Single crystal furnace
By setting an arc surface in the flip valve structure of the single crystal furnace to reflect light and heat, the serious heat loss of existing single crystal furnaces is solved, and effective heating and heat retention of the melted silicon in the crucible is achieved.
Patent Information
- Application Number
- CN202421711665.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-18
- Publication Date
- 2025-06-27
- Estimated Expiration
- 2034-07-18
AI Technical Summary
The structure of the existing single crystal furnace is unreasonable, which causes the heat in the crucible to be transmitted to the flip valve in the form of heat radiation and is taken away by the water-cooling system, resulting in serious heat loss.
A single crystal furnace flap valve structure is designed. The partial surface of the flip valve structure facing one side of the first furnace chamber is arranged as an arc surface, the outer peripheral edge of the arc surface extends to the first furnace chamber, and the geometric center of the arc surface extends toward the second furnace chamber, ensuring that the arc surface can effectively reflect visible light and infrared light.
Through the reflection of the arc-shaped surface, the loss of heat is effectively prevented, ensuring that the polysilicon material floating on the molten silicon surface in the crucible is effectively heated, and the loss of heat is reduced.
Smart Images
Figure CN223033502U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon manufacturing equipment, and particularly relates to a single crystal furnace. Background Art
[0002] A single crystal furnace is a device that melts polycrystalline materials such as polysilicon through a heater in an environment of inert gas (mainly nitrogen and helium), and grows dislocation-free single crystals by the Czochralski method.
[0003] A single crystal furnace usually has a main furnace chamber and a sub-furnace chamber. The sub-furnace chamber is located above the main furnace chamber, and the main furnace chamber and the sub-furnace chamber are isolated by a flap valve. However, the existing structure design of the flap valve is unreasonable, resulting in a large amount of heat in the crucible being transferred to the flap valve in the form of thermal radiation and being taken away by the water cooling system, so that the heat loss is relatively serious. Summary of the Utility Model
[0004] The main purpose of the utility model is to provide a single crystal furnace to solve the problem that the structure of the flap valve of the single crystal furnace in the prior art is unreasonable, resulting in a large amount of heat in the crucible being transferred to the flap valve in the form of thermal radiation and being taken away by the water cooling system, so that the heat loss is relatively serious.
[0005] To achieve the above purpose, the utility model provides a single crystal furnace, including a first furnace chamber, a second furnace chamber and a flap valve structure. The first furnace chamber is used for containing a crucible, the first furnace chamber has a top cover structure, and there is a communication hole at the top cover structure; the second furnace chamber is located above the first furnace chamber and is connected to the first furnace chamber, and the second furnace chamber is communicated with the first furnace chamber through the communication hole; the flap valve structure is disposed at the communication hole in an openable and closable manner to open and close the communication hole; wherein, a part of the surface of the flap valve structure facing the first furnace chamber is an arc surface, and the outer peripheral edge of the arc surface extends towards the first furnace chamber, and the geometric center of the arc surface extends towards the second furnace chamber.
[0006] Further, the arc surface is a part of a spherical surface.
[0007] Further, at least the radius R of the sphere where the arc surface is located satisfies that the reflected light is converged to the geometric center of the crucible.
[0008] Further, the surface of the flap valve structure facing the first furnace chamber includes a reflection area and an assembly area. Among them, the reflection area has an arc surface, the assembly area is annular and is located on the outer peripheral side of the reflection area, and the assembly area is used for sealing connection with the first furnace chamber.
[0009] Further, the assembly area is an annular plane.
[0010] Further, the width W of the assembly area in the radial direction of the flap valve structure satisfies: 10mm ≤ W ≤ 30mm.
[0011] Further, the reflection area is a part of a spherical surface, the assembly area is an annular plane, and the center of the sphere where the reflection area is located passes through the central axis of the assembly area.
[0012] Further, at least the arc surface has a coating.
[0013] Further, the arc surface has a silver coating.
[0014] Further, the surface of the flap valve structure facing the second furnace chamber is a plane.
[0015] Applying the technical solution of the present utility model, a flap valve structure is provided. By disposing the flap valve structure in an openable and closable manner at the communication hole for opening and closing the communication hole, in this application, a part of the surface of the flap valve structure facing the first furnace chamber is set as an arc surface. At the same time, the outer peripheral edge of the arc surface extends toward the first furnace chamber, and the geometric center of the arc surface extends toward the second furnace chamber. In this way, it is ensured that the arc surface can effectively reflect the visible light band and the light in the infrared band with strong thermal effects, which is beneficial to effectively heating the polysilicon material floating on the surface of the molten silicon in the crucible and preventing a large amount of heat loss. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The schematic diagrams in the specification forming a part of this application are used to provide a further understanding of the present utility model. The schematic embodiments and descriptions of the present utility model are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:
[0017] Figure 1 shows a schematic structural diagram of a flap valve structure of a single crystal furnace according to an optional embodiment of the present utility model;
[0018] Figure 2 shows Figure 1 the cross-sectional structural diagram of the flap valve structure in
[0019] Among them, the above-mentioned drawings include the following reference numerals:
[0020] 10. Flap valve structure; 11. Reflection area; 12. Assembly area. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0021] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and in no way limits the present utility model and its application or use. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.
[0022] In order to solve the problem that the structure of the flap valve of the single crystal furnace in the prior art is unreasonable, resulting in a large amount of heat in the crucible being transferred to the flap valve in the form of heat radiation and being taken away by the water cooling system, resulting in relatively serious heat loss, the present utility model provides a single crystal furnace.
[0023] As Figure 1 and Figure 2 shown, the single crystal furnace includes a first furnace chamber, a second furnace chamber, and a flap valve structure 10. Among them, the first furnace chamber is used to hold the crucible, the first furnace chamber has a top cover structure, and there is a communication hole at the top cover structure; the second furnace chamber is located above the first furnace chamber and is connected to the first furnace chamber, and the second furnace chamber is communicated with the first furnace chamber through the communication hole; the flap valve structure 10 is disposed at the communication hole in an openable and closable manner to open and close the communication hole; among them, a part of the surface of the flap valve structure 10 facing the first furnace chamber is an arc surface, and the outer peripheral edge of the arc surface extends toward the first furnace chamber, and the geometric center of the arc surface extends toward the second furnace chamber.
[0024] Applying the technical solution of the present utility model, a flap valve structure 10 is provided. By disposing the flap valve structure 10 at the communication hole in an openable and closable manner to open and close the communication hole, in this application, a part of the surface of the flap valve structure 10 facing the first furnace chamber is set as an arc surface, and at the same time, the outer peripheral edge of the arc surface extends toward the first furnace chamber, and the geometric center of the arc surface extends toward the second furnace chamber. In this way, it is ensured that the arc surface can effectively reflect the light in the visible light band and the infrared band with strong thermal effects, which is beneficial to effectively heating the polysilicon material floating on the surface of the molten silicon in the crucible and preventing a large amount of heat loss.
[0025] It should be noted that in this application, the arc surface is a part of a spherical surface. In this way, while ensuring the radiation uniformity of the light reflected by the arc surface, it can also ensure the convenience of processing the arc surface.
[0026] It should be noted that in this application, at least the radius R of the sphere where the arc surface is located satisfies that the reflected light is converged to the geometric center of the crucible. In this way, it is ensured that the heat reflected by the arc surface can be concentrated in the crucible as much as possible.
[0027] As shown in Figure 1 and Figure 2 The surface of the flap valve structure 10 facing the first furnace chamber includes a reflection area 11 and an assembly area 12. Among them, the reflection area 11 has an arc surface, and the assembly area 12 is annular and located on the outer peripheral side of the reflection area 11. The assembly area 12 is used for sealing connection with the first furnace chamber. In this way, while ensuring the installation reliability of the flap valve structure 10, it can also ensure the sealing reliability of the first furnace chamber and the reflection reliability of the reflection area 11.
[0028] As shown in Figure 1 and Figure 2 The assembly area 12 is an annular plane. In this way, the sealing reliability between the assembly area 12 and the first furnace chamber is ensured.
[0029] It should be noted that in this application, at least one circle of sealing rings is provided between the assembly area 12 and the first furnace chamber.
[0030] It should be noted that in this application, in order to ensure that the reflection area 11 has a sufficiently large area as much as possible, and at the same time ensure the sealing reliability between the assembly area 12 and the first furnace chamber, optionally, the width W of the assembly area 12 in the radial direction of the flap valve structure 10 satisfies: 10mm ≤ W ≤ 30mm.
[0031] Preferably, the width W of the assembly area 12 in the radial direction of the flap valve structure 10 is 15mm.
[0032] It should be noted that in this application, considering that the single crystal furnace itself belongs to a columnar structure, the reflection area 11 is a part of a spherical surface, the assembly area 12 is an annular plane, and the center of the sphere where the reflection area 11 is located passes through the central axis of the assembly area 12. In this way, it is ensured that the light reflected by the reflection area 11 can be concentrated into the crucible as much as possible.
[0033] It should be noted that in this application, at least the arc surface has a coating.
[0034] Optionally, the arc surface has a silver coating. In this way, it is ensured that the arc surface can effectively reflect the light in the visible light band and the infrared band with strong thermal effects, which is beneficial to effectively heating the polysilicon material floating on the surface of the molten silicon in the crucible and preventing a large amount of heat loss.
[0035] It should be noted that in this application, considering that the crucible is located in the first furnace chamber, then the surface of the flap valve structure 10 facing the second furnace chamber does not need to be provided with an arc surface. As shown in Figure 2 The surface of the flap valve structure 10 facing the second furnace chamber is a plane. In this way, the processing convenience of the flap valve structure 10 is ensured.
[0036] It should be noted that the terms used herein are for the purpose of describing particular embodiments only and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly dictates otherwise, the singular forms are also intended to include the plural forms. In addition, it should be understood that when the terms "comprises" and / or "comprising" are used in this specification, they specify the presence of the stated features, steps, operations, devices, components, and / or combinations thereof.
[0037] Unless otherwise specifically stated, the relative arrangements of the components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for the sake of convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the authorized specification. In all the examples shown and discussed herein, any specific values should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.
[0038] For the sake of convenience of description, spatial relative terms such as "above", "over", "on the upper surface", "above", etc. may be used herein to describe the spatial positional relationship of one device or feature to other devices or features as shown in the drawings. It should be understood that the spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the drawings of the device. For example, if the device in the drawing is inverted, the device described as "above" or "over" other devices or structures will then be positioned "below" or "beneath" the other devices or structures. Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations of the spatial relative descriptions used herein will be made.
[0039] It should be noted that the terms used herein are for the purpose of describing particular embodiments only and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly dictates otherwise, the singular forms are also intended to include the plural forms. In addition, it should be understood that when the terms "comprises" and / or "comprising" are used in this specification, they specify the presence of the stated features, steps, operations, devices, components, and / or combinations thereof.
[0040] It should be noted that the terms "first", "second", etc. in the description, claims and above-mentioned drawings of this application are used to distinguish similar objects, and do not necessarily describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application described here can be implemented in an order other than those illustrated or described here.
[0041] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, the present utility model can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.
Claims
1. A single crystal furnace, characterized in that: include: A first furnace chamber, wherein the first furnace chamber is used to hold the crucible, and the first furnace chamber has a top cover structure, and the top cover structure has a communicating hole; a second furnace chamber, the second furnace chamber being located above the first furnace chamber and connected to the first furnace chamber, and the second furnace chamber being connected to the first furnace chamber through the connecting hole; A flap valve structure (10), the flap valve structure (10) being openably and closably arranged at the communicating hole to open and close the communicating hole; Wherein, a portion of the surface of the flap valve structure (10) facing the first furnace chamber is an arc-shaped surface, and the outer periphery of the arc-shaped surface extends toward the first furnace chamber, and the geometric center of the arc-shaped surface extends toward the second furnace chamber.
2. The single crystal furnace according to claim 1, characterized in that: The arc surface is a part of a spherical surface.
3. The single crystal furnace according to claim 2, characterized in that: At least the radius R of the sphere where the arc-shaped surface is located satisfies the requirement of converging the reflected light to the geometric center of the crucible.
4. The single crystal furnace according to claim 1, characterized in that: The surface of the flap valve structure (10) facing the first furnace chamber includes a reflection area (11) and an assembly area (12), wherein the reflection area (11) has the arc surface, the assembly area (12) is annular and located on the outer peripheral side of the reflection area (11), and the assembly area (12) is used for sealing connection with the first furnace chamber.
5. The single crystal furnace according to claim 4, characterized in that: The assembly area (12) is an annular plane.
6. The single crystal furnace according to claim 4, characterized in that: A width W of the assembly area (12) in the radial direction of the flap valve structure (10) satisfies: 10 mm ≤ W ≤ 30 mm.
7. The single crystal furnace according to claim 4, characterized in that: The reflection area (11) is a part of a spherical surface, the assembly area (12) is an annular plane, and the center of the sphere where the reflection area (11) is located passes through the central axis of the assembly area (12).
8. The single crystal furnace according to any one of claims 1 to 7, characterized in that: At least the arc-shaped surface has a coating.
9. The single crystal furnace according to claim 8, characterized in that: The arc surface has a silver coating.
10. The single crystal furnace according to any one of claims 1 to 7, characterized in that: The surface of the flap valve structure (10) facing the second furnace chamber is a plane.