Carrying table support

Abstract

The utility model relates to a platform deck support which comprises a support body. The movable mechanism comprises a first supporting body arranged on the support body and a first platform movably connected to the first supporting body in the first direction. The adjusting mechanism comprises a first adjusting assembly movably connected to the first platform and the support body and a second adjusting assembly movably connected to the first platform and the second platform. The detection assembly comprises a range finder arranged on one side of the carrying table assembly and a focusing assembly arranged above the carrying table assembly, and the focusing assembly is arranged on the support body in an up-down movable mode. Through the arrangement, the wafer detection device can detect the wafer to be detected, is suitable for wafers of different sizes and shapes, is high in moving precision, and does not damage wafer products in the moving process.

Description

Technical Field

[0001] The utility model relates to the technical field of ellipsometer testing, in particular to a stage bracket. Background Art

[0002] An ellipsometer obtains relevant properties of a film material by measuring the amplitude ratio and phase difference of the p-component (vibration direction in the incident plane) and s-component (vibration direction perpendicular to the incident plane) of the reflected light. The specific measurable parameters include film thickness, refractive index, extinction coefficient, dielectric constant, porosity, crystallinity, etc. Due to the advantages of non-contact measurement, no damage to the sample, high measurement accuracy, and the ability to measure multi-layer thin films, ellipsometry is widely used in wafer inspection, micro-nano structure device manufacturing, process on-line control, material research, biomedical detection and other fields.

[0003] The existing ellipsometer spot positioning mainly relies on the microscope imaging system above the sample stage. By adjusting the microscope imaging system, the capture frame in the observation interface of the microscope imaging system is positioned on the spot, and then ellipsometry measurement is started. However, only fixed-point detection can be performed. When measuring the film thickness of wafer products with different sizes, shapes, and thicknesses, it is necessary to adjust the focusing component or the position of the wafer product. Adjusting the focusing component for detection is rather troublesome, and the repeated directional movement of the focusing component will cause slight deformation and reduce the detection accuracy. Adjusting the position of the wafer product is also difficult to ensure the adjustment accuracy and is likely to damage the wafer. Summary of the Utility Model

[0004] Therefore, the technical problem to be solved by the utility model is to overcome the problem that the existing ellipsometer can only perform fixed-point detection, and when measuring the film thickness of wafer products with different sizes, shapes, and thicknesses, it is necessary to adjust the focusing component or the position of the wafer product, thereby providing a stage bracket.

[0005] To solve the above technical problem, the utility model provides a stage bracket, including:

[0006] A bracket body;

[0007] A movable mechanism, which includes: a first support body arranged on the bracket body, a first platform movably connected to the first support body along a first direction, a second support body arranged on the first platform, a second platform movably connected to the second support body along a second direction, and a stage assembly arranged on the second platform;

[0008] An adjusting mechanism, which includes: a first adjusting component respectively movably connected to the first platform and the bracket body, and a second adjusting component respectively movably connected to the first platform and the second platform;

[0009] The detection component includes a rangefinder disposed on one side of the stage component and a focusing component disposed above the stage component, and the focusing component is vertically movably disposed on the bracket body.

[0010] In an embodiment of the present invention, the stage component includes a tabletop, a plurality of air holes penetrating through the thickness of the tabletop, and a material taking groove opened on one side of the tabletop. The shape of the tabletop is adapted to the size of the product to be detected, and the air holes are used to connect to a negative pressure device.

[0011] In an embodiment of the present invention, the tabletop is provided with a plurality of arc-shaped adjustment grooves along the circumferential direction, and a plurality of positioning members are detachably connected to the adjustment grooves, and the positioning members are rotatably disposed in the adjustment grooves.

[0012] In an embodiment of the present invention, the number of the first support bodies is two. The two first support bodies are disposed on the bracket body along a first direction, and the second support body is disposed on the first platform along a second direction. The first direction and the second direction are perpendicular to each other. The bracket body includes a base and a vertical frame disposed along a third direction, and the first support body is disposed between the first platform and the base of the bracket body.

[0013] In an embodiment of the present invention, both the first adjustment component and the second adjustment component include a base body, a guide rail disposed on the base body, a rack disposed on the guide rail, a sliding seat movably connected to the base body and the guide rail, and a tooth shaft rotatably connected to the sliding seat. The end of the tooth shaft meshes with the rack.

[0014] In an embodiment of the present invention, the base body is provided with a first scale line along its length direction, the sliding seat is provided with a second scale line corresponding to the first scale line, and a rotating member is connected to the end of the tooth shaft.

[0015] In an embodiment of the present invention, the tooth shaft and the sliding seat are rotationally connected in a damping manner.

[0016] In an embodiment of the present invention, two groups of first locking members are respectively disposed on the first platform and the second platform. The first locking members are used to lock the first platform and / or the second platform, and the two groups of first locking members are respectively connected to the first platform and / or the second platform and the base body.

[0017] In an embodiment of the present invention, the focusing component includes a lifting substrate disposed on the bracket body, a movable plate movably connected to the lifting substrate, a driving member disposed on the lifting substrate and having an output end connected to the movable plate, a focusing bracket connected to the movable plate, and a vision component connected to the focusing bracket.

[0018] In an embodiment of the present utility model, the bracket body is further provided with a second locking member. The second locking member is provided with a strip-shaped locking groove along the height direction, and the movable plate is provided with a hole corresponding to the locking groove.

[0019] The above technical solution of the present utility model has the following advantages compared with the prior art:

[0020] For a stage bracket of the present utility model, the position of the first platform along the first direction is adjusted by the first adjustment assembly cooperating with the first support body, and the position of the second platform along the second direction is adjusted by the second adjustment assembly cooperating with the second support body, so as to drive the first platform and the second platform to move freely within the ranges of the first direction and the second direction, and thus be able to move freely within the plane range and drive the stage assembly. By means of the provided distance measuring device, the top surface height of the wafer to be detected on the stage assembly can be detected, and in cooperation with the provided focusing assembly, the size and position of the light spot on the wafer to be detected can be detected, so as to realize the movement of the position of the stage assembly, facilitate the detection of the wafer to be tested, and adapt to wafers of different sizes and shapes. It not only has high movement accuracy, but also will not damage the wafer product during the movement process. Description of the Drawings

[0021] In order to make the content of the present utility model easier to be clearly understood, the following further details the present utility model according to the specific embodiments of the present utility model and in conjunction with the drawings, wherein

[0022] Figure 1 is a schematic structural diagram of the stage bracket of the present utility model;

[0023] Figure 2 is a three-dimensional view of the movable mechanism and the adjustment mechanism of the present utility model;

[0024] Figure 3 is a schematic position diagram of the stage assembly and the wafer product to be detected of the present utility model;

[0025] Figure 4 is a three-dimensional view of the focusing assembly of the present utility model;

[0026] Figure 5 is a three-dimensional view of the focusing assembly from another angle of the present utility model;

[0027] Figure 6 is a partial cross-sectional view of the adjustment assembly of the present utility model.

[0028] Description of the reference numerals in the drawings of the specification: 1. Base; 2. Upright frame; 3. Vision component; 4. Tabletop; 5. Wafer to be detected; 6. First platform; 7. Second platform; 8. Focusing bracket; 9. Driving member; 10. Lifting substrate; 11. Movable plate; 12. Second locking member; 13. Locking groove; 14. Rangefinder; 15. First support body; 16. Second support body; 17. Substrate; 18. Guide rail; 19. First scale line; 20. Rotating member; 21. Air hole; 22. Adjusting groove; 23. Positioning member; 24. Material taking groove; 25. Rack; 26. Tooth shaft; 27. Gear; 28. Sliding seat; 29. Second scale line; 30. First locking member. Detailed implementation manners

[0029] The present utility model will be further described below in conjunction with the drawings and specific embodiments, so that those skilled in the art can better understand the present utility model and be able to implement it, but the embodiments given are not intended to limit the present utility model.

[0030] Embodiment

[0031] Referring to Figure 1-6 As shown, a stage bracket of the present utility model includes:

[0032] A bracket body;

[0033] A moving mechanism, which includes: a first support body 15 arranged on the bracket body, a first platform 6 movably connected to the first support body 15 along a first direction, a second support body 16 arranged on the first platform 6, a second platform 7 movably connected to the second support body 16 along a second direction, and a stage assembly arranged on the second platform 7;

[0034] An adjusting mechanism, which includes: a first adjusting component respectively movably connected to the first platform 6 and the bracket body, and a second adjusting component respectively movably connected to the first platform 6 and the second platform 7;

[0035] A detection component, which includes: a rangefinder 14 arranged on one side of the stage assembly, and a focusing component arranged above the stage assembly, and the focusing component is movably arranged up and down on the bracket body.

[0036] A stage support described in the present utility model can be used for ellipsometric detection of an ellipsometer, especially for wafer product detection. The position of the first platform 6 in the first direction is adjusted by the first adjustment component cooperating with the first support body 15, and the position of the second platform 7 in the second direction is adjusted by the second adjustment component cooperating with the second support body 16, so as to drive the first platform 6 and the second platform 7 to move freely within the range of the first direction (in this embodiment, the front-back direction) and the second direction (in this embodiment, the left-right direction), and thus can move freely within the plane range and drive the stage component. By means of the provided rangefinder 14, which is a laser rangefinder, it can detect the top surface height of the wafer 5 to be detected on the stage component, and cooperate with the provided focusing component to detect the spot size and position on the wafer 5 to be detected, so as to realize the movement of the position of the stage component, facilitate the detection of the wafer to be measured, and adapt to wafers of different sizes and shapes.

[0037] See Figure 2 、 Figure 3 As shown, the stage component includes: a tabletop 4, a plurality of air holes 21 penetrating through the thickness of the tabletop 4, and a pick-up groove 24 opened on one side of the tabletop 4. The shape of the tabletop 4 is adapted to the size of the product to be detected. The air holes 21 are used to connect to a negative pressure device. The air holes 21 are evenly distributed on the tabletop 4, and their distribution pattern is any one of a grid pattern, a circular arrangement, and a rectangular arrangement to achieve the best adsorption effect. Each air hole 21 is designed with an interface and can be connected to a negative pressure device. When the negative pressure device is started, the air holes 21 generate suction force to firmly adsorb the wafer of the product to be detected on the tabletop 4. The pick-up groove 24 is opened on one side or multiple sides of the tabletop 4, and its width and depth are matched with the size of the product to be detected and the size of the mechanical gripper for picking up the material, which can facilitate the operator to place and take out the product quickly and safely, while reducing direct contact with the product and avoiding damaging the wafer. After the detection is completed, the negative pressure device is turned off to eliminate the suction force.

[0038] Continue Figure 3 As shown, a plurality of arc-shaped adjustment grooves 22 are opened on the tabletop 4 along the circumferential direction, and a plurality of positioning members 23 are detachably connected to the adjustment grooves 22. The positioning members 23 are rotatably arranged in the adjustment grooves 22. By adjusting the position of the positioning members 23 along the adjustment grooves 22, the positioning members 23 are rectangular or elliptical or wedge-shaped with rounded corners, and a through hole adapted to the size of the adjustment grooves 22 is opened at one end, and a bolt is passed through the through hole and connected to the adjustment grooves 22. By rotating the positioning members 23, the inner sides of the plurality of positioning members 23 are adapted to the wafer to be measured along the circumferential direction, and their hardness is lower than that of the wafer to avoid scratching the wafer, so as to limit and position the wafer.

[0039] See Figure 2-Figure 3 、 Figure 6As shown, the number of the first supports 15 is two, which can provide a more stable support structure to ensure the stability and reliability of the stage bracket. The two first supports 15 are arranged on the bracket body along a first direction. The second support 16 is arranged on the first platform 6 along a second direction. The first direction and the second direction are perpendicular to each other. The bracket body includes a base 1 and a vertical frame 2 arranged along a third direction. The first support 15 is arranged between the first platform 6 and the base 1 of the bracket body.

[0040] See Figure 6 As shown, both the first adjustment assembly and the second adjustment assembly include: a base body 17, a guide rail 18 arranged on the base body 17, a rack 25 arranged on the guide rail 18, a sliding seat 28 movably connected to the base body 17 and the guide rail 18, and a tooth shaft 26 rotatably connected to the sliding seat 28. The end of the tooth shaft 26 meshes with the rack 25. A gear 27 is arranged at the end of the tooth shaft 26 to mesh with the rack 25. The guide rail 18 is arranged on the base body 17 to guide the movement direction of the sliding seat 28, ensuring the smoothness and accuracy of the sliding. The sliding seat 28 is movably connected between the base body 17 and the guide rail 18 and can move up and down along the guide rail 18. The sliding of the sliding seat 28 is realized by the rotation of the tooth shaft 26.

[0041] See Figure 2 As shown, a first scale line 19 is provided along the length direction of the base body 17. A second scale line 29 corresponding to the first scale line 19 is provided on the sliding seat 28, which is used to identify and measure the position of the sliding seat 28 on the base body 17, facilitating the operator to accurately adjust and position the sliding seat 28 on the base body 17, ensuring the precise adjustment calibration and use of the stage bracket. A rotating member 20 is connected to the end of the tooth shaft 26.

[0042] The tooth shaft 26 is connected to the sliding seat 28 in a damping rotation manner. Since there is damping between the tooth shaft 26 and the sliding seat 28, resistance is generated to the rotation, ensuring smooth rotation and not being too loose or too tight, and preventing the tooth shaft 26 from loosening.

[0043] Furthermore, two groups of first locking members 30 are respectively arranged on the first platform 6 and the second platform 7. The first locking members 30 are used to lock the first platform 6 and / or the second platform 7, which can realize the fixation and release of the first platform 6 and the second platform 7, facilitating the operator to perform position adjustment and fixation. The two groups of first locking members 30 are respectively connected to the first platform 6 and / or the second platform 7 and the base body 17. Through the way of fixation and locking, the first platform 6 and the second platform 7 can be firmly fixed to the base body 17 independently of each other without moving or loosening.

[0044] See Figure 4 、 Figure 5As shown in the figure, the focusing assembly includes: a lifting substrate 10 disposed on the bracket body, a movable plate 11 movably connected to the lifting substrate 10, a driving member 9 disposed on the lifting substrate 10 and having an output end connected to the movable plate 11, a focusing bracket 8 connected to the movable plate 11, and a vision component 3 connected to the focusing bracket 8. The lifting substrate 10 is disposed on the bracket body and is used to support and fix the entire focusing assembly structure. The movable plate 11 is movably connected to the lifting substrate 10 and can move up and down in the vertical direction. The position adjustment of the movable plate 11 can be achieved through the driving member 9, which is used to adjust the focal length and focusing degree of the article on the stage assembly. In this embodiment, the driving member 9 is a fine-tuning cylinder.

[0045] See Figure 2 As shown in the figure, the bracket body is further provided with a second locking member 12. The second locking member 12 is provided with a strip-shaped locking groove 13 in the height direction. The movable plate 11 is provided with a hole corresponding to the locking groove 13. The second locking member 12 is provided with a strip-shaped locking groove 13 in the height direction. The locking groove 13 is designed as a strip-shaped structure to enable the movable plate 11 to move up and down, and is limited and guided by the second locking member 12. A bolt passes through the locking groove 13 and is locked to the focusing bracket 8 or the movable plate 11, and the locking method is damping locking or screw locking or plug-in locking. Damping locking can be selected to cooperate with the fine-tuning cylinder. The damping force is greater than the gravity of the focusing bracket 8, and the driving force of the fine-tuning cylinder is greater than the sum of the maximum damping static friction force and the gravity of the focusing bracket 8.

[0046] Obviously, the above embodiments are merely examples for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or variations can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or variations derived therefrom are still within the protection scope of the present invention.

Claims

1. A stage support, characterized in that: include: The bracket body; A movable mechanism, comprising: a first support body disposed on the bracket body, a first platform movably connected to the first support body along a first direction, a second support body disposed on the first platform, a second platform movably connected to the second support body along a second direction, and a stage assembly disposed on the second platform; The adjustment mechanism comprises: a first adjustment component movably connected to the first platform and the bracket body respectively, and a second adjustment component movably connected to the first platform and the second platform respectively; The detection component includes: a rangefinder arranged on one side of the stage component, and a focusing component arranged above the stage component, and the focusing component is movably arranged on the bracket body up and down.

2. A stage support according to claim 1, characterized in that: The platform assembly includes: a table, a plurality of air holes penetrating the thickness of the table, and a material taking slot opened on one side of the table. The shape of the table is adapted to the size of the product to be tested, and the air holes are used for externally connecting a negative pressure device.

3. A stage support according to claim 2, characterized in that: The table top is provided with a plurality of arc-shaped adjustment grooves along the circumferential direction, the adjustment grooves are detachably connected with a plurality of positioning members, and the positioning members are rotatably arranged in the adjustment grooves.

4. A stage support according to claim 1 or 3, characterized in that: The number of the first support bodies is two, the two first support bodies are arranged on the bracket body along the first direction, the second support body is arranged on the first platform along the second direction, the first direction and the second direction are perpendicular to each other, the bracket body includes a base and a stand arranged along the third direction, and the first support body is arranged between the first platform and the base of the bracket body.

5. The stage support according to claim 1, characterized in that: The first adjustment assembly and the second adjustment assembly both include: a base, a guide rail arranged on the base, a rack arranged on the guide rail, a sliding seat movably connected to the base and the guide rail, and a gear shaft rotatably connected to the sliding seat, and the end of the gear shaft is engaged with the rack.

6. The stage support according to claim 5, characterized in that: The base is provided with a first scale line along its length direction, the sliding seat is provided with a second scale line corresponding to the first scale line, and the end of the gear shaft is connected with a rotating member.

7. The stage support according to claim 5, characterized in that: The gear shaft and the sliding seat are connected in a damping rotation manner.

8. The stage support according to claim 1, characterized in that: The first platform and the second platform are respectively provided with two groups of first locking members, the first locking members are used to lock the first platform and / or the second platform, and the two groups of the first locking members are respectively connected to the first platform and / or the second platform and the base.

9. The stage support according to claim 1, characterized in that: The focusing assembly includes: a lifting base plate arranged on the bracket body, a movable plate movably connected to the lifting base plate, a driving member arranged on the lifting base plate and having an output end connected to the movable plate, a focusing bracket connected to the movable plate, and a visual assembly connected to the focusing bracket.

10. The stage support according to claim 1, characterized in that: The bracket body is further provided with a second locking piece, the second locking piece is provided with a strip-shaped locking groove along the height direction, and the movable plate is provided with a hole body corresponding to the locking groove.

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