Semiconductor chip test equipment
By designing a semiconductor chip testing device including a hinged cover, limiting block and pressure measurement mechanism, the problem of the existing equipment producing non-vertical forces and pressures on the chip during the test process is solved, and higher detection accuracy and longer equipment life are achieved.
Patent Information
- Application Number
- CN202421731023.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-19
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-07-19
AI Technical Summary
During the testing process, existing semiconductor chip testing equipment will generate non-vertical forces on the detection chip and the pressure magnitude cannot be visible or adjusted, which will easily damage the chip and the detection accuracy will be reduced after long-term use.
A semiconductor chip testing device including a detection base, a detection recess and a detection limiting mechanism is designed. The detection limiting mechanism consists of a hinged cover, a limiting block, a sliding limiting structure, an elastic driving structure and a pressure measuring mechanism. The limiting block can be moved vertically, and the pressure can be visually adjustable through the elastic driving structure and a limiting drive mechanism.
During the detection process, the limiting block does not generate non-vertical force on the semiconductor chip, and the pressure value can be visually adjusted, which improves the detection accuracy, reduces the detection difficulty, and extends the service life of the detection equipment.
Smart Images
Figure CN223022314U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to semiconductor chip production and testing equipment, in particular to a semiconductor chip testing device. Background Art
[0002] Semiconductor chip testing equipment is usually used in the testing stage during the chip manufacturing process, as well as for testing chips during the assembly and repair of electronic devices.
[0003] In the prior art, for semiconductor chip testing equipment, one type is a detection device with a hinged cover, including a detection base, a pressing cover, a rotating shaft, and a torsion spring; one end of the pressing cover is rotatably installed on the detection base through the rotating shaft, the torsion spring is installed on the rotating shaft and elastically connects the detection base and the pressing cover, a detection groove is provided on the detection base, the other end of the pressing cover is detachably connected to the detection base, and after the pressing cover is opened and detached from the detection base, by setting the torsion spring, it is convenient for the automatic opening of the pressing cover. During use, the semiconductor chip to be tested is placed in the detection groove of the detection base, a limiting pressing block for elastically limiting the semiconductor chip in the detection groove is provided on the pressing cover, and after the pressing cover is closed and covered, the limiting pressing block elastically limits the semiconductor chip, so that it is stably connected to the detection conduction point of the test socket. During the process of the pressing cover rotating to the horizontal position to limit the chip, the limiting pressing block on the cover body will press the semiconductor chip at a relatively small angle, and due to the existence of the inclination angle, a non-vertical force will be generated on the semiconductor device, which is likely to cause damage to the semiconductor chip in the detection groove, and due to the long-term use of the chip, the detection conduction contact points in the detection groove will show a certain degree of wear, but since the spring for elastically applying elastic pressure to the limiting pressing block cannot be adjusted, the pressure cannot be adjusted adaptively either, resulting in poor connection between the detection base and the test chip.
[0004] Another type is a detection device with a knob cover, including a detection base and a rotating cover; during use, the semiconductor chip to be tested is placed in the detection groove of the detection base, and the rotating cover is tightened by turning the knob to limit the semiconductor chip, so that it is stably connected to the detection point of the test socket. During the process of the rotating cover being tightened by turning the knob to limit the chip, a force in the rotating direction will be generated on the semiconductor chip, and the magnitude of the pressure has no visual feedback and is not easy to control. If the pressure is too small, it may cause poor contact of some contact points, and if the pressure is too large, it may damage the semiconductor chip or the detection conduction point on the detection equipment. Summary of the Utility Model
[0005] The utility model provides a semiconductor chip testing device, which solves the technical problems that in the existing semiconductor chip testing device during the testing process, a force in a direction other than the pressing and limiting pressure on the detection chip will be generated and the magnitude of the pressure is not visible and not adjustable, which is likely to damage the detected semiconductor chip, and the detection accuracy and precision will be reduced during long-term detection.
[0006] The technical solution adopted by the present utility model to solve its technical problems is as follows: A semiconductor chip testing device includes a detection base, a detection concave platform located on the detection base, and a detection limiting mechanism for limiting a semiconductor chip in the detection concave platform for detection. The detection limiting mechanism includes a cover body hinged on the detection base. The cover body includes a first surface corresponding to the semiconductor chip during detection and a second surface facing away from the semiconductor chip. A limiting pressure block for limiting the semiconductor chip in the detection concave platform and protruding from the first surface at one end is arranged in the cover body. A sliding limiting structure for limiting the relative vertical movement of the limiting pressure block with respect to the semiconductor chip in the detection concave platform is arranged in the cover body. An elastic driving structure for elastically driving the limiting pressure block away from the detection concave platform is arranged in the cover body. A pressure measuring mechanism is arranged between the elastic driving structure and the limiting pressure block. A limiting driving mechanism for driving the elastic driving structure to move relative to the semiconductor chip in the detection concave platform is arranged on the second surface of the cover body. A pressure indicating mechanism for displaying the real-time pressure of the pressure measuring mechanism is arranged on the detection base. During the detection process, the limiting pressure block does not generate forces in other directions on the semiconductor chip, and the pressure value is visible and adjustable, improving the detection accuracy and reducing the detection difficulty.
[0007] Further: The sliding limiting structure includes a plurality of parallelly arranged optical rod bolts. The limiting pressure block includes a base portion and a limiting portion protruding from the base portion for pressing the semiconductor chip in the detection concave platform. A plurality of through accommodating cavities are arranged on the periphery of the limiting portion on the base portion. The accommodating cavities include a first sliding limiting cavity matching the optical rod of the optical rod bolt and an anti-detachment limiting cavity for accommodating the bolt head of the optical rod bolt. The anti-detachment limiting cavity is located at one end of the base portion close to the limiting portion. The threaded ends of the plurality of optical rod bolts sequentially pass through the anti-detachment limiting cavity and the first sliding limiting cavity and are fixed in the cover body. The sliding limiting structure is beautiful and does not cause negative impacts on the test operation, and the structure is simple.
[0008] Further: The elastic driving structure includes a driving plate and an elastic member. A first limiting concave platform is arranged at one end of the first surface of the cover body. A second limiting concave platform with an area larger than that of the first limiting concave platform is arranged at one end of the first limiting concave platform facing the second surface of the cover body. The driving plate includes a driving upper plate movably arranged in the first limiting concave platform and a driving lower plate protruding correspondingly from the driving upper plate towards the first limiting concave platform. The two ends of the pressure measuring mechanism are respectively fixed on the driving lower plate and the limiting pressure block. Second sliding limiting cavities matching the optical rods of the optical rod bolts are arranged through the driving lower plate at positions corresponding to the plurality of optical rod bolts. The optical rods of the plurality of optical rod bolts pass through the second sliding limiting cavities. The elastic member is arranged in the second limiting concave platform to apply an elastic force towards the second surface direction of the cover body to the driving upper plate. The limiting driving mechanism drives the driving upper plate to move in the direction of the first limiting concave platform. During the overall operation process, the driving plate is also limited to slide along the optical rod direction of the optical rod bolt, with more stable operation, high precision, and long service life.
[0009] Furthermore, at one end of the second limiting concave platform facing the second surface of the cover body, there is a third limiting concave platform extending to the second surface of the cover body. The area of the third limiting concave platform is larger than that of the second limiting concave platform. A cover plate is fixed in the third limiting concave platform. A threaded hole is provided on the cover plate for the threaded end of the optical rod bolt to sequentially pass through the anti - detachment limiting cavity, the first sliding limiting cavity, and the second sliding limiting cavity and then be fixedly matched. The assembly of the cover body part of the detection device is simple and convenient.
[0010] Furthermore, a first relief concave platform for accommodating the lower end of the pressure measuring mechanism is provided on the base. The structure is compact, reducing the overall volume of the cover body.
[0011] Furthermore, a second relief concave platform for accommodating the upper end of the pressure measuring mechanism is provided on the driving lower plate. The structure is compact, reducing the overall volume of the cover body.
[0012] Furthermore, the limiting driving mechanism includes a threaded column and a knob part fixed at one end of the threaded column. A through adjustment hole is provided at a position on the cover plate corresponding to the driving upper plate. A thread matching the thread on the threaded column is provided in the adjustment hole. The structure is simple to realize the driving and adjustment of the driving upper plate.
[0013] Furthermore, an adjustment concave platform for accommodating the threaded column is provided at a position on the driving upper plate corresponding to the adjustment hole. This increases the stability and durability of the threaded column.
[0014] Furthermore, a convex platform protruding outward is provided on the periphery of the first limiting concave platform at one end of the second surface of the cover body. An elastic part limiting cavity extending into the convex platform is provided at the bottom of the second limiting concave platform far from the second surface of the cover body. The two ends of the elastic part are respectively elastically abutted against the bottom of the elastic part limiting cavity and one end of the driving upper plate far from the second surface of the cover body. The elastic part limiting cavity increases the limiting and protection of the elastic part. The convex platform design has a compact structure, reducing the overall volume of the cover body.
[0015] Furthermore, the pressure indicating mechanism includes a display screen for displaying the pressure value of the pressure measuring mechanism in real - time on the detection seat and three indicator lights respectively for indicating excessive pressure, too low pressure, and appropriate pressure. It is convenient to use and can accurately and intuitively control the magnitude of the pressure during detection. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 is the front view of the present utility model;
[0017] Figure 2 is the cross - sectional view of the cover body part;
[0018] Figure 3 is the cross - sectional view of the limiting pressure block and the optical rod bolt part.
[0019] The markings in the figure are: detection base 100, detection concave platform 110, cover body 201, first limiting concave platform 202, second limiting concave platform 203, convex platform 204, elastic member limiting cavity 205, limiting pressure block 210, base portion 211, limiting portion 212, first sliding limiting cavity 213, anti-disengagement limiting cavity 214, first relief concave platform 215, pressure measurement mechanism 220, elastic member 231, driving upper plate 232, driving lower plate 233, limiting driving mechanism 240, cover plate 250, optical rod bolt 260, fixing bolt 270. Detailed implementation mode
[0020] The present utility model will be further described below in conjunction with the accompanying drawings and the detailed implementation mode.
[0021] As Figure 1 A semiconductor chip testing device shown in the figure includes a detection base 100, a detection concave platform 110 located on the detection base 100, and a detection limiting mechanism for limiting a semiconductor chip in the detection concave platform 110 for detection. The detection limiting mechanism includes a cover body 201 hinged on the detection base 100. The cover body 201 includes a first surface corresponding to the semiconductor chip during detection and a second surface facing away from the semiconductor chip. A limiting pressure block 210 for limiting the semiconductor chip in the detection concave platform 110 and protruding from the first surface at one end is arranged in the cover body 201. A sliding limiting structure for limiting the relative vertical movement of the limiting pressure block 210 with respect to the semiconductor chip in the detection concave platform 110 is arranged in the cover body 201. An elastic driving structure for elastically driving the limiting pressure block 210 away from the detection concave platform 110 is arranged in the cover body 201. A pressure measurement mechanism 220 is arranged between the elastic driving structure and the limiting pressure block 210. A limiting driving mechanism 240 for driving the elastic driving structure to move relative to the semiconductor chip in the detection concave platform 110 is arranged on the second surface of the cover body 201. A pressure indicating mechanism for displaying the real-time pressure of the pressure measurement mechanism 220 is arranged on the detection base 100.
[0022] In this specific embodiment, the pressure measurement mechanism 220 is a pressure sensor purchased on the market; elastic bayonet structures are correspondingly arranged at one end of the cover body 201 away from the hinge and on the detection base 100;
[0023] During specific implementation, the semiconductor chip to be detected is placed on the detection concave platform 110, and then the cover body 201 is covered. At this time, the elastic drive structure elastically drives the limit pressing block 210 away from the detection concave platform 110, that is, the limit pressing block 210 does not contact the semiconductor chip in the detection concave platform 110 during the process of covering the cover body 201 on the detection base 100. Then, the limit drive mechanism 240 drives the elastic drive structure to move towards the semiconductor chip in the detection concave platform 110, thereby driving the pressure measurement mechanism 220 and the limit pressing block 210 to move towards the semiconductor chip in the detection concave platform 110. When the limit pressing block 210 contacts the semiconductor chip in the detection concave platform 110, the pressure measurement mechanism 220 immediately indicates the pressure received by the semiconductor chip in the detection concave platform 110 in real time. When the value reaches the preset range, the driving of the elastic drive structure towards the semiconductor chip in the detection concave platform 110 is stopped, and then the test can be carried out. During the pressing process, the limit pressing block 210 only moves in the vertical direction relative to the semiconductor chip in the detection concave platform 110 and does not generate a force in a direction other than the vertical direction. After the test is completed, the limit drive mechanism 240 is reset, and the elastic drive structure elastically drives the limit pressing block 210 away from the detection concave platform 110, that is, the limit pressing block 210 does not contact the semiconductor chip in the detection concave platform 110 during the process of opening and covering the cover body 201 again. Opening the cover body 201 and taking out the semiconductor chip in the detection concave platform 110 completes this test. Each test can be carried out according to the above steps.
[0024] During the detection process, the limit pressing block 210 does not generate a force in other directions on the semiconductor chip, and the pressure value is visible and adjustable, which improves the detection accuracy and reduces the detection difficulty.
[0025] On the basis of the above, as Figures 1 to 3 shown, the sliding limit structure includes a plurality of parallelly arranged optical rod bolts 260. The limit pressing block 210 includes a base portion 211 and a limit portion 212 protruding from the base portion for pressing the semiconductor chip in the detection concave platform 110. A plurality of through accommodating cavities are arranged on the periphery of the limit portion 212 on the base portion 211. The accommodating cavity includes a first sliding limit cavity 213 matching the optical rod of the optical rod bolt 260 and an anti - detachment limit cavity 214 for accommodating the bolt head of the optical rod bolt 260. The anti - detachment limit cavity 214 is located at one end of the base portion 211 close to the limit portion 212. The threaded ends of the plurality of optical rod bolts 260 sequentially pass through the anti - detachment limit cavity 214 and the first sliding limit cavity 213 and are fixed in the cover body 201.
[0026] In specific implementation, the limiting pressing block 210 can slide along the optical axis direction of the optical axis bolt 260, and the bolt head of the optical axis bolt 260 can prevent the limiting pressing block 210 from falling off the cover body 201 within the anti-detachment limiting cavity 214; the height of the anti-detachment limiting cavity 214 is greater than the height of the bolt head of the optical axis bolt 260. In actual implementation, after the testing device is assembled, during the relative movement of the limiting pressing block 210 during detection, the bolt head of the optical axis bolt 260 is always within the anti-detachment limiting cavity 214, which is aesthetically pleasing and does not affect the testing operation, and the structure is simple.
[0027] On the basis of the above, as Figures 1 to 3 shown, the elastic driving structure includes a driving plate and an elastic member 231. One end of the first surface of the cover body 201 is provided with a first limiting concave platform 202. The first limiting concave platform 202 is provided with a second limiting concave platform 203 with an area larger than that of the first limiting concave platform 202 towards one end of the second surface of the cover body 201. The driving plate includes a driving upper plate 232 movably arranged within the first limiting concave platform 202 and a driving lower plate 233 protruding towards the corresponding position of the first limiting concave platform 202 on the driving upper plate 232. Both ends of the pressure measuring mechanism 220 are respectively fixed on the driving lower plate 233 and the limiting pressing block 210. Through holes corresponding to the plurality of optical axis bolts 260 are provided at corresponding positions on the driving lower plate 233, and the optical axes of the plurality of optical axis bolts 260 pass through the second sliding limiting cavities. The elastic member 231 is arranged within the second limiting concave platform 203 to apply an elastic force towards the second surface direction of the cover body 201 to the driving upper plate 232, and the limiting driving mechanism 240 drives the driving upper plate 232 to move relative to the first limiting concave platform 202.
[0028] In this specific embodiment, the elastic member 231 is a spring, and both ends thereof are respectively in contact with the bottom of the second limiting concave platform 203 far from the second surface of the cover body 201 and the end face of the driving upper plate 232 close to the first limiting concave platform 202. In specific implementation, according to different specific structures, the elastic member 231 can also be a tension spring (both ends of the tension spring are respectively pulled at the end face of the driving upper plate 232 far from the first limiting concave platform 202 and the corresponding position inside the cover body 201), etc. elastic components; the driving lower plate 233 corresponds to the limiting pressing block 210 and both are of the same cylindrical shape, and both ends of the pressure measuring mechanism 220 are fixed at the central positions of the driving lower plate 233 and the limiting pressing block 210 and are located between the plurality of optical axis bolts 260.
[0029] During specific implementation, both the limiting pressure block 210 and the driving plate can slide along the direction of the smooth rod of the smooth rod bolt 260. The driving lower plate 233 and the limiting pressure block 210 are fixedly connected through the pressure measuring mechanism 220, that is, the driving lower plate 233 and the limiting pressure block 210 move synchronously. The driving upper plate 232 is applied with an elastic force towards the second surface of the cover body 201 under the action of the elastic member 231, that is, the limiting pressure block 210 can be driven by the driving lower plate 233 on the driving upper plate 232 to move away from the semiconductor chip in the detection concave table 110. The limiting driving mechanism 240 can drive the driving upper plate 232 to move relative to the first limiting concave table 202 against the elastic force of the elastic member 231, that is, the limiting pressure block 210 can be driven by the driving lower plate 233 on the driving upper plate 232 relative to the semiconductor chip in the detection concave table 110. When the limiting driving mechanism 240 returns to the initial position, the driving upper plate 232 is applied with an elastic force towards the second surface of the cover body 201 under the action of the elastic member 231, that is, the limiting pressure block 210 can be driven by the driving lower plate 233 on the driving upper plate 232 to move away from the semiconductor chip in the detection concave table 110.
[0030] During the overall operation process, the driving plate is also limited to slide along the direction of the smooth rod of the smooth rod bolt 260, with more stable operation, high precision and long service life.
[0031] On the basis of the above, as Figures 1 to 3 shown, at one end of the second limiting concave table 203 facing the second surface of the cover body 201, there is a third limiting concave table extending to the second surface of the cover body 201. The area of the third limiting concave table is larger than that of the second limiting concave table 203. A cover plate 250 is fixed in the third limiting concave table. The cover plate 250 is provided with a threaded hole for the threaded end of the smooth rod bolt 260 to pass through the anti-loosening limiting cavity 214, the first sliding limiting cavity 213 and the second sliding limiting cavity in sequence and be fixedly matched. In this specific embodiment, the part of the cover plate 250 located outside the second limiting concave table 203 is fixed on the third limiting concave table through the fixing bolt 270; during equipment assembly, both ends of the pressure measuring mechanism 220 are fixed to the limiting pressure block 210 and the driving plate respectively, then the limiting pressure block 210 and the driving plate are limited on the cover plate 250 through the smooth rod bolt 260, then the elastic member 231 is placed in the second limiting concave table 203, and finally the cover plate 250 is fixed on the third limiting concave table through bolts, and the assembly of the cover body 201 part of the detection equipment is simple and convenient.
[0032] On the basis of the above, as Figures 1 to 3 shown, the base 211 is provided with a first relief concave table 215 for accommodating the lower end of the pressure measuring mechanism 220. The structure is compact and the overall volume of the cover body 201 is reduced.
[0033] On the basis of the above, as Figures 1 to 2As shown, a second relief recess for accommodating the upper end of the pressure measuring mechanism 220 is provided on the driving lower plate 233. The structure is compact, reducing the overall volume of the cover 201.
[0034] On the basis of the above, as Figures 1 to 2 shown, the limit driving mechanism 240 includes a threaded post and a knob portion fixed at one end of the threaded post. A through adjustment hole is provided at a position corresponding to the driving upper plate 232 on the cover plate 250, and a thread matching the thread on the threaded post is provided in the adjustment hole. The structure is simple to realize the driving and adjustment of the driving upper plate 232.
[0035] On the basis of the above, as Figures 1 to 2 shown, an adjustment recess for accommodating the threaded post is provided at a position corresponding to the adjustment hole on the driving upper plate 232. The adjustment hole on the driving upper plate 232 increases the length of the threaded post entering the interior of the cover 201, thereby increasing the stability and durability of the threaded post.
[0036] On the basis of the above, as Figures 1 to 2 shown, a convex platform 204 protruding outward is provided on the periphery of the first limit recess 202 at one end of the second surface of the cover 201. An elastic member limit cavity 205 extending into the convex platform 204 is provided at the bottom of the second limit recess 203 away from the second surface of the cover 201. Both ends of the elastic member 231 are elastically abutted against the bottom of the elastic member limit cavity 205 and one end of the driving upper plate 232 away from the second surface of the cover 201. The elastic member limit cavity 205 increases the limit protection for the elastic member, and the design of the convex platform 204 is compact, reducing the overall volume of the cover 201.
[0037] On the basis of the above, as Figure 1 shown, the pressure indicating mechanism includes a display screen for real-time displaying the pressure value of the pressure measuring mechanism 220 provided on the detection seat 100 and three indicator lights for respectively indicating excessive pressure, insufficient pressure, and appropriate pressure. In the specific implementation process, when quickly detecting, the pressure of the limit pressing block 210 on the semiconductor chip can be adjusted by observing the three indicator lights; when the specific pressure value is required during the R & D research and maintenance process, it can be observed through the display screen. It is convenient to use and the control of the pressure during detection is intuitive and accurate.
[0038] In the above specific embodiments, the purpose, technical solution, and beneficial effects of the present invention have been further described in detail. It should be understood that the above are only specific embodiments of the present invention and are not used to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
Claims
1. A semiconductor chip testing device, comprising a testing seat (100), a testing recess (110) located on the testing seat (100), and a testing limiting mechanism for limiting the semiconductor chip in the testing recess (110) for testing, characterized in that: The detection limit mechanism comprises a cover body (201) hinged on the detection seat (100), the cover body (201) comprising a first surface corresponding to the semiconductor chip during detection and a second surface away from the semiconductor chip, a limit pressing block (210) having one end protruding from the first surface and used for limiting the position of the semiconductor chip in the detection recess (110) is arranged in the cover body (201), and a sliding limit structure is arranged in the cover body (201) for the limit pressing block (210) to move vertically relative to the semiconductor chip in the detection recess (110). The cover body (201) is provided with an elastic driving structure for elastically driving a limit pressure block (210) away from the detection recess (110); a pressure measuring mechanism (220) is provided between the elastic driving structure and the limit pressure block (210); a limit driving mechanism (240) for driving the elastic driving structure to move relative to the semiconductor chip in the detection recess (110) is provided on the second surface of the cover body (201); and a pressure indicating mechanism for displaying the real-time pressure of the pressure measuring mechanism (220) is provided on the detection seat (100).
2. A semiconductor chip testing device according to claim 1, characterized in that: The sliding limit structure comprises a plurality of parallel-arranged light rod bolts (260), the limit pressure block (210) comprises a base (211) and a limit portion (212) protruding from the base for pressing a semiconductor chip in the detection recess (110), a plurality of penetrating accommodating cavities are arranged on the periphery of the upper limit portion (212) of the base (211), the accommodating cavities comprising a first sliding limit cavity (213) matching the light rod of the light rod bolt (260) and an anti-slip limit cavity (214) accommodating a bolt cap of the light rod bolt (260), the anti-slip limit cavity (214) being located at one end of the base (211) close to the limit portion (212), and the threaded ends of the plurality of light rod bolts (260) are fixed in the cover body (201) after passing through the anti-slip limit cavity (214) and the first sliding limit cavity (213) in sequence.
3. A semiconductor chip testing device according to claim 2, characterized in that: The elastic driving structure comprises a driving plate and an elastic member (231); a first limiting recess (202) is arranged at one end of the first surface of the cover body (201); a second limiting recess (203) having an area larger than the first limiting recess (202) is arranged at one end of the first limiting recess (202) facing the second surface of the cover body (201); the driving plate comprises a driving upper plate (232) movably arranged in the first limiting recess (202) and a driving lower plate (233) located on the driving upper plate (232) and protruding toward the first limiting recess (202); and two ends of the pressure measuring mechanism (220) are respectively fixed The drive lower plate (233) and the limiting pressure block (210) are fixed thereon; a second sliding limiting cavity matching the light rod of the light rod bolt (260) is provided on the drive lower plate (233) at positions corresponding to the plurality of light rod bolts (260); the light rods of the plurality of light rod bolts (260) are provided through the second sliding limiting cavity; the elastic member (231) is provided in the second limiting recess (203) to apply an elastic force toward the second surface of the cover body (201) to the drive upper plate (232); and the limiting drive mechanism (240) drives the drive upper plate (232) to move relative to the first limiting recess (202).
4. A semiconductor chip testing device according to claim 3, characterized in that: A third limiting recess (203) extending to the second surface of the cover body (201) is provided at one end of the second limiting recess (203) facing the second surface of the cover body (201); the area of the third limiting recess is larger than the area of the second limiting recess (203); a cover plate (250) is fixed inside the third limiting recess; the cover plate (250) is provided with a threaded hole for matching and fixing the threaded end of the light rod bolt (260) through the anti-slip limit cavity (214), the first sliding limit cavity (213) and the second sliding limit cavity in sequence.
5. The semiconductor chip testing device according to claim 3, characterized in that: The base (211) is provided with a first recessed platform (215) for accommodating the lower end of the pressure measuring mechanism (220).
6. The semiconductor chip testing device according to claim 3, characterized in that: The driving lower plate (233) is provided with a second recessed platform for accommodating the upper end of the pressure measuring mechanism (220).
7. The semiconductor chip testing device according to claim 4, characterized in that: The position limiting driving mechanism (240) comprises a threaded column and a knob portion fixed to one end of the threaded column, and a penetrating position adjusting hole is provided on the cover plate (250) at a position corresponding to the driving upper plate (232), and a thread matching the thread on the threaded column is provided in the position adjusting hole.
8. The semiconductor chip testing device according to claim 7, characterized in that: A position adjustment recess for accommodating a threaded column is arranged on the driving upper plate (232) at a position corresponding to the position adjustment hole.
9. The semiconductor chip testing device according to claim 3, characterized in that: A boss (204) protruding outward is arranged on the periphery of the first limiting recess (202) at one end of the second surface of the cover body (201), and an elastic member limiting cavity (205) extending into the boss (204) is arranged at the bottom of the second limiting recess (203) away from the second surface of the cover body (201), and the two ends of the elastic member (231) elastically abut against the bottom of the elastic member limiting cavity (205) and the end of the driving upper plate (232) away from the second surface of the cover body (201), respectively.
10. The semiconductor chip testing device according to claim 1, characterized in that: The pressure indicating mechanism comprises a display screen arranged on the detection seat (100) for displaying the pressure value of the pressure measuring mechanism (220) in real time, and three indicator lights for indicating excessive pressure, insufficient pressure and appropriate pressure respectively.