Rotary membrane filtering device

Abstract

The utility model relates to a rotary membrane filtering device which comprises a rotating mechanism, an air blower, a water inlet mechanism and a blow-off pipe, the water inlet mechanism, the air blower and the blow-off pipe are respectively communicated with the rotating mechanism, and the rotating mechanism comprises a rotating variable-speed motor, a rotating assembly, a filter barrel and a fixed seat. The filter barrel and the rotating variable-speed motor are mounted on the fixed seat, the rotating assembly is rotationally arranged in the filter barrel, and the rotating variable-speed motor drives the rotating assembly to rotate. According to the rotary membrane filtering device, the water inlet machine conveys a developing solution into the rotating mechanism, the rotating mechanism rotates, the air blower blows air into the rotating mechanism, materials with high concentration, high viscosity and high solid content are separated out through rotation and air and water mixed flushing, the clean developing solution is obtained, suspension liquid is discharged through the blow-off pipe, and the cleaning effect is good. The filter cake layer covers the filter channel to perform double-sided filtration, so that the effective filter area is increased, the filter efficiency and stability are further improved, and the filter is easier to clean.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a rotary membrane filtration device. Background Art

[0002] PCB belongs to functional electroplating, and its quality is directly related to the cleanliness of the liquid medicine. For the special function requirements of high-density, high-precision, multi-functional, and high aspect ratio multi-layer PCB products, clean liquid medicine filtration plays a key role in quality. There are mechanical impurities in the liquid medicine, and these particles must be removed in time; the existence of organic substances such as green oil, solder mask, inner layer, and outer layer developing / sensitizing inks that hinder plating, the decomposition of additives (brighteners), and the precipitation of components that hinder plating will pollute the liquid medicine, resulting in defects in the plating layer.

[0003] The filtration methods that have been used in the industry are filter elements and filter bags. For decades, the filtration technology has not been able to make a breakthrough. During the production process of PCB circuit boards, there are some problems, such as: incomplete development leading to short circuits and residual copper; frequent tank changes affecting production efficiency; frequent tank maintenance with high maintenance costs; 80% of the COD wastewater from circuit boards comes from stripping and developing solutions; frequent tank pouring and maintenance waste a lot of manpower and material resources. Content of the Utility Model

[0004] The main purpose of the utility model is to provide a rotary membrane filtration device to solve the above technical problems without using a filter element for filtration.

[0005] To achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A rotary membrane filtration device includes a rotary mechanism, a blower, a water inlet mechanism, and a sewage pipe. The water inlet mechanism, the blower, and the sewage pipe are respectively communicated with the rotary mechanism. The rotary mechanism includes a rotation speed changer, a rotary component, a filter barrel, and a fixed seat. The filter barrel and the rotation speed changer are installed on the fixed seat. The rotary component is rotatably arranged in the filter barrel, and the rotation speed changer drives the rotary component to rotate.

[0007] As a preferred technical solution, the rotary component includes a filter membrane, a rotating shaft, and a partition block. The filter membrane and the partition block are alternately installed on the rotating shaft.

[0008] As a preferred technical solution, the rotating shaft is a hollow shaft.

[0009] As a preferred technical solution, the filter membrane includes a fixing hole, a filter cake layer, and a filtration channel. The filter cake layer is arranged on the outer surface of the filtration channel. The fixing hole is arranged in the middle of the filter cake layer, and the rotating shaft passes through the fixing hole. The filtration channel is communicated with the rotating shaft.

[0010] As a preferred technical solution, the filtration pore size of the filter cake layer is ≥ 1500 mesh.

[0011] As a preferred technical solution, the rotating mechanism further includes a drain pipe, and the drain pipe is communicated with the rotating shaft.

[0012] As a preferred technical solution, the water inlet mechanism includes a water inlet pump and a water inlet pipe, and the water inlet pump is communicated with the rotating mechanism through the water inlet pipe.

[0013] The beneficial effects of the present utility model are as follows: in the above-mentioned rotary membrane filtration device, the water inlet machine transports the developer to the rotating mechanism. The rotating mechanism rotates and the blower blows air into the rotating mechanism. Through rotation, gas and water mixed flushing, the materials containing high concentration, high viscosity and high solid content are separated to obtain clean developer. Finally, the suspension is discharged through the sewage discharge pipe. The filter cake layer covers the filtration channel and can perform double-sided filtration, increasing the effective filtration area, thereby improving the filtration efficiency and stability, and being easier to clean. The swirling flushing generates high shear force on the surface of the filter membrane to form a swirling flow sweeping, and the shear force removes the impurities on the filter cake layer, forming an efficient cleaning of the surface of the filter membrane. And with a continuous large flux, it can concentrate and separate the materials containing high concentration, high viscosity and high solid content. The filter membrane does not need to be replaced, greatly saving the labor cost and the cost of hazardous solid waste treatment. It can automatically backwash to flush out the materials to form a suspension and output through the sewage discharge pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a block diagram of the developer circulation and recovery system related to the present utility model;

[0015] Figure 2 It is a structural schematic diagram of the rotary membrane filtration device related to the present utility model;

[0016] Figure 3 It is a cross-sectional view of the rotary membrane filtration device related to the present utility model;

[0017] Figure 4 It is a three-dimensional cross-sectional view of the filter membrane of the rotary membrane filtration device related to the present utility model;

[0018] Figure 5 It is a structural schematic diagram of the high-speed centrifugal device related to the present utility model. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] In order to make the purpose, technical solutions and advantages of the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0020] Such asFigure 1 As shown in the figure, a developing solution circulation and recovery system includes a developing tank 1, a transfer pump 2, a collection tank 3, a nano-bubble removal device 4, a transfer tank 5, a rotary membrane filtration device 6, a backwash collection tank 7, and a high-speed centrifugation device 8. The developing tank 1 stores the developing solution, which can react with the photosensitive resin that has not been exposed to ultraviolet light. After the PCB is exposed, it is placed in the developing tank. During the developing process, the unexposed part of the photosensitive resin is dissolved, while the exposed part remains. After the developing is completed, the developer is mixed with other impurities, so filtration and recycling are required. The transfer pump 2 transports the reacted developing solution to the collection tank 3. The developing solution is transported from the collection tank 3 to the nano-bubble removal device 4, where nano-bubbles are introduced into the developing solution. The suspended solids in the developing solution adhere to the surface of the bubbles and float, thus separating from the developing solution to remove the hydrophobic particles in the developing solution. The transfer pump 2 transports the remaining developing solution to the transfer tank 5. The developing solution is transported from the transfer tank 5 to the rotary membrane filtration device 6, which separates the suspension containing materials with high concentration, high viscosity, and high solid content in the developing solution into the backwash collection tank 7, discharges and recovers the filtered developing solution, and transports the suspension from the backwash collection tank 7 to the high-speed centrifugation device 8, where the solid membrane residue is separated from the liquid.

[0021] Please refer to Figures 2 - 4 As shown in the figure, the rotary membrane filtration device 6 includes a frame 61, a rotary mechanism 62, a blower 64, a water inlet mechanism 63, and a drain pipe 65 provided on the frame 61. The water inlet mechanism 63, the blower 64, and the drain pipe 65 are respectively connected to the rotary mechanism 62. The water inlet mechanism 63 transports the developing solution into the rotary mechanism 62. The rotary mechanism 62 rotates, and the blower 64 blows air into the rotary mechanism 62. The rotation, air, and water are mixed for flushing to separate the materials with high concentration, high viscosity, and high solid content, and the clean developing solution is discharged. Subsequently, backwashing is carried out to form a suspension with the materials. The drain pipe 65 transports the suspension to the backwash collection tank 7. In addition, when the flushing method cannot meet the requirement of thorough flushing, the chemical washing function can be activated to quickly recover.

[0022] The water inlet mechanism 63 includes a water inlet pump 631 and a water inlet pipe 632. The water inlet pump 631 is connected to the rotating mechanism 62 through the water inlet pipe 632. The rotating mechanism 62 includes a rotating speed changer 621, a rotating assembly 624, a filter barrel 623 and a fixed seat 622. The fixed seat 622 is fixed on the frame 61. The filter barrel 623 and the rotating speed changer 621 are installed on the fixed seat 622. The rotating assembly 624 is rotatably arranged in the filter barrel 623. The rotating speed changer 621 drives the rotating assembly 624 to rotate. The rotating assembly 624 includes a filter membrane 627, a drain pipe 628, a rotating shaft 625 and a partition block 626. The filter membrane 627 and the partition block 626 are alternately installed on the rotating shaft 625. The drain pipe 628 is communicated with the rotating shaft 625. The rotating shaft 625 is a hollow shaft. The filter membrane 627 includes a fixing hole 6273, a filter cake layer 6271 and a filtering channel 6272. The filter cake layer 6271 is arranged on the outer surface of the filtering channel 6272. The fixing hole 6273 is arranged in the middle of the filter cake layer 6271. And the rotating shaft 625 passes through the fixing hole 6273. The filtering channel 6272 is communicated with the rotating shaft 625. The filter cake layer 6271 can perform double-sided filtration, increasing the effective filtration area within an equivalent volume, thereby improving the filtration efficiency and stability, and being easier to clean. Rotating flushing generates a high shear force on the surface of the filter membrane 627 to form a swirling flow sweeping. The shear force removes the impurities on the filter cake layer 6271, forming an efficient cleaning of the surface of the filter membrane 627. And a continuous large flux is suitable for the concentration and separation of materials containing high concentration, high viscosity and high solid content. The filtration pore diameter of the filter cake layer 627 is ≥1500 mesh, enabling the developer to enter the filter cake 6271, enter the rotating shaft 625 through the filtering channel 6272, and thus be discharged through the drain pipe 628 to recover the developer. The filter membrane 627 does not require replacement cost, greatly saving labor cost and hazardous solid waste treatment cost.

[0023] In this embodiment, the power of the water inlet pump 631 is 5.5kW, the frequency is 50Hz, and the independent test flow rate is 60 - 70M 3 / H. The diameter of the water inlet pipe 632 is DN100, the diameter of the sewage discharge pipe 65 is DN50, and the diameter of the drain pipe 628 is DN80.

[0024] As Figure 5 shown, the high-speed centrifugal device 8 includes a bottom plate 81, a housing 82, a differential 83, a drum mechanism 84 and a screw conveyor mechanism 85. The housing 82 and the differential 83 are fixed on the bottom plate 81. The drum mechanism 84 is installed in the housing 82. The screw conveyor mechanism 85 is installed in the drum mechanism 84. The differential 83 is respectively connected to the drum mechanism 84 and the screw conveyor mechanism 85. The drum mechanism 84 rotates. The screw conveyor mechanism 85 rotates in the same direction as the drum mechanism 84, and the rotational speed is slightly lower than that of the drum mechanism 84. The differential 83 functions to change the rotational speeds of the drum mechanism 84 and the screw conveyor mechanism 85.

[0025] The drum mechanism 84 includes a drum 841 and a first motor 842. The first motor 842 is installed at one end of the differential 83, and the first motor 842 drives the drum 841 to rotate. The screw conveyor mechanism 85 includes a screw conveyor 851 and a second motor 852. The second motor 852 is installed at the other end of the differential 83, and the screw conveyor 851 is installed in the drum 841. The screw conveyor 851 is provided with a hollow rotating shaft. The second motor 852 drives the screw conveyor 851 to rotate. The suspension to be separated is fed into the inner cavity of the screw conveyor 851 through a feed pipe. The first motor 842 and the second motor 852 are turned on, so that the drum 841 and the screw conveyor 851 rotate at different speeds. The high-speed rotating drum 841 generates a strong centrifugal force to throw the solid-phase particles with a density greater than that of the liquid phase against the inner wall of the drum 841, and the solid-liquid separation of the suspension is carried out. Four corners at the lower end of the bottom plate 81 are fixedly installed with support feet 811, and shock absorbers 812 are fixedly installed at the lower ends of the four support feet 811, which play a role in reducing the vibration force generated during separation.

[0026] The above embodiments are only preferred examples of the present invention, and are not intended to limit the scope of implementation of the present invention. Therefore, any equivalent changes or modifications made according to the structure, features, and principles described in the scope of the patent application of the present invention should be included within the scope of the patent application of the present invention.

Claims

1. A rotary membrane filtration device, characterized in that: It includes a rotating mechanism, a blower, a water inlet mechanism and a sewage pipe, wherein the water inlet mechanism, the blower and the sewage pipe are respectively connected to the rotating mechanism, and the rotating mechanism includes a rotating speed changer, a rotating component, a filter barrel and a fixed seat, the filter barrel and the rotating speed changer are installed on the fixed seat, the rotating component is rotatably set in the filter barrel, and the rotating speed changer drives the rotating component to rotate.

2. The rotary membrane filtration device according to claim 1, characterized in that: The rotating assembly comprises a filter membrane, a rotating shaft and a spacer block, and the filter membrane and the spacer block are alternately installed on the rotating shaft.

3. The rotary membrane filtration device according to claim 2, characterized in that: The rotating shaft is a hollow shaft.

4. The rotary membrane filtration device according to claim 3, characterized in that: The filter membrane includes a fixed hole, a filter cake layer and a filter channel, the filter cake layer is arranged on the outer surface of the filter channel, the fixed hole is arranged in the middle of the filter cake layer, the rotating shaft passes through the fixed hole, and the filter channel is connected to the rotating shaft.

5. The rotary membrane filtration device according to claim 4, characterized in that: The filtration pore size of the filter cake layer is ≥1500 meshes.

6. The rotary membrane filtration device according to claim 5, characterized in that: The rotating mechanism further includes a drain pipe, which is connected to the rotating shaft.

7. The rotary membrane filtration device according to claim 5, characterized in that: The water inlet mechanism comprises a water inlet pump and a water inlet pipe, and the water inlet pump is connected with the rotating mechanism through the water inlet pipe.

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