Granularity detection equipment for semiconductor vacuum gate valve

Abstract

The utility model relates to the technical field of semiconductor vacuum gate valve granularity testing, in particular to semiconductor vacuum gate valve granularity detecting equipment which comprises a vacuum obtaining module, a testing cavity, a granularity detecting module and a data reading and processing module. One end of the gate valve is connected with a granularity detection module, the other end of the gate valve is connected with the test cavity, and the other end of the test cavity is connected with high-purity nitrogen. The equipment is simple to use, an actual detection method which is difficult to simulate in vacuum equipment is matched into a quantifiable part detection method, the granularity of a semiconductor vacuum gate valve is tested by building a vacuum module, the use requirement of product cleanliness is met, data such as vacuum, flow and granularity are read through a data reading and processing module, and the detection accuracy is improved. And a test result can be conveniently and quickly output. The reliability of the granularity test of the semiconductor vacuum gate valve is greatly improved, and reliable data and support are provided for product performance indexes.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor vacuum valve particle size testing, and particularly relates to a semiconductor vacuum valve particle size detection device. Background Art

[0002] In the semiconductor manufacturing industry, the precision and stability of the wafer manufacturing process are one of the key factors to ensure chip quality. With the continuous progress of technology, the requirements for the cleanliness of the wafer surface are becoming increasingly strict. Especially for the tiny particles generated during the wafer coating and etching processes, both their quantity and size need to be strictly controlled at an extremely low level. These particles may not only cause faults such as circuit short circuits and open circuits, but also seriously affect the product yield and reliability.

[0003] Traditionally, semiconductor equipment manufacturers usually adopt a complex "dummy wafer" detection method, that is, using special optical detection equipment to detect the particle size on the surface of a simulated wafer. However, this method has significant drawbacks: one is that the equipment is expensive and the maintenance cost is high, requiring a specific experimental environment and professional personnel to operate; the second is that the detection process is complex and difficult to replicate and simulate in a conventional production environment, resulting in limited comparability and operability of the detection results; the third is that the detection data cannot be directly applied to the manufacturing process of key components such as vacuum valves, making it difficult to achieve rapid and effective quality control.

[0004] In view of the above problems, it is particularly important to develop a device that can simply, efficiently, and accurately detect the particle size of semiconductor vacuum valves. Summary of the Utility Model

[0005] In order to solve the above problems, the utility model provides a semiconductor vacuum valve particle size detection device. This semiconductor vacuum valve particle size detection device is simple to use, matches the actual detection method that is difficult to simulate in a vacuum device into a quantifiable component detection method, tests the particle size of the semiconductor vacuum valve by building a vacuum module, meets the usage requirements of product cleanliness, reads data such as vacuum, flow rate, and particle size through a data reading and processing module, and outputs the test results conveniently and quickly. It greatly improves the reliability of semiconductor vacuum valve particle size testing and provides reliable data and support for product performance indicators.

[0006] The technical solution of the utility model is as follows:

[0007] A semiconductor vacuum valve particle size detection device includes a vacuum acquisition module, a test chamber, a particle size detection module, and a data reading and processing module. The vacuum acquisition module is connected to the test chamber to evacuate the test chamber. One end of the valve is connected to the particle size detection module, and the other end is connected to the test chamber. The other end of the test chamber is connected to high-purity nitrogen.

[0008] The vacuum acquisition module consists of a vacuum pump and a vacuum gauge. The vacuum pump is used to provide a vacuum environment for the test cavity, and the vacuum gauge is used to read the vacuum value and transmit it to the data processing module.

[0009] The particle size detection module is a particle counter.

[0010] An observation window is provided on the test cavity.

[0011] The observation window is made of transparent glass or transparent plastic.

[0012] A cooling water channel is provided on the side of the test cavity.

[0013] An air baffle is provided at the bottom in the air extraction direction of the test cavity.

[0014] The beneficial effects of the present utility model are as follows:

[0015] 1. A semiconductor vacuum valve particle size detection device disclosed by the present utility model uses a common particle counter as a detection tool, which is simple to operate and has strong reproducibility.

[0016] 2. A semiconductor vacuum valve particle size detection device disclosed by the present utility model adopts an optimized test cavity design, which can simulate the actual use environment to the greatest extent.

[0017] 3. A semiconductor vacuum valve particle size detection device disclosed by the present utility model, through cooperation with semiconductor equipment manufacturers, outputs a set of comparison standards for particle detection in equipment factories and particle detection in parts manufacturing factories, forming a product standard test plan and test standard. Description of the Drawings

[0018] By reading the detailed description of the preferred embodiments below, the solutions and advantages of the present application will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to limit the present utility model.

[0019] In the drawings:

[0020] Figure 1 is a schematic structural composition diagram of a semiconductor vacuum valve particle size detection device according to an embodiment of the present utility model;

[0021] Figure 2 is a schematic connection structure diagram of the particle counter of a semiconductor vacuum valve particle size detection device according to an embodiment of the present utility model;

[0022] Figure 3Schematic diagram of the external structure of the test chamber of a semiconductor vacuum valve particle size detection device according to an embodiment of the present invention;

[0023] Figure 4 Schematic diagram of the internal structure of the test chamber of a semiconductor vacuum valve particle size detection device according to an embodiment of the present invention;

[0024] The components represented by the reference numerals in the figure are:

[0025] The present invention: 1. Vacuum acquisition module, 2. Test chamber, 21. Observation window, 22. Cooling water channel, 23. Gas baffle, 3. Particle counter, 4. Data reading and processing module, 5. Valve, 6. High-purity nitrogen. Detailed implementation manners

[0026] As Figure 1 and Figure 2 shown, the semiconductor vacuum valve particle size detection device includes a vacuum acquisition module 1, a test chamber 2, a particle size detection module, and a data reading and processing module 4. The vacuum acquisition module is connected to the test chamber 2 to evacuate the test chamber 2. One end of the valve 5 is connected to the particle size detection module, and the other end is connected to the test chamber 2. The other end of the test chamber 2 is connected to high-purity nitrogen 6.

[0027] The vacuum acquisition module is composed of a vacuum pump and a vacuum gauge. The vacuum pump is used to provide a vacuum environment for the test chamber, and the vacuum gauge is used to read the vacuum value and transmit it to the data processing module.

[0028] The particle size detection module is a particle counter 3.

[0029] As Figure 3 shown, an observation window 21 is provided on the test chamber 2; the observation window 21 is made of transparent glass or transparent plastic; a cooling water channel 22 is provided on the side of the test chamber 2.

[0030] As Figure 4 shown, a gas baffle 23 is provided at the bottom of the test chamber 2 in the air extraction direction.

[0031] The usage environment is Figure 1 shown in the parts test process of the example of the vacuum valve to be measured. The vacuum acquisition module evacuates the test chamber 2 to be measured and ensures the vacuum environment during the test process. The particle size detection module is connected to the valve 5 to be measured. The high-purity nitrogen cylinder is opened, and the particle counter is opened to start calculating the particle size and quantity of nitrogen passing through the valve, so as to realize the particle size detection of the product.

[0032] The vacuum valve to be measured is installed on the test cavity. The particle counter and high-purity nitrogen are respectively connected to both sides of the valve and the cavity. The module is pre-evacuated by a vacuum pump. When the reading of the vacuum gauge reaches the required value, the vacuum pump is turned off, the number of cycles and the gas source pressure required for the test are set, and the reciprocating motion of the valve is started.

[0033] Meanwhile, the particle counter and the high-purity nitrogen cylinder are opened to test the particle size and quantity generated by the nitrogen passing through the vacuum valve. The particle counter automatically reads the particle size and quantity, and different particle counters can be selected to detect particles of different sizes.

[0034] Combined with the actual particle size and value detected by the optical detection equipment on the wafer surface by the client, compared with the in-factory detection data, a control standard is finally formed, and an operationally strong product test plan and test standard are formed.

[0035] This particle size detection equipment for the conductor vacuum valve improves the detection efficiency and accuracy: by integrating a vacuum acquisition module, a test cavity, a particle size detection module, and a data reading and processing module, this equipment can directly detect the particle size of the semiconductor vacuum valve without the need for complex "dummy wafer" detection methods, thus significantly improving the detection efficiency and accuracy. This direct detection method reduces intermediate links and makes the detection results closer to the actual usage situation.

[0036] This particle size detection equipment for the conductor vacuum valve reduces the detection cost: compared with traditional expensive optical detection equipment, the structure of this equipment is relatively simple and the maintenance cost is lower. At the same time, because its requirements for the test environment and test personnel are relatively low, it can be used in a conventional production environment, further reducing the detection cost.

[0037] This particle size detection equipment for the conductor vacuum valve enhances the comparability and operability of detection: the data output by the equipment can be directly applied to the manufacturing process of key components such as vacuum valves, providing strong support for quickly formulating and adjusting particle size detection plans and standards. This direct data feedback mechanism enhances the comparability and operability of detection and helps to improve the overall quality control level of semiconductor manufacturing.

[0038] This particle size detection equipment for the conductor vacuum valve simulates the actual usage environment: by evacuating the test cavity through the vacuum acquisition module and connecting high-purity nitrogen, this equipment can simulate the vacuum environment in the semiconductor manufacturing process, making the detection results closer to the actual usage situation. This ability to simulate the environment improves the accuracy and reliability of detection.

[0039] The particle size detection equipment for the conductor vacuum valve enhances the functionality of the equipment and the user experience: The setting of the observation window makes the test process visual, facilitating the operator to monitor the test status in real time; the setting of the cooling water channel helps to maintain the stable temperature of the test chamber and reduce the influence of temperature fluctuations on the detection results; the setting of the air baffle helps to optimize the air flow distribution and improve the detection accuracy. These design details enhance the functionality of the equipment and the user experience.

[0040] The data reading and processing module 4 consists of the following key components:

[0041] Data acquisition unit: Responsible for real-time data acquisition from detection equipment such as the particle counter 3 and the vacuum gauge. Implementation method: Connect to the detection equipment through standardized communication interfaces (such as RS-232, USB, Ethernet, etc.) to ensure accurate data transmission.

[0042] Data processing unit: Processes and analyzes the acquired data, including data cleaning, screening, statistics, and comparison, etc. Implementation method: Built-in high-performance processors and algorithm libraries, capable of quickly processing a large amount of data and generating analysis results according to preset algorithms.

[0043] Data storage unit: Stores the processed data and the original data in internal or external storage devices for subsequent query and analysis. Implementation method: Use solutions such as large-capacity hard disks, SSDs, or cloud storage to ensure long-term data preservation and fast access.

[0044] Data display unit: Displays the test results and analysis data through a liquid crystal display screen, a computer interface, or other visualization tools. Implementation method: Integrate a graphical user interface (GUI), providing an intuitive operation interface and rich chart display functions, facilitating the operator to understand and analyze the test results.

[0045] Control unit: Automatically controls the test process according to the preset test plan, including controlling the operation of equipment such as the vacuum pump, high-purity nitrogen cylinder, and particle counter. Implementation method: Write a control program and use a PLC, single-chip microcomputer, or other controllers to achieve automated test control.

[0046] In this embodiment: The data acquisition unit is connected to the particle counter 3 through a USB interface and to the vacuum gauge through an RS-485 interface, and real-time collects particle size data and vacuum degree data; The data processing unit: It is built-in with a high-performance ARM processor and a dedicated algorithm library, which cleans, screens, and statistically analyzes the collected data, calculates parameters such as the number of particles and size distribution, and compares them with the preset standard values; The data storage unit: Uses an SSD as the internal storage device, with a storage capacity of more than 1TB, ensuring that a large amount of test data and historical records can be stored. At the same time, it supports backing up data to cloud storage through an Ethernet interface; The data display unit: Integrates a 10.1-inch high-definition liquid crystal display, and real-time displays the test results and analysis data through the GUI interface. At the same time, it provides a USB interface and an Ethernet interface, supporting the export of test reports in Excel or PDF format; The automatic control unit: It is built-in with a PLC controller, which automatically controls the operation of the vacuum pump, high-purity nitrogen cylinder, and particle counter according to the preset test plan. Set test parameters such as the vacuum degree target value, number of cycles, and gas source pressure through the touch screen interface to realize one-key start of the automatic test process.

Claims

1. A semiconductor vacuum gate valve particle size detection device, characterized in that: The invention comprises a vacuum acquisition module (1), a test chamber (2), a particle size detection module and a data reading and processing module (4); the vacuum acquisition module is connected to the test chamber (2) to evacuate the test chamber (2); one end of the gate valve (5) is connected to the particle size detection module, and the other end is connected to the test chamber (2); the other end of the test chamber (2) is connected to high-purity nitrogen (6).

2. A semiconductor vacuum gate valve particle size detection device according to claim 1, characterized in that: The vacuum acquisition module is composed of a vacuum pump and a vacuum meter. The vacuum pump is used to provide a vacuum environment for the test cavity, and the vacuum meter is used to read the vacuum value and transmit it to the data processing module.

3. A semiconductor vacuum gate valve particle size detection device according to claim 1, characterized in that: The particle size detection module is a particle counter (3).

4. A semiconductor vacuum gate valve particle size detection device according to claim 1, characterized in that: An observation window (21) is provided on the test cavity (2).

5. A semiconductor vacuum gate valve particle size detection device according to claim 4, characterized in that: The observation window (21) is made of transparent glass or transparent plastic.

6. The semiconductor vacuum gate valve particle size detection device according to claim 1, characterized in that: A cooling water channel (22) is provided on the side of the test cavity (2).

7. The semiconductor vacuum gate valve particle size detection device according to claim 1, characterized in that: An air baffle (23) is provided at the bottom of the test chamber (2) in the air extraction direction.

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