Multifunctional sample processor

Abstract

The utility model relates to the technical field of conducting treatment on a sample before observation of a scanning electron microscope, and discloses a multifunctional sample treatment machine which comprises a rack, a control cabinet is arranged on one side of the rack, a belt wheel is arranged at the top end of magnetic fluid, a baffle rod is arranged at the top end of an evaporation baffle, and the baffle rod is connected with the control cabinet. And an observation window is arranged on the other side of the top end of the rack. According to the metal coating method, metal with low resistivity, such as gold, platinum and palladium, is evaporated by adopting a special device and then covers the surface of a sample. After the sample is plated with the metal film, the charging and discharging effects can be prevented, the damage effect of electron beams on the sample can be reduced, the generation rate of secondary electrons is increased, a good image is obtained, and the device is equipment for sample preparation of a scanning electron microscope, an electron probe and the like; the sample treated by the equipment can be used for appearance observation and component analysis of the sample, and is particularly suitable for quantitative analysis of components.

Description

Technical Field

[0001] The utility model relates to the technical field of conductive treatment of samples before scanning electron microscope observation, in particular to a multifunctional sample processor. Background Technique

[0002] In the development of modern science and technology and industrial production, the scanning electron microscope plays a very important role. The scanning electron microscope is a multifunctional instrument with many excellent performances and is one of the most widely used instruments. Due to the scanning electron microscope having a variety of important characteristics and functions, it has attracted more and more attention from scientific research personnel and is increasingly widely used. Now the scanning electron microscope has been widely used in materials science (metallic materials, non-metallic materials, nano materials), metallurgy, biology, medicine, semiconductor materials and devices, geological exploration, prevention and control of plant diseases and insect pests, identification of disasters (fires, failure analysis), criminal investigation, gem identification, product quality identification and production process control in industrial production, etc. Before observing with a scanning electron microscope, corresponding treatment needs to be carried out on the sample. The main requirements for the preparation of scanning electron microscope samples are: as much as possible to preserve the surface structure of the sample well, without deformation and contamination, the sample is dry and has good electrical conductivity.

[0003] This multifunctional sample processor is suitable for the conductive treatment of samples before scanning electron microscope observation. After biological samples are dehydrated and dried, their surfaces are not charged and their electrical conductivity is also poor. When observing with a scanning electron microscope, when the incident electron beam hits the sample, charge accumulation will occur on the sample surface, forming charging and discharging effects, which affect the observation and photographic recording of the image. Therefore, conductive treatment needs to be carried out before observation, making the sample surface conductive - the metal coating method. Content of the Utility Model

[0004] The purpose of the utility model is to provide a multifunctional sample processor to solve the problems put forward in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: a multifunctional sample processor, including a frame, a control cabinet is arranged on one side of the frame, an inner cavity is arranged inside the frame, a vacuum chamber is arranged at the top of the frame, a vacuum rear chassis is installed at the bottom end inside the vacuum chamber, a copper connection disk, a cold trap outer cylinder, an evaporation electrode, a magnetic fluid, a bracket, a resistance gauge and an evaporation baffle are respectively arranged at the top of the vacuum rear chassis, a belt pulley is arranged at the top of the magnetic fluid, a baffle rod is arranged at the top of the evaporation baffle, and an observation window is arranged on the other side at the top of the frame.

[0006] Preferably, a workpiece disk is installed at the top of the vacuum rear chassis through a first bolt and a second bolt, a workpiece rotation mechanism is arranged at the middle position inside the workpiece disk, a carbon spraying component is arranged on one side at the top of the workpiece disk, and a gold spraying component is arranged on the other side at the top of the workpiece disk.

[0007] Preferably, a lifting lug is provided on one side of the vacuum rear chassis. A pin shaft is installed inside the lifting lug. A lifting drive is provided on one side of the pin shaft. A lifting rotary seat is provided outside the lifting drive. A lifting guide is provided outside the lifting rotary seat. An inner ring positioning sleeve is provided at the bottom end of the lifting rotary seat.

[0008] Preferably, a rotary introducer is provided on one side inside the frame. An ionization gauge is provided at the top of the rotary introducer. A starting flap valve is provided on one side of the ionization gauge. A liquid nitrogen inlet / outlet pipe is provided at the bottom end of one side of the vacuum chamber. A liquid nitrogen cylinder flange is provided at the top of the liquid nitrogen inlet / outlet pipe. A liquid injection funnel is provided at the top of the liquid nitrogen cylinder flange. A control valve is provided inside the liquid injection funnel. A stepping motor is provided on one side inside the frame. An elbow is provided at the top of the stepping motor. A liquid nitrogen cylinder body is provided at the bottom of the liquid nitrogen cylinder flange. A Cimat is provided at the bottom of the liquid nitrogen cylinder body.

[0009] Preferably, a dry pump is provided at the bottom end inside the frame. A first three-way joint and a second three-way joint are respectively provided on the outer side wall of the dry pump. A manual baffle valve is provided at the top of the dry pump. A molecular pump is provided on one side of the dry pump. A straight-through connection is provided on one side of the molecular pump. A pipeline is provided on the other side of the molecular pump.

[0010] Preferably, a small limit ring and a large limit ring are provided at the top inside the frame. A speed reducer is provided on one side inside the frame. A limit plate is provided on the other side inside the frame. An electromagnetic baffle valve is provided on one side of the limit plate.

[0011] Compared with the prior art, the beneficial effects of the present utility model are:

[0012] (1) The metal coating method is a method of evaporating metals with low resistivity, such as gold, platinum, palladium, etc., and covering them on the surface of the sample by using a special device. After the sample is coated with a metal film, it can not only prevent the charging and discharging effects, but also reduce the damage effect of the electron beam on the sample, increase the generation rate of secondary electrons, and obtain good images. It is a device for sample preparation in scanning electron microscopes and electron probes, etc. The samples processed by this device can be used for both the appearance observation of the sample and the composition analysis, especially the quantitative analysis of the composition is more suitable;

[0013] (2) The ZF350 multi-functional specimen surface treatment machine is a device for specimen preparation for scanning electron microscopes and electron microprobes, etc. It is mainly used for vacuum carbon evaporation. The specimens processed by this device can be used for both the appearance observation of samples and component analysis, especially quantitative analysis of components is more suitable. This instrument is equipped with a molecular pump, and the molecular pump system is especially suitable for users with high requirements for vacuum and good vacuum environment. To shorten the preparation time, the device is also equipped with an open-type liquid nitrogen cold trap to increase the pumping speed. Brief Description of the Drawings

[0014] Figure 1 It is a front view sectional structure schematic diagram of the present utility model;

[0015] Figure 2 It is a side view sectional structure schematic diagram of the present utility model;

[0016] Figure 3 It is a front view enlarged structure schematic diagram of the buffer spring of the present utility model.

[0017] In the figure: 1. Liquid nitrogen inlet and outlet pipe; 2. Small limit ring; 3. Large limit ring; 4. Reducer; 5. Limit plate; 6. Electromagnetic baffle valve; 7. Inner cavity; 8. Inner ring positioning sleeve; 9. First three-way; 10. Ximat; 11. Liquid nitrogen cylinder; 12. Liquid nitrogen cylinder flange; 13. Stepper motor; 14. Elbow; 15. Control valve; 16. Liquid injection funnel; 17. Vacuum chamber; 18. Start-up flap valve; 19. Ionization gauge; 20. Rotary introducer; 21. Manual baffle valve; 22. Second three-way; 23. Straight-through; 24. Molecular pump; 25. Dry pump; 26. Pipeline; 27. Baffle rod; 28. First bolt; 29. Evaporation electrode; 30. Vacuum rear chassis; 31. Workpiece plate; 32. Copper connection plate; 33. Cold trap outer cylinder; 34. Observation window; 35. Magnetofluid; 36. Belt pulley; 37. Second bolt; 38. Control cabinet; 39. Carbon spraying component; 40. Gold spraying component; 41. Workpiece rotation mechanism; 42. Bracket; 43. Resistance gauge; 44. Lifting lug; 45. Pin shaft; 46. Lifting drive; 47. Lifting and rotating seat; 48. Lifting guide; 49. Evaporation baffle; 50. Frame. Detailed Description of the Embodiment

[0018] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0019] Embodiment 1: Please refer to Figures 1-3, a multi-functional sample processor, comprising a frame 50, a control cabinet 38 is provided on one side of the frame 50, an inner cavity 7 is provided inside the frame 50, a vacuum chamber 17 is provided at the top of the frame 50, a vacuum rear chassis 30 is installed at the bottom inside the vacuum chamber 17, a copper connection plate 32, a cold trap outer cylinder 33, an evaporation electrode 29, a magnetofluid 35, a bracket 42, a resistance gauge 43 and an evaporation baffle 49 are respectively provided at the top of the vacuum rear chassis 30, a pulley 36 is provided at the top of the magnetofluid 35, a baffle rod 27 is provided at the top of the evaporation baffle 49, an observation window 34 is provided on the other side at the top of the frame 50, a workpiece plate 31 is installed at the top of the vacuum rear chassis 30 through a first bolt 28 and a second bolt 37, a workpiece rotation mechanism 41 is provided at the middle position inside the workpiece plate 31, a carbon spraying assembly 39 is provided on one side at the top of the workpiece plate 31, a gold spraying assembly 40 is provided on the other side at the top of the workpiece plate 31, a lifting lug 44 is provided on one side of the vacuum rear chassis 30, a pin shaft 45 is installed inside the lifting lug 44, a lifting drive 46 is provided on one side of the pin shaft 45, a lifting rotary seat 47 is provided outside the lifting drive 46, a lifting guide 48 is provided outside the lifting rotary seat 47, an inner ring positioning sleeve 8 is provided at the bottom of the lifting rotary seat 47, a rotary introducer 20 is provided on one side inside the frame 50, an ionization gauge 19 is provided at the top of the rotary introducer 20, a starting flap valve 18 is provided on one side of the ionization gauge 19, a liquid nitrogen inlet and outlet pipe 1 is provided at the bottom on one side of the vacuum chamber 17, a liquid nitrogen cylinder flange 12 is provided at the top of the liquid nitrogen inlet and outlet pipe 1, a liquid injection funnel 16 is provided at the top of the liquid nitrogen cylinder flange 12, a control valve 15 is provided inside the liquid injection funnel 16, a stepping motor 13 is provided on one side inside the frame 50, an elbow 14 is provided at the top of the stepping motor 13, a liquid nitrogen cylinder body 11 is provided at the bottom of the liquid nitrogen cylinder flange 12, a Simat 10 is provided at the bottom of the liquid nitrogen cylinder body 11, a dry pump 25 is provided at the bottom inside the frame 50, a first three-way joint 9 and a second three-way joint 22 are respectively provided on the outer side wall of the dry pump 25, a manual baffle valve 21 is provided at the top of the dry pump 25, a molecular pump 24 is provided on one side of the dry pump 25, a straight-through 23 is provided on one side of the molecular pump 24, a pipeline 26 is provided on the other side of the molecular pump 24, a small limit ring 2 and a large limit ring 3 are provided at the top inside the frame 50, a speed reducer 4 is provided on one side inside the frame 50, a limit plate 5 is provided on the other side inside the frame 50, and an electromagnetic baffle valve 6 is provided on one side of the limit plate 5.

[0020] Working principle: First, clean and install the sample processing chamber, then clean the bell jar, dehydrate and dry it with anhydrous ethanol, cover it on the workbench disk, turn on the power supply, install the carbon evaporation accessory in the corresponding manner, grind the carbon rod with a carbon rod grinder and install it on the carbon evaporation accessory. Then stick the sample to the sample stage, and the exposed part of the fluoroplastic part should be completely protected with an aluminum film to prevent the carbon film from being evaporated onto it. Cover the bell jar and pump high vacuum. When the high vacuum is less than 5×10 -5After [unit not specified], turn the evaporation electrode 29 selection switch to the corresponding electrode number, turn on the sample rotation switch, adjust the sample rotation speed adjustment switch to make the sample rotate at an appropriate speed, turn the heating current knob clockwise for carbon evaporation. After carbon evaporation is completed, turn the evaporation electrode 29 selection switch, heating current adjustment knob, sample rotation switch, sample rotation speed adjustment switch, etc. to the "off" or "0" position, press the air release button to fill the bell jar with nitrogen to break the vacuum, and take out the sample. After each metal evaporation, be sure to completely clean the residual metal film on the part gaskets, spacers, pad columns, plexiglass screws, glass covers, etc., or cover and protect them during evaporation.

[0021] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claimed rights.

Claims

1. A multifunctional sample processing machine, comprising a frame (50), characterized in that: A control cabinet (38) is arranged on one side of the frame (50), an inner cavity (7) is arranged inside the frame (50), a vacuum chamber (17) is arranged at the top of the frame (50), a vacuum rear chassis (30) is installed at the bottom of the vacuum chamber (17), a copper connection plate (32), a cold-fall outer cylinder (33), an evaporation electrode (29), a magnetic fluid (35), a bracket (42), a resistance gauge (43) and a vapor deposition baffle (49) are arranged at the top of the vacuum rear chassis (30), a pulley (36) is arranged at the top of the magnetic fluid (35), a baffle rod (27) is arranged at the top of the vapor deposition baffle (49), and an observation window (34) is arranged on the other side of the top of the frame (50).

2. A multifunctional sample processing machine according to claim 1, characterized in that: A workpiece disk (31) is installed at the top of the vacuum rear chassis (30) via a first bolt (28) and a second bolt (37); a workpiece rotating mechanism (41) is arranged at a middle position inside the workpiece disk (31); a carbon spraying component (39) is arranged on one side of the top of the workpiece disk (31); and a gold spraying component (40) is arranged on the other side of the top of the workpiece disk (31).

3. A multifunctional sample processing machine according to claim 1, characterized in that: A lifting ear (44) is provided on one side of the vacuum rear chassis (30), a pin shaft (45) is installed inside the lifting ear (44), a lifting transmission device (46) is provided on one side of the pin shaft (45), a lifting rotating seat (47) is provided outside the lifting transmission device (46), a lifting guide (48) is provided outside the lifting rotating seat (47), and an inner ring positioning sleeve (8) is provided at the bottom end of the lifting rotating seat (47).

4. The multifunctional sample processing machine according to claim 1, characterized in that: A rotary introducer (20) is arranged on one side of the frame (50), an ionization gauge (19) is arranged on the top of the rotary introducer (20), a start gate valve (18) is arranged on one side of the ionization gauge (19), a liquid nitrogen inlet and outlet pipe (1) is arranged on the bottom of one side of the vacuum chamber (17), a liquid nitrogen cylinder flange (12) is arranged on the top of the liquid nitrogen inlet and outlet pipe (1), a liquid nitrogen cylinder flange (12) is arranged on the top of the liquid nitrogen cylinder flange (12), a liquid injection funnel (16) is arranged on the inside of the liquid injection funnel (16), a control valve (15) is arranged on one side of the frame (50), an elbow (14) is arranged on the top of the stepping motor (13), a liquid nitrogen cylinder (11) is arranged on the bottom of the liquid nitrogen cylinder flange (12), and a Simatic (10) is arranged on the bottom of the liquid nitrogen cylinder (11).

5. The multifunctional sample processing machine according to claim 1, characterized in that: A dry pump (25) is arranged at the bottom end of the frame (50), a first three-way valve (9) and a second three-way valve (22) are arranged on the outer side walls of the dry pump (25), a manual baffle valve (21) is arranged at the top of the dry pump (25), a molecular pump (24) is arranged on one side of the dry pump (25), a straight-through valve (23) is arranged on one side of the molecular pump (24), and a pipeline (26) is arranged on the other side of the molecular pump (24).

6. The multifunctional sample processing machine according to claim 1, characterized in that: A small limiting ring (2) and a large limiting ring (3) are arranged at the top of the frame (50), a reducer (4) is arranged on one side of the frame (50), a limiting plate (5) is arranged on the other side of the frame (50), and an electromagnetic baffle valve (6) is arranged on one side of the limiting plate (5).

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