Vacuum transfer box and vacuum coating equipment

Abstract

The utility model discloses a vacuum transfer box and vacuum coating equipment, a second transfer mechanism is connected to a first transfer mechanism in a sliding manner, a third transfer mechanism is connected to the second transfer mechanism in a sliding manner, and a rotary feeding mechanism is connected to the third transfer mechanism in a sliding manner; therefore, when the first transfer mechanism moves in the first direction, the rotary feeding mechanism can be driven to move, when the second transfer mechanism moves in the second direction, the rotary feeding mechanism can be driven to move, and when the third transfer mechanism moves in the third direction, the rotary feeding mechanism can be driven to move. The rotary feeding mechanism can rotate on the third transferring mechanism, and the rotating axis is parallel to the first direction, so that the cargo cages can be transferred from the previous working procedure to the next working procedure, the vacuum environment does not need to be damaged, the vacuumizing time during manual loading and unloading operation and the operation time required by loading and unloading are saved, and the working efficiency is improved. And the overall rhythm speed of the coating process is improved, so that the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum transfer box and a vacuum coating device. Background Art

[0002] Vacuum coating technology is a method of evaporating or sputtering metals, alloys or compounds in a vacuum so that they solidify and deposit on the object to be coated (referred to as a substrate, wafer or matrix), which is called vacuum coating.

[0003] At present, most of the coating industry uses manual loading and unloading. That is to say, after each coating process of the coated parts, the box door needs to be opened, and then the coated parts are transferred to the work station of the next process. After the box door is opened, the vacuum environment for coating is destroyed. When the coated parts are processed in the next process, it takes time to evacuate the inside of the box to a vacuum. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a vacuum transfer box and a vacuum coating device, which do not need to destroy the vacuum environment, save the vacuuming time and the operation time required for manual loading and unloading, improve the overall beat speed of the coating process, and thus improve the production efficiency.

[0005] In a first aspect, the utility model provides a vacuum transfer box, which includes a frame, a transfer box body and a transfer device;

[0006] The transfer box body is arranged on the frame, the transfer box body has a transfer chamber, a feed port and at least two discharge ports communicated with the transfer chamber, and the transfer device is located in the transfer chamber;

[0007] Wherein, the transfer device includes a frame, a first transfer mechanism, a second transfer mechanism, a third transfer mechanism and a rotating feeding mechanism; the first transfer mechanism is slidably connected to the frame and can move relative to the frame along a first direction; the second transfer mechanism is slidably connected to the first transfer mechanism and can move relative to the first transfer mechanism along a second direction; the third transfer mechanism is slidably connected to the second transfer mechanism and can move relative to the second transfer mechanism along a third direction; the rotating feeding mechanism is rotatably arranged on the third transfer mechanism, and the rotation axis of the rotating feeding mechanism is parallel to the first direction, and the rotating feeding mechanism can clamp a cargo cage; the first direction, the second direction and the third direction are perpendicular to each other.

[0008] In an optional embodiment, the frame is provided with a first guiding component capable of moving along the second direction, the first guiding component is connected to the second transfer mechanism, and the first guiding component can stretch along the first direction.

[0009] In an alternative embodiment, the first guiding assembly includes a first guiding member and a second guiding member that are slidably connected, and the first guiding member and the second guiding member are capable of relative sliding along the first direction; the first guiding member is connected to the second transfer mechanism; the second guiding member is in transmission connection with the frame and is capable of moving along the second direction.

[0010] In an alternative embodiment, the frame is provided with a second driving mechanism, and the second driving mechanism is connected to the second guiding member for driving the second guiding member to move along the second direction.

[0011] In an alternative embodiment, the frame is provided with a second guiding assembly capable of moving along a third direction, the second guiding assembly is connected to the third transfer mechanism, and the second guiding assembly is capable of telescoping along the first direction.

[0012] In an alternative embodiment, the second guiding assembly includes a third guiding member and a fourth guiding member, and the third guiding member and the fourth guiding member are capable of relative sliding along the first direction; the third guiding member is connected to the third transfer mechanism; the fourth guiding member is in transmission connection with the frame and is capable of moving along the second direction.

[0013] In an alternative embodiment, a transmission frame body is slidably connected to the frame, the transmission frame body is slidably connected to the fourth guiding member, the transmission frame body is capable of moving along the third direction relative to the frame, and the fourth guiding member is capable of moving along the second direction relative to the transmission frame body.

[0014] In an alternative embodiment, the transfer device includes a rotating mechanism, and the rotating mechanism includes a first rotating assembly and a second rotating assembly; the first rotating assembly and the second rotating assembly are spaced apart along the third direction; the first rotating assembly and the second rotating assembly are used to selectively be in transmission connection with the rotating feeding mechanism to drive the rotating feeding mechanism to rotate relative to the third transfer mechanism; wherein, the rotating direction of the first rotating assembly for driving the rotating feeding mechanism to rotate is opposite to the rotating direction of the second rotating assembly for driving the rotating feeding mechanism to rotate.

[0015] In an alternative embodiment, the rotating feeding mechanism includes a rotating frame and a cage tray; the length direction of the rotating frame is along the first direction, and one end of the rotating frame is rotatably connected to the third transfer mechanism; the cage tray is connected to the rotating frame; the rotating mechanism is used to be connected to the end of the rotating frame away from the third transfer mechanism to drive the rotating frame to rotate relative to the third transfer mechanism.

[0016] In an alternative embodiment, the frame is provided with a first slide rail extending along the first direction, and the first transfer mechanism is slidably connected to the first slide rail.

[0017] In an alternative embodiment, the first transfer mechanism includes a first frame body and a first track provided on the first frame body. The first frame body is slidably connected to the frame and can move along the first direction; the first track extends along the second direction, and the second transfer mechanism is slidably connected to the first track.

[0018] In an alternative embodiment, the second transfer mechanism includes a second frame body and a second track provided on the second frame body; the second frame body is slidably connected to the first transfer mechanism and can move along the second direction; the second track extends along the third direction, and the third transfer mechanism is slidably connected to the second track.

[0019] In an alternative embodiment, a transmission frame body capable of moving along the third direction is slidably connected to the frame. The transmission frame body is slidably connected to the third transfer mechanism, and the transmission frame body and the third transfer mechanism can generate relative sliding along the first direction.

[0020] In an alternative embodiment, the transfer device further includes a rotation mechanism, a first driving mechanism, a second driving mechanism, a third driving mechanism, and a fourth driving mechanism; the first driving mechanism is used to drive the first transfer mechanism to move; the second driving mechanism is used to drive the second transfer mechanism to move; the third driving mechanism is used to drive the third transfer mechanism to move; the fourth driving mechanism is used to drive the rotation mechanism to rotate, so as to drive the rotating feeding mechanism to rotate through the rotation mechanism.

[0021] In a second aspect, the present invention provides a vacuum coating device, including a coating chamber and the vacuum transfer chamber described in the foregoing embodiment; wherein, each of the discharge ports corresponds to one of the coating chambers.

[0022] The beneficial effects of the embodiments of the present invention include:

[0023] The second transfer mechanism is slidably connected to the first transfer mechanism, the third transfer mechanism is slidably connected to the second transfer mechanism, and the rotating feeding mechanism is slidably connected to the third transfer mechanism. Therefore, when the first transfer mechanism moves along the first direction, it can drive the second transfer mechanism, the third transfer mechanism, and the rotating feeding mechanism to move. When the second transfer mechanism moves along the second direction, it can drive the third transfer mechanism and the rotating feeding mechanism to move. When the third transfer mechanism moves along the third direction, it can drive the rotating feeding mechanism to move. The rotating feeding mechanism can rotate on the third transfer mechanism, and the rotation axis is parallel to the first direction, so that the cage clamped by the rotating feeding mechanism can rotate and move in three directions, transferring the cage from the previous process to the next process without destroying the vacuum environment, saving the vacuum pumping time and the operation time required for loading and unloading manually, improving the overall beat speed of the coating process, and thus improving the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0025] Figure 1 One of the schematic diagrams of the vacuum transfer box in this embodiment;

[0026] Figure 2 Another schematic diagram of the vacuum transfer box in this embodiment;

[0027] Figure 3 For Figure 1 、 Figure 2 Schematic diagram after hiding the transfer box body and the frame;

[0028] Figure 4 For Figure 3 Partial structural schematic diagram of the middle frame, the first transfer mechanism and the second transfer mechanism;

[0029] Figure 5 For Figure 3 One of the schematic diagrams after hiding the first motor, the second motor, the third motor, the fourth motor and the rotating mechanism;

[0030] Figure 6 For Figure 5 Enlarged view of part A of

[0031] Figure 7 For Figure 3 Another schematic diagram after hiding the first motor, the second motor, the third motor, the fourth motor and the rotating mechanism;

[0032] Figure 8 is Figure 7 an enlarged view of part B of

[0033] Icon: 100 - rack; 200 - transfer box; 210 - feed inlet; 220 - discharge outlet; 300 - transfer device; 310 - frame; 311 - first slide rail; 313 - second slide rail; 320 - first transfer mechanism; 321 - first frame body; 322 - first track; 330 - second transfer mechanism; 331 - second frame body; 332 - second track; 333 - first guiding component; 334 - first guiding member; 335 - second guiding member; 340 - third transfer mechanism; 341 - third frame body; 342 - driving frame body; 343 - second guiding component; 344 - third guiding member; 345 - fourth guiding member; 346 - third track; 350 - rotating feeding mechanism; 351 - rotating frame; 352 - cage tray; 360 - first rotating component; 361 - second rotating component; 362 - gear disk; 370 - first driving mechanism; 371 - second driving mechanism; 372 - third driving mechanism; 373 - fourth driving mechanism; 380 - first motor; 381 - second motor; 382 - third motor; 384 - fourth motor; 400 - cage. Detailed implementation manners

[0034] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some but not all of the embodiments of the present utility model. Usually, the components of the embodiments of the present utility model described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0035] Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the present utility model to be protected, but merely represents the selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the scope of protection of the present utility model.

[0036] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0037] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is customarily placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, terms such as "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0038] In addition, terms such as "horizontal", "vertical", "hanging" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0039] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0040] The following combines Figures 1 to 8 , and makes a detailed description of some embodiments of the present utility model. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0041] This embodiment discloses a vacuum coating device, which includes a feeding box, a first gate valve, a vacuum transfer box, a second gate valve, a coating box, and a vacuum pumping device.

[0042] The feeding box is mainly used for placing the cage 400 loaded with coating parts. The feeding box is docked with the vacuum transfer box through the first gate valve, and the vacuum transfer box is docked with the coating box through the second gate valve. The vacuum transfer box is mainly used to transfer the cage 400 in the feeding box to the coating box, so that the coating box can perform vacuum coating on the coating parts on the cage 400. That is to say, the vacuum transfer box can transfer the cage 400 from the station of the previous process to the station of the next process. The vacuum pumping device mainly performs vacuum pumping on the internal spaces of the feeding box, the vacuum transfer box, and the coating box.

[0043] Specifically, the feed box is provided with a first pair of interfaces, and the vacuum transfer box is provided with a feed inlet 210 and a discharge outlet 220. The first plug valve is arranged between the feed box and the vacuum transfer box. When the first plug valve is closed, it can isolate the first pair of interfaces from the feed inlet 210, so that during the process of placing the cage 400 in the feed box, the vacuum environments in the vacuum transfer box and the coating box are not affected. The vacuum pumping device evacuates the feed box to a certain extent to be basically the same as the vacuum degree in the vacuum transfer box. In this way, after the first plug valve is opened, the feed inlet 210 and the discharge outlet 220 can be docked and communicated, so that the cage 400 can enter the vacuum transfer box from the feed box, and the entire vacuum environment is not affected. The coating box is provided with a second pair of interfaces, and the second plug valve is arranged between the vacuum transfer box and the coating box. The second plug valve is in a closed state during the process of the cage 400 being placed in the feed box and entering the vacuum transfer box from the feed box, so as to avoid the influence of air release during feeding on the vacuum environment in the coating box. When the feed box is re-evacuated to match the vacuum degree of the vacuum transfer box after loading, when the second plug valve is opened, the discharge outlet 220 and the second pair of interfaces are docked and communicated, so that the cage 400 is transferred to the coating box through the vacuum transfer box to coat the coated parts.

[0044] Combined with Figure 1 and Figure 2 , the vacuum transfer box includes a frame 100, a transfer box body 200, and a transfer device 300. The frame 100 mainly serves to carry the transfer box body 200 and the transfer device 300.

[0045] The transfer box body 200 has a hollow structure and is arranged on the frame 100. The transfer box body 200 is provided with a feed inlet 210 and a discharge outlet 220. The number of discharge outlets 220 is more than two, and each discharge outlet 220 is docked with a coating box through a second plug valve. For example, the transfer box body 200 is generally rectangular parallelepiped-shaped, including a bottom wall and a top wall opposite in the first direction and four side walls connecting between the bottom wall and the top wall. The four side walls are connected end to end in sequence, and two side walls are opposite in the second direction. One of these two side walls is provided with the feed inlet 210; the other two side walls are opposite in the third direction and are both provided with discharge outlets 220, so as to dock with two coating boxes.

[0046] The transfer device 300 is located in the transfer chamber to pick up the cage 400 in the feed box through the feed inlet 210 and put the cage 400 into the coating box through the discharge outlet 220.

[0047] Among them, the first direction is the Z direction (up and down direction) shown in the figure, the second direction is the Y direction (front and back direction) shown in the figure, the third direction is the X direction (left and right direction) shown in the figure, and the first direction, the second direction, and the third direction are perpendicular to each other.

[0048] Combined with Figure 3, the transfer device 300 includes a frame 310, a first transfer mechanism 320, a second transfer mechanism 330, a third transfer mechanism 340, and a rotating feeding mechanism 350. The first transfer mechanism 320 is slidably connected to the frame 310 and can move relative to the frame 310 along a first direction. The second transfer mechanism 330 is slidably connected to the first transfer mechanism 320 and can move relative to the first transfer mechanism 320 along a second direction. The third transfer mechanism 340 is slidably connected to the second transfer mechanism 330 and can move relative to the second transfer mechanism 330 along a third direction. The rotating feeding mechanism 350 is rotatably arranged on the third transfer mechanism 340, and the rotation axis of the rotating feeding mechanism 350 is parallel to the first direction. The rotating feeding mechanism 350 can clamp the cage 400.

[0049] In this way, since the second transfer mechanism 330 is slidably connected to the first transfer mechanism 320, the third transfer mechanism 340 is slidably connected to the second transfer mechanism 330, and the rotating feeding mechanism 350 is slidably connected to the third transfer mechanism 340, when the first transfer mechanism 320 moves along the first direction, it can drive the second transfer mechanism 330, the third transfer mechanism 340, and the rotating feeding mechanism 350 to move. When the second transfer mechanism 330 moves along the second direction, it can drive the third transfer mechanism 340 and the rotating feeding mechanism 350 to move. When the third transfer mechanism 340 moves along the third direction, it can drive the rotating feeding mechanism 350 to move. And the rotating feeding mechanism 350 can rotate on the third transfer mechanism 340, and the rotation axis is parallel to the first direction, so that the cage 400 clamped by the rotating feeding mechanism 350 can rotate and move in three directions, transferring the cage 400 from the previous process to the next process without destroying the vacuum environment, saving the vacuum pumping time and the operation time required for manual loading and unloading, improving the overall beat speed of the coating process, and thus improving the production efficiency.

[0050] In order to facilitate the automatic movement of the rotating feeding mechanism 350 and improve the transfer efficiency of the cage 400. Therefore, the transfer device 300 further includes a first driving mechanism 370, a second driving mechanism 371, a third driving mechanism 372, and a fourth driving mechanism 373; the first driving mechanism 370 is used to drive the first transfer mechanism 320 to move; the second driving mechanism 371 is used to drive the second transfer mechanism 330 to move; the third driving mechanism 372 is used to drive the third transfer mechanism 340 to move; the fourth driving mechanism 373 is used to drive the rotating mechanism to rotate to drive the rotating feeding mechanism 350 to rotate.

[0051] In this embodiment, in combination with Figure 4, the first transfer mechanism 320 includes a first frame 321 and a first track 322 provided on the first frame 321. The first frame 321 is slidably connected to the frame 310 and can move along the first direction. The first track 322 extends along the second direction, and the second transfer mechanism 330 is slidably connected to the first track 322. In this way, by providing the first track 322 extending along the second direction on the first frame 321 for the second transfer mechanism 330 to slidably connect, the movement of the second transfer mechanism 330 along the second direction can be limited, and at the same time, the frictional force between the first transfer mechanism 320 and the second transfer mechanism 330 can be reduced.

[0052] Wherein, a first slide rail 311 extending along the first direction is further provided on the frame 310, and the first frame 321 of the first transfer mechanism 320 is slidably connected to the first slide rail 311. In this way, the frictional force between the frame 310 and the first transfer mechanism 320 is reduced through the first slide rail 311, and the positional relationship between the first transfer mechanism 320 and the frame 310 is defined, so that the first transfer mechanism 320 moves along the first direction.

[0053] Combined Figure 5 , the second transfer mechanism 330 includes a second frame 331 and a second track 332. The second frame 331 is slidably connected to the first track 322 of the first transfer mechanism 320 and can move along the second direction; the second track 332 extends along the third direction, and the third transfer mechanism 340 is slidably connected to the second frame 331. In this way, the third transfer mechanism 340 can move along the third direction under the guiding action of the second track 332, and at the same time, the frictional resistance is reduced through the second track 332.

[0054] A first guiding component 333 is connected between the frame 310 and the second transfer mechanism 330. The first guiding component 333 can move along the second direction relative to the frame 310, and the first guiding component 333 can expand and contract along the first direction.

[0055] In this way, the first guiding component 333 drives the second transfer mechanism 330 to move in the second direction. At the same time, since the first guiding component 333 can expand and contract in the first direction, it will not interfere with the movement of the second transfer mechanism 330 in the first direction, preventing the possible movement interference phenomenon between the first transfer mechanism 320 and the second transfer mechanism 330 due to different movement directions.

[0056] In this embodiment, the first guiding assembly 333 includes a first guiding member 334 and a second guiding member 335 that are slidably connected; the first guiding member 334 and the second guiding member 335 can produce relative sliding along a first direction; the first guiding member 334 is connected to the second frame body 331; the second guiding member 335 is connected to the second driving mechanism 371 and thus indirectly connected to the frame 310, so that it can move along a second direction under the action of the second driving mechanism 371, and thus drive the second transfer mechanism 330 to move along the second direction through the first guiding member 334.

[0057] In this way, by arranging the first guiding member 334 and the second guiding member 335 that can produce relative sliding along the first direction between the second frame body 331 and the frame 310, when the second driving mechanism 371 drives the second frame body 331 to move along the second direction through the second guiding member 335, at the same time, the second frame body 331 can also move along the first direction through this first guiding assembly, so as to prevent the possible movement interference phenomenon between the first transfer mechanism 320 and the second transfer mechanism 330 due to different movement directions.

[0058] Specifically, in combination with Figure 6 , the first guiding member 334 can be a sleeve-shaped element fixed on the second frame body 331, such as a linear bearing, and the second guiding member 335 is a slide bar correspondingly inserted into the first guiding member 334, so that the sliding friction between the two is small. The length directions of the first guiding member 334 and the second guiding member 335 are both along the first direction, and one end of the second guiding member 335 is connected to the second driving mechanism 371.

[0059] In this embodiment, in combination with Figure 7 , the third transfer mechanism 340 includes a third frame body 341, and a driving frame body 342 that can move along a third direction is slidably connected to the frame 310. The third frame body 341 is slidably connected to the second track 332 of the second transfer mechanism 330, and the rotary feeding mechanism 350 is rotatably arranged on the third frame body 341. The driving frame body 342 is slidably connected to the third frame body 341, and the driving frame body 342 and the third frame body 341 can produce relative sliding along the first direction.

[0060] In this way, the third frame body 341 drives the rotary feeding mechanism 350 to move along the third direction, and at the same time, through the sliding connection between the driving frame body 342 and the third frame body 341, the two can produce sliding along the first direction, so as to prevent the driving frame body 342 from interfering with the movement of the third frame body 341 in the first direction.

[0061] In combination with Figure 8, a second guiding component 343 is connected between the third frame body 341 and the transmission frame body 342. The second guiding component 343 can move along a third direction relative to the frame 310, and the second guiding component 343 can telescopically extend along a first direction.

[0062] In this way, the transmission frame body 342 drives the third transfer mechanism 340 through the second guiding component 343 to realize the movement in the third direction. At the same time, since the first guiding component 333 can telescopically extend in the first direction, the relative sliding between the third frame body 341 and the transmission frame body 342 in the first direction is realized, so as to prevent the transmission frame body 342 from interfering with the movement of the third frame body 341 in the first direction, and avoid the possible movement interference phenomenon between the first transfer mechanism 320 and the third transfer mechanism 340 due to different movement directions.

[0063] In this embodiment, the second guiding component 343 includes a third guiding member 344 and a fourth guiding member 345 that are slidably connected; the third guiding member 344 and the fourth guiding member 345 can generate relative sliding along the first direction, so that relative sliding can occur between the transmission frame body 342 and the third frame body 341, and the friction force is small. The third guiding member 344 is connected to the third frame body 341; a third track 346 along the second direction is provided on the transmission frame body 342, and the fourth guiding member 345 is slidably connected to the third track 346, that is, the fourth guiding member 345 is indirectly connected to the frame 310 through the transmission frame body 342 to be able to move relative to the frame body along the second direction and the third direction, and at the same time prevent the third frame body 341 from interfering with each other in the first direction and the third direction.

[0064] Among them, the third guiding member 344 can be a sliding column fixed on the third frame body 341, the fourth guiding member 345 can be a linear bearing, both the third guiding member 344 and the fourth guiding member 345 extend along the first direction, the third guiding member 344 slidably passes through the fourth guiding member 345, and the fourth guiding member 345 can be slidably connected to the third track 346 through a slider.

[0065] In order to reduce the friction force when the transmission frame body 342 moves on the frame 310, a second sliding rail 313 extending along the third direction is provided on the frame 310, and the transmission frame body 342 is slidably connected to the second sliding rail 313.

[0066] Combined with Figure 5 and Figure 7, The rotating feeding mechanism 350 includes a rotating frame 351 and a cage tray 352. The length direction of the rotating frame 351 is along the first direction, and one end of the rotating frame 351 is rotatably connected to the third frame body 341 of the third transfer mechanism 340. The cage tray 352 is connected to the rotating frame 351; the rotating mechanism is used to connect to the end of the rotating frame 351 away from the third transfer mechanism 340 to drive the rotating frame 351 to rotate relative to the third transfer mechanism 340, so that the rotating frame 351 drives the cage 400 clamped by the cage tray 352 to perform a circular motion to change the orientation of the cage 400.

[0067] The structure of the cage 400 is generally cylindrical. Therefore, when the transfer device 300 transfers the cage 400, the stability during the transportation process needs to be considered. Therefore, two cage trays 352 are arranged opposite to each other in the first direction to be located at both ends of the cage 400. Among them, a semi-circular hole with the same outer diameter as the cage 400 is provided on the cage tray 352. The opening direction of the semi-circular hole is away from the rotating frame 351, and a support platform is provided on the inner wall of the semi-circular hole to support the cage 400.

[0068] The rotating mechanism is used to drive the rotating feeding mechanism 350 to rotate relative to the third transfer mechanism 340. The rotating mechanism includes a first rotating component 360 and a second rotating component 361. The structures of the first rotating component 360 and the second rotating component 361 are basically the same, and both are gear disks 362 with rotating shafts. The rotating shafts are used to connect the rotating frame 351, and when the gear disk 362 rotates, it drives the rotating frame 351 to rotate. Of course, the first rotating component 360 and the second rotating component 361 can also be in the form of a belt drive structure or a dialing turntable structure.

[0069] Combined with Figure 1 , the first rotating component 360 and the second rotating component 361 are spaced apart along the third direction. The first rotating component 360 and the second rotating component 361 are used to selectively drive the rotating feeding mechanism 350 in a transmission connection to drive the rotating feeding mechanism 350 to rotate relative to the third transfer mechanism 340. Among them, the rotating direction of the first rotating component 360 driving the rotating feeding mechanism 350 to rotate is opposite to the rotating direction of the second rotating component 361 driving the rotating feeding mechanism 350 to rotate. In this way, the first rotating component 360 and the second rotating component 361 are used to drive the rotating feeding mechanism 350 to rotate in opposite rotating directions, so as to transfer the cage 400 into the coating box docked with different discharge ports 220, reduce the overall volume occupied by the vacuum transfer box, and make the structure more compact.

[0070] Combined with Figure 1In this embodiment, the outside of the transfer box 200 has drive motors corresponding to the first drive mechanism 370, the second drive mechanism 371, the third drive mechanism 372 and the fourth drive mechanism 373, and the first drive mechanism 370, the second drive mechanism 371, the third drive mechanism 372 and the fourth drive mechanism 373 are all connected to the corresponding drive motors through magnetic fluid sealing transmission parts. In other words, the outside of the transfer box 200 has a first motor 380, a second motor 381, a third motor 382 and a fourth motor 384, and the first motor 380, the second motor 381, the third motor 382 and the fourth motor 384 are connected to the first drive mechanism 370, the second drive mechanism 371, the third drive mechanism 372 and the fourth drive mechanism 373 through fluid sealing transmission parts. In this way, all motors transmit power to each drive mechanism inside the transfer box 200 through magnetic fluid to ensure that the vacuum environment inside the transfer box 200 is not affected.

[0071] Since the rotating mechanism includes the first rotating assembly 360 and the second rotating assembly 361 , there are two fourth motors 384 accordingly, one fourth motor 384 is transmission-connected to the first rotating assembly 360 , and the other fourth motor 384 is transmission-connected to the second rotating assembly 361 .

[0072] In this embodiment, the first driving mechanism 370 can be a screw transmission mechanism, which includes a first nut seat and a first screw that are threaded together. The length direction of the first screw is along the first direction. The first nut seat is fixed to the first frame 321 of the first transfer mechanism 320, and the first screw is connected to the first motor 380. In this way, when the first motor 380 is working, the torsional driving force provided by the first motor 380 causes the first screw to rotate. Since the first nut seat is fixed to the first frame 321, the first screw and the first nut seat generate spiral motion, which converts the torsional driving force into a linear driving force, so that the first nut seat drives the first frame 321 to move along the first direction.

[0073] Among them, the first motor 380 is installed on the side wall of the vacuum box, and the axial direction of the first motor 380 is perpendicular to the first direction, so the direction of the torsional driving force needs to be changed. At this time, the transmission connection between the first motor 380 and the first screw can be achieved through a bevel gear.

[0074] Specifically, a gear shaft is arranged on the frame 310, and the length extension direction of the gear shaft is perpendicular to the first direction. The gear shaft is provided with a first bevel gear, and a second bevel gear is arranged on the first screw. The first bevel gear and the second bevel gear are meshed, so that when the first motor 380 is working, the gear shaft can be driven to rotate, and then the first screw is driven to rotate through the meshing of the two bevel gears.

[0075] Of course, in some embodiments, the first driving mechanism 370 can also be a rack and pinion mechanism or a belt drive or other transmission methods. Taking the rack and pinion mechanism as an example, the extending direction of the rack is along the first direction, and it is fixed to the first frame 321, while the pinion is connected to the first motor 380. Thus, when the first motor 380 operates, the first transfer mechanism 320 moves in the first direction.

[0076] In this embodiment, the second driving mechanism 371 can also be a lead screw transmission mechanism, which includes a second lead screw and a second lead nut in threaded engagement. The length direction of the second lead screw is along the second direction, the second lead nut is connected to the second guide member 335, and the second lead screw is in transmission connection with the second motor 381. In this way, when the second motor 381 operates, the torsional driving force provided by the second motor 381 causes the second lead screw to rotate. Since the second lead nut is fixed to the second frame 331, the second lead screw and the second lead nut generate a helical motion, converting the torsional driving force into a linear driving force, causing the second lead nut to drive the second frame 331 to move along the second direction.

[0077] Of course, in some embodiments, the second driving mechanism 371 can also be a rack and pinion mechanism or a belt drive mechanism or other transmission methods.

[0078] In this embodiment, the third driving mechanism 372 can be a belt drive mechanism, which includes a driving roller, a driven roller, and a conveyor belt. The driving roller and the driven roller are both rotatably arranged on the frame, and they are opposite to each other in the third direction. The rotation axes of the driving roller and the driven roller are both along the second direction. The conveyor belt is wound around the driving roller and the driven roller, and the transmission frame 342 of the third transfer mechanism 340 is connected to the conveyor belt. The driving roller is connected to the third motor 382. In this way, when the third motor 382 operates, the driven roller can follow the movement through the friction force between the driving roller and the conveyor belt, realizing the movement of the transmission frame 342 along the third direction.

[0079] It can be understood that, in some embodiments, the third driving mechanism 372 can also be a rack and pinion mechanism or a lead screw transmission mechanism or other transmission methods.

[0080] In this embodiment, the fourth driving mechanism 373 can be a gear transmission mechanism, and the number of them is two. They are both fixed on the top wall of the transfer box body 200, located inside the transfer box body 200, and are respectively in transmission connection with the first rotating assembly 360 and the second rotating assembly 361. Specifically, the fourth driving mechanism 373 is in external meshing with the gear disk 362. Thus, when the fourth motor 384 operates, the gear disk 362 is driven to rotate through the fourth driving mechanism 373, thereby driving the rotating frame 351 to rotate when the rotating shaft of the gear disk 362 of the first rotating assembly 360 or the second rotating assembly 361 is connected to the rotating frame 351.

[0081] In this embodiment, an example of the working principle of the vacuum transfer box is as follows:

[0082] When the transfer device 300 needs to pick up materials, rotate the feeding mechanism 350 so that it is directly opposite to the feeding port 210 of the transfer box body 200. Then, drive the cage tray 352 to descend to the low material-picking position by the first transfer mechanism 320. The second transfer mechanism 330 drives the cage tray 352 to move forward towards the feeding port 210 to the material-picking position, so that the cage tray 352 forks the cage 400. Then, the first transfer mechanism 320 drives the cage tray 352 to move upward to lift the cage 400 to the high material-picking position, and the second transfer mechanism 330 drives the cage tray 352 to retreat to the original middle position.

[0083] If it is necessary to feed the coating box through the discharge port 220 on the right side, the third transfer mechanism 340 drives the cage tray 352 to move to the left until the rotating frame 351 is directly opposite to the first rotating assembly 360. Then, drive the rotating frame 351 to move upward by the first transfer mechanism 320 so that the rotating frame 351 is connected to the first rotating assembly 360. Then, the first rotating assembly 360 drives the rotating frame 351 to rotate clockwise to the right by 90°, so that the cage tray 352 is directly opposite to the right discharge port 220. Then, drive the rotating frame 351 to descend by the first transfer mechanism 320 so that the rotating frame 351 is disengaged from the first rotating assembly 360. After that, the third transfer mechanism 340 drives the cage tray 352 to move to the right until the cage tray 352 enters the to-be-loaded position in the coating box. The first transfer mechanism 320 drives the cage tray 352 to move downward so that the cage tray 352 is disengaged from the cage 400. Finally, the third transfer mechanism 340 drives the rotating feeding mechanism 350 back into the transfer box body 200, and thus an operation of picking up and placing the cage 400 is completed.

[0084] As for the operation process of feeding the coating box through the discharge port 220 on the left side, it is basically the same as the above process. It should be noted that at this time, the rotating frame 351 is connected to the second rotating assembly 361 to drive the rotating frame 351 to rotate counterclockwise to the left by 90°.

[0085] In addition, it should also be pointed out that although the transfer device 300 in this embodiment is applied to the transfer of coating parts for vacuum coating in the above content, it does not mean that the transfer device 300 can only be used for the transfer of coating part shelves. It should be understood that the transfer device 300 can also be used in other industries that require the transfer of goods.

[0086] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum transfer box, characterized in that, It includes a frame, a transfer box body and a transfer device; The transfer box body is arranged on the frame. The transfer box body has a transfer chamber, a feed inlet and at least two discharge outlets communicated with the transfer chamber. The transfer device is located in the transfer chamber; Wherein, the transfer device includes a frame, a first transfer mechanism, a second transfer mechanism, a third transfer mechanism and a rotating feeding mechanism; The first transfer mechanism is slidably connected to the frame and can move relative to the frame along a first direction; The second transfer mechanism is slidably connected to the first transfer mechanism and can move relative to the first transfer mechanism along a second direction; The third transfer mechanism is slidably connected to the second transfer mechanism and can move relative to the second transfer mechanism along a third direction; The rotating feeding mechanism is rotatably arranged on the third transfer mechanism, and the rotation axis of the rotating feeding mechanism is parallel to the first direction. The rotating feeding mechanism can clamp a cargo cage; The first direction, the second direction and the third direction are perpendicular to each other.

2. The vacuum transfer box according to claim 1, wherein A first guiding assembly is connected between the frame and the second transfer mechanism. The first guiding assembly can move relative to the frame along the second direction, and the first guiding assembly can expand and contract in the first direction.

3. The vacuum transfer box according to claim 2, wherein The first guiding assembly includes a first guiding member and a second guiding member which are slidably connected. The first guiding member and the second guiding member can produce relative sliding along the first direction; The first guiding member is connected to the second transfer mechanism; The second guiding member is connected to the frame and can move along the second direction.

4. The vacuum transfer box according to claim 3, characterized in that, The frame is provided with a second driving mechanism. The second driving mechanism is connected to the second guiding member and is used to drive the second guiding member to move along the second direction.

5. The vacuum transfer box according to claim 1, wherein, A second guiding assembly is connected between the frame and the third transfer mechanism. The second guiding assembly can move relative to the frame along the third direction, and the second guiding assembly can expand and contract along the first direction.

6. The vacuum transfer box according to claim 5, characterized in that, The second guiding assembly includes a third guiding member and a fourth guiding member. The third guiding member and the fourth guiding member can produce relative sliding along the first direction; The third guiding member is connected to the third transfer mechanism; The fourth guiding member is connected to the frame and can move along the second direction.

7. The vacuum transfer box according to claim 6, wherein A transmission frame body is slidably connected to the frame. The transmission frame body is slidably connected to the fourth guiding member. The transmission frame body can move relative to the frame along the third direction, and the fourth guiding member can move relative to the transmission frame body along the second direction.

8. The vacuum transfer box according to claim 1, wherein The transfer device includes a rotating mechanism. The rotating mechanism includes a first rotating component and a second rotating component; The first rotating component and the second rotating component are distributed at intervals along the third direction; The first rotating component and the second rotating component are used to selectively drive the rotating feeding mechanism to rotate relative to the third transfer mechanism by being in transmission connection with the rotating feeding mechanism; Among them, the rotation direction in which the first rotation assembly drives the rotating feeding mechanism to rotate is opposite to the rotation direction in which the second rotation assembly drives the rotating feeding mechanism to rotate.

9. The vacuum transfer box according to claim 8, characterized in that, The rotating feeding mechanism includes a rotating frame and a cage tray; The length direction of the rotating frame is along the first direction, and one end of the rotating frame is rotatably connected to the third transfer mechanism; The cage tray is connected to the rotating frame; the rotating mechanism is used to connect to one end of the rotating frame away from the third transfer mechanism to drive the rotating frame to rotate relative to the third transfer mechanism.

10. The vacuum transfer box according to claim 1, characterized in that, The frame is provided with a first slide rail extending along the first direction, and the first transfer mechanism is slidably connected to the first slide rail; and / or The first transfer mechanism includes a first frame body and a first track provided on the first frame body. The first frame body is slidably connected to the frame and can move along the first direction; the first track extends along the second direction, and the second transfer mechanism is slidably connected to the first track; and / or The second transfer mechanism includes a second frame body and a second track provided on the second frame body; the second frame body is slidably connected to the first transfer mechanism and can move along the second direction; the second track extends along the third direction, and the third transfer mechanism is slidably connected to the second track; and / or A transmission frame body that can move along the third direction is slidably connected to the frame. The transmission frame body is slidably connected to the third transfer mechanism, and the transmission frame body and the third transfer mechanism can generate relative sliding along the first direction; and / or The transfer device further includes a rotating mechanism, a first driving mechanism, a second driving mechanism, a third driving mechanism, and a fourth driving mechanism; the first driving mechanism is used to drive the first transfer mechanism to move; the second driving mechanism is used to drive the second transfer mechanism to move; the third driving mechanism is used to drive the third transfer mechanism to move; the fourth driving mechanism is used to drive the rotating mechanism to rotate, so as to drive the rotating feeding mechanism to rotate through the rotating mechanism.

11. A vacuum coating device, characterized in that, It includes a coating box and the vacuum transfer box according to any one of claims 1-10; wherein, each of the discharge ports corresponds to one of the coating boxes.

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