Wafer character detection device

Abstract

The utility model discloses a wafer character detection device, which comprises an upper computer, a camera electrically connected with the upper computer, an industrial personal computer, a single-chip microcomputer electrically connected with the industrial personal computer, and a light-emitting component electrically connected with the single-chip microcomputer, the light-emitting assembly comprises a first light-emitting set and a second light-emitting set, the first light-emitting set comprises a first lamp set, a second lamp set, a third lamp set, a fourth lamp set, a fifth lamp set and a sixth lamp set which are mutually independent, and the second light-emitting set comprises a seventh lamp set and an eighth lamp set which are mutually independent. According to the utility model, the lamp group with eight subareas including the six subareas at the upper part and the two subareas at the lower part is arranged, and each subarea can be independently lightened or combined for use through the industrial personal computer, so that some defects of wafer characters can be more easily irradiated.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer testing, and particularly relates to a wafer character detection device. Background Art

[0002] At present, in the semiconductor manufacturing industry, the characters and two-dimensional code information on the wafer are of great significance for product traceability, quality control, and production management. Therefore, the identification and detection of the characters and two-dimensional codes on the wafer are very important.

[0003] When detecting the wafer characters and two-dimensional code information, it is necessary to illuminate the wafer with a light source and then identify it with a camera. However, generally, the wafer detection device has only one kind of illumination, and certain defects of the wafer characters need specific illumination to be visible, such as bright-field or dark-field illumination. Summary of the Utility Model

[0004] Aiming at the deficiencies of the prior art, the utility model provides a wafer character detection device, which includes a light source with multiple partitions that can be individually lit or used in combination to more clearly show certain defects of the wafer characters.

[0005] The utility model is realized through the following technical solutions:

[0006] A wafer character detection device includes an industrial control computer, a camera electrically connected to the industrial control computer, a single-chip microcomputer electrically connected to the industrial control computer, and a light-emitting component electrically connected to the single-chip microcomputer. The light-emitting component includes a first light-emitting group and a second light-emitting group. The first light-emitting group includes a first circuit board and a plurality of lighting lamp groups integrated on the first circuit board. Each lighting lamp group includes a number of first lamp beads arranged evenly along the X direction. The second light-emitting group includes a second circuit board and at least one seventh lamp group and at least one eighth lamp group integrated on the second circuit board. The seventh lamp group includes a number of second lamp beads arranged evenly along the Y direction, and the eighth lamp group includes a number of second lamp beads arranged evenly along the X direction. The lighting lamp groups, the seventh lamp group, and the eighth lamp group can be individually lit or used in combination under the control of the single-chip microcomputer, making it easier to illuminate the defects of the wafer characters.

[0007] Furthermore, the wafer character detection device further includes a beam splitter and a reflector. The beam splitter and the reflector are arranged in parallel, and the reflector is arranged below the first light-emitting group. The light emitted by the first light-emitting group is reflected by the reflector to the beam splitter and then reflected downward by the beam splitter.

[0008] Further, the wafer character detection device further includes a first mounting plate, a first hole is formed on the first mounting plate, both the camera and the first circuit board are fixedly connected to the first mounting plate, and at least a part of the camera passes through the first hole, and the first circuit board is disposed on the side of the camera.

[0009] Further, the wafer character detection device further includes a second mounting plate, the second mounting plate is fixedly connected to the second circuit board, and the second mounting plate is disposed below the first mounting plate.

[0010] Further, the second light emitting group includes a pair of symmetric seventh light groups and a pair of symmetric eighth light groups, the pair of seventh light groups are respectively disposed on two short sides of the second circuit board, the pair of eighth light groups are respectively disposed on two long sides of the second circuit board, and the pair of eighth light groups and the pair of seventh light groups form a rectangular shape.

[0011] Further, a second hole is formed on the second mounting plate, a third hole identical to the second hole is formed on the second circuit board, and the pair of symmetric seventh light groups and the pair of symmetric eighth light groups are disposed around the third hole.

[0012] Further, the light emitted by the first light emitting group is reflected by the reflector to the beam splitter, and then reflected by the beam splitter to pass through the second hole and the third hole.

[0013] Further, the wafer character detection device further includes a first diffuser and a second diffuser, the first diffuser is fixedly disposed below the first light emitting group, and the second diffuser is fixedly disposed below the second light emitting group.

[0014] Further, the wafer character detection device further includes a housing and a positive lens, the camera, the single-chip microcomputer and the light emitting component are all disposed in the housing, and the positive lens is fixedly connected to the bottom case of the housing.

[0015] Compared with the prior art, the advantages of the present utility model are as follows:

[0016] 1. By providing a total of eight light groups in six upper partitions and two lower partitions, and each partition can be individually lit or used in combination by an industrial control computer, certain defects of the wafer characters are more easily illuminated.

[0017] 2. By providing diffusers below the light emitting components, the overall light is more uniform, and by providing parallel reflector and beam splitter, the position of the light emitting component is not affected by the camera, making the structure more compact. Description of the Drawings

[0018] Figure 1Schematic diagram of the structure of a wafer character detection device according to an embodiment of the present invention;

[0019] Figure 2 Partial internal structure schematic diagram of a wafer character detection device according to an embodiment of the present invention;

[0020] Figure 3 Another partial internal structure schematic diagram of a wafer character detection device according to an embodiment of the present invention;

[0021] Figure 4 Cross-sectional view of a wafer character detection device according to an embodiment of the present invention;

[0022] Figure 5 Schematic diagram of the structure of a first light-emitting group according to an embodiment of the present invention;

[0023] Figure 6 Schematic diagram of the structure of a second light-emitting group according to an embodiment of the present invention;

[0024] Figure 7 Partial exploded view of a wafer character detection device according to an embodiment of the present invention;

[0025] Figure 8 Circuit block diagram of a wafer character detection device according to an embodiment of the present invention.

[0026] Description of the drawings: 1. Industrial control computer; 2. Single-chip microcomputer; 3. Light-emitting component; 5. Camera; 30. First light-emitting group; 31. Second light-emitting group; 301. First lamp group; 302. Second lamp group; 303. Third lamp group; 304. Fourth lamp group; 305. Fifth lamp group; 306. Sixth lamp group; 307. Seventh lamp group; 308. Eighth lamp group; 300. First lamp bead; 310. Second lamp bead; 93. Housing; 92. Condensing lens; 10. Control circuit module; 930. Bottom case; 931. Upper cover; 932. First interface; 933. Second interface; 32. First circuit board; 33. Second circuit board; 60. First mounting plate; 61. Second mounting plate; 600. First hole; 90. First diffuser; 91. Second diffuser; 612. Fixing part; 611. Platform; 610. Second hole; 330. Third hole; 7. Beam splitter; 8. Reflector; 70. Fixing plate. Detailed implementation manners

[0027] The technical solution of the utility model will be further described in detail below in conjunction with the preferred embodiments and their accompanying drawings in a non-limiting manner. In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "towards", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present utility model, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined. The embodiments described below by referring to the drawings are exemplary and are intended to explain the present utility model and should not be construed as a limitation of the present utility model.

[0028] As Figures 1 to 7 shown, a wafer character detection device according to an embodiment of the present utility model includes an industrial control computer 1, a camera 5 electrically connected to the industrial control computer 1, a single-chip microcomputer 2 electrically connected to the industrial control computer 1, and a light-emitting component 3 electrically connected to the single-chip microcomputer 2. The light-emitting component 3 includes a first light-emitting group 30 and a second light-emitting group 31. The first light-emitting group 30 includes a first circuit board 32 and a plurality of lighting lamp groups integrated on the first circuit board 32. Each lighting lamp group includes a number of first lamp beads 300 arranged uniformly along the X direction. The second light-emitting group 31 includes a second circuit board 33 and at least one seventh lamp group 307 and at least one eighth lamp group 308 integrated on the second circuit board 33. The seventh lamp group 307 includes a number of second lamp beads 310 arranged uniformly along the Y direction, and the eighth lamp group 308 includes a number of second lamp beads 310 arranged uniformly along the X direction. The lighting lamp groups, the seventh lamp group 307, and the eighth lamp group 308 can be individually lit or used in combination under the control of the single-chip microcomputer 2, making it easier to detect the defects of the wafer characters.

[0029] Specifically, the wafer character detection device further includes a housing 93 and a magnifying lens 92. The housing 93 is rectangular, and the camera 5, the single-chip microcomputer 2, and the light-emitting component 3 are all arranged inside the housing 93. The magnifying lens 92 is fixedly connected to the bottom shell 930 of the housing 93 to make the camera 5 take clearer pictures.

[0030] In addition, referring to Figure 2, the wafer character detection device further includes a control circuit module 10. The single-chip microcomputer 2 is disposed within the control circuit module 10, and the single-chip microcomputer 2 and the peripheral circuit form the control circuit module 10 and are electrically connected to the light-emitting component 3. A first interface 932 and a second interface 933 are further provided on the upper cover 931 of the housing 93. The first interface 932 is electrically connected to the camera 5, and the second interface 933 is electrically connected to the single-chip microcomputer 2.

[0031] Further, referring to Figure 4 and Figure 5 , the first light-emitting group 30 further includes a first circuit board 32. The first light-emitting group 301, the second light-emitting group 302, the third light-emitting group 303, the fourth light-emitting group 304, the fifth light-emitting group 305, and the sixth light-emitting group 306 each include a plurality of first lamp beads 300 arranged uniformly along the X direction and are integrated on the first circuit board 32, and the first light-emitting group 301, the second light-emitting group 302, the third light-emitting group 303, the fourth light-emitting group 304, the fifth light-emitting group 305, and the sixth light-emitting group 306 are arranged uniformly along the Y direction.

[0032] The second light-emitting group 31 includes a pair of symmetric seventh light-emitting groups 307 and a pair of symmetric eighth light-emitting groups 308. The pair of seventh light-emitting groups 307 are respectively disposed on two short sides of the second circuit board 33, and the pair of eighth light-emitting groups 308 are respectively disposed on two long sides of the second circuit board 33. The pair of eighth light-emitting groups 308 and the pair of seventh light-emitting groups 307 form a rectangular shape.

[0033] Referring to Figure 3 , the wafer character detection device further includes a first mounting plate 60 and a second mounting plate 61 disposed within the housing 93. The first mounting plate 60 is fixed to the housing 93 by screws (not shown in the figure), and the second mounting plate 61 is fixed to the bottom case 930 of the housing 93 by screws, and the second mounting plate 61 is disposed below the first mounting plate 60.

[0034] A first hole 600 is formed on the first mounting plate 60. The camera 5 and the first circuit board 32 are both fixedly connected to the first mounting plate 60 by screws, and at least a part of the camera 5 passes through the first hole 600. Specifically, the lens of the camera 5 can pass through the first hole 600. In addition, the first circuit board 32, i.e., the first light-emitting group 30, is disposed on the side of the camera 5. The first circuit board 32 is fixed below the first mounting plate 60 by screws, and the wafer character detection device further includes a first diffuser plate 90. The first diffuser plate 90 is fixed below the first circuit board 32, i.e., below the first light-emitting group 30, by bolts (not shown in the figure) to make the light of the first light-emitting group 30 more uniform.

[0035] The second mounting plate 61 is fixedly connected to the second circuit board 33. Specifically, the second mounting plate 61 is formed with a fixing portion 612 and a platform 611. The fixing portion 612 is fixed to the bottom case 930 of the housing 93 by screws, and the second circuit board 33 is fixed to the platform 611 by screws. Moreover, a second hole 610 is formed on the second mounting plate 61, and a third hole 330 identical to the second hole 610 is formed on the second circuit board 33. A pair of symmetric seventh lamp groups 307 and a pair of symmetric eighth lamp groups 308 are arranged around the third hole 330. The wafer character detection device further includes a second diffuser plate 91, and the second diffuser plate 91 is fixedly arranged below the second light-emitting group 31. Specifically, the second diffuser plate 91 is fixedly connected to the bottom case 930 of the housing 93 by screws, making the light of the second light-emitting group 31 more uniform.

[0036] Further, referring to Figure 6 , the wafer character detection device further includes a beam splitter 7 and a reflector 8. The beam splitter 7 and the reflector 8 are arranged in parallel and are both fixedly connected to the second mounting plate 61 by screws. In addition, the reflector 8 is arranged below the first light-emitting group 30. The light emitted by the first light-emitting group 30 is reflected by the reflector 8 to the beam splitter 7, and then reflected downward by the beam splitter 7 and reflected to pass through the second hole 610 and the third hole 330. In this embodiment, the wafer character detection device further includes two fixing plates 70. The two fixing plates 70 are respectively fixed to both ends of the beam splitter 7 and the reflector 8 by screws, and the fixing plates 70 are further fixedly connected to the second mounting plate 61, ensuring the parallelism of the beam splitter 7 and the reflector 8 and preventing the optical path from shifting.

[0037] During use, the industrial control computer 1 electrically connects the camera 5 and the single-chip microcomputer 2 through the first interface 932 and the second interface 933 respectively. During shooting, the industrial control computer 1 sends a signal to the single-chip microcomputer 2, and the single-chip microcomputer 2 controls the on / off of the first lamp group 301 to the eighth lamp group 308 to change the lighting state. At the same time, in each lighting state, the industrial control computer 1 sends a shooting signal to the camera 5. After the camera 5 shoots an image and transmits it back to the industrial control computer 1, the industrial control computer 1 analyzes and identifies the image. In this embodiment, by setting eight lamp groups in six upper partitions and two lower partitions, and each partition can be individually lit or used in combination by the industrial control computer 1, some defects of the wafer characters are more easily illuminated. And diffuser plates are arranged below both the first light-emitting group 30 and the second light-emitting group 31, making the overall light more uniform. And by setting the parallel reflector 8 and beam splitter 7, the position of the light-emitting component 3 is not affected by the camera 5, making the structure more compact.

[0038] The above embodiments merely illustrate several implementation manners of the present utility model, and the description thereof is relatively specific and detailed. However, it should not be construed as a limitation to the scope of the patent of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several variations and improvements can still be made, and these all fall within the protection scope of the present utility model. Therefore, the protection scope of the patent of the present utility model shall be subject to the appended claims.

Claims

1. A wafer character detection device, comprising an industrial computer (1) and a camera (5) electrically connected to the industrial computer (1), characterized in that: The wafer character detection device further comprises a single chip microcomputer (2) electrically connected to the industrial computer (1) and a light emitting assembly (3) electrically connected to the single chip microcomputer (2), the light emitting assembly (3) comprising a first light emitting group (30) and a second light emitting group (31), the first light emitting group (30) comprising a first circuit board (32) and a plurality of lighting lamp groups integrated on the first circuit board (32), each of the lighting lamp groups comprising a plurality of first lamp beads (300) uniformly arranged along the X direction, the second light emitting group (31) comprising a second circuit board (3 3) and at least one seventh light group (307) and at least one eighth light group (308) integrated on the second circuit board (33), wherein the seventh light group (307) includes a plurality of second lamp beads (310) evenly arranged along the Y direction, and the eighth light group (308) includes a plurality of second lamp beads (310) evenly arranged along the X direction, and the lighting light group, the seventh light group (307) and the eighth light group (308) can be lit individually or used in combination under the control of the single chip computer (2), so that defects of wafer characters can be more easily illuminated.

2. The wafer character detection device according to claim 1, characterized in that: The wafer character detection device further comprises a beam splitter (7) and a reflector (8), wherein the beam splitter (7) and the reflector (8) are arranged in parallel, and the reflector (8) is arranged below the first light-emitting group (30), and the light emitted by the first light-emitting group (30) is reflected by the reflector (8) to the beam splitter (7), and then reflected downward by the beam splitter (7).

3. The wafer character detection device according to claim 2, characterized in that: The wafer character detection device also includes a first mounting plate (60), a first hole (600) is formed on the first mounting plate (60), the camera (5) and the first circuit board (32) are both fixedly connected to the first mounting plate (60), and the camera (5) at least partially passes through the first hole (600), and the first circuit board (32) is arranged on the side of the camera (5).

4. The wafer character detection device according to claim 3, characterized in that: The wafer character detection device further comprises a second mounting plate (61), the second mounting plate (61) being fixedly connected to the second circuit board (33), and the second mounting plate (61) being arranged below the first mounting plate (60).

5. The wafer character detection device according to claim 4, characterized in that: The second light-emitting group (31) comprises a symmetrical pair of seventh light groups (307) and a symmetrical pair of eighth light groups (308); the pair of seventh light groups (307) are respectively arranged on two short sides of the second circuit board (33); the pair of eighth light groups (308) are respectively arranged on two long sides of the second circuit board (33); the pair of eighth light groups (308) and the pair of seventh light groups (307) form a rectangular shape.

6. The wafer character detection device according to claim 5, characterized in that: A second hole (610) is formed on the second mounting plate (61), a third hole (330) identical to the second hole (610) is formed on the second circuit board (33), and the symmetrical pair of seventh lamp groups (307) and the symmetrical pair of eighth lamp groups (308) are arranged around the third hole (330).

7. The wafer character detection device according to claim 6, characterized in that: The light emitted by the first light-emitting group (30) is reflected by the reflective plate (8) to the beam splitter (7), and then reflected by the beam splitter (7) to pass through the second hole (610) and the third hole (330).

8. The wafer character detection device according to claim 1, characterized in that: The wafer character detection device further comprises a first diffusion plate (90) and a second diffusion plate (91), wherein the first diffusion plate (90) is fixedly arranged below the first light-emitting group (30), and the second diffusion plate (91) is fixedly arranged below the second light-emitting group (31).

9. The wafer character detection device according to claim 1, characterized in that: The wafer character detection device further comprises a housing (93) and an amplifying lens (92); the camera (5), the single-chip computer (2) and the light-emitting component (3) are all arranged in the housing (93); and the amplifying lens (92) is fixedly connected to a bottom shell (930) of the housing (93).

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