VOC waste gas decomposition device
By combining heating method and combustion method in the VOC exhaust gas decomposition device, the VOC exhaust gas is preheated to the ignition point and then oxidation and combustion is carried out, which solves the problems of long combustion time, low efficiency and high cost in the prior art, and achieves an efficient, low cost and environmentally friendly VOC exhaust gas treatment effect.
Patent Information
- Application Number
- CN202421958157.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-13
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-08-13
AI Technical Summary
The existing VOC exhaust gas combustion devices have problems such as long combustion time, low efficiency, high cost, large space occupation, increased carbon emissions and environmental pollution, especially in the case of high concentrations of exhaust gas, which are prone to high temperature shutdown.
A VOC exhaust gas decomposition device including an exhaust gas heating assembly and a combustion assembly is used to remove combustible substances by combining heating and combustion. The exhaust gas heating assembly includes a heating unit and a heating tube, and the VOC exhaust gas is heated to the ignition point through an electric heating wire, and then oxygen is added to the combustion chamber of the combustion assembly for oxidation combustion.
It greatly improves the treatment efficiency and quality of VOC exhaust gas, avoids high-temperature shutdown, reduces maintenance costs and carbon emissions, and the device has a compact structure and small space.
Smart Images
Figure CN223020305U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to an exhaust gas decomposition device, in particular to a VOC exhaust gas decomposition device. Background Art
[0002] In the coating industry chain, certain pollution will be generated during processes such as silicon wafer production, silicon material purification, and battery cell production. The production of battery cells involves a relatively large number of chemical substances, and the types of pollutants generated are also relatively diverse, including VoCs, NH3HF, HCL, etc.
[0003] The harmful gases causing environmental pollution in the coating industry mainly come from the cleaning, spin coating, stripping, etching, and developing processes of chip or circuit board production. The exhaust gases in the semiconductor industry are mainly divided into two categories: organic exhaust gases and acid-base exhaust gases. Organic ones include: total non-methane hydrocarbons, NOx, SO2, etc.; acid-base ones include: NH3, Cl2, sulfuric acid mist, fluorides, chlorides, etc.
[0004] In order to solve the impact caused by the exhaust gases generated by the coating process, the existing VOC exhaust gas combustion devices include a combustion tower, and the combustion tower is divided into multiple areas. During use, the exhaust gas is directly sent into the combustion tower through the air inlet, and natural gas is used to burn the exhaust gas in different areas in turn. The disadvantages of this kind of exhaust gas combustion device are as follows: First, since the VOC exhaust gas directly enters the combustion tower without being preheated, the combustion time of the VOC exhaust gas is long, the efficiency is low, and even incomplete combustion may occur, directly affecting the subsequent treatment quality of the combusted gas. Second, it not only has a high construction cost but also occupies a large space. Third, it relies on natural gas thermal oxidation, increasing carbon emissions and also causing certain pollution to the environment. Fourth, since the exhaust gas is directly burned, it is sensitive to the concentration of the exhaust gas. Especially when the concentration is high, the energy generated during the combustion of the exhaust gas itself will directly affect the temperature of the combustion chamber, resulting in the phenomenon of high-temperature shutdown. Summary of the Utility Model
[0005] The purpose of the utility model is to provide a VOC exhaust gas decomposition device that is not only structurally compact and occupies a small area, but also uses a combination of heating method and combustion method to remove combustible substances, and greatly improves the process treatment efficiency and quality.
[0006] To achieve the above purpose, the technical solution of the utility model is: a VOC exhaust gas decomposition device, the innovation of which lies in: including an exhaust gas heating assembly for heating the VOC gas to reach the ignition point and a combustion assembly for decomposing the heated VOC gas, and the exhaust gas heating assembly is connected to the combustion assembly.
[0007] The waste gas heating assembly includes a heating unit and a heating pipe. The heating pipe is arranged inside the heating unit, and one end of the heating pipe is used to access VOC waste gas, and the other end is communicated with the combustion assembly.
[0008] The combustion assembly includes a combustion kettle which has a combustion chamber. The other end of the heating pipe is communicated with the air inlet end of the combustion chamber. The combustion chamber has an air outlet channel connected to an external cooling device.
[0009] The VOC waste gas is heated to the ignition point by the waste gas heating assembly, and after being sent into the combustion assembly, oxygen is added to complete the oxidation combustion, which is used to decompose the VOC gas.
[0010] In the above technical solution, the waste gas heating assembly further includes a pneumatic ball valve and a waste gas inlet pipe. The pneumatic ball valve is arranged on the pipeline of the waste gas inlet pipe. The first valve port of the pneumatic ball valve is externally connected to the VOC waste gas source, the second valve port is communicated with one end of the heating pipe, and the third valve port is used to externally connect the gas emergency bypass port.
[0011] In the above technical solution, the waste gas heating assembly further includes a first pneumatic valve. One end of the heating pipe is connected to the pipeline of the waste gas inlet pipe, and the first pneumatic valve is arranged on this pipeline.
[0012] In the above technical solution, the heating unit includes a heating body, and a fixed disk, a ceramic tube and an electric heating wire arranged inside the heating body. A plurality of ceramic tubes are arranged between the two fixed disks, and each ceramic tube wraps the corresponding electric heating wire. The heating pipe is arranged on the axis connection line of the two fixed disks. The electric heating wire heats the VOC waste gas inside the heating pipe through the heating pipe and raises the temperature to the ignition point.
[0013] In the above technical solution, there is a cavity inside the heating body and between the fixed disk and the heating body, and ceramic fiber cotton for heat insulation is arranged in this cavity.
[0014] In the above technical solution, the combustion assembly further includes an oxygen access unit. The oxygen access unit includes an oxygen inlet pipe and a second pneumatic valve. The oxygen inlet pipe is communicated with the combustion chamber, and the second pneumatic valve for controlling the on or off of the oxygen inlet pipe is arranged on the pipeline of the oxygen inlet pipe. The oxygen entering the combustion chamber through the oxygen inlet pipe is mixed with the heated VOC waste gas and then undergoes oxidation combustion to decompose the VOC waste gas.
[0015] In the above technical solution, the combustion assembly further includes a temperature sensor. The temperature sensing probe of the temperature sensor extends into the interior of the combustion chamber to monitor the internal temperature of the combustion chamber.
[0016] In the above technical solution, the waste gas heating assembly and the combustion assembly are integrated into an integral structure, and the waste gas heating assembly is arranged inside the combustion assembly.
[0017] In the above technical solution, the combustion kettle is formed by joining two mating half kettles together. The waste gas heating assembly is arranged in one of the half kettles, and one end of the heating pipe is located outside the half kettle, and the other half kettle has a combustion chamber.
[0018] In the above technical solution, ceramic fiber cotton for heat insulation is arranged on the outer periphery of the combustion chamber in the other half kettle of the combustion kettle.
[0019] The positive effect of the present utility model is that after adopting the VOC waste gas decomposition device of the present utility model, since the present utility model includes a waste gas heating assembly for heating the VOC gas to the ignition point and a combustion assembly for decomposing the heated VOC gas, and the waste gas heating assembly is communicated with the combustion assembly,
[0020] The waste gas heating assembly includes a heating unit and a heating pipe. The heating pipe is arranged inside the heating unit, and one end of the heating pipe is used to access the VOC waste gas, and the other end is communicated with the combustion assembly.
[0021] The combustion assembly includes a combustion kettle. The combustion kettle has a combustion chamber. The other end of the heating pipe is communicated with the air inlet end of the combustion chamber. The combustion chamber has an air outlet channel connected to an external cooling device.
[0022] The VOC waste gas is heated to the ignition point by the waste gas heating assembly and sent into the combustion assembly, and then oxygen is added to complete oxidation combustion, so as to decompose the VOC gas.
[0023] The present utility model adopts a combination of heating method and combustion method to remove combustible substances in the VOC waste gas. Specifically, the VOC waste gas is preheated to the ignition point and then burned, which improves the efficiency of removing substances such as methane in the VOC waste gas, greatly improves the treatment efficiency and treatment quality of the VOC waste gas. Even if the concentration of the VOC waste gas is high, due to preheating it, the energy generated when the waste gas burns directly is prevented from affecting the temperature of the combustion chamber, thus also preventing the phenomenon of high-temperature shutdown.
[0024] At the same time, the present utility model not only occupies a small space, but also has a low construction cost, reduces the maintenance cost, and reduces carbon emissions to protect the environment. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] Figure 1 is a schematic structural diagram of a specific embodiment of the present utility model;
[0026] Figure 2 is a three-dimensional structural diagram of the present utility model;
[0027] Figure 3 is Figure 2 a rear view schematic diagram of Detailed implementation mode
[0028] The present utility model will be further described below in conjunction with the accompanying drawings and the given embodiments, but it is not limited thereto.
[0029] As Figure 1 、 2 、shown in Figure 3, a VOC waste gas decomposition device includes an exhaust gas heating assembly 1 for heating VOC gas to the ignition point and a combustion assembly 2 for decomposing the heated VOC gas, and the exhaust gas heating assembly 1 is communicated with the combustion assembly 2.
[0030] The exhaust gas heating assembly 1 includes a heating unit 11 and a heating pipe 12. The heating pipe 12 is arranged inside the heating unit 11. One end of the heating pipe 12 is used to access VOC waste gas, and the other end is communicated with the combustion assembly 2.
[0031] The combustion assembly 2 includes a combustion kettle 21. The combustion kettle 21 has a combustion chamber 211. The other end of the heating pipe 12 is communicated with the intake end of the combustion chamber 211. The combustion chamber 211 has an air outlet channel 212 connected to an external cooling device.
[0032] The VOC waste gas is heated to the ignition point by the exhaust gas heating assembly 1 and sent into the combustion assembly 2, and then oxygen is added to complete the oxidation combustion, so as to decompose the VOC gas.
[0033] As Figure 1 、 2 、shown in Figure 3, in order to apply to various types of waste gas, the exhaust gas heating assembly 1 further includes a pneumatic ball valve 13 and an exhaust gas inlet pipe 14. The pneumatic ball valve 23 is arranged on the pipeline of the exhaust gas inlet pipe 14. The first valve port of the pneumatic ball valve 23 is externally connected to a VOC waste gas source, the second valve port is communicated with one end of the heating pipe 12, and the third valve port is used to be externally connected to a gas cleaning end. Specifically, when the heating unit 11 is not heated to the set temperature, the waste gas can directly enter the emergency bypass port through the third valve port of the pneumatic ball valve, and the VOC waste gas is directly output through the emergency bypass port for emergency treatment. For example, it is sent into a gas cleaning device to carry out acid or alkali removal.
[0034] As Figure 2 、 3 shown in Figure, in order to control whether the exhaust gas inlet pipe is conducted, the exhaust gas heating assembly 1 further includes a first pneumatic valve 15. One end of the heating pipe 12 is connected to the pipeline of the exhaust gas inlet pipe 14, and the first pneumatic valve 15 is arranged on this pipeline. When the first pneumatic valve 15 is opened, the waste gas enters the heating pipe 12 through the exhaust gas inlet pipe 14.
[0035] As Figure 1As shown in the figure, in order to utilize new energy for electric heating of clean energy, replace the use of natural gas combustion in the existing technology, reduce carbon emissions, and protect the environment, the heating unit 11 includes a heating body 111, a fixed disk 112, a ceramic tube 113, and an electric heating wire disposed within the heating body 111. A plurality of ceramic tubes 113 are provided between the two fixed disks 112, and each ceramic tube 113 wraps the corresponding electric heating wire. The heating tube 11 is disposed on the axial center connection line of the two fixed disks 112. The electric heating wire heats the VOC waste gas inside it through the heating tube 11 and raises the temperature to the ignition point. The heating unit of the present utility model heats the gas in an isolated manner, so that the electric heating wire does not directly contact the VOC waste gas. This is because the VOC waste gas itself has certain corrosiveness. The electric heating wire is used to electrically heat the heating tube 21 to meet the purpose of heating the VOC waste gas in the heating tube 21, and to avoid the VOC waste gas from corroding the heating components and causing powder accumulation, which affects the service life of the heating device.
[0036] Furthermore, in order to improve the heat insulation and corrosion resistance of the heating unit, there is a cavity within the heating body 111 and located between the fixed disk 112 and the heating body 211, and ceramic fiber cotton for heat insulation is provided within this cavity.
[0037] As Figure 2 shown in the figure, in order to ensure sufficient oxidation combustion of the heated VOC gas, decompose the VOC waste, and remove flammable gases, the combustion assembly 2 further includes an oxygen access unit. The oxygen access unit includes an oxygen inlet pipe 22 and a second pneumatic valve 24. The oxygen inlet pipe 22 is communicated with the combustion chamber 211, and a second pneumatic valve 24 for controlling the on or off of the oxygen inlet pipe 22 is provided on the pipeline of the oxygen inlet pipe 22. The oxygen entering the combustion chamber 211 through the oxygen inlet pipe 22 is mixed with the heated VOC waste gas and then undergoes oxidation combustion to decompose the VOC waste gas.
[0038] As Figure 1 shown in the figure, in order to be able to detect the temperature inside the combustion chamber and prevent heat loss, which affects the efficiency of removing flammable gases, the combustion assembly 2 further includes a temperature sensor 23. The temperature sensing probe of the temperature sensor 23 extends into the interior of the combustion chamber 211 to monitor the internal temperature of the combustion chamber 211.
[0039] As Figure 1 shown in the figure, in order to make the structure of the present utility model more compact and occupy less space, the waste gas heating assembly 1 and the combustion assembly 2 are integrated into an integrated structure, and the waste gas heating assembly 1 is disposed inside the combustion assembly 2.
[0040] Furthermore, as Figure 2As shown in the figure, in order to achieve a segmented structural design for the combustion mechanism and facilitate maintenance, the combustion kettle 21 is formed by joining two mating half-kettles together. The waste gas heating assembly 1 is arranged in one of the half-kettles, and one end of the heating pipe 12 is located outside this half-kettle, while the other half-kettle has a combustion chamber 211.
[0041] Furthermore, in order to improve the temperature resistance and corrosion resistance of the combustion kettle, ceramic fiber cotton for heat insulation is provided on the outer periphery of the combustion chamber 211 in the other half-kettle of the combustion kettle 21 of the present utility model.
[0042] The technological process of the present utility model is as follows:
[0043] Heating: The VOC waste gas enters the waste gas heating assembly 1 (heating zone) for heating.
[0044] If the heating unit 11 does not heat up to the set temperature, the waste gas directly passes through the pneumatic ball valve 13 to the gas cleaning end for cleaning and then is discharged.
[0045] If the heating unit 11 heats up to the set temperature, the waste gas enters the heating pipe 12 inside the heating unit 11 through the pneumatic ball valve 13. The electric heating wire heats the VOC waste gas inside it to 850 °C through the heating pipe 12.
[0046] Combustion: The combustion assembly 2 (oxidation zone) burns by the combustion method.
[0047] The heated VOC waste gas enters the combustion chamber 211 of the combustion kettle 21 through the heating pipe 12. The pneumatic valve 24 is opened, and oxygen enters the combustion chamber 211 through the oxygen inlet pipe 22. After being fully mixed with the waste gas, it oxidizes and burns to remove substances such as methane in the VOC gas. The temperature sensor 23 detects the temperature inside the combustion chamber 311 in real time. The purpose is to ensure that the temperature inside the combustion chamber is not lower than the ignition point of the VOC waste gas to prevent incomplete decomposition of the VOC gas.
[0048] After testing the waste gas treatment, the present utility model has a removal efficiency of > 99% for flammable waste gas (VOCs, SiH4, PH3, H2, etc.) in the waste gas.
[0049] The present utility model adopts a combination of the heating method and the combustion method to remove combustible substances in the VOC waste gas. Specifically, the VOC waste gas is pre-heated to the ignition point by using a new energy electric heating method first and then burned, which speeds up the efficiency of removing substances such as methane in the VOC waste gas, greatly improves the treatment efficiency and treatment quality of the VOC waste gas. Even when the concentration of the VOC waste gas is high, due to pre-heating it, the energy generated when the waste gas burns directly is prevented from affecting the temperature of the combustion chamber, thereby also preventing the phenomenon of high-temperature shutdown.
[0050] Meanwhile, the utility model not only occupies a small space, but also has a low construction cost. The segmented structure design reduces the maintenance cost and difficulty, and replaces the combustion of natural gas in the prior art with clean energy, reducing carbon emissions and protecting the environment.
[0051] Inspired by the ideal embodiments of the present utility model described above, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of the present utility model. The technical scope of the present utility model is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.
Claims
1. A VOC waste gas decomposition device, characterized in that: The invention comprises an exhaust gas heating assembly (1) for heating VOC gas to reach the ignition point and a combustion assembly (2) for decomposing the heated VOC gas, and the exhaust gas heating assembly (1) is connected to the combustion assembly (2). The exhaust gas heating assembly (1) comprises a heating unit (11) and a heating pipe (12), wherein the heating pipe (12) is arranged inside the heating unit (11), and one end of the heating pipe (12) is used to receive the VOC exhaust gas, and the other end is connected to the combustion assembly (2). The combustion assembly (2) comprises a combustion kettle (21), the combustion kettle (21) having a combustion chamber (211), the other end of the heating tube (12) being connected to an air inlet end of the combustion chamber (211), and the combustion chamber (211) having an air outlet passage (212) for an external cooling device. The VOC waste gas is heated to the ignition point by the waste gas heating assembly (1), and is sent to the combustion assembly (2) where oxygen is added to complete oxidation combustion, thereby decomposing the VOC gas.
2. The VOC waste gas decomposition device according to claim 1, characterized in that: The exhaust gas heating assembly (1) further comprises a pneumatic ball valve (13) and an exhaust gas inlet pipe (14); the pneumatic ball valve (13) is arranged on the pipeline of the exhaust gas inlet pipe (14); a first valve port of the pneumatic ball valve (13) is externally connected to a VOC exhaust gas source, a second valve port is connected to one end of the heating pipe (12), and a third valve port is used to be externally connected to an emergency bypass port.
3. The VOC waste gas decomposition device according to claim 1, characterized in that: The exhaust gas heating assembly (1) further comprises a first pneumatic valve (15); one end of the heating pipe (12) is connected to an exhaust gas inlet pipe (14), and the first pneumatic valve (15) is provided on the pipe.
4. The VOC waste gas decomposition device according to claim 1, characterized in that: The heating unit (11) comprises a heating body (111), and a fixed disk (112), a ceramic tube (113) and an electric heating wire arranged in the heating body (111); a plurality of ceramic tubes (113) are arranged between the two fixed disks (112), and each ceramic tube (113) wraps a corresponding electric heating wire; the heating tube (12) is arranged on the axis connecting the two fixed disks (112); the electric heating wire heats the VOC waste gas inside the heating tube (12) through the heating tube (12) and raises the temperature to an ignition point.
5. The VOC waste gas decomposition device according to claim 4, characterized in that: A cavity is provided in the heating body (111) and between the fixed plate (112) and the heating body (111), and ceramic fiber wool for heat insulation and heat preservation is provided in the cavity.
6. The VOC waste gas decomposition device according to claim 1, characterized in that: The combustion assembly (2) further comprises an oxygen access unit, the oxygen access unit comprising an oxygen inlet pipe (22) and a second pneumatic valve (24), the oxygen inlet pipe (22) being connected to the combustion chamber (211), and a second pneumatic valve (24) for controlling the opening or closing of the oxygen inlet pipe (22) being provided on the pipeline of the oxygen inlet pipe (22), the oxygen entering the combustion chamber (211) through the oxygen inlet pipe (22) is mixed with the heated VOC waste gas and then oxidized and burned, thereby decomposing the VOC waste gas.
7. The VOC waste gas decomposition device according to claim 1, characterized in that: The combustion assembly (2) further comprises a temperature sensor (23), wherein a temperature sensing probe of the temperature sensor (23) extends into the interior of the combustion chamber (211) and is used to monitor the internal temperature of the combustion chamber (211).
8. The VOC waste gas decomposition device according to claim 1, characterized in that: The exhaust gas heating assembly (1) and the combustion assembly (2) are integrated into an integral structure, and the exhaust gas heating assembly (1) is arranged inside the combustion assembly (2).
9. The VOC waste gas decomposition device according to claim 1 or 8, characterized in that: The combustion kettle (21) is composed of two opposing half kettles connected together, the exhaust gas heating assembly (1) is arranged in one of the half kettles, and one end of the heating pipe (12) is located outside the half kettle, and the other half kettle has a combustion chamber (211).
10. The VOC waste gas decomposition device according to claim 9, characterized in that: Ceramic fiber wool for heat insulation and heat preservation is provided in the other half of the combustion kettle (21) and on the outer periphery of the combustion chamber (211).