Fixing and adjusting device applied to molecular pump

Abstract

The utility model discloses a fixing and adjusting device applied to a molecular pump, which comprises a buffer gasket assembly, a support assembly connected to the bottom of the buffer gasket assembly, and a plurality of adjusting locking screw assemblies movably connected to the support assembly, the first connecting piece is used for fixedly connecting the buffer gasket assembly and the bracket assembly to the molecular pump; the lower ends of the adjusting locking screw assemblies are jointly connected to a supporting plate. According to the fixing and adjusting device applied to the molecular pump, the adjusting support assembly, the cushion gasket assembly and the supporting plate form a mechanism capable of adjusting and fixing the molecular pump, displacement and movement of the molecular pump in the high-speed operation process can be greatly reduced, the problem that the molecular pump and parts connected with the molecular pump are not welded due to vibration displacement is solved, and the service life of the molecular pump is prolonged. The service life of the pipeline is prolonged. Meanwhile, under the condition that the molecular pump is not disassembled, the fixing and adjusting device can adjust the transverse position and the vertical position of the molecular pump easily, rapidly and conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of molecular pump fixing devices for semiconductor equipment, and particularly relates to a fixing and adjusting device applied to a molecular pump. Background Art

[0002] With the continuous development of semiconductor thin film equipment, the quality requirements for thin film deposition are also getting higher and higher. In order to ensure that the deposits are evacuated as much as possible, a turbo molecular pump is usually assembled in the fore-vacuum pipeline system. When the turbo molecular pump is working normally, the internal turbine can reach a very high rotational speed (45000 rpm). At high rotational speeds, the turbo molecular pump generates vibrations, which cause the fixed position of the molecular pump to move, affecting the service life of the components fixed to it. After being used for a period of time, its position needs to be readjusted to ensure the stability of the molecular pump. Summary of the Utility Model

[0003] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a fixing and adjusting device applied to a molecular pump to solve the technical problem that the existing molecular pump is displaced due to vibration, resulting in the welding of the components connected to it being opened.

[0004] To achieve the above purpose, the utility model adopts the following technical solutions:

[0005] An embodiment of the utility model provides a fixing and adjusting device applied to a molecular pump, which includes: a buffer washer assembly, a bracket assembly connected to the bottom of the buffer washer assembly, a plurality of adjusting and locking screw assemblies movably connected to the bracket assembly, and a first connecting member for fixedly connecting the buffer washer assembly and the bracket assembly to the molecular pump; the lower ends of the plurality of adjusting and locking screw assemblies are commonly connected to a support plate.

[0006] Among them, the adjusting and locking screw assembly includes: a screw, a locking nut and an adjusting nut screwed on the screw, the screw passes through the bracket assembly, and the locking nut is located above the bracket assembly, and the adjusting nut is located below the bracket assembly.

[0007] Among them, the bracket assembly is provided with a first waist-shaped hole having the same number as the adjusting and locking screw assembly, and the screw is adjustably passed through the first waist-shaped hole.

[0008] Among them, the buffer washer assembly includes: a first half-ring washer and a second half-ring washer, the first half-ring washer and the second half-ring washer jointly enclose an annular washer, and the first half-ring washer and the second half-ring washer are both provided with a first connection hole for passing through the first connecting member.

[0009] Wherein, both the first semi-circular washer and the second semi-circular washer are washers made of Teflon material.

[0010] Wherein, the bracket assembly includes: a first semi-circular bracket and a second semi-circular bracket. The first semi-circular bracket and the second semi-circular bracket jointly enclose an annular bracket. The annular washer is attached to the top of the annular bracket. Second connection holes aligned with the first connection holes are provided on both the first semi-circular bracket and the second semi-circular bracket.

[0011] Wherein, the edges of both the first semi-circular bracket and the second semi-circular bracket are convexly provided with connecting ears on the outer side. First waist-shaped holes for passing through the adjusting and locking screw are provided on the connecting ears.

[0012] Wherein, the support plate is provided with screw connection holes having the same number as the adjusting and locking screw assemblies. The lower ends of the adjusting and locking screw assemblies are screwed to the screw connection holes.

[0013] Wherein, a bottom plate is further connected to the bottom of the support plate. The bottom plate is adjustably connected to the support plate.

[0014] Wherein, second waist-shaped holes are provided on the support plate, and threaded holes are provided on the bottom plate. The bottom plate is connected to the support plate by screws passing through the second waist-shaped holes.

[0015] The fixing and adjusting device of the present utility model applied to a molecular pump. The adjusting bracket assembly, the buffer pad washer assembly and the support plate form a mechanism for adjusting and fixing the molecular pump, which can greatly reduce the displacement and crosstalk of the molecular pump during high-speed operation, improve the problem of welding opening caused by vibration displacement between the molecular pump and its connected components, and increase the service life of the pipeline. At the same time, the fixing and adjusting device can realize the horizontal and vertical position adjustment of the molecular pump without disassembling the molecular pump, and its adjustment method is simple and convenient.

[0016] The above description is only an overview of the technical solution of the present utility model. In order to be able to understand the technical means of the present utility model more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present utility model more obvious and understandable, the following preferred embodiments are specifically described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic structural diagram of the molecular pump and the foreline pipeline system in an existing semiconductor device.

[0018] Figure 2 and Figure 3 It is a schematic structural diagram of different perspectives of the connection state between the fixing and adjusting device applied to the molecular pump of the embodiment of the present utility model and the foreline pipeline of the semiconductor device.

[0019] Figure 4 Schematic diagram of the connection structure between the fixing and adjusting device applied to the molecular pump and the molecular pump according to an embodiment of the present invention.

[0020] Figure 5 Schematic diagram of the overall structure of the fixing and adjusting device applied to the molecular pump according to an embodiment of the present invention.

[0021] Figure 6 Exploded view of the fixing and adjusting device applied to the molecular pump according to an embodiment of the present invention.

[0022] Figure 7 Schematic diagram of the partial connection state structure of the buffer washer assembly, bracket assembly and adjusting locking screw assembly of the fixing and adjusting device applied to the molecular pump according to an embodiment of the present invention.

[0023] Figure 8 is Figure 7 partial exploded view shown.

[0024] Figure 9 Schematic diagram of the molecular pump structure of the fixing and adjusting device applied to the molecular pump according to an embodiment of the present invention.

[0025] Explanation of reference numerals:

[0026] Fixing and adjusting device 100 applied to molecular pump, molecular pump and pre-stage pipeline system 200, support plate 11, bracket assembly 12, buffer washer assembly 13, adjusting locking screw assembly 14, first connecting piece 15, bottom plate 16, second connecting piece 17, molecular pump 21, angle valve 22, pre-stage pipeline 23, angle valve 24, flange 211, connection hole 212, screw connection hole 111, second waist-shaped hole 112, first half-ring bracket 121, second half-ring bracket 122, first half-ring washer 131, second half-ring washer 132, connection ear 1210, second connection hole 1211, first connection hole 1311, first waist-shaped hole 1212, screw 141, locking nut 142, adjusting nut 143, threaded hole 161. Detailed implementation manners

[0027] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific implementation manners.

[0028] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0029] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "resin", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is the orientation or positional relationship based on the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0030] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, the meaning of "a plurality" is two or more, unless otherwise specifically defined.

[0031] In the present utility model, unless otherwise clearly specified and defined, the terms "installed", "connected", "connected to", "fixed", etc. shall be understood in a broad sense. For example, it may be a connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0032] In the present utility model, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under" and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0033] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0034] As Figure 1 shown, it is an existing molecular pump and a foreline piping system 200. A turbo molecular pump is usually assembled in the foreline evacuation piping system of a semiconductor thin film deposition equipment to evacuate internal deposits. The foreline 23 is connected to the inlet of the molecular pump 21 through a pipe, and is fixed at the inlet by a caliper. A angle valve 22 is provided on the input pipe; similarly, an output pipe and an angle valve 24 provided on the output pipe are also provided at the output end of the molecular pump 21, and the molecular pump 21 itself is not provided with a support mechanism. At high rotational speeds, the turbo molecular pump generates vibrations, which cause the fixed position of the molecular pump to shift, affecting the service life of the components fixed thereto. After being used for a period of time, its position needs to be adjusted to ensure the stability of the molecular pump, and its adjustment is inconvenient and the component life is short. Therefore, based on the above requirements, this embodiment provides a fixing and adjusting device 100 applied to a molecular pump.

[0035] Please refer to Figures 2 to 9 , the fixing and adjusting device 100 applied to a molecular pump in this embodiment includes: a buffer washer assembly 13, a bracket assembly 12 connected to the bottom of the buffer washer assembly 13, a plurality of adjusting and locking screw assemblies 14 movably connected to the bracket assembly 12, and a first connecting member 15 for fixedly connecting the buffer washer assembly 13 and the bracket assembly 12 to the molecular pump 21; the lower ends of the plurality of adjusting and locking screw assemblies 14 are commonly connected to a support plate 16. The fixing and adjusting device 100 applied to a molecular pump in this embodiment can not only adjust the fixed position of the molecular pump 21 through the adjustable connection between the adjusting and locking screw assemblies 14 and the bracket assembly 12, but also fixedly support the molecular pump 21 after the adjustment is in place, thereby weakening the damage such as welding opening to the components connected thereto caused by vibrations during the operation of the molecular pump 21.

[0036] Please refer to again Figures 6 to 8, the adjusting and locking screw assembly 14 includes: a screw 141, a locking nut 142 and an adjusting nut 143 screwed onto the screw 141. The screw 141 passes through the support assembly 12, and the locking nut 142 is located above the support assembly 12, and the adjusting nut 143 is located below the support assembly 12. The support assembly 12 horizontally supports the bottom of the molecular pump 21. A plurality of adjusting and locking screw assemblies 14 are respectively connected to different positions of the support assembly 12, and the support assembly 12 is supported in the vertical direction by the adjusting nut 143. After adjusting to an appropriate height, the locking nut 142 is tightened, so that the support assembly 12 is jointly limited to the set height of the screw 141 by the locking nut 142 and the adjusting nut 143.

[0037] Wherein, the support assembly 12 is provided with first waist-shaped holes 1212 having the same number as the adjusting and locking screw assemblies 14, and the screw 141 is adjustably passed through the first waist-shaped holes 1212. The first waist-shaped holes 1212 can realize the mating of the screw 141 at different positions in the first waist-shaped holes 1212, so as to adjust the front and rear positions of the support assembly 12 in the horizontal direction, and thus adjust the front and rear positions of the molecular pump 21. Wherein, the length direction of the first waist-shaped holes 1212 is determined according to the actual adjustment direction.

[0038] The buffer washer assembly 13 includes: a first half-ring washer 131 and a second half-ring washer 132. The first half-ring washer 131 and the second half-ring washer 132 jointly enclose an annular washer. The first half-ring washer 131 and the second half-ring washer 132 are both provided with first connection holes 1311 for passing through the first connecting member 15. The buffer washer assembly 13 is composed of two first half-ring washers 131 and second half-ring washers 132 with substantially the same structure, which can simplify the assembly and disassembly.

[0039] In this embodiment, both the first half-ring washer 131 and the second half-ring washer 132 are washers made of Teflon material. In other embodiments, the first half-ring washer 131 and the second half-ring washer 132 can also be made of other materials. The function of the buffer washer assembly 13 is to buffer the vibration during the operation of the molecular pump 21, and at the same time prevent the support assembly 12 from directly contacting the molecular pump 21 and scratching it.

[0040] The bracket assembly 12 includes: a first half-ring bracket 121 and a second half-ring bracket 122. The first half-ring bracket 121 and the second half-ring bracket 122 jointly enclose an annular bracket. The annular washer is attached to the top of the annular bracket. Second connection holes 1211 aligned with the first connection holes 1311 are provided on both the first half-ring bracket 121 and the second half-ring bracket 122. Similarly, the bracket assembly 12 is composed of a first half-ring bracket 121 and a second half-ring bracket 122 with substantially the same shape, in order to simplify and facilitate the assembly and disassembly of the bracket assembly 12 and the molecular pump 21. During assembly, first attach the first half-ring washer 131 to the top surface of the first half-ring bracket 121, and then pass the first connecting member 15 through the first connection hole 1311 and the second connection hole 1211 and connect it to the connection hole 212 on the bottom flange 211 of the molecular pump 21. Similarly, the second half-ring washer 132 and the second half-ring bracket 122 are also connected to the bottom of the molecular pump 21 in the same manner as above.

[0041] In this embodiment, in order to improve the reliability between the bracket assembly 12 and the buffer washer assembly 13, at least two first connection holes 131 and second connection holes 121 are respectively provided, and a plurality of corresponding first connecting members 15 are also provided. Among them, the first connecting member 15 is a screw, specifically an internal hexagonal screw or the like can be selected, and a gasket is also passed through the screw.

[0042] As Figure 9 shown, connection ears 1210 protrude outward from the edges of both the first half-ring bracket 121 and the second half-ring bracket 122, and first waist-shaped holes 1212 for passing through the adjusting and locking screw rod assembly 14 are provided on the connection ears 1210. Specifically, the connection ears 1210 protrude outward from both ends of the first half-ring bracket 121 so as to be misaligned and avoid the adjusting and locking screw rod assembly 14 and the first half-ring washer 131.

[0043] Please refer to Figure 6 again, screw connection holes 111 with the same number as the adjusting and locking screw rod assembly 14 are provided on the support plate 11, and the lower end of the adjusting and locking screw rod assembly 14 is screwed into the screw connection holes 111. Specifically, the lower end of the screw rod 141 of the adjusting and locking screw rod assembly 14 is screwed into the screw connection holes 111. In other embodiments, the lower end of the screw rod 141 can also be fixedly connected to the support plate 11 by welding or other means.

[0044] As Figure 5 and Figure 6 shown, a bottom plate 16 is further connected to the bottom of the support plate 11, and the bottom plate 16 is adjustably connected to the support plate 11.

[0045] Specifically, a second waist-shaped hole 112 is provided on the support plate 11, and a threaded hole 161 is provided on the bottom plate 16. The bottom plate 16 is connected to the support plate 11 by screws 17 passing through the second waist-shaped hole 112. It can be understood that the support plate 11 and the bottom plate 16 can be connected by multiple screws 17 to improve its reliability. The second waist-shaped hole 112 can achieve different mating positions between the support plate 11 and the bottom plate 16, so that the position of the support plate 11 relative to the bottom plate 16 can be adjusted.

[0046] Please refer to again Figure 4 and Figure 5 , after the buffer washer assembly 13 and the bracket assembly 12 are connected, a through cavity is jointly formed in the middle. The bottom of the molecular pump 21 is inserted into the through cavity, and the flange 211 on the housing of the molecular pump 21 is supported on the buffer washer assembly 13. The first connector 15 passes through the buffer washer assembly 13 and the bracket assembly 12 at the same time and is connected to the connection hole 212 on the flange 211, so as to realize the fixed support of the molecular pump 21. The bottom plate 16 can be connected to the plate body on the semiconductor device or the support plane on the semiconductor device.

[0047] The fixing and adjusting device for the molecular pump in this embodiment, the adjusting bracket assembly, the buffer pad washer assembly and the support plate form a mechanism that can adjust and fix the molecular pump, which can greatly reduce the displacement and crosstalk of the molecular pump during high-speed operation, improve the problem of open welding caused by vibration displacement of the components connected to the molecular pump, and improve the service life of the pipeline. At the same time, the fixing and adjusting device can realize the horizontal and vertical position adjustment of the molecular pump without disassembling the molecular pump.

[0048] The above only uses the embodiment to further illustrate the technical content of the present invention, so that it is easier for readers to understand, but it does not mean that the implementation mode of the present invention is limited to this. Any technical extension or re-creation based on the present invention is protected by the present invention. The protection scope of the present invention is subject to the claims.

Claims

1. A fixing and adjusting device for a molecular pump, characterized in that: include: A buffer gasket assembly, a bracket assembly connected to the bottom of the buffer gasket assembly, a plurality of adjusting locking screw assemblies movably connected to the bracket assembly, and a first connecting piece that fixes the buffer gasket assembly and the bracket assembly to the molecular pump; the lower ends of the plurality of adjusting locking screw assemblies are commonly connected to a support plate.

2. The fixing and adjusting device for a molecular pump according to claim 1, characterized in that: The adjusting locking screw assembly comprises: a screw, a locking nut and an adjusting nut threadedly connected to the screw, the screw passes through the bracket assembly, the locking nut is located above the bracket assembly, and the adjusting nut is located below the bracket assembly.

3. The fixing and adjusting device for a molecular pump according to claim 2, characterized in that: The bracket assembly is provided with the same number of first waist-shaped holes as the number of the adjusting locking screw assemblies, and the screws are adjustably inserted into the first waist-shaped holes.

4. The fixing and adjusting device for a molecular pump according to claim 1, characterized in that: The buffer gasket assembly includes: a first half-ring gasket and a second half-ring gasket, the first half-ring gasket and the second half-ring gasket together enclose an annular gasket, and the first half-ring gasket and the second half-ring gasket are both provided with a first connecting hole for passing the first connecting piece.

5. The fixing and adjusting device for a molecular pump according to claim 4, characterized in that: The first half ring gasket and the second half ring gasket are both gaskets made of Teflon material.

6. The fixing and adjusting device for a molecular pump according to claim 4, characterized in that: The bracket assembly includes: a first half-ring bracket and a second half-ring bracket, the first half-ring bracket and the second half-ring bracket together enclose an annular bracket, the annular gasket is attached to the top of the annular bracket, and the first half-ring bracket and the second half-ring bracket are both provided with a second connecting hole aligned with the first connecting hole.

7. The fixing and adjusting device for a molecular pump according to claim 6, characterized in that: The edges of the first half-ring bracket and the second half-ring bracket are both provided with connecting ears protruding outwards, and the connecting ears are provided with a first waist-shaped hole for penetrating the adjusting locking screw assembly.

8. The fixing and adjusting device for a molecular pump according to claim 1, characterized in that: The support plate is provided with screw holes having the same number as the adjusting locking screw assembly, and the lower end of the adjusting locking screw assembly is screwed to the screw holes.

9. The fixing and adjusting device for a molecular pump according to any one of claims 1 to 8, characterized in that: The bottom of the support plate is also connected to a bottom plate, and the bottom plate is adjustably connected to the support plate.

10. The fixing and adjusting device for a molecular pump according to claim 9, characterized in that: The support plate is provided with a second waist-shaped hole, the bottom plate is provided with a threaded hole, and the bottom plate and the support plate are connected by screws passing through the second waist-shaped hole.

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