Cast aluminum alloy wafer heating disc structure
Through the casting aluminum alloy process, the metal heater is directly cast inside the disk body, which solves the problems of poor sealing and insufficient temperature uniformity in the traditional welding process, and achieves efficient, reliable and economical heating disk production.
Patent Information
- Application Number
- CN202422368428.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-27
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-09-27
AI Technical Summary
The wafer heating disks made of traditional welding processes have problems such as poor sealing, insufficient temperature uniformity, high manufacturing costs, long cycles and poor product consistency.
The cast aluminum alloy process is adopted to directly cast the metal heater inside the disk body through die casting to achieve integrated molding, and compatible with different heating wire designs through universal molds to simplify the processing and assembly process.
It significantly improves the sealing and temperature uniformity of the heating plate, reduces manufacturing costs and production cycles, and improves product consistency and production efficiency.
Smart Images
Figure CN223023236U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer heating plates, and particularly relates to a casting aluminum alloy wafer heating plate structure. Background Art
[0002] In the semiconductor manufacturing industry, as a key device, the wafer heating plate plays a crucial role in temperature control processes such as wafer heating and cooling. Especially in a vacuum and special gas environment, the sealing performance, temperature uniformity, and manufacturing efficiency of the heating plate directly affect the yield and production cost of wafers. Traditional wafer heating plates mostly adopt a welding process, that is, the cover plate, base, and shaft module are assembled by welding, and a metal electric heater is embedded in the cover plate. However, this structure has significant drawbacks: 1. Sealing problem: The welding process has extremely high requirements for the brazing joint rate. Once the welding is poor, it is very easy to cause air leakage in the disk body, seriously affecting the sealing performance of the heating plate, and then threatening the stability of the entire production environment; 2. Poor temperature uniformity: Due to the installation gap between the metal electric heater and the disk body, the heat transfer is uneven during the heating process, resulting in poor temperature uniformity on the working surface, directly reducing the yield rate of wafers; 3. Manufacturing cost and cycle: The welding process is complex, involving multiple processing and assembly links, which not only increases the manufacturing cost but also prolongs the production cycle; in addition, different welding molds need to be customized for different projects, further increasing the mold manufacturing cost and restricting the production flexibility; 4. Poor product consistency: Due to human factors and material differences in the welding and assembly processes, there are often performance differences between heating plates, affecting the overall consistency of products.
[0003] In view of the above problems, there is an urgent need for a new type of wafer heating plate structure to solve the problems of poor sealing performance, insufficient temperature uniformity, high manufacturing cost, long cycle, and poor product consistency brought by the traditional welding structure. Summary of the Utility Model
[0004] In order to solve the above problems, the utility model provides a casting aluminum alloy wafer heating plate structure, which shows significant technical advantages in terms of sealing performance, temperature uniformity, manufacturing cost, production cycle, and product consistency, providing an efficient, reliable, and economical heating plate solution for the semiconductor manufacturing industry.
[0005] The technical solution of the utility model is as follows:
[0006] A casting aluminum alloy wafer heating plate structure includes a casting disk body and a shaft column. The casting disk body includes a disk body main body and a metal heater integrally cast. The heating part of the metal heater is inside the disk body main body, and the wiring end of the metal heater is led out from the shaft column and then the shaft column is welded to the disk body main body; the disk body main body is made of cast aluminum material.
[0007] The casting disk body uses the Al-Si-Mg system.
[0008] The shaft column is cast and formed using cast aluminum material.
[0009] The casting disk body and the shaft column are made by die-casting.
[0010] The beneficial effects of the present utility model are as follows:
[0011] 1. A casting aluminum alloy wafer heating disk structure disclosed by the present utility model. In this structure, the metal heater is directly cast inside the disk body through the die-casting process, achieving integral molding and completely eliminating the problem of air leakage in the disk body caused by poor welding in the traditional welding process. Thus, the sealing performance of the heating disk is significantly improved, ensuring the stability of the production environment.
[0012] 2. A casting aluminum alloy wafer heating disk structure disclosed by the present utility model. Since the metal heater and the disk body are closely fitted through the die-casting process, heat transfer is more uniform during the heating process, avoiding the problem of uneven heat transfer caused by installation gaps in the traditional welding structure. Experimental data shows that the temperature uniformity of the cast aluminum heating disk can reach ±0.38%, which is about 250% higher than that of the welded heating disk, effectively improving the yield rate of the wafers.
[0013] 3. A casting aluminum alloy wafer heating disk structure disclosed by the present utility model. The casting mold of this structure can be compatible with the heating wire design in any arrangement form and can be repeatedly used by different projects as a general mold, achieving platformization and generalization. This not only reduces the mold manufacturing cost but also shortens the production cycle and improves production efficiency. At the same time, the die-casting process simplifies multiple processing and assembly links in the traditional welding process, further reducing the manufacturing cost.
[0014] 4. A casting aluminum alloy wafer heating disk structure disclosed by the present utility model. The casting process of this structure avoids the influence of human factors and material differences during the welding and assembly processes on the performance of the heating disk, ensuring the consistency of the performance between heating disks and improving the overall quality of the product. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] By reading the detailed description of the preferred embodiments below, the solutions and advantages of this application will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present utility model.
[0016] In the drawings:
[0017] Figure 1Schematic three-dimensional structure diagram of a casting aluminum alloy wafer heating plate structure according to an embodiment of the present invention;
[0018] Figure 2 Schematic three-dimensional exploded structure diagram of a casting aluminum alloy wafer heating plate structure according to an embodiment of the present invention (the overall casting plate body is separately shown to display the internal structure);
[0019] Figure 3 Cross-sectional view of a casting aluminum alloy wafer heating plate structure according to an embodiment of the present invention;
[0020] Figure 4 Cross-sectional view of the casting plate body of a casting aluminum alloy wafer heating plate structure according to an embodiment of the present invention;
[0021] Figure 5 Schematic diagram of the casting mold used for a casting aluminum alloy wafer heating plate structure according to an embodiment of the present invention;
[0022] The components represented by the reference numerals in the figure are:
[0023] The present invention: 1. Casting plate body, 1a. Plate body main body, 1b. Metal heater, 2. Shaft column. Detailed implementation manners
[0024] As Figures 1 to 3 shown, the casting aluminum alloy wafer heating plate structure includes a casting plate body 1 and a shaft column 2.
[0025] As Figure 4 shown, the casting plate body 1 includes a plate body main body 1a and a metal heater 1b integrally cast. The heating part of the metal heater 1b is inside the plate body main body 1a, and the wiring end of the metal heater 1b is led out from the shaft column 2 and then the shaft column 2 is welded to the plate body main body 1a; the plate body main body 1a is made of cast aluminum material.
[0026] The casting plate body 1 is selected from the Al-Si-Mg series.
[0027] The shaft column 2 is cast and formed using cast aluminum material.
[0028] The casting plate body 1 and the shaft column 2 are made by die-casting.
[0029] The manufacturing process sequence is: first fix the metal heater 1b, then pour molten aluminum into the casting mold, and finally weld it with the shaft column 2. The upper surface of the cover plate is the working surface of the wafer.
[0030] As Figure 3 shown, wherein the metal heater is embedded in the plate body, and the shaft column can be cast together with the plate body or welded later, as Figure 4As shown in the figure; the advantage of welding in the later stage is that the casting mold of the disk body can be used as a general mold for heating disks of the same size, and there is no requirement for the shape of the heating wire. Since most of the casting cost lies in the mold, this solution can make the casting mold be used for multiple different projects, greatly reducing the casting cost.
[0031] As Figure 5 shown, a support structure and an exhaust structure are designed in the mold to ensure the horizontal position of the metal heater in the disk body and to discharge the air holes generated during the casting process, thereby improving the quality and temperature consistency performance of the cast aluminum disk body.
[0032] This cast aluminum alloy wafer heating disk structure casts the disk body and the shaft column separately, so as to realize the use of the disk body mold as a general mold. As long as the size is satisfied, there are no requirements for the layout design of the embedded heating wire, and the versatility is greatly improved, and the corresponding cost is greatly reduced.
[0033] Since casting only requires embedding the heating wire into the disk body and casting them together, compared with the welding method, it saves the processing of the heating wire groove of the disk body and the welding process, etc. And as described in Article 2, when the casting mold can be universal, it saves the time for mold making. Therefore, the production cycle of the heating disk using the casting process will be greatly reduced compared with the current welded heating disk, and the corresponding production efficiency will be greatly improved.
[0034] Since the heating wire does not need to be assembled during the casting process, the problem of inconsistent temperature performance caused by the assembly difference of the heating wire will not occur in the casting heating disk, thus greatly improving the quality consistency of the heating disk product.
[0035] Many air holes are often generated during the casting process. To solve this problem, the gas inside the casting is discharged by die-casting, greatly reducing the size and quantity of the air holes inside the casting.
Claims
1. A cast aluminum alloy wafer heating plate structure, characterized in that: The invention comprises a cast disc body (1) and a shaft column (2), wherein the cast disc body (1) comprises a disc body main body (1a) and a metal heater (1b) which are integrally cast, wherein a heating part of the metal heater (1b) is inside the disc body main body (1a), and a connection terminal of the metal heater (1b) is led out from the shaft column (2), and then the shaft column (2) is welded to the disc body main body (1a); the disc body main body (1a) is made of cast aluminum.
2. The cast aluminum alloy wafer heating plate structure according to claim 1, characterized in that: The casting disc body (1) is made of Al-Si-Mg system.
3. The cast aluminum alloy wafer heating plate structure according to claim 1, characterized in that: The shaft column (2) is cast by using cast aluminum material.
4. The cast aluminum alloy wafer heating plate structure according to claim 1, characterized in that: The casting disc body (1) and the shaft column (2) are manufactured by die-casting.