Support plate return device and solar cell production system

Abstract

The utility model provides a carrier plate returning device and a solar cell production system, the carrier plate returning device is arranged on supporting legs of a PVD equipment cavity, the carrier plate returning device comprises a pair of transmission assemblies, the transmission assemblies are oppositely arranged, and the transmission assemblies are correspondingly arranged on the opposite sides of the supporting legs; the carrier plate is placed on the transmission assembly, and the carrier plate can move along with transmission of the transmission assembly. According to the carrier plate returning device, the carrier plate returning device is arranged to be of a split structure and fixed to the supporting legs, the transmission position of main equipment serves as the reference, the positioning precision is guaranteed by machining, the stability consistent with the transmission position of the main equipment can be achieved, the requirement of the returning device is greatly met, debugging does not need to be conducted in a narrow cavity, and the cost is reduced. The assembling and adjusting efficiency of the equipment is greatly improved, and meanwhile the service life of the transmission assembly and the carrier plate is prolonged; moreover, different from an integrated return mechanism, a pair of transmission assemblies can be connected without a structural member, and the structure is more compact.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell preparation, in particular to a carrier plate return device and a solar cell production system. Background Art

[0002] PVD is a key device in the heterojunction photovoltaic cell production line. Using magnetron sputtering technology, the surface atoms on the cathode target are bombarded and separated and deposited on the silicon wafer to form a highly transparent conductive film. This device adopts an in-line cavity structure, and the silicon wafers are carried by carrier plates and enter each functional cavity in sequence to complete film coating. Combined with an automatic loading and unloading machine, the empty carrier plates are returned to the starting point through a return mechanism, and continuous production is realized in this way.

[0003] The existing return mechanism is an independent module, made into multiple sections, equipped with casters and feet placed on the bottom of the cavity, and then spliced together.

[0004] However, due to the very limited space at the bottom of the cavity and the working condition that the length of the return device is basically more than dozens of meters, this structure is very inconvenient for debugging the return height and front-back consistency, and it is also very difficult to ensure the accuracy. During the return process, phenomena such as carrier plate bumping and impact are likely to occur, accelerating the wear of transmission parts, causing the fastening bolts of the carrier plate to loosen, and reducing the service life of the carrier plate; moreover, when maintaining other components in the cavity, due to space limitations, the return device must be removed from the bottom of the cavity before operation, and it is extremely inconvenient to move it back and re-debug the transmission smoothness. Content of the Utility Model

[0005] The utility model provides a carrier plate return device and a solar cell production system to solve the defect that it is very inconvenient to debug the return height and front-back consistency in the prior art and it is also very difficult to ensure the accuracy, and realizes fixing the outgoing component on the cavity leg. Based on the transmission position of the PVD device, the positioning accuracy is guaranteed by machining, and the smoothness consistent with the main device transmission can be achieved, meeting the requirements of the return device.

[0006] The utility model provides a carrier plate return device for a PVD device. The PVD device has a cavity, and a pair of legs are provided at the bottom of the cavity, including:

[0007] A pair of transmission components, which are oppositely arranged, and the transmission components are correspondingly arranged on the opposite sides of the legs;

[0008] A carrier plate is placed on the transmission components, and the carrier plate can move along with the transmission of the transmission components.

[0009] According to a carrier plate return device provided by the utility model, a dust-proof device is arranged on the transmission components; and the dust-proof device covers the outside of the carrier plate.

[0010] According to a carrier board return device provided by the present utility model, the dust-proof device includes:

[0011] An upper dust-proof cover and a lower dust-proof cover, which are arranged on the transmission assembly;

[0012] And the upper dust-proof cover and the lower dust-proof cover are respectively located on the top side and the bottom side of the carrier board.

[0013] According to a carrier board return device provided by the present utility model, at least part of the upper dust-proof cover is provided with a transparent viewing window.

[0014] According to a carrier board return device provided by the present utility model, it further includes: a dust removal device, which is arranged at one end of the transmission assembly, and the dust removal device is used for adsorbing dust.

[0015] According to a carrier board return device provided by the present utility model, the dust removal device includes:

[0016] A negative pressure machine, which is used for providing negative pressure power;

[0017] A dust suction pipe, one end of which is connected to the negative pressure machine;

[0018] An upper suction nozzle, which is located on the top side of the carrier board;

[0019] A lower suction nozzle, which is located on the bottom side of the carrier board;

[0020] And both the upper suction nozzle and the lower suction nozzle span between a pair of the transmission assemblies.

[0021] According to a carrier board return device provided by the present utility model, the transmission assembly includes:

[0022] A mounting plate, which is detachably arranged inside the legs of the cavity;

[0023] A driving mechanism, which is arranged on the mounting plate;

[0024] A transmission belt, which is in transmission connection with the driving mechanism;

[0025] A plurality of transmission wheels, which rotate along with the movement of the transmission belt; and the top of the transmission wheel bears the carrier board.

[0026] According to a carrier board return device provided by the present utility model, the transmission assembly further includes:

[0027] Guide wheels, there are a plurality of them, and they are evenly arranged on the mounting plate, and the guide wheels are used for guiding the carrier board.

[0028] According to a carrier board return device provided by the present utility model, the transmission assembly further includes:

[0029] A sensor is provided at the end of the mounting plate, and the sensor is used to identify the carrier plate.

[0030] A protective cover is provided on the mounting plate, and the protective cover covers the outside of the conveyor belt, and the guide wheel and the driving wheel extend outside the protective cover.

[0031] The present utility model further provides a solar cell production system, including the carrier plate return device described in any one of the above.

[0032] The carrier plate return device provided by the present utility model is provided with a pair of oppositely arranged transmission components, and the transmission components are correspondingly arranged on the opposite sides of the legs; the carrier plate is placed on the transmission components, and the carrier plate can move with the transmission of the transmission components. The carrier plate return device is set as a split structure and fixed on the legs. Taking the transmission position of the main equipment as a reference, the positioning accuracy is guaranteed by machining, and the smoothness consistent with the transmission of the main equipment can be achieved, far meeting the requirements of the return device, without the need for further debugging in a narrow cavity, greatly improving the installation and adjustment efficiency of the equipment, and at the same time also enhancing the service life of the transmission components and the carrier plate; moreover, different from the integrated return mechanism, there is no need for a structural member to connect between the pair of transmission components, and the structure is more compact. Description of the Drawings

[0033] In order to more clearly illustrate the technical solutions in the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0034] Figure 1 It is a side view of the installation structure of the carrier plate return device provided by an embodiment of the present utility model.

[0035] Figure 2 It is a front view of the installation structure of the carrier plate return device provided by an embodiment of the present utility model.

[0036] Figure 3 It is a schematic diagram of the connection structure between the carrier plate return device and the legs provided by an embodiment of the present utility model.

[0037] Figure 4 It is a schematic diagram of the structure of the carrier plate return device provided by an embodiment of the present utility model.

[0038] Figure 5 It is a schematic diagram of the structure of the dust removal device in the carrier plate return device provided by an embodiment of the present utility model.

[0039] Figure 6It is a schematic structural view of the upper suction nozzle or the lower suction nozzle in the dust removal device provided by an embodiment of the present utility model.

[0040] Figure 7 It is a schematic half-sectional structural view of the transmission assembly provided by an embodiment of the present utility model.

[0041] Reference numerals: 10, cavity; 20, support leg; 30, carrier plate; 40, positioning pin; 1, transmission assembly; 2, dust-proof device; 3, dust removal device; 11, mounting plate; 12, drive mechanism; 13, transmission belt; 14, transmission wheel; 15, guide wheel; 16, sensor; 17, protective cover; 21, upper dust-proof cover; 22, lower dust-proof cover; 31, negative pressure machine; 32, suction pipe; 33, upper suction nozzle; 34, lower suction nozzle. Detailed implementation manners

[0042] In order to make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions in the present utility model will be clearly and completely described below with reference to the accompanying drawings in the present utility model. Obviously, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present utility model without making creative efforts shall fall within the protection scope of the present utility model.

[0043] The following combines Figures 1-7 to describe the embodiments of the present utility model.

[0044] As Figure 1 , Figure 2 and Figure 3 shown, an embodiment of the first aspect of the present utility model provides a carrier plate return device for a PVD device. The PVD device has a cavity 10, and a pair of support legs 20 are provided at the bottom of the cavity 10. The support legs 20 are connected to the cavity 10 through positioning pins 40. The carrier plate return device includes a transmission assembly 1 and a carrier plate 30.

[0045] There are a pair of transmission assemblies 1, which are arranged oppositely, and the transmission assemblies 1 are correspondingly arranged on the opposite sides of the support legs 20; the carrier plate return device is set as a split structure and is directly fixed on the support legs 20. The rotary assembly surface on the support legs 20 is guaranteed by machining based on the cavity reference, which is easy to achieve, and the positioning tolerance far meets the return accuracy requirements, without the need to adjust in the narrow cavity space, greatly improving the assembly and adjustment efficiency, and at the same time improving the service life of the transmission parts and the carrier plate.

[0046] Moreover, different from the integrated feedback mechanism in the prior art, there is no need for structural components to connect the middle of a pair of transmission components 1, and the structure is more compact, thus creating a maintenance space at the bottom of the cavity 10. In addition, the rotary device does not require parts such as foot cups and casters, avoiding the interference problem with the legs of the cathode trolley, and being safer and more convenient for the process chamber pump cover and cathode hoisting operations.

[0047] The carrier plate 30 is placed on the transmission component 1, and the carrier plate 30 can move along with the transmission of the transmission component 1. The carrier plate 30 is used to carry silicon wafers.

[0048] The carrier plate feedback device provided by the present utility model realizes the cyclic movement of the carrier plate in the PVD equipment cavity through the relatively arranged transmission components 1 and the matching carrier plate structure, and has the advantages of simple structure, convenient operation, high efficiency and stability.

[0049] In a feasible embodiment of the present utility model, a dust-proof device 2 is further included. The dust-proof device 2 is arranged on the transmission component 1; and the dust-proof device 2 covers the outside of the carrier plate 30.

[0050] As Figure 4 shown, more specifically, the dust-proof device 2 includes an upper dust-proof cover 21 and a lower dust-proof cover 22, both of which are placed on the transmission component 1; and the upper dust-proof cover 21 and the lower dust-proof cover 22 are respectively located on the top side and the bottom side of the carrier plate 30. The upper dust-proof cover 21 and the lower dust-proof cover 22 adopt a quick-release structure. For the maintenance of the bottom components of the cavity, removing the lower dust-proof cover 22 can create a bottom space of the cavity, which is simple and convenient.

[0051] In a feasible embodiment of the present utility model, at least part of the upper dust-proof cover 21 is provided with a transparent viewing window, which can facilitate the observation of the running state of the carrier plate. At the same time, the upper dust-proof cover 21 and the lower dust-proof cover 22 are also installed with a handle structure, which is convenient for the quick removal of the upper dust-proof cover 21 and the lower dust-proof cover 22.

[0052] It should be noted that the upper dust-proof cover 21 and the lower dust-proof cover 22 can be placed across between a pair of transmission components 1, and the specific structural settings can be set according to requirements and are not specifically limited here.

[0053] Referring again to Figure 1 and Figure 3 shown, in a feasible embodiment of the present utility model, a dust removal device 3 is further included. The dust removal device 3 is arranged at one end of the transmission component 1, and the dust removal device 3 is used for adsorbing dust. The dust removal device 3 can include components such as a dust suction port, a filter and a dust suction motor, sucking dust through the dust suction port and discharging clean gas after filtering through the filter.

[0054] As Figure 5 and Figure 6As shown in the figure, in a feasible embodiment of the present utility model, the dust removal device 3 includes a negative pressure machine 31, a dust suction pipe 32, an upper suction nozzle 33 and a lower suction nozzle 34. The negative pressure machine 31 is used to provide negative pressure power; one end of the dust suction pipe 32 is connected to the negative pressure machine 31; the other end is communicated with the upper suction nozzle 33 and the lower suction nozzle 34. The upper suction nozzle 33 is located on the top side of the carrier plate 30, spanning between a pair of transmission components 1, and is used to adsorb dust and impurities on the top side of the carrier plate. The lower suction nozzle 34 is located on the bottom side of the carrier plate 30, spanning between a pair of transmission components 1, and is used to adsorb dust and impurities on the bottom side of the carrier plate 30. Compared with the prior art in which positive pressure blowing or single-sided negative pressure suction is used for dust removal, blowing cannot eliminate dust. The present utility model uses double-sided suction, which has a better dust removal effect on the hollow carrier plate with double-sided coating.

[0055] Among them, the dust suction pipe 32 usually uses a flexible pipe. The air outlets of the upper suction nozzle 33 and the lower suction nozzle 34 are continuous and the width completely covers the carrier plate, which has a better dust removal effect on the hollow part.

[0056] In addition, the negative pressure machine 31 can use a vacuum cleaner with high negative pressure and low air volume, or a dust collector with high air volume and low negative pressure. With different parameters, the cross-sectional area and structure of the upper suction nozzle 33 and the lower suction nozzle 34 are also different, and can be specifically set according to actual needs. Moreover, it can also be set in a way that single-sided blowing and single-sided suction are carried out synchronously, and the dust removal effect is better.

[0057] As Figure 7 shown, in a feasible embodiment of the present utility model, the transmission component 1 includes a mounting plate 11, a driving mechanism 12, a transmission belt 13, a transmission wheel 14, and a guide wheel 15. The mounting plate 11 is detachably arranged inside the leg 20 of the cavity 10; the driving mechanism 12 is arranged on the mounting plate 11, and the transmission belt 13 is in transmission connection with the driving mechanism 12; a plurality of transmission wheels 14 rotate with the movement of the transmission belt 13; and the top of the transmission wheel 14 bears the carrier plate 30. There are multiple guide wheels 15, which are evenly arranged on the mounting plate 11, and the guide wheels 15 are used to guide the carrier plate 30. The setting of the guide wheels 15 can be finely adjusted to absorb the tolerance fluctuation of the carrier plate 30 in the width dimension. The transmission wheels 14 and the guide wheels 15 are arranged on the mounting plate 11 at a certain distance, and the transmission wheels 14 are connected to each other through the transmission belt and are uniformly driven by the driving mechanism 12 to realize the transmission of the carrier plate 30.

[0058] In a feasible embodiment of the present utility model, the transmission component 1 further includes a sensor 16, which is arranged at the end of the mounting plate 11, and the sensor 16 is used to identify the carrier plate. When the sensor 16 senses a carrier plate, the dust removal device 3 is turned on to remove dust from the carrier plate 30.

[0059] Furthermore, the transmission assembly 1 may further include a protective cover 17, which is disposed on the mounting plate 11, and the protective cover 17 covers the outside of the transmission belt 13, and the guide wheels 15 and the transmission wheels 14 extend outside the protective cover 17. The transmission belt 13 is covered by the protective cover 17 to avoid mechanical damage. In addition, when the upper dust cover 21 and the lower dust cover 22 are removed for debugging, the transmission belt 13 is still covered by the protective cover 17, which can prevent mechanical damage caused by abnormal transmission during debugging and maintenance.

[0060] The working principle of the carrier plate return device provided by the present invention is as follows: The return device is located below the cavity 10 and is installed on the legs 20 of each cavity 10, and combines with the PVD equipment and the loading and unloading automation equipment to realize the continuous reciprocating transmission of the carrier plate 30. When the carrier plate 30 is loaded with wafers on the loading automation equipment, it enters the main equipment cavity for continuous coating production. After completion, the carrier plate is transferred from the automation equipment end to the unloading automation equipment to complete the wafer unloading. The empty carrier plate descends through the unloading automation elevator and then enters the return system. The carrier plate 30 is sequentially returned from the end of the equipment to the front end of the equipment through the transmission assembly 1. The dust removal device 3 is located at the outlet of the transmission assembly 1. When the sensor 16 senses the carrier plate 30, the negative pressure machine 31 is automatically triggered to start suction to clean the carrier plate 30. The carrier plate 30 that has been cleaned and transmitted out of the return device then flows into the loading automation equipment and is lifted by the elevator to re-load wafers.

[0061] As described above, the return device is precisely processed and positioned and installed on the legs 20. The transmission systems of each return cavity section and each cavity of the main equipment are aligned. The transmission stability of the return system can be ensured after the transmission debugging of the PVD equipment is in place, and no further debugging is required. When maintenance is required at the bottom of the cavity, simply remove the upper dust cover 21 and the lower dust cover 22 to create space at the bottom of the cavity, which is simple and convenient.

[0062] In addition, as Figure 1 shown, the entire return device is different from an independent return mechanism, and there is no need for casters and feet at the bottom to avoid interfering with the legs of the cathode cart, which is safer and more convenient for the process chamber pump cover and cathode hoisting operations.

[0063] In the second aspect of the embodiments of the present invention, a solar cell production system is provided, including the carrier plate return device according to any one of the above embodiments.

[0064] The solar cell production system provided by the present utility model includes the carrier board return device as described above, so the structure is more compact. The carrier board return device is directly installed on the support leg 20. Based on the main equipment transmission device, the precision is achieved by machining, and the smoothness consistent with that of the main equipment transmission can be achieved, far meeting the requirements of the return system. There is no need to perform debugging in a narrow cavity, greatly improving the installation and adjustment efficiency of the equipment, and at the same time, the service life of the transmission component 1 and the carrier board 30 is also extended. Moreover, different from the integrated return mechanism, there is no need for structural parts to connect between a pair of transmission components, and the structure is also more compact.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model and are not intended to limit them. Although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments or perform equivalent replacements for some of the technical features. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A substrate return device, used for a PVD device, wherein the PVD device comprises a cavity (10), the bottom of the cavity (10) comprises a pair of legs (20), characterized in that: include: A pair of transmission assemblies (1) are arranged opposite to each other, and the transmission assemblies (1) are arranged on the opposite side of the supporting leg (20); A carrier plate (30) is placed on the transmission assembly (1), and the carrier plate (30) can move along with the transmission of the transmission assembly (1); Wherein, the transmission assembly (1) comprises: A mounting plate (11) detachably disposed on the inner side of the leg (20) of the cavity (10); A driving mechanism (12) is arranged on the mounting plate (11); A transmission belt (13) is transmission-connected to the driving mechanism (12); A plurality of transmission wheels (14) rotate along with the movement of the transmission belt (13); and the top of the transmission wheel (14) supports the carrier plate (30).

2. The carrier return device according to claim 1, characterized in that: Also includes: The dustproof device (2) is arranged on the transmission component (1); and the dustproof device (2) is covered on the outer side of the carrier plate.

3. The carrier return device according to claim 2, characterized in that: The dust prevention device (2) comprises: An upper dust cover (21) and a lower dust cover (22) are both mounted on the transmission assembly (1); Furthermore, the upper dust cover (21) and the lower dust cover (22) are respectively located on the top side and the bottom side of the carrier plate (30).

4. The carrier return device according to claim 3, characterized in that: The upper dust cover (21) is at least partially provided with a transparent viewing window.

5. The carrier return device according to claim 1, characterized in that: Also includes: A dust removal device (3), wherein the dust removal device (3) is arranged at one end of the transmission component (1), and the dust removal device (3) is used to absorb dust.

6. The carrier return device according to claim 5, characterized in that: The dust removal device (3) comprises: A negative pressure machine (31), used for providing negative pressure power; A dust suction pipe (32), one end of which is connected to the negative pressure machine (31); An upper suction nozzle (33) is located on the top side of the carrier plate; A lower suction nozzle (34) located at the bottom side of the carrier plate; Furthermore, the upper suction nozzle (33) and the lower suction nozzle (34) both span between a pair of transmission components (1).

7. The carrier return device according to claim 1, characterized in that: The transmission assembly also includes: There are a plurality of guide wheels (15) which are evenly arranged on the mounting plate (11); the guide wheels (15) are used to guide the carrier plate (30).

8. The carrier return device according to claim 7, characterized in that: The transmission assembly (1) further comprises: A sensor (16) is arranged at an end of the mounting plate (11), and the sensor (16) is used to identify the carrier plate; A protective cover (17) is arranged on the mounting plate (11), and the protective cover (17) is arranged on the outside of the transmission belt (13), and the guide wheel (15) and the transmission wheel (14) extend outside the protective cover (17).

9. A solar cell production system, characterized in that: It comprises the carrier return device as described in any one of claims 1 to 8.

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