Boat carrying device and semiconductor process equipment

Abstract

The utility model discloses a boat carrying device and semiconductor process equipment, and the boat carrying device comprises a fixed seat (11), a cavity cover (20), a bearing part (30), an elastic sleeve (40), and a limiting mechanism (50). The first end of the bearing part (30) penetrates through the cavity cover (20) to extend to the outer side of the cavity cover (20) and is connected with the fixing seat (11), the bearing part (30) is sleeved with the elastic sleeve (40), the first port and the second port of the elastic sleeve (40) are in sealing fit with the outer side surface of the cavity cover (20) and the fixing seat (11) respectively, the limiting mechanism (50) comprises a supporting shaft (51) and a joint bearing (52), and the joint bearing (52) is arranged on the supporting shaft (51). The first end of the supporting shaft (51) is connected with the fixing base (11), and the second end of the supporting shaft (51) is movably connected with the cavity cover (20) through the knuckle bearing (52). According to the scheme, the situation that force cannot be applied due to the fact that the elastic sleeve is crushed by the cavity cover can be avoided.

Description

Technical Field

[0001] This application belongs to the field of semiconductor technology, and particularly relates to a boat device and a semiconductor processing equipment. Background Art

[0002] Horizontal tube furnaces are important low-pressure chemical vapor deposition thin-film deposition devices for depositing thin films on substrates. In the thin-film deposition process steps, one of the steps is to place the substrate (such as a wafer) on a wafer carrier device, and then place the wafer carrier device (essentially a boat) carrying the substrate on a boat device. The boat device is transported by a conveying mechanism into the horizontal tube furnace.

[0003] To simplify the operation steps, in the horizontal tube furnaces related to the related art, the chamber cover of the horizontal tube furnace is integrated on the boat device. During the process of the conveying mechanism driving the boat device into the horizontal tube furnace, the chamber cover moves synchronously with the boat device, so as to realize the transportation of the wafer carrier device into the horizontal tube furnace, and at the same time, the chamber cover will also seal and cover the furnace opening of the horizontal tube furnace. To achieve sealing, the carrier of the wafer carrier device passes through the chamber cover, and a bellows is sleeved thereon. The first end of the bellows is sealed and fixed on the carrier, and the second end of the bellows is sealed and fixed on the outside of the chamber cover. The bellows can apply an elastic force to the chamber cover, which is beneficial to the sealing and covering of the furnace opening by the chamber cover. To further improve the sealing effect, the wafer carrier device of the related art is also provided with a bent elastic piece. The first end of the bent elastic piece is fixed on the carrier, and the second end of the bent elastic piece is fixed on the outside of the chamber cover. The bent elastic piece applies a force to the chamber cover so that the chamber cover can be better sealed and covered.

[0004] Of course, considering that the chamber cover may be deflected, the connection between the second end of the bent elastic piece and the chamber cover is spaced from the second end of the bellows. However, in the actual process, the bent elastic piece will gradually lose its elastic force due to frequent deformation after long-term use, resulting in the gradual loss of the force applied to the chamber cover. This leads to poor sealing effect of the chamber cover. At the same time, the weakening of the elastic force of the bent elastic piece is likely to cause excessive compression of the bellows during the closing process of the chamber cover, resulting in damage to the elasticity of the bellows and inability to rebound, and ultimately leading to the weakening of the force of the bellows and inability to achieve good sealing and covering of the chamber cover. Summary of the Utility Model

[0005] The utility model discloses a boat device and a semiconductor processing equipment to solve the problem of poor sealing effect caused by insufficient force on the chamber cover after the boat device related to the related art has been working for a long time.

[0006] To solve the above technical problems, the utility model provides the following technical solutions:

[0007] In a first aspect, the present utility model discloses a boat-carrying device. The disclosed boat-carrying device includes a fixed seat, a chamber cover, a carrier, an elastic sleeve, and a limiting mechanism;

[0008] The first end of the carrier passes through the chamber cover and extends to the outside of the chamber cover, and is connected to the fixed seat. The elastic sleeve is sleeved outside the carrier. The first port and the second port of the elastic sleeve are respectively in sealing cooperation with the outer surface of the chamber cover and the fixed seat. The limiting mechanism includes a support shaft and a spherical plain bearing. The first end of the support shaft is connected to the fixed seat, and the second end of the support shaft is movably connected to the chamber cover through the spherical plain bearing.

[0009] In a second aspect, an embodiment of the present application discloses a semiconductor processing apparatus. The disclosed semiconductor processing apparatus includes a process chamber, a conveying mechanism, and the boat-carrying device according to the first aspect. The conveying mechanism is fixedly connected to the fixed seat. The conveying mechanism is used to drive the boat-carrying device to move, so that the carrier enters and exits the process chamber through the chamber opening. When the carrier extends into the process chamber, the chamber cover seals and covers the chamber opening; when the carrier is outside the process chamber, the chamber cover is separated from the chamber opening.

[0010] The technical solution adopted by the present utility model can achieve the following technical effects:

[0011] The boat-carrying device disclosed in the embodiment of the present application improves the structure of the boat-carrying device involved in the related art. The elastic sleeve is sleeved on the carrier, and the two ends of the elastic sleeve are respectively in sealing cooperation with the chamber cover and the fixed seat. Furthermore, when the chamber cover closes the chamber opening, the elastic sleeve can apply an elastic force to the chamber cover based on the fixed seat, which is beneficial to the sealing of the chamber cover to the chamber opening. At the same time, the support shaft is respectively connected to the fixed seat and the spherical plain bearing, and then can be connected to the chamber cover through the spherical plain bearing. Since the inner ring and the outer ring of the spherical plain bearing are spherically hinged, it can better adapt to the inclination of the chamber cover and continuously apply a pressing force to the chamber cover. At the same time, the force application structure formed by the support shaft and the spherical plain bearing has better compressive resistance compared with the bent elastic sheet described in the background art. Therefore, it can replace the bent elastic sheet to assist in pressing the inclined chamber cover while avoiding the situation that the elastic sleeve is crushed by the chamber cover and cannot apply force, and further avoid the situation that the elastic sleeve is overcompressed by the chamber cover and cannot rebound. Description of the Drawings

[0012] Figures 1 to 3 Are respectively schematic structural diagrams of the boat-carrying device disclosed in the embodiment of the present utility model from different perspectives;

[0013] Figure 4It is an exploded view of the boat-carrying device disclosed in the embodiment of the present utility model;

[0014] Figure 5 and Figure 6 are respectively schematic views of partial structures of the boat-carrying device disclosed in the embodiment of the present utility model from different perspectives;

[0015] Figure 7 and Figure 8 are respectively Figure 5 schematic views of the structure shown from different perspectives in the exploded state;

[0016] Figures 9 to 11 are respectively schematic views of partial structures of the boat-carrying device disclosed in the embodiment of the present utility model from different perspectives;

[0017] Figures 12 to 14 are respectively schematic views of the carrier of the boat-carrying device disclosed in the embodiment of the present utility model from different perspectives;

[0018] Figure 15 and Figure 16 are respectively schematic views of the semiconductor process equipment disclosed in the embodiment of the present utility model in different states.

[0019] Explanation of reference numerals:

[0020] 11 - fixed seat, 12 - first connecting portion, 121 - first through hole, 13 - second threaded member, 14 - hoop assembly, 141 - hoop member, 142 - first threaded member, 15 - second connecting portion, 151 - first sub-connecting portion, 1511 - first sub-cavity, 1512 - fourth threaded hole, 1513 - third threaded member, 152 - second sub-connecting portion, 1521 - second sub-cavity,

[0021] 20 - chamber cover, 21 - first sealing ring,

[0022] 30 - carrier, 31 - first carrier rod, 311 - first threaded hole, 32 - second carrier rod, 321 - second threaded hole, 33 - first sleeve, 331 - first annular flange, 34 - second sleeve, 341 - second annular flange, 35 - third connecting portion,

[0023] 40 - elastic sleeve, 41 - first flange,

[0024] 50 - limiting mechanism, 51 - support shaft, 511 - first screw rod, 512 - nut, 52 - spherical plain bearing, 53 - bearing seat, 54 - first retaining ring, 55 - second retaining ring, 56 - fourth threaded member, 57 - fifth threaded member,

[0025] 60 - Process chamber, 61 - Chamber opening, 71 - Reflective member, 72 - Second screw, 73 - Sixth threaded member, 74 - Limiting sleeve,

[0026] 81 - Bracket, 82 - Conveyor mechanism, 83 - Wafer carrier device. Detailed implementation manners

[0027] To make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions of the present utility model will be clearly and completely described below in conjunction with the specific embodiments of the present utility model and the corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0028] The following will, in conjunction with the drawings, detail the technical solutions disclosed in each embodiment of the present utility model.

[0029] Please refer to Figures 1 to 16 , an embodiment of the present utility model discloses a boat device, and the disclosed boat device belongs to semiconductor process equipment. The disclosed boat device includes a fixed seat 11, a chamber cover 20, a carrier 30, an elastic sleeve 40, and a limiting mechanism 50.

[0030] The fixed seat 11 is the base of the boat device, and the fixed seat 11 can directly or indirectly realize the connection between the boat device and the conveyor mechanism 82 of the semiconductor process equipment. At the same time, the fixed seat 11 is also the installation foundation for other components of the boat device, and other components of the boat device can be directly or indirectly installed on the fixed seat 11.

[0031] The chamber cover 20 is a part of the semiconductor process equipment and also a part of the boat device, and is used for sealing cooperation with the process chamber 60 of the semiconductor process equipment to enclose the process space of the semiconductor process equipment. The carrier 30 is the main part for loading the wafer carrier device (i.e., the carrier boat) 83 described in the background art. In the embodiment of the present utility model, the first end of the carrier 30 passes through the chamber cover 20 and extends to the outside of the chamber cover 20, and is connected to the fixed seat 11. Specifically, the first end of the carrier 30 passing through the chamber cover 20 can be fixedly connected to the fixed seat 11 by means of connection, clamping, etc. The first end of the carrier 30 passing through the chamber cover 20 can be directly fixedly connected to the fixed seat 11, or can be indirectly fixedly connected to the fixed seat 11 through an intermediate member (such as the first connecting portion 12 mentioned later). The embodiment of the present utility model does not limit the specific connection manner between the carrier 30 and the fixed seat 11. It should be noted that the inner side of the chamber cover 20 faces the process space, and the outer side and the inner side of the chamber cover 20 are two opposite sides of the chamber cover 20.

[0032] The elastic sleeve 40 is a telescopic kit that can elastically expand and contract. The elastic sleeve 40 can be a corrugated pipe or other types of telescopic kits. The specific type of the elastic sleeve 40 is not limited in the embodiments of the present invention. Since the first end of the carrier 30 passes through the chamber cover 20, and the second end of the carrier 30 needs to enter the process space together with the wafer carrier device 83 for processing during the process. At least during the process, the process space needs to be sealed. Based on this, in the embodiments of the present invention, the elastic sleeve 40 is sleeved outside the carrier 30. The first port and the second port of the elastic sleeve 40 are respectively in sealing cooperation with the outer surface of the chamber cover 20 and the fixed seat 11, so as to realize the sealing at the joint of the chamber cover 20 and the carrier 30.

[0033] In an optional solution, the elastic sleeve 40 can be a corrugated pipe with an outer diameter of φ50 - φ60 mm and an effective compression length greater than 20 mm. Specifically, the corrugated pipe can be a welded corrugated pipe. The welded corrugated pipe has good bendability and telescopicity, a long service life, and high mechanical displacement compensation, which is beneficial to elastically pressing the chamber cover 20, and further realizes the sealing between the chamber cover 20 and the chamber opening 61 of the process chamber 60.

[0034] When the conveying mechanism 82 drives the wafer carrier device to move so that the chamber cover 20 closes the chamber opening 61 of the process chamber 60, the conveying mechanism 82 drives the chamber cover 20 to press the chamber opening 61. When the chamber cover 20 touches the chamber opening 61 and is limited, the elastic sleeve 40 will be compressed, and the elastic restoring force of the elastic sleeve 40 will drive the chamber cover 20 to press the chamber opening 61, so as to realize the sealing of the chamber opening 61 and form a sealed process space. That is to say, the elastic sleeve 40 not only plays a role in realizing the sealing at the joint of the chamber cover 20 and the carrier 30, but also can assist in realizing the sealing between the chamber cover 20 and the chamber opening 61 of the process chamber 60.

[0035] Specifically, the sealing cooperation between the first port of the elastic sleeve 40 and the outer surface of the chamber cover 20 and between the second port of the elastic sleeve 40 and the fixed seat 11 can be realized by welding sealing, bonding sealing, seal member sealing and other methods. The specific sealing connection structure between them is not limited in the embodiments of the present invention. In an optional solution, the first port of the elastic sleeve 40 can be in sealed connection with the outer surface of the chamber cover 20 by welding. The second port of the elastic sleeve 40 can be provided with a first flange 41, and the first flange 41 is fixedly connected to the fixed seat 11 through a threaded connector. A second sealing ring is provided between the first flange 41 and the fixed seat 11, so as to realize the sealing cooperation between the second port of the elastic sleeve 40 and the fixed seat 11.

[0036] The limiting mechanism 50 plays a limiting role. Specifically, the limiting mechanism 50 connects the fixed seat 11 and the chamber cover 20, and is based on the fixed seat 11 to be in limiting cooperation with the chamber cover 20. In the embodiment of the present utility model, the limiting mechanism 50 is a rigid structure. Due to the limitation of the limiting mechanism 50, the chamber cover 20 can be prevented from excessively squeezing the elastic sleeve 40, and thus the problem of damaging the elasticity of the elastic sleeve 40 due to excessive squeezing can be avoided. Of course, the limiting mechanism 50 can also assist the elastic sleeve 40 to press the chamber cover 20, which is beneficial to the sealing between the chamber cover 20 and the chamber opening 61.

[0037] In the embodiment of the present utility model, the limiting mechanism 50 includes a support shaft 51 and a spherical plain bearing 52. The first end of the support shaft 51 is connected to the fixed seat 11, and the second end of the support shaft 51 is movably connected to the chamber cover 20 through the spherical plain bearing 52.

[0038] The spherical plain bearing 52 is a spherical sliding bearing. The spherical plain bearing 52 includes an inner ring and an outer ring, and the inner ring and the outer ring are in spherical cooperation, so that there is a relatively flexible rotational freedom between the inner ring and the outer ring. In the embodiment of the present utility model, the second end of the support shaft 51 being movably connected to the chamber cover 20 through the spherical plain bearing 52 can be considered as: the inner ring of the spherical plain bearing 52 is connected to the second end of the support shaft 51, and the outer ring of the spherical plain bearing 52 is connected to the chamber cover 20. Due to the spherical cooperation between the inner ring and the outer ring, the support shaft 51 and the chamber cover 20 are actually indirectly movably connected. Since the sliding surface between the inner ring and the outer ring is spherical, it can move within a certain angular range. It can still work when the support shaft 51 is not concentric with the bearing seat 53 mentioned later. The spherical plain bearing 52 can bear a large load and can bear the load with both radial and axial directions existing simultaneously. When the chamber cover 20 tilts due to gravity, the adjustment of the spherical plain bearing 52 is beneficial to realizing the pressing of the chamber cover 20 to ensure that the chamber cover 20 is still tightly sealed against the chamber opening 61.

[0039] The boat loading device disclosed in the embodiment of the present utility model is connected to the conveying mechanism 82 of the semiconductor process equipment. Specifically, the conveying mechanism 82 is connected to the fixed seat 11, so as to realize the driving connection with the entire boat loading device through the fixed seat 11. The semiconductor process equipment includes a process chamber 60, and the process chamber 60 has a chamber opening 61. In the embodiment where the semiconductor process equipment is a horizontal pipeline equipment, the chamber opening 61 is the furnace opening described in the background art.

[0040] In the specific working process, the conveying mechanism 82 drives the fixed seat 11 to move, thereby realizing the movement of the entire boat-carrying device. The boat-carrying device moves close to the chamber opening 61 until the chamber cover 20 seals and covers the chamber opening 61. The part of the carrier 30 including its second end then carries the wafer carrier device 83 into the process space enclosed by the chamber cover 20 and the process chamber 60. The elastic sleeve 40 is compressed and shrinks, and at the same time, under the action of its elastic restoring force, it can drive the chamber cover 20 to seal the chamber opening 61. During this process, the chamber cover 20 tilts due to gravity and other reasons. Since the inner ring and the outer ring of the spherical plain bearing 52 can rotate relative to each other, it can still adaptively support the chamber cover 20 when the chamber cover 20 tilts, thereby assisting the elastic sleeve 40 to ensure the sealing effect between the chamber cover 20 and the chamber opening 61.

[0041] Meanwhile, the support shaft 51 is connected to the fixed seat 11, and the support shaft 51 is connected to the chamber cover 20 through the spherical plain bearing 52, so as to be able to limit the chamber cover 20 based on the fixed seat 11. Compared with the bent elastic piece in the background art, the limiting mechanism 50 disclosed in the embodiment of the present invention is a non-elastic structure. Therefore, it can be avoided from being crushed, and it can also be avoided that all the pressure of the chamber cover 20 is applied to the elastic sleeve 40, and further, the problem of excessive compression of the elastic sleeve 40 and damage to its elasticity can be avoided. Since the limiting mechanism 50 adopts the spherical plain bearing 52, it can support and press the tilted chamber cover 20 instead of the bent elastic piece in the background art, ensuring the sealing effect between the chamber cover 20 and the chamber opening 61.

[0042] The boat-carrying device disclosed in the embodiment of the present application improves the structure of the boat-carrying device involved in the related art. The elastic sleeve 40 is sleeved on the carrier 30, and the two ends of the elastic sleeve 40 are respectively in sealing cooperation with the chamber cover 20 and the fixed seat 11. Thus, during the process of the chamber cover 20 closing the chamber opening 61, the elastic sleeve 40 can apply an elastic force to the chamber cover 20 based on the fixed seat 11, which is beneficial to the sealing of the chamber cover 20 to the chamber opening 61. Meanwhile, the support shaft 51 is respectively connected to the fixed seat 11 and the spherical plain bearing 52, and can then be connected to the chamber cover 20 through the spherical plain bearing 52. Since the inner ring and the outer ring of the spherical plain bearing 52 are spherical hinges, it can better adapt to the tilt of the chamber cover 20 and continuously apply a pressing force to the chamber cover 20. At the same time, the force application structure formed by the support shaft 51 and the spherical plain bearing 52 has good compressive resistance compared with the bent elastic piece described in the background art. Therefore, while being able to replace the bent elastic piece to assist in pressing the tilted chamber cover 20, it can avoid the situation that the elastic sleeve 40 is crushed by the chamber cover 20 and cannot apply force, and further avoid the situation that the elastic sleeve 40 is overcompressed by the chamber cover 20 and cannot rebound.

[0043] The structure of the carrier 30 can be various as long as it can carry the wafer carrier device 83. The embodiments of the present invention do not limit the specific structure of the carrier 30. In one embodiment, the carrier 30 may include a first carrier rod 31 and a second carrier rod 32, and the first carrier rod 31 and the second carrier rod 32 may be spaced apart. Specifically, the first carrier rod 31 and the second carrier rod 32 may be parallel or there may be a preset small angle between the first carrier rod 31 and the second carrier rod 32, so that the first carrier rod 31 and the second carrier rod 32 are spaced apart. There may be multiple elastic sleeves 40, and they respectively correspond to the first carrier rod 31 and the second carrier rod 32 one by one. The elastic sleeves 40 are sleeved outside the corresponding first carrier rod 31 or second carrier rod 32. In this structure, the first carrier rod 31 and the second carrier rod 32 can respectively support two side edges of the wafer carrier device 83.

[0044] The first ends of the first carrier rod 31 and the second carrier rod 32 can respectively pass through the chamber cover 20 and extend to the outside of the chamber cover 20. The first end of the carrier 30 includes the first ends of the first carrier rod 31 and the second carrier rod 32. Most of the structure of the second end of the first carrier rod 31 and most of the structure of the second end of the second carrier rod 32 are located inside the chamber cover 20, so as to support the wafer carrier device 83 during the process and be in the process space.

[0045] The elastic sleeves 40 are sleeved outside the corresponding first carrier rod 31 or second carrier rod 32. Specifically, the first port and the second port of the elastic sleeve 40 sleeved on the first carrier rod 31 are respectively in sealing cooperation with the outer surface of the chamber cover 20 and the fixed seat 11, and the first port and the second port of the elastic sleeve 40 sleeved on the second carrier rod 32 are respectively in sealing cooperation with the outer surface of the chamber cover 20 and the fixed seat 11. While the carrier 30 of this structure supports the wafer carrier device 83, multiple elastic sleeves 40 can be configured so that the multiple elastic sleeves 40 can cooperate with each other, thereby improving the elastic pressing on the chamber cover 20, and further making the sealing and pressing between the chamber cover 20 and the chamber opening 61 more stable.

[0046] The embodiments of the present invention do not limit the number of the first carrier rod 31 and the second carrier rod 32. In one embodiment, both the first carrier rod 31 and the second carrier rod 32 can be one. The connection points of the first carrier rod 31, the second carrier rod 32 and the spherical plain bearing 52 with the chamber cover 20 can be distributed in a triangle, which is beneficial to improving the balance of the acting force on the chamber cover 20, beneficial to alleviating the tilting problem of the chamber cover 20, and also capable of improving the stability of the pressing on the chamber cover 20. Specifically, in this case, there may be two first connection parts 12, and the two first connection parts 12 can be symmetrically distributed with respect to the center of the chamber cover 20. The distance between the two first connection parts 12 can be between 80 mm and 120 mm.

[0047] As described above, the carrier 30 can be directly fixedly connected to the fixed seat 11 or indirectly fixedly connected to the fixed seat 11. Based on this, in a further embodiment, the boat device disclosed in the embodiment of the present invention may include a plurality of first connecting portions 12. The first connecting portion 12 may be a tubular structural member. The first end portion of the first connecting portion 12 is fixed to the fixed seat 11. The second end portion of the first connecting portion 12 passes through the chamber cover 20 and extends to the side of the chamber cover 20 facing away from the fixed seat 11 (i.e., the inner side of the chamber cover 20).

[0048] The end portions of the first carrier rod 31 and the second carrier rod 32 (i.e., the first end of the first carrier rod 31 and the first end of the second carrier rod 32) respectively extend into the corresponding first connecting portion 12 from the port of the second end portion of the corresponding first connecting portion 12 and are fixedly connected to the corresponding first connecting portion 12. The elastic sleeve 40 is sleeved outside the corresponding first connecting portion 12. Since the first end portions of the first carrier rod 31 and the second carrier rod 32 extend into the corresponding first connecting portion 12, the elastic sleeve 40 is sleeved outside the corresponding first connecting portion 12, and thus indirectly sleeved outside the first carrier rod 31 or the second carrier rod 32. Since the first port and the second port of the elastic sleeve 40 are respectively in sealing cooperation with the outer surface of the chamber cover 20 and the fixed seat 11, and at the same time the elastic sleeve 40 is sleeved outside the first connecting portion 12, the first connecting portion 12 will not cause a sealing problem in the process space even if it passes through the chamber cover 20. In addition, the plurality of first connecting portions 12 can support the corresponding elastic sleeves 40, so as to relieve the inclination of the chamber cover 20.

[0049] Since the carrier 30 directly supports the wafer carrier device 83 and most of the structure of the carrier 30 is in the process space, once the carrier 30 is damaged, a large production accident will occur. In this structure, the first connecting portion 12 is a hollow tubular structural member, which can enable the portions of the first carrier rod 31 and the second carrier rod 32 passing through the chamber cover 20 to be located in the first connecting portion 12, and finally protect the first carrier rod 31 and the second carrier rod 32 to avoid damage to the portions exposed outside the chamber cover 20.

[0050] The first carrier rod 31 and the second carrier rod 32 and the corresponding first connecting portion 12 can be tightly fitted by plugging to achieve fixed connection. Of course, they can also be connected by a connecting member (such as the second threaded member 13 mentioned later). Considering possible disassembly, repair, etc. in the future, in one embodiment, the first carrier rod 31 can be connected by a connecting member (such as the second threaded member 13 mentioned later) after a relatively loose plugging. The connecting member can be a threaded connecting member, a connecting pin, etc. The embodiment of the present invention does not limit the specific type of the connecting member.

[0051] In a specific embodiment, a fifth threaded hole may be formed in the pipe wall of the first connecting portion 12, and the second threaded member 13 may pass through the fifth threaded hole and abut against the first bearing rod 31 or the second bearing rod 32, so as to achieve the fixed connection between the first connecting portion 12 and the first bearing rod 31 or the second bearing rod 32. This connection method can prevent axial displacement and relative rotation between the first bearing rod 31 and the second bearing rod 32 and the corresponding first connecting portion 12, thereby improving the connection stability therebetween.

[0052] In another specific embodiment, a first through hole 121 may be formed in the pipe wall of the first connecting portion 12, a first threaded hole 311 may be formed in the first bearing rod 31, and a second threaded hole 321 may be formed in the second bearing rod 32. The first connecting portion 12 may be fixedly connected to the first bearing rod 31 or the second bearing rod 32 by a second threaded member 13 that passes through the first through hole 121 and is threadedly connected to the first threaded hole 311 or the second threaded hole 321. This structure can prevent axial displacement and relative rotation between the first bearing rod 31 or the second bearing rod 32 and the corresponding first connecting portion 12, thereby improving the connection stability therebetween. At the same time, this method can prevent the second threaded member 13 from applying too large a tightening force to the first bearing rod 31 or the second bearing rod 32, and it is not easy to cause damage to the first bearing rod 31 or the second bearing rod 32.

[0053] There can be various connection methods between the first connecting portion 12 and the fixed seat 11 to fix the first end portion of the first connecting portion 12 to the fixed seat 11, and the embodiments of the present invention do not make limitations. For example, the first connecting portion 12 and the fixed seat 11 can be fixed by welding, bonding, flange connection and other methods.

[0054] Since the elastic sleeve 40 is sleeved outside the corresponding first connecting portion 12 and the elastic sleeve 40 will expand and contract during operation, a circular gap can be formed between the first connecting portion 12 and the elastic sleeve 40. This circular gap extends along the first connecting portion 12 into the process space, and ensuring the seal of this circular gap is beneficial to the seal of the process space. Since the second port of the elastic sleeve 40 is in sealing cooperation with the fixed seat 11, in order to ensure the seal of the process space, in the embodiments of the present invention, the first end portion of the first connecting portion 12 is in sealing cooperation with the fixed seat 11 to seal the circular gap at the connection between the first end portion of the first connecting portion 12 and the fixed seat 11.

[0055] In the embodiments of the present utility model, there are various ways to achieve the sealing between the first end of the first connecting portion 12 and the fixed seat 11. For example, the second port of the elastic sleeve 40 is in sealing cooperation with the fixed seat 11, so that the second port of the elastic sleeve 40 is sealed and covered by the fixed seat 11. The first end of the first connecting portion 12 can be fixed to the fixed seat 11 by means such as welding, bonding, connecting members (such as screws), etc. The first end of the first connecting portion 12 can be an open end or a closed end. In this case, even if the connection between the first end of the first connecting portion 12 and the fixed seat 11 is a non-sealed connection, it will not cause problems with the sealing of the process space.

[0056] To improve the stability of the connection, the first end of the first connecting portion 12 can be fixedly connected to the fixed seat 11 by threading. In this case, the fixed seat 11 can be provided with a third threaded hole, and the first end of the first connecting portion 12 is a threaded connection end, and the threaded connection end is in threaded cooperation with the third threaded hole, so as to achieve the fixed connection between the first connecting portion 12 and the fixed seat 11. The third threaded hole can penetrate the fixed seat 11 or not penetrate the fixed seat 11, and the embodiments of the present utility model do not make any restrictions. In a further embodiment where the third threaded hole penetrates the fixed seat 11, the first end of the first connecting portion 12 is threadedly fixed to the third threaded hole of the fixed seat 11, and the threaded connection between the two is welded to be sealed by solder. In this case, the first end of the first connecting portion 12 and the fixed seat 11 are fixed by two means, namely threaded cooperation and welding, so as to improve the stability of the fixed connection. At the same time, since the threaded cooperation between the third threaded hole penetrating the fixed seat 11 and the first end of the first connecting portion 12 is sealed by solder, leakage will not occur at the threaded cooperation between the third threaded hole on the fixed seat 11 and the first connecting portion 12, and thus the sealing of the annular gap can be ensured, which is beneficial to the sealing of the process space.

[0057] As described above, in the boat device disclosed in the embodiments of the present utility model, the fixed seat 11 can be directly or indirectly connected to the conveying mechanism 82 of the semiconductor process equipment. In one embodiment, the boat device disclosed in the embodiments of the present utility model may further include a second connecting portion 15, and the second connecting portion 15 is fixed to the side of the fixed seat 11 facing away from the chamber cover 20 and is used for connecting to the conveying mechanism 82. In this case, the conveying mechanism 82 can be indirectly connected to the fixed seat 11 through the second connecting portion 15, and the conveying mechanism 82 is connected to the boat device by connecting to the second connecting portion 15.

[0058] The conveying mechanism 82 is connected to the boat-loading device. The boat-loading device is similar to a cantilever structure. In order to reduce the torque received at the connection between the conveying mechanism 82 and the boat-loading device, in one embodiment, the fixing base 11 can be a plate-like structure, which is beneficial to the thin and light design of the fixing base 11, and further beneficial to reducing the torque received at the connection between the conveying mechanism 82 and the boat-loading device. Of course, the specific shape of the fixing base 11 is not limited in the embodiments of the present invention. In other embodiments, the second connecting portion 15 can be a hollow structure. In this case, the second connecting portion 15 can be made of a material with relatively high strength and relatively small density. For example, the second connecting portion 15 can be made of steel. The second connecting portion 15 being a hollow structure can reduce the weight of the boat-loading device, and further reduce the torque received at the connection between the conveying mechanism 82 and the boat-loading device, and ultimately ensure the stability of the connection.

[0059] As described in an embodiment above, the fixing base 11 can be provided with a third threaded hole, and the third threaded hole can penetrate through the fixing base 11. The first end of the first connecting portion 12 can be threadedly and fixedly connected to the third threaded hole. Further, the first end of the first connecting portion 12 can extend into the inner cavity of the second connecting portion 15, so that the first end of the first connecting portion 12 and the third threaded hole can achieve threaded engagement in a relatively long area as much as possible, which is beneficial to improving the stability of the connection.

[0060] As described above, the first connecting portion 12 is a tubular structural member, and the port at the second end of the first connecting portion 12 is for the insertion of the end of the first carrier rod 31 or the second carrier rod 32. The first carrier rod 31 and the second carrier rod 32 will extend into the process space, and it is not easy to form a seal between the first carrier rod 31 or the second carrier rod 32 and the first connecting portion 12. Therefore, the first end of the first connecting portion 12 cannot damage the sealing performance of the process space. Based on this, in an alternative solution, the first end of the first connecting portion 12 is a closed end, which is beneficial to ensuring the seal.

[0061] In other embodiments, the first end of the first connecting portion 12 can be an open end. In the embodiment where the first end of the first connecting portion 12 extends into the inner cavity of the second connecting portion 15, in order to ensure the seal, the inner cavity of the second connecting portion 15 can be a sealed inner cavity.

[0062] As described above, the conveying mechanism 82 is connected to the second connecting portion 15. Optionally, the conveying mechanism 82 and the second connecting portion 15 are connected by a third threaded member 1513. In the specific connection process, the third threaded member 1513 is likely to penetrate through the second connecting portion 15, resulting in the inner cavity of the second connecting portion 15 no longer being a sealed inner cavity, and it is thus relatively difficult to ensure the seal of the open end when the first end of the first connecting portion 12 is an open end.

[0063] Based on this, in other embodiments of the present utility model, the second connecting portion 15 may include a first sub-connecting portion 151 and a second sub-connecting portion 152. The first sub-connecting portion 151 is fixedly connected to the fixed seat 11 through the second sub-connecting portion 152. The first sub-connecting portion 151 is provided with a first sub-cavity 1511, and the second sub-connecting portion 152 is provided with a second sub-cavity 1521. The first sub-cavity 1511 and the second sub-cavity 1521 are sealed and isolated from each other. The second sub-cavity 1521 is a sealed sub-cavity. The inner cavity of the second connecting portion 15 may include the first sub-cavity 1511 and the second sub-cavity 1521. The first end portion of the first connecting portion 12 passes through the third threaded hole and extends into the second sub-cavity 1521. The first sub-connecting portion 151 is provided with a fourth threaded hole 1512 for connecting with the conveying mechanism 82 of the semiconductor processing equipment through a third threaded member 1513. The fourth threaded hole 1512 communicates with the first sub-cavity 1511. In this case, since the inner cavity of the second connecting portion 15 includes the first sub-cavity 1511 and the second sub-cavity 1521 that are sealed and isolated from each other, and the second sub-cavity 1521 is a sealed sub-cavity, which is responsible for sealing the open end when the first end portion of the first connecting portion 12 is an open end. Even if the fourth threaded hole 1512 extends into the first sub-cavity 1511 during the opening process, it will not cause a sealing problem for the first end portion of the first connecting portion 12.

[0064] It can be seen that both the first sub-connecting portion 151 and the second sub-connecting portion 152 included in the second connecting portion 15 of this structure are hollow structures. Therefore, it can ensure that the second connecting portion 15 will not be too heavy, resulting in excessive torque on the connection between the conveying mechanism 82 and the boat device. At the same time, it can also avoid the sealing problem that is likely to occur when the conveying mechanism 82 is connected to the second connecting portion 15 through the third threaded member 1513.

[0065] In order to improve the support strength, the carrier 30 may be made of silicon carbide with a relatively high hardness. In the specific process, the carrier 30 made of silicon carbide is relatively likely to generate pollutants (such as metal particles) and thus cause pollution in the process space. Of course, it is not limited to silicon carbide, and similar problems also exist for carriers 30 made of other materials that are likely to generate pollutants. Based on this, the carrier 30 disclosed in the embodiments of the present utility model may further include a first sleeve 33 and a second sleeve 34. Both the first sleeve 33 and the second sleeve 34 are structural members with one end open and the other end closed. The first sleeve 33 and the second sleeve 34 are respectively sleeved on the first carrier rod 31 and the second carrier rod 32, and are respectively fixedly connected to the corresponding first connecting portion 12. This structure can enable the first sleeve 33 and the second sleeve 34 to respectively cover the first carrier rod 31 and the second carrier rod 32, thereby blocking the pollutants scattered from the first carrier rod 31 and the second carrier rod 32 from directly invading the process space, so as to alleviate the pollution problem caused by the pollutants.

[0066] The first sleeve 33 can be fixedly connected to the corresponding first connecting portion 12 in various ways. Similarly, the second sleeve 34 can be fixedly connected to the corresponding first connecting portion 12 in various ways, which is not limited in the embodiments of the present utility model. In an optional embodiment, a hoop assembly 14 is detachably fixed to the end of each first connecting portion 12. The hoop assembly 14 forms a stepped clamping hole, and the first connecting portion 12 is clamped in the small-diameter section of the stepped clamping hole. The open ends of the first sleeve 33 and the second sleeve 34 are fixed in the large-diameter section of the corresponding stepped clamping hole. This way of realizing the fixed connection between the first sleeve 33 and the second sleeve 34 and the corresponding first connecting portion 12 by clamping through the hoop assembly 14 is simple and convenient. In other embodiments, the first sleeve 33 and the second sleeve 34 can also be fixedly connected to the corresponding first connecting portion 12 through a flange structure.

[0067] The hoop assembly 14 can include two hoop members 141, and the two hoop members 141 can be fixedly connected through a first threaded member 142 to form a stepped clamping hole. The end faces of the open ends of the first sleeve 33 and the second sleeve 34 can be attached to the annular surface of the stepped clamping hole facing the axis of the stepped clamping hole, which is beneficial to the sealing of the process space. In a further embodiment, a first annular flange 331 can be provided at the open end of the first sleeve 33, and a second annular flange 341 can be provided at the open end of the second sleeve 34. The first annular flange 331 can increase the end face area of the open end of the first sleeve 33, so that the end face of the open end of the first sleeve 33 has a larger fitting area with the annular surface of the corresponding stepped clamping hole, which is beneficial to the sealing of the process space. Similarly, the second annular flange 341 can increase the end face area of the open end of the second sleeve 34, so that the end face of the second sleeve 34 has a larger fitting area with the annular surface of the corresponding stepped clamping hole, which is beneficial to the sealing of the process space.

[0068] In a further embodiment, the length of the large-diameter section of the stepped clamping hole can be greater than the thicknesses of the first annular flange 331 and the second annular flange 341. Thus, during high-temperature processes, the first annular flange 331 and the second annular flange 341 can undergo thermal expansion deformation in the corresponding large-diameter section, preventing the hoop assembly 14 from squeezing and damaging the first sleeve 33 or the second sleeve 34. In a specific embodiment, the length of the large-diameter section of the stepped clamping hole can be 0.5 - 1 mm larger than the thickness of the first annular flange 331 or the second annular flange 341.

[0069] The first sleeve 33 and the second sleeve 34 can be quartz sleeves. Of course, they can also be made of other materials that can adapt to the process environment in the process space and have less pollution. The embodiments of the present utility model do not limit the specific materials of the first sleeve 33 and the second sleeve 34.

[0070] As described above, the first bearing rod 31 and the second bearing rod 32 are spaced apart. Correspondingly, the first sleeve 33 and the second sleeve 34 are also spaced apart. During the process of supporting the wafer carrier device 83, in order to avoid the problem of support stability caused by the possible mutual separation after they are pressed, in a further optional solution, the bearing member 30 disclosed in the embodiment of the present invention may further include a third connecting portion 35. The third connecting portion 35 can be sleeved on the first sleeve 33 and the second sleeve 34 respectively, and connect the first sleeve 33 and the second sleeve 34. Due to the pulling effect of the third connecting portion 35, the first sleeve 33 and the second sleeve 34 can be prevented from moving away from each other, and further, the first bearing rod 31 and the second bearing rod 32 can be prevented from moving away from each other.

[0071] There can be multiple third connecting portions 35, and they can be made of quartz material. It should be noted that the embodiment of the present invention does not limit the specific number and material of the third connecting portion 35. In one embodiment, the third connecting portion 35 can be slidably sleeved outside the first sleeve 33 and the second sleeve 34, so that the specific position of the third connecting portion 35 can be adjusted flexibly. In the embodiment where there are multiple third connecting portions 35, the third connecting portion 35 can slide on the first sleeve 33 and the second sleeve 34, so that the distance between two adjacent third connecting portions 35 can be adjusted. At the same time, using multiple third connecting portions 35 can assist in correcting the distance between the first sleeve 33 and the second sleeve 34, so that the distance between the two at each position in their extending direction (i.e., the axial direction of the first sleeve 33 or the second sleeve 34) is the same or within a preset requirement range. In one embodiment, there are two third connecting portions 35, and the distance between the two third connecting portions 35 can be 800 mm to 1000 mm. Of course, the distance between two adjacent third connecting portions 35 can be adjusted flexibly according to the working conditions, and the embodiment of the present invention does not limit it. In one embodiment, when there are multiple third connecting portions 35, the distance from the closed end of the first sleeve 33 and the second sleeve 34 can be 200 mm to 250 mm. Similarly, the embodiment of the present invention does not limit it either.

[0072] To ensure the sliding of the third connecting portion 35, the diameters of the sliding fit holes on the third connecting portion 35 that cooperate with the first sleeve 33 and the second sleeve 34 are larger. In one embodiment, the diameter of the sliding fit hole on the third connecting portion 35 is 1 mm - 2 mm larger than the diameter of the first sleeve 33 or the second sleeve 34.

[0073] As described above, the first end of the support shaft 51 is connected to the fixed seat 11. In the embodiment of the present utility model, there may be a small amount of movement between the support shaft 51 and the fixed seat 11, that is, the two are movably connected. For example, the fixed seat 11 may be provided with a card slot, and the support shaft 51 may be provided with two annular protrusions. The support shaft 51 is clamped in the card slot, and the two annular protrusions are respectively located on both sides of the fixed seat 11. The support shaft 51 can move slightly along the axial direction of the support shaft 51 in the card slot. In the specific working process, the conveying mechanism 82 drives the boat carrier device to move. After the chamber cover 20 contacts the chamber opening 61, the conveying mechanism 82 can continue to drive other parts of the boat carrier device (such as the fixed seat 11, the carrier 30, etc.) to move a preset distance, so that the chamber cover 20 compresses the elastic sleeve 40 due to being blocked by the chamber opening 61. Then, the elastic restoring force of the elastic sleeve 40 will act on the chamber cover 20 in the opposite direction, so that the chamber cover 20 is pressed tightly against the chamber opening 61, thereby realizing the sealing of the chamber opening 61. A first sealing ring 21 is provided at the edge of the surface of the chamber cover 20 facing the chamber opening 61. The chamber cover 20 is pressed tightly, so that it seals the chamber opening 61 through the first sealing ring 21. During this process, there may be a small amount of movement between the support shaft 51 and the fixed seat 11, which can adapt to the situation where when the chamber cover 20 and the limiting mechanism 50 are blocked, the conveying mechanism can still drive components such as the fixed seat 11, the carrier 30, and the first connecting portion 12 to continue to move a preset distance.

[0074] After the chamber cover 20 seals and presses the chamber opening 61 tightly, or after the conveying mechanism 82 is driven in place, the fixed seat 11 will also apply a pressing force to the chamber cover 20 through the limiting mechanism 50. For example, in this case, the fixed seat 11 can apply a force to the support shaft 51 through an annular protrusion close to the spherical plain bearing 52, and then apply a pressing force to the chamber cover 20 through the support shaft 51 and the spherical plain bearing 52. In this case, continuing to move a preset distance can just make the fixed seat 11 continue to move to a position where it abuts against the annular protrusion close to the spherical plain bearing 52, so as to realize applying a pressing force to the chamber cover 20 through the support shaft 51 and the spherical plain bearing 52.

[0075] In the embodiment of the utility model, the support shaft 51 can also realize the movable connection and cooperation with the fixing seat 11 through other structures, which are not limited to the two annular protrusions and the slot mentioned above. Based on this, in another specific embodiment, the support shaft 51 may include a first screw 511 and a nut 512. The fixing seat 11 may be provided with a second through hole. The first screw 511 has a first shoulder, and the first end of the first screw 511 passes through the second through hole and extends to the side of the fixing seat 11 away from the chamber cover 20, and is threadedly matched with the nut 512, and the nut 512 is used to limit the cooperation with the fixing seat 11, so as to prevent the first screw 511 from falling off from the first through hole. The first screw 511 can move along the axial direction of the first screw 511 in the second through hole, and the first shoulder of the first screw 511 and the nut 512 can respectively limit the cooperation with the surface where the two orifices of the second through hole are located, and the second end of the first screw 511 is fixedly connected to the inner ring of the joint bearing 52, and the outer ring of the joint bearing 52 is fixedly connected to the chamber cover 20. After the chamber cover 20 seals and presses the chamber opening 61 or the conveying mechanism 82 is driven into position, the fixing seat 11 contacts the first shoulder and drives the first screw 511 and the spherical bearing 52 to apply a pressing force to the chamber cover 20 through the first shoulder.

[0076] In an embodiment in which the support shaft 51 includes a first screw rod 511 and a nut 512, the position of the nut 512 on the first screw rod 511 can be adjusted to adjust the distance between the nut 512 and the first shaft shoulder, thereby achieving the purpose of adjusting the compression amount of the elastic sleeve 40, which is beneficial to ensure that the elastic sleeve 40 is always within its elastic working range, which is beneficial to improve the service life of the elastic sleeve 40.

[0077] In the embodiment of the utility model, the second end of the first screw rod 511 can be fixedly connected with the inner ring of the spherical bearing 52 by means of an interference fit axial hole plug-in. The outer ring of the spherical bearing 52 can be fixedly connected with the chamber cover 20. In order to facilitate the connection, the limiting mechanism 50 disclosed in the embodiment of the utility model can also include a bearing seat 53, and the outer ring of the spherical bearing 52 can be fixed in the bearing seat 53. The bearing seat 53 is fixed on the chamber cover 20. Specifically, the outer ring of the spherical bearing 52 can also be fixedly connected by means of an interference fit axial hole plug-in. The bearing seat 53 can be fixed on the chamber cover 20 by means of a fourth threaded member 56. Of course, the embodiment of the utility model does not limit the specific connection method between them.

[0078] The limit mechanism 50 may further include a first retaining ring 54. The first retaining ring 54 may be sleeved on the first screw rod 511 and fixed on the end face of the bearing seat 53 facing away from the chamber cover 20. A ring-shaped limit projection is provided on the side of the bearing seat 53 facing the chamber cover 20. The outer ring of the spherical plain bearing 52 is positioned between the ring-shaped limit projection and the first retaining ring 54, so as to prevent the outer ring of the spherical plain bearing 52 from axially moving on the first screw rod 511, thereby improving the connection stability between the spherical plain bearing 52 and the bearing seat 53. In a further embodiment, the first retaining ring 54 may axially cover the gap between the inner ring and the outer ring of the spherical plain bearing 52, so as to prevent foreign objects from entering this gap and causing jamming between the inner ring and the outer ring. Optionally, the fourth threaded member 56 described above may fix the first retaining ring 54 and the bearing seat 53 on the chamber cover 20 together, so that more components can be assembled together with fewer connecting members, which is beneficial to simplifying the structure.

[0079] The limit mechanism 50 according to the embodiment of the present invention may further include a second retaining ring 55. The second retaining ring 55 is sleeved on the second end of the first screw rod 511 and fixedly connected to the first screw rod 511 on the side of the spherical plain bearing 52 facing the chamber cover 20. The first screw rod 511 may include a second shoulder, and the second shoulder is arranged on the side of the spherical plain bearing 52 facing away from the chamber cover 20. The inner ring of the spherical plain bearing 52 is positioned between the second retaining ring 55 and the second shoulder, so as to prevent the spherical plain bearing 52 from axially moving along the first screw rod 511, thereby improving the connection stability between the spherical plain bearing 52 and the first screw rod 511. Specifically, a fifth threaded member 57 fixedly connected to the end face of the second end of the first screw rod 511 can press the second retaining ring 55 against the inner ring of the spherical plain bearing 52, so that the inner ring of the spherical plain bearing 52 is clamped by the second shoulder and the second retaining ring 55.

[0080] As described above, the first end of the support shaft 51 is connected to the fixed seat 11. In the above embodiment, a scheme in which the first end of the support shaft 51 is movably connected to the fixed seat 11 is listed. In other embodiments, the first end of the support shaft 51 may also be fixedly connected to the fixed seat 11. Since the inner ring and the outer ring of the spherical plain bearing 52 are spherically hinged and there is a small clearance. During the specific working process, the conveying mechanism 82 drives the boat-carrying device to move. After the chamber cover 20 contacts the chamber opening 61, the conveying mechanism 82 can continue to drive other parts of the boat-carrying device (such as the fixed seat 11, the bearing member 30, the support shaft 51, and the inner ring) to move a preset distance. The clearance existing between the inner ring and the outer ring allows the conveying mechanism 82 to continue to drive a relatively small distance, so that the chamber cover 20 is blocked by the chamber opening 61 and compresses the elastic sleeve 40, thereby enabling the elastic sleeve 40 to generate an elastic restoring force and react on the chamber cover 20.

[0081] In order to reduce the loss of thermal energy during the process, a reflector 71 may be provided on the inner side of the chamber cover 20. The reflector 71 may be one or multiple. In an embodiment where there are multiple reflectors 71, the multiple reflectors 71 may be stacked on the inner side of the chamber cover 20 at intervals in sequence. In one embodiment, there may be two reflectors 71. The boat carrier device disclosed in the embodiment of the present invention may further include a second screw 72, a sixth threaded member 73, and a limit sleeve 74. The first end of the second screw 72 is fixedly attached to the inner surface of the chamber cover 20 by screw thread engagement. The second screw 72 is provided with a third shoulder. The two reflectors 71 are passed through the second screw 72. The limit sleeve 74 is sleeved on the second screw 72. The sixth threaded member 73 is fixed to the second end of the second screw 72. One of the two reflectors 71 is positioned between the third shoulder and the first end of the limit sleeve 74, and the other of the two reflectors 71 is positioned between the second end of the limit sleeve 74 and the cap body of the sixth threaded member 73. The sixth threaded member 73 may be a screw, a bolt, etc. The embodiment of the present invention does not limit the specific type of the sixth threaded member 73.

[0082] Based on the boat carrier device disclosed in the embodiment of the present invention, the embodiment of the present invention discloses a semiconductor processing apparatus. The disclosed semiconductor processing apparatus includes a process chamber 60, a conveying mechanism 82, and the boat carrier device described in the above embodiment. The conveying mechanism 82 is fixedly connected to the fixed seat 11. The conveying mechanism 82 is used to drive the boat carrier device to move so that the carrier 30 enters and exits the process chamber 60 through the chamber opening 61. When the carrier 30 extends into the process chamber 60, the chamber cover 20 seals and covers the chamber opening 61. When the carrier 30 is moved out of the process chamber 60, the chamber cover 20 is separated from the chamber opening 61.

[0083] The semiconductor processing apparatus disclosed in the embodiment of the present invention may further include a bracket 81, and the conveying mechanism 82 may be installed on the bracket 81.

[0084] The semiconductor processing apparatus disclosed in the embodiment of the present invention may be a horizontal furnace tube apparatus. Of course, it may also be other types of horizontal apparatuses. The embodiment of the present invention does not limit the specific type of the semiconductor processing apparatus.

[0085] In the above embodiments of the present invention, the differences between the various embodiments are mainly described. As long as the different optimized features of the various embodiments are not contradictory, they can be combined to form a more optimal embodiment. Considering the simplicity of the text, they will not be elaborated here.

[0086] The embodiments of the present utility model have been described above in conjunction with the accompanying drawings. However, the present utility model is not limited to the above specific embodiments. The above specific embodiments are merely illustrative rather than restrictive. Under the inspiration of the present utility model, those of ordinary skill in the art can also make many forms without departing from the purpose of the present utility model and the scope protected by the claims, and all of them fall within the protection scope of the present utility model.

Claims

1. A boat carrying device, characterized in that: It comprises a fixing seat (11), a chamber cover (20), a bearing member (30), an elastic sleeve (40) and a limiting mechanism (50); The first end of the supporting member (30) passes through the chamber cover (20) and extends to the outside of the chamber cover (20), and is connected to the fixing seat (11); the elastic sleeve (40) is sleeved outside the supporting member (30); the first port and the second port of the elastic sleeve (40) are respectively sealed with the outer surface of the chamber cover (20) and the fixing seat (11); the limiting mechanism (50) includes a support shaft (51) and a joint bearing (52); the first end of the support shaft (51) is connected to the fixing seat (11), and the second end of the support shaft (51) is movably connected to the chamber cover (20) through the joint bearing (52).

2. The boat carrying device according to claim 1, characterized in that: The bearing member (30) comprises a first bearing rod (31) and a second bearing rod (32); there are a plurality of elastic sleeves (40) which correspond to the first bearing rod (31) and the second bearing rod (32) respectively; the elastic sleeves (40) are sleeved outside the corresponding first bearing rod (31) or the second bearing rod (32).

3. The boat carrying device according to claim 2, characterized in that: The boat carrying device also includes a plurality of first connecting parts (12), wherein the first connecting parts (12) are tubular structural parts, wherein the first end of the first connecting part (12) is fixed to the fixing seat (11), and the second end of the first connecting part (12) passes through the chamber cover (20) and extends to the side of the chamber cover (20) facing away from the fixing seat (11), and the ends of the first bearing rod (31) and the second bearing rod (32) respectively extend from the ports of the second end of the corresponding first connecting part (12) to the corresponding first connecting part (12) and are fixedly connected to the corresponding first connecting part (12), and the elastic sleeve (40) is sleeved outside the corresponding first connecting part (12).

4. The boat carrying device according to claim 3, characterized in that: The tube wall of the first connecting part (12) is provided with a first through hole (121), the first bearing rod (31) is provided with a first threaded hole (311), and the second bearing rod (32) is provided with a second threaded hole (321). The first connecting part (12) is fixedly connected to the first bearing rod (31) or the second bearing rod (32) by means of a second threaded member (13) passing through the first through hole (121) and threadedly connected to the first threaded hole (311) or the second threaded hole (321).

5. The boat carrying device according to claim 3, characterized in that: The boat carrying device further comprises a second connecting portion (15), the second connecting portion (15) being a hollow structure, and the second connecting portion (15) being fixed to a side of the fixing seat (11) facing away from the chamber cover (20).

6. The boat carrying device according to claim 5, characterized in that: The fixing seat (11) is provided with a third threaded hole, the first end of the first connecting portion (12) is threadedly fixedly connected to the third threaded hole, and the first end of the first connecting portion (12) is welded to the threaded connection of the fixing seat (11) and sealed by solder, and the first end of the first connecting portion (12) extends into the inner cavity of the second connecting portion (15).

7. The boat carrying device according to claim 6, characterized in that: The second connecting part (15) comprises a first sub-connecting part (151) and a second sub-connecting part (152); the first sub-connecting part (151) is fixedly connected to the fixing seat (11) via the second sub-connecting part (152); the first sub-connecting part (151) is provided with a first sub-cavity (1511); the second sub-connecting part (152) is provided with a second sub-cavity (1521); the first sub-cavity (1511) and the second sub-cavity (1521) are sealed and isolated from each other; the second sub-cavity (1521) is a sealed sub-cavity; the first end of the first connecting part (12) passes through the third threaded hole and extends into the second sub-cavity (1521); the first sub-connecting part (151) is provided with a fourth threaded hole (1512) for connecting to a conveying mechanism (82) of a semiconductor process equipment via a third threaded member (1513); the fourth threaded hole (1512) is communicated with the first sub-cavity (1511).

8. The boat carrying device according to claim 3, characterized in that: The bearing member (30) further comprises a first sleeve (33) and a second sleeve (34); the first sleeve (33) and the second sleeve (34) are both structural members with one end open and the other end closed; the first sleeve (33) and the second sleeve (34) are respectively sleeved on the first bearing rod (31) and the second bearing rod (32), and are respectively fixedly connected to the corresponding first connecting portion (12).

9. The boat carrying device according to claim 8, characterized in that: A clamp assembly (14) is detachably fixed to the end of each first connection part (12), and the clamp assembly (14) forms a stepped clamping hole. The first connection part (12) is clamped in the small-diameter section of the stepped clamping hole, and the open ends of the first sleeve (33) and the second sleeve (34) are fixed in the large-diameter sections of the corresponding stepped clamping holes.

10. The boat carrying device according to claim 8, characterized in that: The bearing member (30) further comprises a third connecting portion (35), wherein the third connecting portion (35) is sleeved on the first sleeve (33) and the second sleeve (34) respectively, and connects the first sleeve (33) and the second sleeve (34).

11. The boat carrying device according to claim 1, characterized in that: The support shaft (51) includes a first screw rod (511) and a nut (512), and the fixing seat (11) is provided with a second through hole. The first end of the first screw rod (511) passes through the second through hole and extends to the side of the fixing seat (11) facing away from the chamber cover (20), and is threadedly engaged with the nut (512). The first screw rod (511) has a first axial shoulder, and the first screw rod (511) can move along its axial direction in the second through hole. The first axial shoulder of the first screw rod (511) and the nut (512) are respectively limitedly engaged with the surfaces where the two openings of the second through hole are located. The second end of the first screw rod (511) is fixedly connected to the inner ring of the joint bearing (52), and the outer ring of the joint bearing (52) is fixedly connected to the chamber cover (20).

12. The boat carrying device according to claim 11, characterized in that: The limiting mechanism (50) further comprises a bearing seat (53), the outer ring of the spherical bearing (52) is fixed in the bearing seat (53), and the bearing seat (53) is fixed on the chamber cover (20).

13. The boat carrying device according to claim 12, characterized in that: The limiting mechanism (50) further comprises a first retaining ring (54), the first retaining ring (54) being sleeved on the first screw rod (511) and fixed on the end surface of the bearing seat (53) facing away from the chamber cover (20), the bearing seat (53) being provided with an annular limiting protrusion on a side facing the chamber cover (20), and the outer ring of the spherical bearing (52) being positioned between the annular limiting protrusion and the first retaining ring (54); and / or, The limiting mechanism (50) further includes a second retaining ring (55), the first screw rod (511) is provided with a second shaft shoulder, the second retaining ring (55) is sleeved on the second end of the first screw rod (511) and is fixedly connected to the first screw rod (511) on the side of the joint bearing (52) facing the chamber cover (20), and the inner ring of the joint bearing (52) is positioned between the second shaft shoulder and the second retaining ring (55).

14. A semiconductor process equipment, characterized in that: It comprises a process chamber (60), a conveying mechanism (82) and a boat carrier device as described in any one of claims 1 to 13, wherein the conveying mechanism (82) is fixedly connected to the fixed seat (11), and the conveying mechanism (82) is used to drive the boat carrier device to move so that the carrier (30) enters and exits the process chamber (60) through the chamber opening (61) of the process chamber (60); when the carrier (30) extends into the process chamber (60), the chamber cover (20) seals and covers the chamber opening (61); when the carrier (30) is located outside the process chamber (60), the chamber cover (20) is separated from the chamber opening (61).

Images