Coating roller and winding device

Abstract

The utility model relates to the field of magnetron sputtering, in particular to a coating roller and a winding device, the winding device comprises the coating roller and a water cooling plate, the water cooling plate has a radian matched with the peripheral surface of the coating roller, the water cooling plate is fixed in a vacuum chamber and is adjacent to the peripheral edges of the two ends of the coating roller, and a flow channel is arranged in the water cooling plate; the coating roller comprises an inner cylinder, an outer cylinder and a roller shaft, the outer cylinder is sleeved on the inner cylinder, a plurality of sections of spiral outer rotary rings are arranged on the outer peripheral surface of the inner cylinder, a multi-head spiral water channel is formed after the outer rotary rings abut against the inner wall of the outer cylinder, and the roller shaft penetrates through the inner cylinder and the outer cylinder to enable the inner cylinder and the outer cylinder to rotate. Cooling liquid in the spiral water channel is pushed by the outer rotating ring in a rotating mode. According to the utility model, a plurality of sections of outer rotary rings are used on the inner cylinder body, and a multi-head spiral water channel formed by the outer rotary rings and the outer cylinder body can enlarge the screw pitch of a single-head spiral water channel, so that the stroke of cooling liquid is increased after the inner cylinder body rotates for a circle.

Description

Technical Field

[0001] The utility model relates to the field of magnetron sputtering, in particular to a coating roller and a winding device. Background Art

[0002] The coating roller is used for transporting the substrate film and cooling the substrate film by reducing its surface temperature.

[0003] According to the search, as disclosed in the patent No. CN220665438U, a cooling device and a coating roller including the cooling device, it can be seen from the content that a first cooling water pipe and a second cooling water pipe are arranged inside the roller body, and heat is carried away through the first cooling water pipe and the second cooling water pipe. However, the heat dissipation effect is not good. Summary of the Utility Model

[0004] To solve the above problems, the utility model provides a coating roller and a winding device, aiming to solve the problem of poor heat dissipation effect.

[0005] To achieve the above purpose, the technical solution adopted by the utility model is: a coating roller includes an inner cylinder, an outer cylinder, and a roller shaft. The outer cylinder is sleeved on the inner cylinder. A plurality of spiral outer rotation rings are arranged on the outer peripheral surface of the inner cylinder. After the outer rotation rings abut against the inner wall of the outer cylinder, a multi-head spiral water channel is formed. The roller shaft penetrates through the inner cylinder and the outer cylinder to rotate the inner cylinder and the outer cylinder, and the coolant in the spiral water channel is rotated and pushed by the outer rotation rings.

[0006] A winding device is arranged in a vacuum chamber. The winding device includes the above-mentioned coating roller and a water-cooled plate. The water-cooled plate has a curvature adapted to the outer peripheral surface of the coating roller. The water-cooled plate is fixed in the vacuum chamber and is adjacent to the circumferences at both ends of the coating roller. A flow channel is arranged inside the water-cooled plate.

[0007] Further, a plurality of long notches are arranged on the surface of the water-cooled plate.

[0008] Further, a cooling baffle is also included. The cooling baffle is closely adjacent to the outside of both ends of the coating roller, so that gaps for heat conduction are formed between the two sides of the substrate film spread on the outer peripheral surface of the coating roller and the cooling baffle. A water belt is arranged on the cooling baffle, and the water belt is filled with flowing coolant to carry away the heat radiation on the cooling baffle.

[0009] Further, the cooling baffle includes a panel, a side plate, and a water belt. One edge of the side plate is arc-shaped, and the edge of the side plate coincides with the circumference of the end face of the coating roller. After the edge of the side plate is connected to the side face of the panel, the panel obtains a corresponding arc shape, so that the surface of the panel is flush with the outer peripheral surface of the coating roller. The water belt is arranged on the panel, and the water belt is filled with flowing coolant.

[0010] Further, after the side plates are connected to the panel, a semi-enclosed space is formed. The panel serves as the inner surface of this space, and the water hose is assembled inside the panel.

[0011] Further, it also includes connecting columns, and the side plates are connected by the connecting columns.

[0012] Further, the side plates and the panel are fixed by welding.

[0013] Further, the other edge of the side plate is formed with multiple inner angles or is arc-shaped.

[0014] Advantages of the present utility model:

[0015] The present utility model mainly uses multiple outer rotating rings on the inner cylinder body. The multi-headed spiral water channel formed with the outer cylinder body can increase the pitch of the single-headed spiral water channel. This makes the coolant travel a greater distance after the inner cylinder body rotates one circle. In other words, it shortens the residence time of the coolant in the inner cylinder body and improves the heat exchange efficiency. Moreover, under this design, the contact area between the coolant and the outer cylinder body is not reduced. Therefore, the present utility model has a remarkable heat dissipation effect. Description of the drawings

[0016] Figure 1 is the three-dimensional view of the winding device.

[0017] Figure 2 is the relationship diagram between the water-cooled plate and the coating roller.

[0018] Figure 3 is Figure 2 The enlarged schematic view of part A of

[0019] Figure 4 is the schematic view after the base film is spread on the coating roller.

[0020] Figure 5 is the relationship diagram between the coating roller and the cooling baffle.

[0021] Figure 6 is the three-dimensional view of the cooling baffle.

[0022] Figure 7 is Figure 6 The enlarged schematic view of part B of

[0023] Figure 8 is Figure 6 The three-dimensional view of another view surface.

[0024] Figure 9 is the cross-sectional view of the coating roller.

[0025] Figure 10 is Figure 9 The enlarged schematic view of part C of

[0026] Figure 11 It is a three-dimensional view of the outer rotating ring assembled on the inner cylinder.

[0027] Figure 12 It is a three-dimensional view of the water-cooled plate.

[0028] Figure 13 It is Figure 12 a sectional view of.

[0029] Figure 14 It is Figure 13 an enlarged schematic view at position D of. Specific implementation mode

[0030] As Figure 1-2 shown in FIGS. 3 and 4, in the magnetron sputtering device, there is a winding device located in the vacuum chamber. The winding device includes three parts: a coating roller 1, a cooling baffle 2, and a water-cooled plate 3. The substrate film 4 is spread on the coating roller 1. Specifically, through the guiding roller, the substrate film 4 covers the lower circumferential surface of the coating roller 1;

[0031] The cooling baffle 2 is located outside both ends of the coating roller 1. The cooling baffle 2 and the coating roller 1 are in a closely adjacent relationship. Its purpose is to weaken the temperature of both sides 41 of the substrate film 4. Therefore, the cooling baffle 2 plays a role in cooling, preventing the temperature from being too high and causing the edges of the substrate film 4 to burn;

[0032] As Figure 5 shown, in addition, the cooling baffle 2 can also act as a shielding effect. In the vacuum chamber, the space between both ends of the coating roller 1 and the inner wall of the vacuum chamber is the installation position of the cooling baffle 2 (as Figure 1 shown). The cooling baffle 2 has a relatively large area in the above space, blocking the entry of copper atoms into the above space, so that the copper atoms cannot transfer from the above space to both ends of the coating roller 1, thus avoiding the situation of slag falling at both ends of the coating roller 1 due to deposition; at the same time, it can also block the transfer of copper atoms from both ends of the coating roller 1 to both sides 41 of the substrate film 4. No coating can be formed on both sides 41 of part of the substrate film 4, otherwise there will be a situation of wire dropping.

[0033] It should be noted that there is a gap for heat conduction between the cooling baffle 2 and both sides 41 of the substrate film 4, and the gap is less than 3 mm.

[0034] As Figure 6-8 shown, the cooling baffle 2 includes a panel 21, side plates 22, and a water belt 23, as Figure 8As shown, the upper edge of the side plate 22 is arc-shaped, and the upper edge of the side plate 22 coincides with the peripheral edge of the end face of the coating roller 1. After the upper edge of the side plate 22 is connected to the side face of the panel 21, the panel 21 obtains a corresponding arc shape, making the surface of the panel 21 flush with the outer peripheral surface of the coating roller 1. In other words, there is a distance of less than 3 mm between the two sides 41 of the base film 4 laid on the coating roller 1 and the panel 21. The advantage of this design is that the distance between the panel 21 and the two sides 41 of the base film 4 can be controlled below 3 mm. In this solution, a side plate 22 with the same radius as the coating roller 1 is used. After connecting the panel 21 to the upper edge of the side plate 22, a surface flush with the outer peripheral surface of the coating roller 1 can be obtained on the panel 21. In the prior art, only a heat dissipation plate similar to the panel 21 is used and bent by external mechanical equipment. However, due to the lack of complex technical parameters, the arc of the heat dissipation plate cannot be flush with the outer peripheral surface of the coating roller 1. Then, for the non-flush area, their straight-line distance is far beyond 3 mm, generally in the range of 10 mm.

[0035] After the side plate 22 is connected to the panel 21, a semi-enclosed space is formed. The panel 21 serves as the inner surface of this space. The water belt 23 is assembled into the panel 21, and there is flowing coolant (in this embodiment, the coolant is refrigerant) in the water belt 23. For the base film 4 laid on the coating roller 1, the heat of its two sides 41 is transferred to the panel 21 in a non-contact form, and with the help of the coolant on the inner surface of the panel 21, the heat on the panel 21 is taken away.

[0036] The cooling baffle 2 is fixed in the vacuum chamber through the side plate 22. It is not difficult to see that when the cooling baffle 2 is disassembled, the connection between the panel 21 and the side plate 22 can always maintain the arc shape of the panel 21. After the above-mentioned heat dissipation plate is bent by mechanical equipment, it is assembled into the vacuum chamber through bolts. However, when using bolts for assembly, there will be a situation of secondary bending of the heat dissipation plate, and this secondary bending situation will not change the bending coefficient of the heat dissipation plate in the free state. Therefore, there will be a rebounding action during disassembly. In the present utility model, the bending of the panel 21 is maintained by the side plate 22. Just disassemble the bolts that fix the side plate 22 in the vacuum chamber. Obviously, this disassembly action will not have a rebounding action, thus solving the problem of danger during disassembly.

[0037] The water belt 23 is assembled onto the panel 21 after the panel 21 is connected to the side plate 22. Therefore, there will be no problem of coolant leakage at the connection due to stress.

[0038] In some embodiments, the stability of the side plate 22 on the panel 21 is also maintained by providing connection columns 24. The connection columns 24 are located in the above-mentioned space and are connected to the above-mentioned side plate 22 at both ends.

[0039] Further, the side plate 22 and the panel 21 are fixed by welding, so that the connection stability between the side plate 22 and the panel 21 can be further improved.

[0040] The lower edge of the side plate 22 is formed with a plurality of inner angles 22a or is arc-shaped. Preferably, the way of forming the inner angle a is more convenient for processing.

[0041] As shown in the figure, inside the coating roller 1, there is provided a multi-head spiral water channel 100. This setting method is mainly to form more heat dissipation areas on the outer peripheral surface of the coating roller 1 close to it, and, with rapid circulation, which is beneficial to the rapid cooling of the substrate film 4;

[0042] As Figure 9-11 shown, specifically, the coating roller 1 includes an inner cylinder 101 and an outer cylinder 102. On the outer peripheral surface of the inner cylinder 101, there are formed multiple spiral outer rotation rings 103. After the outer cylinder 102 is sleeved on the inner cylinder 101, the outer rotation rings 103 and the inner surface of the outer cylinder 102 form the spiral water channel 100;

[0043] At the same time, for each rotation of the spiral water channel 100, the coolant in the spiral water channel 100 will be advanced by a pitch. With the continuous rotation of the coating roller 1, the coolant can be transported from the water inlet to the water outlet. Therefore, the cyclic iteration of the coolant in the spiral water channel 100 also ensures that the surface temperature on the coating roller 1 is always in a cooled state.

[0044] Each head of the spiral water channel 100 supplies the flow of one path of coolant, and the coolants between the multi-head spiral water channels 100 are not connected.

[0045] The length of the coating roller 1 should be longer than the width of the substrate film 4. For example, if the width of the substrate film 4 is 1350 mm, then the length of the coating roller 1 should be at least more than 1500 mm. That is to say, the lower part of the outer peripheral surface of the coating roller 1 (when coating, the substrate film 4 is located on the lower half of the coating roller 1) has an unobstructed area. The water-cooling plate 3 is fixed in the vacuum chamber and blocks the above area. During coating, it can prevent copper atoms from coating this area. Similarly, it can prevent the appearance of a coating layer on the outer peripheral surface of the coating roller 1, avoid the situation of slag falling on the outer peripheral surface of the coating roller 1 due to deposition, and prevent the slag from transferring to the substrate film 4, so as not to damage the substrate film 4;

[0046] As Figure 12-14 shown, the water-cooling plate 3 is provided with a flow channel 31 for the flow of condensate (refrigerant in this embodiment). The purpose is to prevent the water-cooling plate 3 from forming a second heat source. The water-cooling plate 3 will deform when heated. The distance between the water-cooling plate 3 and the substrate film 4 is 3 mm. This uncontrolled deformation amplitude will break through this distance and scratch or interfere with the transportation of the substrate film 4.

[0047] The surface of the water-cooling plate 3 is provided with a plurality of long notches 32 distributed in an array. Bolts pass through the long notches 32 to connect with the inner wall of the vacuum chamber. The long notches 32 have an appropriate length for adjusting the position of the water-cooling plate 3 and adjusting the shielding area of the water-cooling plate 3 for the coating roller 1.

[0048] The water-cooling plate 3 has an arc shape adapted to the outer circumference of the coating roller 1.

[0049] Similarly, the water belt 23 in the cooling baffle 2 can also prevent the panel 21 from deforming.

[0050] In summary, there is no contact between the cooling baffle 2, the water-cooling plate 3 and the coating roller 1. The cooling baffle 2 and the water-cooling plate 3 are both adjacent to both sides 41 of the base film 4 at a short distance.

[0051] This short-distance adjacency is a gap with a distance less than 3 mm between them.

[0052] The above embodiments are only descriptions of the preferred embodiments of the present invention, and do not limit the scope of the present invention. Without departing from the design spirit of the present invention, various deformations and improvements made by those of ordinary engineering and technical personnel in the art to the technical solutions of the present invention shall fall within the protection scope determined by the claims of the present invention.

Claims

1. A coating roller, characterized in that: It includes an inner cylinder, an outer cylinder and a roller. The outer cylinder is sleeved on the inner cylinder. The outer circumference of the inner cylinder is provided with multiple sections of spiral outer rings. When the outer rings abut against the inner wall of the outer cylinder, a multi-head spiral waterway is formed. The roller passes through the inner cylinder and the outer cylinder to rotate the inner cylinder and the outer cylinder, and the coolant in the spiral waterway is pushed forward by the rotation of the outer rings.

2. A winding device, arranged in a vacuum chamber, characterized in that: The invention comprises a coating roller as claimed in claim 1.

3. A winding device according to claim 2, characterized in that: It also includes a water cooling plate, which has an arc that matches the outer peripheral surface of the coating roller. The water cooling plate is fixed in the vacuum chamber and is adjacent to the peripheral edges of both ends of the coating roller. A flow channel is arranged in the water cooling plate.

4. A winding device according to claim 3, characterized in that: The surface of the water cooling plate is provided with a plurality of long notches.

5. A winding device according to claim 3, characterized in that: It also includes a cooling baffle, which is closely adjacent to the two ends of the coating roller so that a gap for heat conduction is formed between the two sides of the substrate film spread on the outer circumference of the coating roller and the cooling baffle. A water belt is provided on the cooling baffle, and the water belt has flowing coolant, which takes away the heat radiation on the cooling baffle through the water belt.

6. A winding device according to claim 5, characterized in that: The cooling baffle includes a panel, a side panel, and a water hose. The side panel has an arc-shaped edge, and the edge of the side panel coincides with the peripheral edge of the end face of the coating roller. After the edge of the side panel is connected to the side of the panel, the panel obtains a corresponding arc shape, so that the surface of the panel is flush with the outer peripheral surface of the coating roller. The water hose is set on the panel, and there is flowing coolant in the water hose.

7. A winding device according to claim 6, characterized in that: After the side panels are connected to the panel, a semi-enclosed space is formed, and the panel serves as one side of the space as the inner side, and the water hose is assembled into the panel.

8. A winding device according to claim 6, characterized in that: The utility model also comprises connecting columns, and the side panels are connected with each other through the connecting columns.

9. A winding device according to claim 6, characterized in that: The side panels and the front panel are fixed by welding.

10. A winding device according to claim 6, characterized in that: The other edge of the side plate is formed with a plurality of inner angles or is in an arc shape.

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