Face trimming machine for machining surface of silicon rod

Abstract

The utility model discloses a finishing machine for processing the surface of a silicon rod, which comprises a plurality of adjusting components and a detection component, the plurality of adjusting components are suitable for adjusting a workpiece to be processed, each adjusting component comprises a first adjusting part and a second adjusting part, the first adjusting part is separably matched with the workpiece to be processed, and the detection component is used for detecting the surface of the silicon rod. The second adjusting piece is movably matched with the first adjusting piece, and the to-be-machined piece is provided with a to-be-machined face; the detection assembly makes contact with the to-be-machined face and is electrically connected with the multiple adjusting assemblies. Therefore, the multiple adjusting assemblies are used for clamping the to-be-machined part so as to firmly fix the to-be-machined part, the detection assembly can accurately detect the to-be-machined face of the to-be-machined part, and the detection assembly is electrically connected with the multiple adjusting assemblies so that the position of the to-be-machined part can be adjusted. The surface finishing machine for machining the surface of the silicon rod finishes high-precision and high-efficiency finishing of the surface to be machined, and the working efficiency of the surface finishing machine for machining the surface of the silicon rod is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic modules, and in particular to a surface finishing machine for processing the surface of a silicon rod. Background Art

[0002] In the prior art, the mainstream semi-bar processing equipment for edge skin does not trim the edge skin cutting surface generated after squaring a round rod, and directly uses a top-arc removing and squaring machine to cut off the top arc. Due to the large difference in the edge skin cutting surface after squaring, the working bench reference fails when the top-arc removing and squaring machine cuts off the edge skin arc top, resulting in an increased difference in the edge skin block after top-arc removal, so that the thickness of the edge skin block is uneven, and the width of the glue joint is inconsistent after bonding, affecting the number of slices per kilogram of the square rod at the slicing end and the cutting efficiency. Summary of the Utility Model

[0003] The utility model aims to at least solve one of the technical problems existing in the prior art. For this purpose, an object of the utility model is to provide a surface finishing machine for processing the surface of a silicon rod, which can improve the reliability, processing accuracy and working efficiency of the surface finishing machine for processing the surface of a silicon rod.

[0004] The surface finishing machine for processing the surface of a silicon rod according to an embodiment of the utility model includes: a plurality of adjusting components and a detecting component. The plurality of adjusting components are adapted to adjust a workpiece to be processed. Each adjusting component includes a first adjusting member and a second adjusting member. The first adjusting member is detachably engaged with the workpiece to be processed. The second adjusting member is movably engaged with the first adjusting member. The workpiece to be processed has a surface to be processed. The detecting component contacts the surface to be processed, and the detecting component is electrically connected to the plurality of adjusting components.

[0005] In the surface finishing machine for processing the surface of a silicon rod according to an embodiment of the utility model, the plurality of adjusting components are used to clamp the workpiece to be processed to firmly fix the workpiece to be processed. The detecting component can accurately detect the surface to be processed of the workpiece to be processed. The detecting component is electrically connected to the plurality of adjusting components to adjust the position of the workpiece to be processed, so that the surface finishing machine for processing the surface of a silicon rod can complete the high-precision and high-efficiency trimming of the surface to be processed, and improve the working efficiency of the surface finishing machine for processing the surface of a silicon rod.

[0006] In some embodiments, the plurality of adjusting components are arranged at both ends of the workpiece to be processed along a first direction. The first adjusting member is movable along the first direction, the second adjusting member is movable along a second direction, the first adjusting member is arranged on a side of the second adjusting member facing the workpiece to be processed, and the first direction is perpendicular to the second direction.

[0007] In some embodiments, the plurality of adjusting components move independently of each other.

[0008] In some embodiments, the plurality of adjustment components include: a first adjustment component, a second adjustment component, a third adjustment component, and a fourth adjustment component. The first adjustment component and the second adjustment component are disposed at one end of the workpiece to be processed along the first direction, and the third adjustment component and the fourth adjustment component are disposed at the other end of the workpiece to be processed along the first direction. The first adjustment component and the third adjustment component are opposite to each other along the first direction, the third adjustment component and the fourth adjustment component are opposite to each other along the first direction, and the first adjustment component and the second adjustment component, and the third adjustment component and the fourth adjustment component are respectively spaced apart along the third direction. The third direction, the first direction, and the second direction are perpendicular to each other.

[0009] In some embodiments, the first adjustment component and the second adjustment component are movable along the second direction; and / or the third adjustment component and the fourth adjustment component are movable along the second direction.

[0010] In some embodiments, the first adjustment component and the third adjustment component are movable along the second direction; and / or the second adjustment component and the fourth adjustment component are movable along the second direction.

[0011] In some embodiments, the detection component includes: a probe box, a cover plate, and at least one probe. An opening is formed on one side of the probe box, the cover plate can open and close the opening, the probe can extend out of and retract into the probe box at the opening, and when the probe extends out of the probe box, the probe abuts against the surface to be processed. The probe is movable along the first direction of the workpiece to be processed.

[0012] In some embodiments, for the range R of the surface to be processed, the R satisfies: 0 mm ≤ R ≤ 0.1 mm.

[0013] In some embodiments, it further includes: a clamping component for clamping the workpiece to be processed.

[0014] In some embodiments, it further includes: a grinding component including a grinding wheel, and the grinding wheel is in contact with the surface to be processed and is movable on the surface to be processed.

[0015] The additional aspects and advantages of the present utility model will be partially given in the following description, partially become apparent from the following description, or be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present utility model will become apparent and be easily understood from the description of the embodiments in conjunction with the following drawings, wherein:

[0017] Figure 1 Schematic diagram of an adjustment component, a workpiece to be processed, and a clamping component according to an embodiment of the present utility model.

[0018] Figure 2 Schematic diagram of a detection component according to an embodiment of the present utility model.

[0019] Figure 3 Schematic diagram of an adjustment component, a workpiece to be processed, and a probe according to an embodiment of the present utility model.

[0020] Figure 4 Schematic diagram of an adjustment component and a workpiece to be processed according to an embodiment of the present utility model.

[0021] Figure 5 Schematic diagram of an adjustment component, a workpiece to be processed, and a grinding component according to an embodiment of the present utility model.

[0022] Reference numerals:

[0023] 100, surface finishing machine;

[0024] 10, adjustment component; 11, first adjustment member; 12, second adjustment member; 13, first adjustment assembly; 14, second adjustment assembly; 15, third adjustment assembly; 16, fourth adjustment assembly;

[0025] 20, detection component; 21, probe box; 22, cover plate; 23, probe;

[0026] 30, workpiece to be processed; 31, surface to be processed;

[0027] 40, clamping component; 41, grinding component;

[0028] A, first direction; B, second direction; C, third direction. Detailed implementation manners

[0029] The embodiments of the present utility model will be described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. Below, reference is made to Figures 1 - 5 A surface finishing machine 100 for processing the surface of a silicon rod according to an embodiment of the present utility model includes: a plurality of adjustment components 10 and a detection component 20. The surface finishing machine 100 for processing the surface of a silicon rod has a first direction A, a second direction B, and a third direction C.

[0030] Specifically, as Figures 1 - 5As shown, a plurality of adjusting components 10 are adapted to adjust a workpiece 30 to be processed. Each adjusting component 10 includes a first adjusting member 11 and a second adjusting member 12. The first adjusting member 11 is detachably engaged with the workpiece 30 to be processed. The second adjusting member 12 is movably engaged with the first adjusting member 11. The workpiece 30 to be processed has a surface 31 to be processed. The detecting component 20 is in contact with the surface 31 to be processed, and the detecting component 20 is electrically connected to the plurality of adjusting components 10.

[0031] Combined with Figures 1 - 5 , the first adjusting member 11 extends along a first direction A. One end of the first adjusting member 11 abuts against one end face of the workpiece 30 to be processed along the first direction A. The first adjusting member 11 is movable relative to the second adjusting member 12 in a direction approaching or departing from the workpiece 30 to be processed. The first adjusting member 11 is detachably engaged with the workpiece 30 to be processed to facilitate the clamping and loading / unloading of the workpiece 30 on a surface finishing machine 100 for processing the surface of a silicon rod. The second adjusting member 12 is movably engaged with the first adjusting member 11 to achieve the position adjustment of the workpiece 30 to be processed. The surface 31 to be processed refers to one side surface of the workpiece 30 to be trimmed. The detecting component 20 is in direct contact with the workpiece 30 to be processed to facilitate the measurement of geometric parameters such as the height, flatness, and roughness of the surface 31 to be processed, providing feedback information for the surface finishing process and ensuring the processing accuracy. The detecting component 20 is electrically connected to the plurality of adjusting components 10. The detecting component 20 can transmit the information of the surface 31 to be processed collected to the control system of the surface finishing machine 100 for processing the surface of a silicon rod. The control system adjusts the actions of the respective adjusting components 10 according to this information to keep the surface 31 to be processed on a preset plane and ensure the quality of the surface finishing.

[0032] In the surface finishing machine 100 for processing the surface of a silicon rod according to an embodiment of the present invention, a plurality of adjusting components 10 are used to clamp the workpiece 30 to be processed to firmly fix the workpiece 30 to be processed. The detecting component 20 can accurately detect the surface 31 to be processed of the workpiece 30 to be processed. The detecting component 20 is electrically connected to the plurality of adjusting components 10 to realize the adjustment of the position of the workpiece 30 to be processed. The surface finishing machine 100 for processing the surface of a silicon rod completes the high-precision and high-efficiency trimming of the surface 31 to be processed, improving the working efficiency of the surface finishing machine 100 for processing the surface of a silicon rod.

[0033] According to some embodiments of the present invention, as Figure 1 shown, a plurality of adjusting components 10 are arranged at both ends of the workpiece 30 to be processed along the first direction A. The first adjusting member 11 is movable along the first direction A, and the second adjusting member 12 is movable along a second direction B. The first adjusting member 11 is arranged on the side of the second adjusting member 12 facing the workpiece 30 to be processed, and the first direction A is perpendicular to the second direction B.

[0034] During the production process, the silicon rod will be formed with a plurality of edge materials with arc-shaped portions at the top and irregular portions at both sides. The edge materials are the workpiece 30 to be processed in this embodiment, and the workpiece 30 to be processed extends along the first direction A. The first adjusting member 11 extends along the first direction A, and one end of the first adjusting member 11 along the first direction A is suitable for detachably cooperating with one end face of the workpiece to be processed along the first direction A. The first adjusting member 11 can move along the first direction A relative to the second adjusting member 12. The workpiece 30 to be processed is clamped between the first adjusting members 11 on the plurality of adjusting assemblies 10. The first adjusting member 11 can fix the clamping member and adjust the position of the workpiece 30 to be processed in the first direction A. The second adjusting member 12 can move along the second direction B. The other end of the first adjusting assembly 13 along the first direction A is connected to one end of the second adjusting assembly 14 along the second direction B. When the second adjusting member 12 moves along the second direction B, it can drive the first adjusting member 11 to move in the second direction B, thereby realizing the position adjustment of the workpiece 30 to be processed in the second direction B.

[0035] Thus, a plurality of adjustment components 10 are arranged at both ends of the workpiece 30 to be processed along the first direction A so as to more stably fix the workpiece 30 to be processed. The first adjustment member 11 and the second adjustment member 12 can move in the first direction A and the second direction B, thereby realizing the position adjustment of the workpiece 30 to be processed in the first direction A and the second direction B, ensuring that the processing surface 31 of the workpiece 30 to be processed remains in a preset position during the processing, thereby ensuring the processing quality of the processing surface 31 by the trimming machine 100 used for processing the surface of the silicon rod.

[0036] According to some embodiments of the present invention, Figure 1 As shown, multiple adjustment components 10 move independently of each other. Each adjustment component 10 can independently receive instructions and perform corresponding motion actions, and is not affected by the motion state of other adjustment components 10. The control system of the trimming machine 100 for processing the surface of silicon rods can set, adjust or control any adjustment component 10 separately without considering the linkage effect of other components. In addition, multiple adjustment components 10 can each perform different adjustment tasks at the same time, realize parallel operation, and significantly improve work efficiency.

[0037] Therefore, the design of independent movement of multiple adjustment components 10 improves the flexibility of the trimming machine 100 for processing the surface of silicon rods, makes the positioning and adjustment of the workpiece 30 to be processed more refined, and at the same time, the trimming machine 100 for processing the surface of silicon rods has higher flexibility, efficiency, adaptability and maintainability, realizes accurate positioning and efficient adjustment of the workpiece 30 to be processed, and ensures processing quality and production efficiency.

[0038] According to some embodiments of the present invention, Figure 3 and Figure 4As shown, a plurality of adjusting components 10 include: a first adjusting component 13, a second adjusting component 14, a third adjusting component 15, and a fourth adjusting component 16. The first adjusting component 13 and the second adjusting component 14 are arranged at one end of the workpiece 30 to be processed along the first direction A, and the third adjusting component 15 and the fourth adjusting component 16 are arranged at the other end of the workpiece 30 to be processed along the first direction A. The first adjusting component 13 and the third adjusting component 15 are opposite to each other along the first direction A, the third adjusting component 15 and the fourth adjusting component 16 are opposite to each other along the first direction A, and the first adjusting component 13 and the second adjusting component 14, the third adjusting component 15 and the fourth adjusting component 16 are respectively arranged at intervals along the third direction C. The third direction C, the first direction A, and the second direction B are perpendicular to each other.

[0039] The first adjusting component 13 and the second adjusting component 14, the third adjusting component 15 and the fourth adjusting component 16 are respectively arranged at intervals along the third direction C, which can avoid interference between the adjusting components 10 and provide sufficient space for the movement of the adjusting components 10. The first adjusting component 13, the second adjusting component 14, the third adjusting component 15, and the fourth adjusting component 16 jointly construct a three-dimensional, comprehensive, and flexible positioning system for the workpiece 30 to be processed, ensuring that the adjusting components 10 perform comprehensive, independent, and precise positioning control on the workpiece 30 in three-dimensional space. This layout is beneficial to precisely control the position of the workpiece 30 to be processed in three-dimensional space, adapt to various complex processing requirements, and ensure the processing accuracy and stability of the surface planing machine 100 for processing the surface of the silicon rod.

[0040] According to some embodiments of the present invention, as Figure 3 and Figure 4 shown, the first adjusting component 13 and the second adjusting component 14 are movable along the second direction B, that is, the first adjusting component 13 and the second adjusting component 14 can adjust the position of one end of the workpiece 30 along the first direction A in the second direction B, and at this time, the third adjusting component 15 and the fourth adjusting component 16 remain stationary. Or, the third adjusting component 15 and the fourth adjusting component 16 are movable along the second direction B, that is, the third adjusting component 15 and the fourth adjusting component 16 can adjust the position of the other end of the workpiece 30 along the first direction A in the second direction B, and at this time, the first adjusting component 13 and the second adjusting component 14 remain stationary. Or, the first adjusting component 13 and the second adjusting component 14 are movable along the second direction B and the third adjusting component 15 and the fourth adjusting component 16 are both movable along the second direction B, that is, both ends of the workpiece 30 along the first direction A can be adjusted.

[0041] Thus, at least one set of the first adjustment assembly 13 and the second adjustment assembly 14, and the third adjustment assembly 15 and the fourth adjustment assembly 16 has the ability to move along the second direction B, enabling the surface finishing machine 100 for processing the surface of the silicon rod to more precisely control the positions of both ends of the workpiece 30 to be processed along the first direction A in the second direction B, and adapting to more extensive and complex processing requirements.

[0042] According to some embodiments of the present invention, as Figure 3 and Figure 4 shown, the first adjustment assembly 13 and the third adjustment assembly 15 are movable along the second direction B. The first adjustment assembly 13 and the second adjustment assembly 14 are adjacent to one side of the workpiece 30 to be processed along the third direction C, that is, the first adjustment assembly 13 and the third adjustment assembly 15 can adjust the position of one side of the workpiece 30 to be processed along the third direction C in the second direction B, and at this time, the second adjustment assembly 14 and the fourth adjustment assembly 16 remain stationary.

[0043] Alternatively, the second adjustment assembly 14 and the fourth adjustment assembly 16 are movable along the second direction B. The second adjustment assembly 14 and the fourth adjustment assembly 16 are adjacent to the other side of the workpiece 30 to be processed along the third direction C, that is, the second adjustment assembly 14 and the fourth adjustment assembly 16 can adjust the position of the other side of the workpiece 30 to be processed along the third direction C in the second direction B, and at this time, the first adjustment assembly 13 and the third adjustment assembly 15 remain stationary. Or, the first adjustment assembly 13 and the third adjustment assembly 15 are movable along the second direction B and the second adjustment assembly 14 and the fourth adjustment assembly 16 are movable along the second direction B, that is, the positions of both sides of the workpiece 30 to be processed along the third direction C in the second direction B can be adjusted.

[0044] Thus, at least one set of the first adjustment assembly 13 and the third adjustment assembly 15, and the second adjustment assembly 14 and the fourth adjustment assembly 16 has the ability to move along the second direction B, enabling the surface finishing machine 100 for processing the surface of the silicon rod to more precisely control the positions of both sides of the workpiece 30 to be processed along the third direction C in the second direction B, so as to realize the adjustment of the surface 31 to be processed and make the surface 31 to be processed on a preset plane for facilitating the trimming of the surface 31 to be processed in subsequent processes.

[0045] According to some embodiments of the present invention, as Figure 2 and Figure 3 shown, the detection assembly 20 includes: a probe box 21, a cover plate 22, and at least one probe 23. An opening is formed on one side of the probe box 21. The cover plate 22 can be opened and closed to the opening. The probe 23 can extend out of and retract into the probe box 21 at the opening. When the probe 23 extends out of the probe box 21, the probe 23 abuts against the surface 31 to be processed, and the probe 23 is movable along the first direction A of the workpiece 30.

[0046] The probe box 21 is the main structure of the detection component 20 and is used to accommodate and protect the probes 23. An opening is formed on one side of the probe box 21 along the second direction B. The opening faces the surface to be machined 31 along the second direction B. The cover plate 22 is matched with the opening. The setting of the opening enables the probes 23 to extend out of the probe box 21 to contact the surface to be machined 31 when needed. At this time, the cover plate 22 is in the open state. When not needed, the probes 23 can retract into the probe box 21. At this time, the cover plate 22 is in the closed state to ensure the safe storage and protection of the probes 23. The probes 23 extend along the second direction B, and the probes 23 can move along the second direction B in the direction of approaching or departing from the surface to be machined 31. One end of the probes 23 along the second direction B contacts the surface to be machined 31 to measure parameters such as the height, flatness, and roughness of the surface to be machined 31. There are multiple probes 23, and the multiple probes 23 are arranged at intervals along the third direction C. The probes 23 can move along the first direction A of the workpiece to be machined 30, so as to facilitate the fixed-point detection of the entire area of the surface to be machined 31 and comprehensively and accurately obtain the data of the surface to be machined 31.

[0047] Thus, the detection component 20 is composed of a probe box 21, a cover plate 22, and probes 23. The probes 23 have functions such as extending and retracting, and moving along the first direction A of the workpiece to be machined 30, and can realize the comprehensive and effective detection of the surface to be machined 31. This design takes into account the protection of the probes 23, the convenience of detection, and the comprehensiveness of data acquisition, and is applicable to various precision machining, detection, and quality control occasions.

[0048] According to some embodiments of the present invention, as Figure 2 shown, the cover plate 22 is configured as a waterproof plate. The cover plate 22 being configured as a waterproof plate can play a role in protecting the probes 23, preventing moisture from contacting the probes 23, and avoiding problems such as a decrease in accuracy, corrosion and rust, and electrical short circuit of the probes 23 due to moisture. Thus, configuring the cover plate 22 as a waterproof plate improves the waterproof performance and environmental adaptability of the detection component 20, effectively protects the probes 23 and other components inside the probe box 21 from moisture, and ensures the accuracy of the detection work and the reliability of the equipment.

[0049] According to some embodiments of the present invention, for the surface to be machined 31, the range R satisfies: 0 mm ≤ R ≤ 0.1 mm. The range refers to the difference between the maximum value and the minimum value in a set of measurement data. For the surface to be machined 31, the range R is used to characterize the maximum height difference between points on this surface in the second direction B, that is, the maximum height difference between any two points on the surface to be machined 31 cannot exceed 0.1 mm, ensuring the flatness of the surface to be machined 31.

[0050] Therefore, limiting the range of the full range R of the surface to be machined 31 is an accurate quantitative requirement for the surface flatness of the surface to be machined 31, so as to ensure that the workpiece to be machined 30 meets the specified accuracy grade and surface quality standard, improve the surface consistency of the workpiece to be machined 30, improve the machining accuracy of the surface finishing machine 100 for machining the surface of the silicon rod on the surface to be machined 31, increase the yield rate of the workpiece to be machined 30, and further improve the utilization rate of the edge skin material in the subsequent process and reduce the waste of silicon rods.

[0051] According to some embodiments of the present invention, such as Figure 1 shown, it further includes: a clamping assembly 40, and the clamping assembly 40 is used for clamping the workpiece to be machined 30. The clamping assembly 40 is used for clamping the workpiece to be machined 30 and moving the workpiece to be machined 30 onto a plurality of adjusting assemblies 10. After the plurality of adjusting assemblies 10 firmly clamp the workpiece to be machined 30, the clamping assembly 40 releases the workpiece to be machined 30. Therefore, the clamping assembly 40 is used to move the workpiece to be machined 30 to the machining position, ensuring the stability of the moving process of the workpiece to be machined 30, improving the convenience of the movement of the workpiece to be machined 30, and ensuring the production efficiency of the surface finishing machine 100 for machining the surface of the silicon rod.

[0052] According to some embodiments of the present invention, such as Figure 1 shown, the clamping assembly 40 includes a suction cup. The suction cup adsorbs the workpiece to be machined 30 by generating negative pressure (vacuum), realizing non-contact clamping, avoiding direct contact between the traditional clamping elements (such as clamping jaws, pressure plates) and the surface of the workpiece. The suction cup cooperates with the surface to be machined 31 of the workpiece to be machined 30, which is beneficial to protecting the surface to be machined 31 from being damaged such as being clamped and scratched, and can improve the surface quality of the surface to be machined 31. The clamping and releasing process of the suction cup is usually realized through air circuit control (such as air pumps, solenoid valves), with simple operation, fast clamping and releasing speed, which is beneficial to improving production efficiency and can improve the automation degree of the surface finishing machine 100 for machining the surface of the silicon rod.

[0053] Therefore, as a part of the clamping assembly 40, the suction cup can effectively solve the clamping problem of specific workpieces to be machined 30 in the surface finishing machine 100 for machining the surface of the silicon rod with its non-contact clamping, strong adaptability, simple and fast operation and other characteristics, and has significant advantages especially in protecting the surface quality of the workpiece, improving production efficiency and realizing automated production.

[0054] According to some embodiments of the present invention, such as Figure 5 shown, it further includes: a grinding assembly 41, and the grinding assembly 41 includes a grinding wheel, and the grinding wheel contacts the surface to be machined 31 and can move on the surface to be machined 31.

[0055] The grinding wheel is the core working medium of the grinding assembly 41, and is usually an annular wheel-shaped tool formed by consolidating hard and wear-resistant abrasive grains (such as silicon carbide, alumina, diamond, etc.) with a binder (such as ceramic, resin, metal, etc.). During the high-speed rotation of the abrasive grains of the grinding wheel, through actions such as shearing, extrusion, and grinding, excess material is removed from the surface to be machined 31, thereby achieving trimming, grinding, or polishing of the workpiece surface.

[0056] Thus, through the contact between the grinding wheel of the grinding assembly 41 and the surface to be machined 31 and various movements of the grinding wheel on the surface to be machined 31, effective grinding of the workpiece surface is carried out. The rotational movement of the grinding wheel provides the cutting force, the axial reciprocating movement and the radial yaw movement ensure the machining uniformity and accuracy, and the workpiece feeding movement helps to cover the entire area to be machined. The coordinated cooperation of these movements enables the surface trimming machine 100 to achieve efficient and precise grinding of the silicon rod surface.

[0057] Combined Figures 1 - 5 , specifically:

[0058] The clamping assembly 40 adsorbs the surface to be machined 31 of the workpiece to be machined 30 through a suction cup to clamp the workpiece to be machined 30. The clamping assembly 40 moves the workpiece to be machined 30 between multiple adjusting assemblies 10, so that one end face of the workpiece to be machined 30 along the first direction A abuts against the first adjusting member 11 of the first adjusting assembly 13 and the second adjusting assembly 14. The first adjusting members 11 of the third adjusting assembly 15 and the fourth adjusting assembly 16 move in the direction approaching the workpiece to be machined 30 along the first direction A until they abut against the other end face of the workpiece to be machined 30 along the first direction A. At this time, the multiple adjusting assemblies 10 fix the workpiece to be machined 30, and the clamping assembly 40 releases the workpiece to be machined 30.

[0059] Then, when the probe 23 of the detection assembly 20 extends out of the probe box 21, the probe 23 abuts against the surface to be machined 31 and moves relative to the workpiece to be machined along the first direction A, completing the fixed-point detection of the entire area of the surface to be machined 31 and obtaining the range data of the surface to be machined 31. The control system of the surface trimming machine 100 calculates the movement distances of the multiple adjusting assemblies 10 in the second direction B according to the range data and controls the movement of the adjusting assemblies 10. First, adjust the movements of the first adjusting assembly 13 and the second adjusting assembly 14, the third adjusting assembly 15 and the fourth adjusting assembly 16 in the second direction B respectively, so that both ends of the surface to be machined 31 along the second direction B are level. Then, adjust the movements of the first adjusting assembly 13 and the third adjusting assembly 15, the second adjusting assembly 14 and the fourth adjusting assembly 16 in the second direction B respectively, so that both sides of the surface to be machined 31 along the third direction C are level, and the position adjustment of the surface to be machined 31 can be completed.

[0060] Finally, the grinding assembly 41 effectively grinds the surface of the workpiece through the contact between the grinding wheel and the surface 31 to be processed and various movements of the grinding wheel on the surface 31 to be processed, so that the range of the extreme difference R of the surface 31 to be processed satisfies: 0 mm ≤ R ≤ 0.1 mm. In summary, the surface finishing machine 100 for processing the surface of the silicon rod can complete the finishing of the surface of the workpiece 30 to be processed. That is, one surface of the edge skin material is finished. In the subsequent process of cutting the edge skin material, this surface can be used as a reference surface to remove the top with an arc-shaped part and the irregular parts on both sides of the edge skin material, obtaining a regular cuboid silicon block, effectively improving the accuracy of the silicon block, increasing the utilization rate of the edge skin material, and also facilitating the improvement of the finished product yield of the silicon wafer.

[0061] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0062] In the description of the present invention, the "first feature" and "second feature" may include one or more of such features. In the description of the present invention, the meaning of "a plurality" is two or more. In the description of the present invention, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. In the description of the present invention, the first feature being "above", "above" and "on the top" of the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature has a higher horizontal height than the second feature.

[0063] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example.

[0064] Although embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present utility model. The scope of the present utility model is defined by the claims and their equivalents.

Claims

1. A trimming machine for processing the surface of a silicon rod, characterized in that: include: A plurality of adjustment components, wherein the plurality of adjustment components are suitable for adjusting a workpiece to be processed, each of the adjustment components comprises a first adjustment component and a second adjustment component, wherein the first adjustment component is detachably matched with the workpiece to be processed, and the second adjustment component is movably matched with the first adjustment component, and the workpiece to be processed has a surface to be processed; A detection component is in contact with the surface to be processed, and the detection component is electrically connected to the plurality of adjustment components.

2. The trimming machine for processing the surface of silicon rods according to claim 1, characterized in that: A plurality of the adjusting components are arranged at two ends of the workpiece to be processed along a first direction; The first adjusting member is movable along a first direction, and the second adjusting member is movable along a second direction. The first adjusting member is arranged on a side of the second adjusting member facing the workpiece to be processed, and the first direction is perpendicular to the second direction.

3. The trimming machine for processing the surface of silicon rods according to claim 1, characterized in that: The plurality of adjustment components move independently of each other.

4. The trimming machine for processing the surface of silicon rods according to claim 2, characterized in that: A plurality of said regulating components include: a first adjusting component and a second adjusting component, wherein the first adjusting component and the second adjusting component are arranged at one end of the workpiece to be processed along the first direction; a third adjusting component and a fourth adjusting component, wherein the third adjusting component and the fourth adjusting component are arranged at the other end of the workpiece to be processed along the first direction; The first adjustment component and the third adjustment component are opposite to each other along the first direction, the third adjustment component and the fourth adjustment component are opposite to each other along the first direction, and the first adjustment component and the second adjustment component, the third adjustment component and the fourth adjustment component are respectively arranged at intervals along the third direction, and the third direction, the first direction and the second direction are orthogonal to each other.

5. The trimming machine for processing the surface of silicon rods according to claim 4, characterized in that: The first adjustment assembly and the second adjustment assembly are movable along the second direction; and / or The third adjustment assembly and the fourth adjustment assembly are movable along the second direction.

6. The trimming machine for processing the surface of silicon rods according to claim 4, characterized in that: The first adjustment component and the third adjustment component are movable along the second direction; and / or The second adjustment assembly and the fourth adjustment assembly are movable along the second direction.

7. The trimming machine for processing the surface of silicon rods according to claim 1, characterized in that: The detection component comprises: A probe box, wherein an opening is formed on one side of the probe box; a cover plate capable of opening and closing the opening; at least one probe, the probe being extendable and retractable from the probe box at the opening, When the probe extends out of the probe box, the probe abuts against the surface to be processed, and the probe is movable along a first direction of the workpiece to be processed.

8. The trimming machine for processing the surface of silicon rods according to claim 1, characterized in that: The range R of the surface to be processed satisfies: 0mm≤R≤0.1mm.

9. The trimming machine for processing the surface of silicon rods according to claim 1, characterized in that: Also includes: A clamping assembly is used to clamp the workpiece to be processed.

10. The face trimming machine for processing the surface of a silicon rod according to any one of claims 1 to 9, characterized in that: Also includes: A grinding assembly comprises a grinding wheel, wherein the grinding wheel is in contact with the surface to be processed and can move on the surface to be processed.

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