Die splitting jig for nanoimprint

Abstract

The utility model discloses a die splitting jig for nanoimprint, which comprises an upper die plate and a lower die plate, a rotating shaft is mounted on the lower die plate, the rotating shaft is connected with the lower die plate through a spring, and the rotating shaft can shift transversely; the upper die plate is rotationally connected with the lower die plate through a rotating shaft, and the upper die plate can turn over with the rotating shaft as the axis. The upper template and the lower template are respectively provided with an adsorption assembly, and the adsorption assemblies are used for adsorbing the imprinting template or the wafer. According to the utility model, the stamping template is separated from the wafer by adopting the die splitting jig, and the stamping template and the wafer are adsorbed by adopting the adsorption assembly during die splitting, so that the wafer is prevented from being damaged. And meanwhile, the transverse force is counteracted by using the spring, the micro-nano structure pattern on the wafer is prevented from being pulled to deform by transverse displacement, and the device is simple in structure, low in cost and suitable for popularization.

Description

Technical Field

[0001] The utility model belongs to the technical field of nanoimprinting, and particularly relates to a mold splitting fixture for nanoimprinting. Background Art

[0002] With the continuous development and progress of micro-nano processing technology, nanoimprinting technology has broken through the problems of traditional lithography in the process of reducing feature size, and has the characteristics of high resolution, low cost and high yield. It is widely used in various fields involving micro-nano processing such as semiconductor manufacturing, MEMS, and biochips.

[0003] The imprinting process mainly includes the following steps. (1) Coating an imprinting adhesive on a wafer, (2) bringing an imprinting template with a micro-nano structure pattern into contact with the wafer, (3) curing the imprinting adhesive, and (4) separating the imprinting template from the wafer.

[0004] The existing mold splitting method often uses manual mold splitting. Workers directly break the imprinting template and the wafer by hand or insert a conical part between the two and then break them. However, it has the following problems:

[0005] First, since the wafer is very thin, it is easy to damage the wafer during the manual separation process, resulting in fragments and reducing the product yield.

[0006] Second, the micro-nano structure pattern between the imprinting template and the wafer is easily damaged. Summary of the Utility Model

[0007] In order to solve the above technical problems, the utility model provides a mold splitting fixture for nanoimprinting.

[0008] In order to achieve the above object, the technical solution of the utility model is as follows:

[0009] The utility model discloses a mold splitting fixture for nanoimprinting, including: an upper template and a lower template. A rotating shaft is installed on the lower template, and the rotating shaft is connected to the lower template through a spring, and the rotating shaft can deflect horizontally;

[0010] The upper template is rotatably connected to the lower template through the rotating shaft, and the upper template can be turned with the rotating shaft as the axis;

[0011] Adsorption components are respectively arranged on the upper template and the lower template, and the adsorption components are used for adsorbing the imprinting template or the wafer.

[0012] On the basis of the above technical solution, the following improvements can be made:

[0013] As a preferred solution, two relatively arranged mounting holes are provided on the lower template.

[0014] As a preferred solution, the rotating shaft passes through the two mounting holes.

[0015] As a preferred solution, the rotating shaft is connected to the upper template through a plurality of sets of spacing adjusting components, and the spacing adjusting components are used to adjust the original spacing between the upper template and the lower template.

[0016] As a preferred solution, each set of spacing adjusting components includes: a lower fixing seat, a pin, an upper fixing seat, and a locking member;

[0017] The ring portion of the lower fixing seat is sleeved on the rotating shaft;

[0018] The pin passes through the through hole of the upper fixing seat and is connected to the lower fixing seat;

[0019] The locking member is used to lock the pin on the upper fixing seat;

[0020] The connecting portion of the upper fixing seat is connected to the upper template.

[0021] As a preferred solution, a jacking mechanism is installed on the upper template or the lower template, and the jacking mechanism is used to jack open a certain gap between the upper template and the lower template.

[0022] As a preferred solution, a handle is installed on the upper template or the lower template.

[0023] The present utility model discloses a mold splitting fixture for nanoimprinting, which has the following beneficial effects:

[0024] First, the mold splitting fixture is used to separate the imprinting template from the wafer. During mold splitting, the adsorption components are used to adsorb the imprinting template and the wafer to avoid damage to the wafer. At the same time, the spring is used to offset the lateral force to avoid the micro-nano structure pattern on the wafer being deformed by the lateral displacement.

[0025] Second, the structure is simple, the cost is low, and it is suitable for popularization. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present utility model, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0027] Figure 1 It is one of the structural schematic diagrams of the mold splitting fixture provided by the embodiment of the present utility model.

[0028] Figure 2 It is another structural schematic diagram of the mold splitting fixture provided by the embodiment of the present utility model.

[0029] Figure 3A cross-sectional view of the lower template provided by an embodiment of the present utility model (showing the spring).

[0030] Figure 4 A schematic structural diagram of the spacing adjustment assembly provided by an embodiment of the present utility model.

[0031] Wherein: 1 - upper template, 2 - lower template, 21 - mounting hole, 3 - rotating shaft, 4 - spring, 5 - imprinting template, 6 - wafer, 7 - spacing adjustment assembly, 71 - lower fixing seat, 72 - pin, 73 - upper fixing seat, 74 - locking member, 8 - ejecting mechanism, 9 - handle. Detailed implementation manners

[0032] The preferred implementation manners of the present utility model will be described in detail below with reference to the accompanying drawings.

[0033] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only some of the embodiments of the present utility model, rather than all embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0034] In addition, the expression "including" elements is an "open" expression. This "open" expression only means that there are corresponding components or steps, and should not be construed as excluding additional components or steps.

[0035] In order to achieve the purpose of the present utility model, in some embodiments of the mold splitting fixture for nanoimprinting, the mold splitting fixture includes: an upper template 1 and a lower template 2. A rotating shaft 3 is installed on the lower template 2, and the rotating shaft 3 is connected to the lower template 2 through a spring 4, and the rotating shaft 3 can undergo a lateral offset;

[0036] The upper template 1 is rotatably connected to the lower template 2 through the rotating shaft 3, and the upper template 1 can be turned with the rotating shaft 3 as the axis;

[0037] Adsorption components (not shown in the figure) are respectively provided on the upper template 1 and the lower template 2, and the adsorption components are used to adsorb the imprinting template 5 or the wafer 6.

[0038] Wherein: The adsorption component is a vacuum channel provided on the upper template 1 or the lower template 2 and a vacuum pumping device communicated with the vacuum channel.

[0039] In order to further optimize the implementation effect of the present utility model, in some other implementation manners, the remaining characteristic technologies are the same, and the difference is that two relatively arranged mounting holes 21 are provided on the lower template 2.

[0040] Furthermore, the rotating shaft 3 passes through the two mounting holes 21.

[0041] In order to further optimize the implementation effect of the present utility model, in some other embodiments, the remaining characteristic technologies are the same, and the difference lies in that the rotating shaft 3 is connected to the upper template 1 through two groups of spacing adjusting components 7, and the spacing adjusting components 7 are used to adjust the original spacing between the upper template 1 and the lower template 2.

[0042] Furthermore, each group of spacing adjusting components 7 includes: a lower fixing seat 71, a shaft pin 72, an upper fixing seat 73, and a locking member 74;

[0043] The annular part of the lower fixing seat 71 is sleeved on the rotating shaft 3;

[0044] The shaft pin 72 passes through the through hole of the upper fixing seat 73 and is connected to the lower fixing seat 71;

[0045] The locking member 74 (such as: a locking screw) is used to lock the shaft pin 72 on the upper fixing seat 73;

[0046] The connecting part of the upper fixing seat 73 is connected to the upper template 1.

[0047] During adjustment, first close the upper template 1 and the lower template 2, then loosen the locking member 74, adjust the position of the shaft pin 72 to a suitable position, and then tighten the locking member 74.

[0048] Adopting the spacing adjusting components 7 to adjust the original spacing between the upper template 1 and the lower template 2 enables the present utility model to be applicable to imprint templates and wafers of different thicknesses.

[0049] In order to further optimize the implementation effect of the present utility model, in some other embodiments, the remaining characteristic technologies are the same, and the difference lies in that a jacking mechanism 8 is installed on the upper template 1 or the lower template 2, and the jacking mechanism 8 is used to jack open a certain gap between the upper template 1 and the lower template 2.

[0050] The jacking mechanism 8 can be but is not limited to a micrometer head.

[0051] In order to further optimize the implementation effect of the present utility model, in some other embodiments, the remaining characteristic technologies are the same, and the difference lies in that a handle 9 is installed on the upper template 1.

[0052] Workers or a driving mechanism use the handle 9 to flip the upper template 1.

[0053] In addition, the embodiment of the present utility model also discloses a mold splitting method for nanoimprinting, which uses any one of the above mold splitting devices for mold splitting, including:

[0054] Step S1: Place the cured imprint template 5 and the wafer 6 together on the lower template 2, and close the upper template 1;

[0055] Step S2: The adsorption components on the upper template 1 and the lower template 2 respectively adsorb the wafer 6 and the imprint template 5.

[0056] Step S3: When demolding, the spring 4 drives the rotating shaft 3 to have a lateral offset to offset the lateral displacement deviation of the micro-nano structure pattern between the imprint template 5 and the wafer 6.

[0057] Furthermore, Step S3 includes:

[0058] Step S3.1: Use the jacking mechanism 8 to slowly jack up the upper template 1 and the lower template 2 by a certain gap.

[0059] Use the spring 4 to drive the rotating shaft 3 to have a lateral offset to offset the lateral displacement deviation of the micro-nano structure pattern between the imprint template 5 and the wafer 6

[0060] Step S3.2: Open the upper template 1.

[0061] During the flipping process of the upper template 1, there will be a certain displacement with the lower template 2. The micro-nano structure patterns on the imprint template 5 and the wafer 6 are concave-convex structures, which are stuck to each other, and it is not easy to separate the imprint template 5 and the wafer 6.

[0062] The utility model uses the jacking mechanism 8 to slowly jack up the upper template 1 and the lower template 2. Since the micro-nano structure patterns on the imprint template 5 and the wafer 6 will have a lateral misalignment when separating, in order to offset the deformation of the imprint pattern caused by the misalignment, the utility model adds a spring 4 to use the spring 4 to offset the lateral displacement deviation caused by demolding, so that the imprint template 5 and the wafer 6 are easily separated and the pattern is not deformed by the lateral displacement.

[0063] The utility model discloses a demolding fixture for nanoimprinting, which has the following beneficial effects:

[0064] First, the demolding fixture is used to separate the imprint template 5 and the wafer 6. When demolding, the adsorption components are used to adsorb the imprint template 5 and the wafer 6 to avoid damaging the wafer 6. At the same time, the spring 4 is used to offset the lateral force to avoid the micro-nano structure pattern on the wafer 6 being deformed by the lateral displacement.

[0065] Second, the structure is simple, the cost is low, and it is suitable for popularization.

[0066] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inner", "front", "center", "both ends", etc. is the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model.

[0067] In the present utility model, unless otherwise clearly stipulated and defined, terms such as "installation", "setting", "connection", "fixation", "swivel connection", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. Unless otherwise clearly defined, for those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0068] The above has shown and described the basic principles, main features and advantages of the present utility model. Those skilled in the art of this industry should understand that the present utility model is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will also have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.

Claims

1. A mold splitting jig for nanoimprinting, characterized in that: include: An upper template and a lower template, wherein a rotating shaft is installed on the lower template, the rotating shaft is connected to the lower template via a spring, and the rotating shaft can be laterally offset; The upper template is rotatably connected to the lower template via a rotating shaft, and the upper template can be turned over with the rotating shaft as the axis; Adsorption components are respectively arranged on the upper template and the lower template, and the adsorption components are used for adsorbing the imprinting template or the wafer.

2. The mold splitting jig according to claim 1, characterized in that: Two mounting holes which are arranged opposite to each other are arranged on the lower template.

3. The mold splitting fixture according to claim 2, characterized in that: The rotating shaft is inserted into the two mounting holes.

4. The mold splitting jig according to claim 1, characterized in that: The rotating shaft is connected to the upper template through a plurality of groups of spacing adjustment components, and the spacing adjustment components are used to adjust the original spacing between the upper template and the lower template.

5. The mold splitting jig according to claim 4, characterized in that: Each set of the spacing adjustment components includes: a lower fixing seat, an axle pin, an upper fixing seat and a locking member; The ring portion of the lower fixing seat is sleeved on the rotating shaft; The shaft pin passes through the through hole of the upper fixing seat and is connected to the lower fixing seat; The locking member is used to lock the shaft pin on the upper fixing seat; The connecting portion of the upper fixing seat is connected to the upper template.

6. The mold splitting jig according to claim 1, characterized in that: A push-up mechanism is installed on the upper template or the lower template, and the push-up mechanism is used to push the upper template and the lower template to open a certain gap.

7. The mold splitting jig according to claim 1, characterized in that: A handle is installed on the upper template or the lower template.

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