Integrated conveying pipeline for sample to be detected and standard solution

Abstract

The utility model relates to the field of sample inspection, and discloses a to-be-inspected sample and standard solution integrated conveying pipeline which comprises a nozzle, the nozzle is arranged above a rotating platform, a rotating disc is rotationally arranged above the rotating platform, a first switching valve is arranged on one side of the rotating platform, and a second switching valve is arranged on the other side of the rotating platform. The first switching valve is communicated with the nozzle through a connecting pipe, a first three-way connector is arranged on one side of the first switching valve, the first switching valve is communicated with the first three-way connector through a connecting pipe, a solvent bottle is arranged below the first three-way connector, and a manual valve is arranged on the connecting pipe communicated between the first three-way connector and the solvent bottle. According to the utility model, the whole wafer or part of the wafer is scanned through the planar movement of the nozzle and the rotary movement of the rotary disc, so as to extract the metal pollutants on the surface of the wafer to be detected, thereby realizing the automatic operation of the pipeline, avoiding the human intervention of the sample in the sampling process, reducing the risk of causing extra pollution, and preventing the influence on the detection result.

Description

Technical Field

[0001] The utility model relates to the technical field of sample inspection, in particular to an integrated conveying pipeline for samples to be inspected and standard solutions. Background Art

[0002] With the continuous reduction of the line width limit of semiconductor chips, the proportion of non-visual defects gradually increases. In the process technology below 20nm, the demand for non-visual (chemical method) monitoring solutions grows rapidly, and at the same time, there are higher requirements for the detection limit of equipment.

[0003] According to the Chinese patent with the publication number: CN218422862U, a semiconductor substrate inspection table includes a workbench, a filtering fan, and a filtering orifice plate; a protective frame is arranged on the working surface of the workbench, and one side of the protective frame is provided with an open end; the filtering fan is arranged on the protective frame, and the air outlet of the filtering fan faces the working surface of the workbench; the filtering orifice plate is erected on the workbench, and there is a working gap between the filtering orifice plate and the working surface of the workbench.

[0004] In the above solution, the filtering fan is used to filter the air, which still has the following disadvantages: during the filtering process, it is inevitable that there will be human intervention, which may lead to the risk of additional contamination of the sample and affect the detection result. Content of the Utility Model

[0005] The purpose of the utility model is to provide an integrated conveying pipeline for samples to be inspected and standard solutions, so as to solve the problem that it may lead to the risk of additional contamination of the sample and affect the detection result.

[0006] To achieve the above-mentioned utility model purpose, the utility model adopts the following technical scheme: an integrated conveying pipeline for samples to be inspected and standard solutions, including a nozzle, the nozzle is arranged above a rotating platform, a rotating disk is rotatably arranged above the rotating platform, a first switching valve is arranged on one side of the rotating platform, the first switching valve is communicated with the nozzle through a connecting pipe, a first three-way joint is arranged on one side of the first switching valve, the first switching valve is communicated with the first three-way joint through a connecting pipe, a solvent bottle is arranged below the first three-way joint, a manual valve is arranged on the connecting pipe communicating between the first three-way joint and the solvent bottle, a first liquid storage ring is arranged below the first switching valve, a first injection pump is arranged below the first liquid storage ring, the first liquid storage ring is communicated with the first injection pump through a connecting pipe, and a first liquid level sensor is arranged on one side of the first liquid storage ring.

[0007] Preferably, a second switching valve is provided on one side of the first three-way joint. The first three-way joint and the second switching valve are communicated through a connecting pipe. A second liquid storage ring is communicated and arranged below the second switching valve. A second liquid level sensor is fixed on the second liquid storage ring. The bottom end of the second liquid storage ring is communicated and provided with a second three-way joint. One end of the second three-way joint is communicated and provided with a second injection pump through a connecting pipe. The other end of the second three-way joint is communicated and provided with a third injection pump through a connecting pipe.

[0008] Preferably, a third three-way joint is communicated and arranged at the three ports of the second switching valve through a connecting pipe. The top end of the third three-way joint is communicated and provided with an analytical instrument through a connecting pipe.

[0009] Preferably, a third switching valve is provided on one side of the third three-way joint. The third three-way joint and one port of the third switching valve are communicated through a connecting pipe. A third liquid storage ring is communicated below the third switching valve. The lower end of the third liquid storage ring is communicated and provided with a fourth injection pump through a connecting pipe. A third liquid level sensor is arranged on the third liquid storage ring.

[0010] Preferably, the first switching valve, the second switching valve and the third switching valve are all provided with three interfaces.

[0011] Preferably, an overflow tank is provided on one side of the rotating platform.

[0012] Compared with the prior art, an integrated conveying pipeline for a sample to be detected and a standard solution adopting the above technical scheme has the following beneficial effects:

[0013] First, pour the required scanning solution into the solvent bottle, then open the manual valve and switch the first switching valve to the three-port position. At this time, the first injection pump extracts the scanning solution and injects it into the first liquid storage ring until the signal of the first liquid level sensor changes from "off" to "on", indicating that the solution has been extracted in place. Then the first switching valve is switched to the one-port position, and the first injection pump pushes the scanning solution to the nozzle. Then, with the scanning solution carried by the nozzle, through the planar movement of the nozzle and the rotational movement of the rotating disk, the whole or part of the wafer is scanned to extract the metal contaminants on the wafer surface to be detected, realizing the automatic operation of the pipeline, avoiding the human intervention in the sampling process of the sample, reducing the risk of causing additional contamination, and preventing the influence on the detection result.

[0014] II. The sample solution to be measured after scanning the wafer is transported to the analytical instrument for analysis. First, switch the second switching valve to port 2, and then the third injection pump extracts the sample solution to be measured in the nozzle to the second liquid storage loop until the signal of the second liquid level sensor changes from "off" to "on", indicating that the solution has been pumped in place. Then, switch the second switching valve to port 3, and the second injection pump is filled with deionized water. The deionized water is used to boost the sample solution to be measured into the analytical instrument. The analytical instrument detects the metal contamination components and contents in the sample solution, which increases the intuitiveness for the staff to observe the detection results.

[0015] III. First, switch the third switching valve to port 3 to connect with the standard solution. The fourth injection pump extracts a certain amount of the standard solution to the third liquid storage loop until the signal of the third liquid level sensor changes from "off" to "on", indicating that the solution has been pumped in place and is ready for use. Then, switch the second switching valve to port 1, and the third injection pump extracts a certain amount of the scanning solution to the second liquid storage loop until the signal of the second liquid level sensor changes from "off" to "on", indicating that the solution has been pumped in place and is ready for use. Finally, switch the second switching valve to port 3 and the third switching valve to port 1. The second injection pump is filled with deionized water to boost the scanning solution. By controlling the speed and volume of the solution ejected by the second injection pump and the fourth injection pump, standard solutions with different concentration gradients are configured for the analytical instrument to measure the standard curve and compare the element components and contents in the sample solution to be measured, which increases the accuracy of the detection results.

[0016] IV. First, move the nozzle to soak in the overflow tank. Switch the first switching valve to port 3, and the first injection pump extracts the scanning solution in the solvent bottle to the first liquid storage loop until the signal of the first liquid level sensor changes from "off" to "on". Then, switch the first switching valve to port 1, and the first injection pump ejects the scanning solution to the nozzle and drains it through the overflow tank. First, move the nozzle to soak in the overflow tank. Switch the second switching valve to port 2, and the third injection pump extracts the deionized water in the overflow tank to the second liquid storage loop until the signal of the second liquid level sensor changes from "off" to "on". Then, switch the second switching valve to port 3, and the third injection pump ejects the scanning solution to the analytical instrument. Repeat the above steps multiple times to clean the pipeline. Switch the third switching valve to port 3, and the fourth injection pump extracts the standard solution to the third liquid storage loop until the signal of the third liquid level sensor changes from "off" to "on". Then, switch the third switching valve to port 1, and the fourth injection pump ejects the scanning solution to the analytical instrument. Repeat the above steps multiple times to clean the pipeline to prevent residues inside the pipeline and avoid the influence of the previous injection on the next detection result. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic structural diagram of the conveying pipeline for the embodiment.

[0018] Figure 2Schematic diagram of the detection pipeline structure in the embodiment.

[0019] Figure 3 Schematic diagram of the analysis pipeline structure in the embodiment.

[0020] Figure 4 Schematic diagram of the liquid distribution pipeline structure in the embodiment.

[0021] In the figure: 1. Nozzle; 2. Rotary platform; 3. Rotary disk; 4. Overflow tank; 5. First switching valve; 6. First three-way joint; 7. Solvent bottle; 8. Manual valve; 9. First liquid storage ring; 10. First liquid level sensor; 11. First injection pump; 12. Second switching valve; 13. Second liquid storage ring; 14. Second liquid level sensor; 15. Second three-way joint; 16. Second injection pump; 17. Third injection pump; 18. Third three-way joint; 19. Analytical instrument; 20. Third switching valve; 21. Third liquid storage ring; 22. Third liquid level sensor; 23. Fourth injection pump. Detailed implementation manners

[0022] The following will, with reference to the accompanying drawings, elaborate on the preferred embodiments of the present invention.

[0023] As Figure 1 and Figure 2 shown, an integrated conveying pipeline for a sample to be detected and a standard solution includes a nozzle 1, the nozzle 1 is arranged above the rotary platform 2, a rotary disk 3 is rotatably arranged above the rotary platform 2, a first switching valve 5 is arranged on one side of the rotary platform 2, the first switching valve 5 is communicated with the nozzle 1 through a connecting pipe, a first three-way joint 6 is arranged on one side of the first switching valve 5, the first switching valve 5 is communicated with the first three-way joint 6 through a connecting pipe, a solvent bottle 7 is arranged below the first three-way joint 6, a manual valve 8 is arranged on the connecting pipe communicating the first three-way joint 6 and the solvent bottle 7, a first liquid storage ring 9 is arranged below the first switching valve 5, a first injection pump 11 is arranged below the first liquid storage ring 9, the first liquid storage ring 9 is communicated with the first injection pump 11 through a connecting pipe, and a first liquid level sensor 10 is arranged on one side of the first liquid storage ring 9.

[0024] In use, the required scanning solution is poured into the interior of the solvent bottle 7. Then, the manual valve 8 is opened, and the first switching valve 5 is switched to the three-way port. At this time, the first syringe pump 11 extracts the scanning solution and injects it into the first liquid storage loop 9 until the signal of the first liquid level sensor 10 changes from "off" to "on", indicating that the solution has been extracted in place. Then, the first switching valve 5 is switched to the one-way port, and the first syringe pump 11 pushes the scanning solution out to the nozzle 1. Then, with the scanning solution carried by the nozzle 1, through the planar movement of the nozzle 1 and the rotational movement of the rotating disk 3, the entire or part of the wafer is scanned to extract the metal contaminants on the wafer surface for testing, realizing the automated operation of the pipeline, avoiding human intervention during the sampling process, reducing the risk of causing additional contamination, and preventing the impact on the test results.

[0025] As Figure 1 and Figure 3 shown, a second switching valve 12 is provided on one side of the first three-way joint 6. The first three-way joint 6 and the second switching valve 12 are connected through a connecting pipe. A second liquid storage loop 13 is connected and provided below the second switching valve 12. A second liquid level sensor 14 is fixed on the second liquid storage loop 13. A second three-way joint 15 is connected and provided at the bottom end of the second liquid storage loop 13. One end of the second three-way joint 15 is connected and provided with a second syringe pump 16 through a connecting pipe, and the other end of the second three-way joint 15 is connected and provided with a third syringe pump 17 through a connecting pipe. The three-way port of the second switching valve 12 is connected and provided with a third three-way joint 18 through a connecting pipe. The top end of the third three-way joint 18 is connected and provided with an analytical instrument 19 through a connecting pipe.

[0026] In use, the sample solution to be tested after scanning the wafer is transported to the analytical instrument 19 for analysis. First, the second switching valve 12 is switched to the two-way port, and then the third syringe pump 17 extracts the sample solution to be tested in the nozzle 1 to the second liquid storage loop 13 until the signal of the second liquid level sensor 14 changes from "off" to "on", indicating that the solution has been extracted in place. Then, the second switching valve 12 is switched to the three-way port, and the second syringe pump 16 is filled with deionized water. The deionized water is used to boost the sample solution to be tested into the analytical instrument 19. The analytical instrument 19 detects the metal contamination components and content contained in the sample solution, increasing the intuitiveness for the staff to observe the test results.

[0027] As Figure 1 and Figure 4 shown, a third switching valve 20 is provided on one side of the third three-way joint 18. The third three-way joint 18 and the one-way port of the third switching valve 20 are connected through a connecting pipe. A third liquid storage loop 21 is connected below the third switching valve 20. The lower end of the third liquid storage loop 21 is connected and provided with a fourth syringe pump 23 through a connecting pipe. A third liquid level sensor 22 is provided on the third liquid storage loop 21.

[0028] In use, first switch the third switching valve 20 so that its three ports are connected to the standard solution. The fourth injection pump 23 extracts a certain amount of the standard solution into the third liquid storage loop 21 until the signal of the third liquid level sensor 22 changes from "off" to "on", indicating that the solution has been extracted in place and is ready for use. Then switch the second switching valve 12 to its first port, and the third injection pump 17 extracts a certain amount of the scanning solution into the second liquid storage loop 13 until the signal of the second liquid level sensor 14 changes from "off" to "on", indicating that the solution has been extracted in place and is ready for use. Finally, switch the second switching valve 12 to its third port and the third switching valve 20 to its first port. The second injection pump 16 is filled with deionized water to boost the scanning solution. By controlling the speed and amount of the solution ejected by the second injection pump 16 and the fourth injection pump 23, standard solutions with different concentration gradients are configured for the analytical instrument 19 to measure the standard curve and compare the composition and content of the elements in the sample solution to be measured, thereby improving the accuracy of the detection results.

[0029] As Figures 1 - 4 shown, the first switching valve 5, the second switching valve 12, and the third switching valve 20 are all provided with three interfaces, and an overflow tank 4 is arranged on one side of the rotating platform 2.

[0030] In use, first move the nozzle 1 to be immersed in the overflow tank 4. Switch the first switching valve 5 to its third port, and the first injection pump 11 extracts the scanning solution in the solvent bottle 7 into the first liquid storage loop 9 until the signal of the first liquid level sensor 10 changes from "off" to "on". Then switch the first switching valve 5 to its first port, and the first injection pump 11 ejects the scanning solution to the nozzle 1 and drains it through the overflow tank 4. First move the nozzle 1 to be immersed in the overflow tank 4. Switch the second switching valve 12 to its second port, and the third injection pump 17 extracts the deionized water in the overflow tank 4 into the second liquid storage loop 13 until the signal of the second liquid level sensor 14 changes from "off" to "on". Then switch the second switching valve 12 to its third port, and the third injection pump 17 ejects the scanning solution to the analytical instrument 19. Repeat the above steps multiple times to clean the pipeline. Switch the third switching valve 20 to its third port, and the fourth injection pump 23 extracts the standard solution into the third liquid storage loop 21 until the signal of the third liquid level sensor 22 changes from "off" to "on". Then switch the third switching valve 20 to its first port, and the fourth injection pump 23 ejects the scanning solution to the analytical instrument 19. Repeat the above steps multiple times to clean the pipeline to prevent residues inside the pipeline and avoid the influence of the previous injection on the next detection result.

[0031] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent replacements or changes, and all should be covered within the protection scope of the present invention.

Claims

1. An integrated delivery pipeline for a sample to be tested and a standard solution, comprising a nozzle (1), wherein the nozzle (1) is arranged above a rotating platform (2), and is characterized in that: A rotating disk (3) is rotatably arranged above the rotating platform (2); a first switching valve (5) is arranged on one side of the rotating platform (2); the first switching valve (5) is connected to the nozzle (1) through a connecting pipe; a first three-way joint (6) is arranged on one side of the first switching valve (5); the first switching valve (5) and the first three-way joint (6) are connected through a connecting pipe; a solvent bottle (7) is arranged below the first three-way joint (6); a manual valve (8) is arranged on the connecting pipe connecting the first three-way joint (6) and the solvent bottle (7); a first liquid storage ring (9) is arranged below the first switching valve (5); a first injection pump (11) is arranged below the first liquid storage ring (9); the first liquid storage ring (9) and the first injection pump (11) are connected through a connecting pipe; a first liquid level sensor (10) is arranged on one side of the first liquid storage ring (9).

2. The integrated delivery pipeline for samples to be tested and standard solutions according to claim 1, characterized in that: A second switching valve (12) is provided on one side of the first three-way joint (6); the first three-way joint (6) is connected to the second switching valve (12) through a connecting pipe; a second liquid storage ring (13) is provided below the second switching valve (12); a second liquid level sensor (14) is fixed on the second liquid storage ring (13); a second three-way joint (15) is provided at the bottom end of the second liquid storage ring (13); one end of the second three-way joint (15) is provided with a second injection pump (16) through a connecting pipe; and the other end of the second three-way joint (15) is provided with a third injection pump (17) through a connecting pipe.

3. The integrated delivery pipeline for samples to be tested and standard solutions according to claim 2, characterized in that: The three ports of the second switching valve (12) are connected to a third three-way joint (18) via a connecting pipe, and the top end of the third three-way joint (18) is connected to an analytical instrument (19) via a connecting pipe.

4. The integrated delivery pipeline for samples to be tested and standard solutions according to claim 3 is characterized in that: A third switching valve (20) is provided on one side of the third three-way connector (18); the third three-way connector (18) is connected to one port of the third switching valve (20) via a connecting pipe; a third liquid storage ring (21) is connected below the third switching valve (20); a fourth injection pump (23) is provided at the lower end of the third liquid storage ring (21) via a connecting pipe; and a third liquid level sensor (22) is provided on the third liquid storage ring (21).

5. The integrated delivery pipeline for samples to be tested and standard solutions according to claim 1, characterized in that: The first switching valve (5), the second switching valve (12) and the third switching valve (20) are each provided with three interfaces.

6. The integrated delivery pipeline for samples to be tested and standard solutions according to claim 1, characterized in that: An overflow trough (4) is provided on one side of the rotating platform (2).

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