaller-width cartridge.

[0071] To enable the tray pushing fork 602 to better cooperate with the cartridge at the tray loading position 15, a position adjustment mechanism for the tray pushing fork 602 in the horizontal direction is also provided. Specifically, it includes a first linear module 610 and a second linear module 611 for driving the movement of the fork mounting base 601. The fork mounting base 601 is mounted on the second linear module 611, and the second linear module 611 is mounted on the first linear module 610. The first linear module 610 can drive the second linear module 611 to move in the horizontal plane along a direction perpendicular to the tray pushing direction, and the second linear module 611 can drive the fork mounting base 601 to move in the horizontal plane along the tray pushing direction.

[0072] Among them, the first linear module 610 includes a slide cylinder 612 and a linear module mounting plate 613 mounted on the slide cylinder 612. The second linear module 611 includes a mounting seat drive plate 614 fixed to the linear module mounting plate 613. The bottom of the mounting seat drive plate 614 is configured as a mounting seat slide rail 615, and the fork mounting seat 601 is slidably connected to the mounting seat slide rail 615.

[0073] A mounting seat conveyor belt 616 with a conveying direction along the length direction of the mounting seat slide rail 615, a mounting seat drive wheel 617, and a mounting seat drive motor 618 for driving the movement of the mounting seat conveyor belt 616 are mounted on the mounting seat drive plate 614. An output belt connecting member 619 connected to the mounting seat conveyor belt 616 is provided on the fork mounting seat 601. Under the action of the output belt connecting member 619, the fork mounting seat 601 moves along with the mounting seat conveyor belt 616, realizing the movement of the fork mounting seat 601 in the horizontal plane along the direction of the tray pushing out.

[0074] As Figures 10 - 17 shown, in this embodiment, the tray detection mechanism 3 includes a vision detection station 31 and a tray conveying station 32.

[0075] Among them, a 2D vision detection camera 33 and a 3D vision detection camera 34 are sequentially arranged at the vision detection station 31 along the conveying direction of the tray conveying track 51. There are also two tray suction plates 8 that can move up and down and are used to adsorb the trays on the tray conveying track 51. The two tray suction plates 8 are both arranged below the tray conveying track 51 and are respectively corresponding to the 2D vision detection camera 33 and the 3D vision detection camera 34. The tray suction plate 8 corresponding to the 2D vision detection camera 33 is made of a transparent material and a backlight is provided below it. There is also an ink dotting machine 35 provided at the 3D vision detection camera 34 and located on the 3D camera linear motor module 304 for ink dotting and marking defective products.

[0076] A backlight is provided at the lower part of the tray suction plate 8, so that the backlight shines from below the product, which can make the photos taken by the 2D vision detection camera 33 clearer and the results more accurate. The backlight has a good detection effect on hollow materials, making the hollow edges clearer. In addition, a ring light source is also provided below the 2D vision detection camera 33, which can effectively eliminate the shadow generated by the backlight mounting connecting member.

[0077] At the vision detection station 31, a 2D camera adjustment mechanism 301 and a 3D camera adjustment mechanism 302 for adjusting the positions of the 2D vision detection camera 33 and the 2D vision detection camera 33 respectively are also provided. The 2D camera adjustment mechanism 301 and the 3D camera adjustment mechanism 302 include a 2D camera linear motor module 303 and a 3D camera linear motor module 304 that can respectively realize the movement of the 2D vision detection camera 33 and the 3D vision detection camera 34 in the horizontal plane along the length and width directions of the tray conveying track 51.

[0078] At the tray conveying station 32, there is a tray conveying mechanism 5, and the tray conveying mechanism 5 includes a tray conveying track 51. The tray loading position 15 and the tray unloading position 16 are respectively located at the inlet and outlet ends of the tray conveying track 51.

[0079] Among them, the tray conveying mechanism 5 includes a fixed conveying frame 501 and a movable conveying frame 502 that can move towards or away from the fixed conveying frame 501. In order to realize the movement of the movable conveying frame 502, there is also a conveying frame driving mechanism. The conveying frame driving mechanism includes a conveying frame driving motor 516, a conveying frame driving lead screw 517 connected to the conveying frame driving motor 516, and a driving frame 518 connected to the conveying frame driving lead screw 517. The driving frame 518 is fixed on the movable conveying frame 502.

[0080] To further ensure the movement stability of the movable conveying frame 502, the movable conveying frame 502 further includes two movable support plates 519 arranged at both ends of the movable track plate 504 and used for supporting the movable track plate 504. The conveying frame driving mechanism further includes a support plate track 520 arranged under the movable support plate 519 for the movable support plate 519 to slide and a driving frame track 521 arranged under the driving frame 518 for the driving frame 518 to slide.

[0081] The fixed conveying frame 501 and the movable conveying frame 502 respectively include a fixed track plate 503 and a movable track plate 504. The fixed track plate 503 and the movable track plate 504 are arranged in parallel, and the upper ends of the opposite side surfaces are both constructed with tray edge supporting platforms 505. The tray edge supporting platforms 505 on the fixed track plate 503 and the tray edge supporting platforms 505 on the movable track plate 504 together constitute the tray conveying track 51.

[0082] At the inlet and outlet ends of the tray conveying track 51 on the fixed track plate 503 and the movable track plate 504, there are track guiding plates 506. The side surface of the track guiding plate 506 is constructed with a tray edge upper limiting platform 507 arranged above the tray edge supporting platform 505. The lower end surfaces of the tray edge supporting platform 505 and the tray edge upper limiting platform 507 together constitute a tray edge guiding groove 508; the lower end surface of the tray edge upper limiting platform 507 includes a horizontal limiting surface 509 parallel to the tray edge supporting platform 505 and an inclined guiding surface 510 arranged at the starting end of the horizontal limiting surface 509.

[0083] Under the action of the track guiding plate 506, the pushed tray can be accurately guided onto the tray edge supporting platform 505. And under the combined action of the track guiding plate 506 and the tray suction plate 8, it can ensure that the tray is completely fixed and flat without deformation during the detection process, and guarantee the accuracy of the detection result.

[0084] The tray conveying mechanism 5 further includes a plurality of moving jaws 52 that can move along the length direction of the tray conveying track 51 and are used to clamp the edge of the tray. The moving jaws 52 include two clamping plates 511 that can move relative to each other. The moving jaws 52 near the tray receiving position 16 constitute the second tray pushing mechanism.

[0085] The moving jaws 52 clamp and transport the tray to different detection stations on the tray conveying track 51. After the detection is completed, the moving jaws 52 push the detected products one by one into an empty material box. After the material box is filled, it is transported to the blanking mechanism 12 by the material box gripping mechanism 104 in the material box transport rack 14 at the blanking mechanism 12 for further transportation to subsequent stations.

[0086] In this embodiment, the moving jaws 52 are arranged on the side of the fixed conveying frame 501 and further include a jaw driving mechanism. The jaw driving mechanism includes a jaw linear motor module 512 whose length direction is arranged along the length direction of the tray conveying track 51. A jaw mounting seat 513 is installed on the jaw linear motor module 512. Two relatively arranged clamping plate mounting arms 514 and a mounting arm driving cylinder 515 capable of driving the clamping plate mounting arms 514 to move along the width direction of the tray conveying track 51 are provided on the jaw mounting seat 513. The two clamping plates 511 are respectively installed on the two clamping plate mounting arms 514 and the two clamping plate mounting arms 514 can move towards or away from each other. The specific movement driving method can adopt a conventional two-way motor or two-way cylinder drive.

[0087] When a defect is detected, an inkjet mark needs to be made on the defective product. Since the chip is small, the positioning requirement is precise, and the material is very thin, when the jaws drag the material over, there may be relative sliding between the jaws and the material. Relying solely on the walking distance of the moving jaws 52 along the X-axis for positioning is inaccurate. Therefore, the inkjet positioning mechanism 7 is designed.

[0088] In this embodiment, an inkjet positioning mechanism 7 is provided at the tray conveying track 51 and is located below the dotting machine 35. The inkjet positioning mechanism 7 includes an inkjet positioning frame 71. An inkjet positioning plate 701 capable of blocking and positioning the tray on the tray conveying track 51 is installed on the inkjet positioning frame 71. The inkjet positioning plate 701 can move up and down along the height direction of the tray conveying track 51 to the upper or lower part of the tray; the inkjet positioning frame 71 includes a positioning frame bottom plate 702 and a positioning plate support 703 provided on the positioning frame bottom plate 702. The positioning plate support 703 is slidably arranged on the positioning frame bottom plate 702 along the width direction of the tray conveying track 51. The inkjet positioning plate 701 is arranged on the positioning plate support 703. A vertically arranged fixed plate driving cylinder 704 is fixed on the positioning plate support 703. The inkjet positioning plate 701 is connected to the piston rod of the fixed plate driving cylinder 704.

[0089] The positioning plate support 703 is further provided with a tray support assembly. The tray support assembly includes a tray support rod 522 that can support the bottom of the tray on the tray conveying track 51. The length direction of the tray support rod 522 is arranged along the length direction of the tray conveying track 51, and the upper end surface of the tray support rod 522 is an arc surface.

[0090] The inkjet positioning plate 701 is configured as a U-shaped plate with an open upper end. The inkjet positioning plate 701 is arranged below the tray support rod 522 and can move upward to a position where the tray support rod 522 is inside the inkjet positioning plate 701. The U-shaped plate configuration of the inkjet positioning plate 701 can prevent the tray support rod 522 from blocking the inkjet positioning plate 701 when the inkjet positioning plate 701 moves upward.

[0091] A support limiting plate 705 is fixed on the positioning frame bottom plate 702. The support limiting plate 705 is provided with a limiting plate long slot 706 arranged along the track width direction. The positioning plate support 703 is provided with a plurality of bolt holes 707 spaced apart and cooperating with the long slot. A fastening wrench 708 for relatively fixing and limiting the positioning plate support 703 and the support limiting plate 705 is provided at the bolt holes 707.

[0092] Positioning frame fixing plates 709 are further provided at both ends of the positioning frame bottom plate 702. The positioning frame fixing plates 709 are provided with vertically arranged fixing plate long slots 710 for adjusting the installation height of the positioning frame fixing plates 709.

[0093] During the working process of the inkjet positioning mechanism 7, after adjusting the width of the tray conveying track 51, by loosening the fastening wrench 708, the entire positioning plate support 703 is moved relative to the positioning frame bottom plate 702 to the middle position of the tray conveying track 51. At this time, the inkjet positioning plate 701 and the tray support rod 522 are centered in the tray conveying track 51. Since the tray is thin and has a certain flexibility, the tray support rod 522 supports the middle of the tray, which can prevent the middle of the tray from being concave and deformed during the tray detection process. The upper surface of the tray support rod 522 is configured as an arc surface, which can make the contact between the tray support rod 522 and the lower surface of the tray a line contact, reducing the risk of potential product scratching.

[0094] When the product detection is completed and defective products are found, the inkjet positioning plate 701 is lifted. When the material moves into place, it is centered and blocked by the inkjet positioning plate 701. The sensor in the inkjet positioning plate 701 detects the position, realizing that the flow direction is hard limited to ensure the inkjet accuracy during this process. After the defective part is inkjet-printed, the inkjet positioning plate 701 descends, and the product is transported to the next station.

[0095] In this embodiment, the movement process, movement position, etc. of the movement mechanism are accurately detected by a position sensor. For example, a displacement sensor is set in the corresponding transmission mechanism or movement mechanism, and the installation position of the displacement sensor is adjusted according to actual needs. The position detection principle is a conventional detection method.

[0096] During the operation of the entire vision detection system in this embodiment, first, an operator manually places a full material box into the material box placement groove 112 at the material box loading position 101 of the loading mechanism 11. Under the action of the material box conveyor belt 119, it is transported to the lower part of the material box barcode reader 4 for barcode scanning and detection. The material box with a successful barcode scan flows to the material tray discharging position through the material box gripping mechanism 104; the material box with a failed barcode scan is sent to the material box discharging rack by the material box gripping mechanism 104 for discharge and manual processing.

[0097] Then, the material tray pushing mechanism pushes the material trays in the material box at the material tray discharging position one by one into the material tray conveying track 51, and the empty material box is discharged from the lower layer;

[0098] Next, under the action of the moving gripper 52, the material tray to be detected loaded with materials on the material tray conveying track 51 is transported to the 2D vision detection station below the 2D vision detection camera 33 for 2D detection; after the 2D detection is completed, it is transported to the 3D vision detection station below the 3D vision detection camera 34 for 3D detection;

[0099] After the vision detection is completed, if it is a non-conforming product, it is marked with ink at the non-conforming position by the ink dotting machine 35 and then transported to the discharging position; if it is a qualified product, it is directly transported to the discharging position.

[0100] At the discharging mechanism 12, an operator also manually places an empty material box at the loading position; after the empty material box passes the barcode scan successfully, it is sent to the product receiving position. If the barcode scan fails, it is discharged from the lower layer for manual processing;

[0101] Next, the moving gripper 52 pushes the detected products one by one into the empty material box at the product receiving position; after the empty material box at the product receiving position is full, it is placed by the material box gripping mechanism 104 at the lower full material box discharging position 102, and after caching a certain number, it reminds the operator to take it out.

[0102] The entire process of this embodiment has a smooth flow and a reasonable layout between each station, and can better realize the automated operation in the entire detection process and automatically classify the qualified and unqualified products after detection.

[0103] It is easy to understand that those skilled in the art can combine, split, recombine, etc. the embodiments of the present application based on one or several embodiments provided by the present application to obtain other embodiments, and these embodiments do not exceed the protection scope of the present application.

[0104] In summary, the above are only the preferred embodiments of the present invention, and all equivalent changes and modifications made according to the scope of the patent application of the present invention shall fall within the scope covered by the patent of the present invention.

Claims

1. A 2D and 3D visual inspection system for chips DB and gold wires WB, comprising a material box transplanting mechanism and a material tray inspection mechanism (3), characterized in that: The material box transplanting mechanism comprises a loading mechanism (11) and a unloading mechanism (12); a material tray detection mechanism (3) is arranged between the loading mechanism (11) and the unloading mechanism (12); the loading mechanism (11) and the unloading mechanism (12) both comprise a material box upper and lower material rack (13) and a material box transport rack (14) arranged at intervals in the horizontal direction; the material box upper and lower material rack (13) comprises a material box upper material position (101) and a material box lower material position (102) arranged at intervals in the vertical direction; a material tray discharge position (15) and a material tray collection position (16) are respectively formed on the loading mechanism (11) and the unloading mechanism (12) and between the material box upper and lower material rack (13) and the material box transport rack (14); A material box grabbing mechanism (104) is provided at the material box transport frame (14) in the loading mechanism (11) and the unloading mechanism (12). The material box grabbing mechanism (104) is movable in the vertical direction and the horizontal direction for transporting the material box at the material box loading position (101) to the material tray receiving position (16) and for transporting the material box at the material tray discharging position (15) to the material box unloading position (102). The tray detection mechanism (3) comprises a visual detection station (31) and a tray conveying station (32), wherein a 2D visual detection camera (33) and a 3D visual detection camera (34) are sequentially arranged at the visual detection station (31) along the conveying direction of the tray conveying track (51); A tray conveying mechanism (5) is provided at the tray conveying station (32), the tray conveying mechanism (5) comprising a tray conveying track (51), the tray discharge position (15) and the tray receiving position (16) being respectively located at the inlet and outlet ends of the tray conveying track (51); a first tray pushing mechanism (6) for pushing a tray sheet to be inspected in the tray at the tray discharge position (15) to the tray conveying track (51) is provided at the upper and lower material racks (13) of the material box, and a second tray pushing mechanism for pushing a tray on the tray conveying track (51) after inspection is completed to the tray receiving position (16) of the material box is provided at the tray conveying mechanism (5).

2. A 2D and 3D visual inspection system for chip DB and gold wire WB according to claim 1, characterized in that: The upper material position (101) and the lower material position (102) of the material box are both provided with a material box placement groove (112) which is open at the upper end and the end facing the material box transport frame (14), and the upper and lower material frames (13) of the material box are provided with a material box code reader (4) capable of scanning the code of the material box at the upper material position (101).

3. The 2D and 3D visual inspection system for chip DB and gold wire WB according to claim 1, characterized in that: A material box conveying mechanism (17) is provided at the material box upper material position (101), the material box conveying mechanism (17) comprising a material box upper material rack (105), the material box upper material rack (105) comprising a material box conveying platform (106); the material box upper material rack (105) is also provided with a movable material box limiting plate (107) and a fixed material box limiting plate (108) which are perpendicular to the material box conveying platform (106) and arranged in the longitudinal direction along the material box conveying direction; the movable material box limiting plate (107) and the fixed material box limiting plate (108) are arranged in parallel and can move toward or away from the fixed material box limiting plate (108); the movable material box limiting plate (107), the fixed material box limiting plate (108) and the material box conveying platform (106) together constitute a material box placement slot (112); A material box conveying belt (119) is provided at the material box conveying platform (106); two ends of the material box conveying platform (106) along the conveying direction of the material box conveying belt (119) respectively constitute a material box inlet end (120) and a material box outlet end (121); the material box outlet end (121) is arranged corresponding to a material tray discharge position (15) or a material tray collection position (16).

4. The 2D and 3D visual inspection system for chip DB and gold wire WB according to claim 1, characterized in that: The first material tray pushing mechanism (6) comprises a material fork mounting seat (601), a material tray pushing fork (602) is mounted on the material fork mounting seat (601), one end of the material tray pushing fork (602) forms a material fork extension end (603) that can be inserted into the material box for pushing out a single material tray in the material box, and the other end forms a material fork mounting end (604); a material fork buffer assembly is also mounted on the material fork mounting seat (601), the material fork buffer assembly comprises a material fork slide rail (605) arranged along the material tray pushing direction in the length direction and a material fork slider (606) that can slide along the material fork slide rail (605), the material tray pushing fork (602) is mounted on the material fork slider (606), and further comprises a buffer spring (607) arranged along the length direction of the material fork slide rail (605), the end of the buffer spring (607) can abut against the material fork slider (606) to buffer the movement of the material tray pushing fork (602).

5. The 2D and 3D visual inspection system for chip DB and gold wire WB according to claim 1, characterized in that: Two tray suction plates (8) capable of moving up and down and used for adsorbing trays on the tray conveying track (51) are provided at the tray conveying track (51); the two tray suction plates (8) are both arranged below the tray conveying track (51) and are respectively arranged corresponding to the 2D visual inspection camera (33) and the 3D visual inspection camera (34); the tray suction plate (8) corresponding to the 2D visual inspection camera (33) is made of a transparent material and is provided with a backlight source below.

6. The 2D and 3D visual inspection system for chip DB and gold wire WB according to claim 1, characterized in that: A 2D camera adjustment mechanism (301) and a 3D camera adjustment mechanism (302) are also provided at the visual inspection station (31) for adjusting the positions of the 2D visual inspection camera (33) and the 3D visual inspection camera (34), respectively. The 2D camera adjustment mechanism (301) and the 3D camera adjustment mechanism (302) include a 2D camera linear motor module (303) and a 3D camera linear motor module (304) that can respectively enable the 2D visual inspection camera (33) and the 3D visual inspection camera (34) to move in a horizontal plane along the length and width directions of the tray conveying track (51).

7. The 2D and 3D visual inspection system for chip DB and gold wire WB according to claim 1, characterized in that: The tray conveying mechanism (5) comprises a fixed conveying frame (501) and a movable conveying frame (502) capable of moving toward or away from the fixed conveying frame (501); the fixed conveying frame (501) and the movable conveying frame (502) respectively comprise a fixed track plate (503) and a movable track plate (504); the fixed track plate (503) and the movable track plate (504) are arranged in parallel and the upper ends of the opposite sides are both configured with a tray edge support (505); the tray edge support (505) on the fixed track plate (503) and the tray edge support (505) on the movable track plate (504) together constitute a tray conveying track (51).

8. The 2D and 3D visual inspection system for chip DB and gold wire WB according to claim 1, characterized in that: The tray conveying mechanism (5) further comprises a plurality of movable clamping jaws (52) capable of moving along the length direction of the tray conveying track (51) and used for clamping the edge of the tray. The movable clamping jaws (52) comprise two clamping plates (511) capable of relative movement. The movable clamping jaws (52) located near the tray receiving position (16) constitute a second tray pushing mechanism.

9. The 2D and 3D visual inspection system for chip DB and gold wire WB according to claim 1, characterized in that: An inkjet positioning mechanism (7) is provided at the tray conveying track (51), the inkjet positioning mechanism (7) comprising an inkjet positioning frame (71), an inkjet positioning plate (701) being mounted on the inkjet positioning frame (71) and being capable of blocking and positioning the tray on the tray conveying track (51), the inkjet positioning plate (701) being capable of moving up and down along the height direction of the tray conveying track (51) to the upper part or the lower part of the tray; the inkjet positioning frame (71) comprising a positioning frame bottom plate (702) and a positioning plate bracket (703) arranged on the positioning frame bottom plate (702), the positioning plate bracket (703) being slidably arranged on the positioning frame bottom plate (702) along the width direction of the tray conveying track (51), and the inkjet positioning plate (701) being arranged on the positioning plate bracket (703).

10. The 2D and 3D visual inspection system for chip DB and gold wire WB according to claim 8, characterized in that: A material tray support assembly is also provided on the positioning plate bracket (703), and the material tray support assembly comprises a material tray support rod (522) capable of supporting the bottom of the material tray on the material tray conveying track (51); the length direction of the material tray support rod (522) is arranged along the length direction of the material tray conveying track (51), and the upper end surface of the material tray support rod (522) is an arc surface.

Images