Detection device

Abstract

The utility model relates to the technical field of detection, and provides a detection device for detecting a to-be-detected object, and the detection device comprises a first light source which is used for providing first light for a first surface of the to-be-detected object, and the first light forms first signal light through the first surface; the first polarizer is used for generating first polarized light, and the first polarized light is transmitted by the object to be measured to form first transmission signal light; the polarization direction of the second polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmission signal light forms second signal light through the second polarizer; the first detection assembly is used for receiving the first signal light; and the second detection assembly is used for receiving the second signal light. The practicability of the detection device can be improved at least.

Description

Technical Field

[0001] This application relates to the field of detection technologies, and particularly to a detection device. Background Art

[0002] In the process of semiconductor manufacturing, in order to ensure the quality of semiconductor devices, defect detection needs to be carried out in each link of the semiconductor manufacturing process. There are often various types of defects in semiconductor materials, and detection devices often require multiple detection modes to detect various types of defects.

[0003] In the related art, the detection mode of the detection device is single. For example, it only includes a single detection light source to detect a single type of defect, resulting in missed detection of defects in the object to be measured, and the practicability of the detection device is low. Moreover, because the detection mode of the detection device is single, the detector needs to replace the detection device to complete defect detection under different light sources, resulting in low efficiency of defect detection, thus leading to low practicability of the detection device. Therefore, the practicability of the detection device in the related art is low. Utility Model Content

[0004] The embodiments of this application provide a detection device, which can at least improve the practicability of the detection device.

[0005] According to some embodiments of this application, the embodiments of this application provide a detection device for detecting an object to be measured, where the object to be measured includes opposite first and second surfaces, and the detection device includes: a first light source for providing first light to the first surface of the object to be measured, and the first light forms first signal light after passing through the first surface; a first polarizer for generating first polarized light, and the first polarized light forms first transmitted signal light after passing through the object to be measured; a second polarizer, the polarization direction of the second polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light forms second signal light after passing through the second polarizer; a first detection component for receiving the first signal light; and a second detection component for receiving the second signal light.

[0006] In some embodiments, the first light forms the first signal light after being reflected by the first surface, and the first polarizer is used to polarize the first light to generate the first polarized light. Among them, the first detection component is further used to generate a first image according to the first signal light, and the second detection component is further used to generate a second image according to the second signal light.

[0007] In some embodiments, the detection device further includes: a second light source configured to provide second light to the second surface of the object to be measured. The second light forms a third signal light after passing through the object to be measured, and the first detection component is further configured to receive the third signal light and form a third image based on the third signal light.

[0008] In some embodiments, the second light is reflected by the second surface to form a fourth signal light, and the second detection component is further configured to receive the fourth signal light and form a fourth image based on the fourth signal light.

[0009] In some embodiments, the second polarizer is further configured to polarize the second light to form second polarized light. The second polarized light forms a second transmitted signal light after passing through the object to be measured, and the second transmitted signal light forms the third signal light after passing through the first polarizer.

[0010] In some embodiments, the detection device further includes: a first beam splitter configured to reflect the first light to the object to be measured and transmit the first signal light and the third signal light to the first detection component, or the first beam splitter is configured to transmit the first light to the object to be measured and reflect the first signal light and the third signal light to the first detection component; a second beam splitter configured to reflect the second light to the object to be measured and transmit the second signal light to the second detection component, or the second beam splitter is configured to transmit the second light to the object to be measured and reflect the second signal light to the second detection component.

[0011] In some embodiments, the first polarizer is located on the optical path between the first beam splitter and the object to be measured, and the second polarizer is located on the optical path between the second beam splitter and the object to be measured.

[0012] In some embodiments, the detection device further includes: a third polarizer located between the second beam splitter and the second light source, configured to convert the second light into second polarized light. The second polarized light forms a second transmitted signal light after passing through the object to be measured. The polarization direction of the third polarizer is not perpendicular to the polarization direction of the second polarizer; a fourth polarizer located between the first detection component and the first beam splitter, configured to convert the second transmitted signal light into the third signal light. The polarization direction of the first polarizer is not perpendicular to the polarization direction of the fourth polarizer, and the polarization direction of the fourth polarizer is perpendicular to the polarization direction of the third polarizer; wherein, the first polarizer is located on the optical path between the first light source and the first beam splitter, and the second polarizer is located on the optical path between the second beam splitter and the second detection component.

[0013] In some embodiments, the detection device further includes: a driving member, the driving member is connected to the first polarizer, the second polarizer, the third polarizer, and the fourth polarizer. If the first light source is turned on, the driving member drives at least one of the first polarizer and the fourth polarizer away from a first preset position; if the second light source is turned on, the driving member drives at least one of the second polarizer and the third polarizer away from a second preset position; wherein, the first preset position is located in the optical path between the first light source and the first detection component, and the second preset position is located in the optical path between the second light source and the second detection component.

[0014] In some embodiments, the detection device further includes a dark-field light source assembly, the dark-field light source assembly includes one or both of a first dark-field light source and a second dark-field light source; the first dark-field light source is used to provide a first dark-field light to the object to be measured, and the first dark-field light is scattered by the first surface of the object to be measured to form a first dark-field signal light; the second dark-field light source is used to provide a second dark-field light to the object to be measured, and the second dark-field light is scattered by the second surface of the object to be measured to form a second dark-field signal light; wherein, the first detection component is further used to receive the first dark-field signal light and generate a first dark-field image according to the first dark-field signal light; the second detection component is further used to receive the second dark-field signal light and generate a second dark-field image according to the second dark-field signal light, and the first beam splitter is further used to transmit or reflect the first dark-field signal light to the first detection component, and the second beam splitter is further used to transmit or reflect the second dark-field signal light to the second detection component.

[0015] In some embodiments, the first dark-field light source is a strip light source, and / or the second dark-field light source is a strip light source; the detection device further includes: a rotating table, the rotating table is used to relatively rotate the object to be measured and the dark-field light source assembly; a controller, the controller is used to control the dark-field light source assembly to scan the object to be measured multiple times, and rotate the rotating table by a preset angle between adjacent scans; the dark-field light source assembly includes the first dark-field light source and the second dark-field light source.

[0016] In some embodiments, the first detection component includes a plurality of first detectors. The fields of view of the plurality of first detectors are arranged in a strip shape on the first surface, and the fields of view of adjacent first detectors partially overlap or are staggered; the second detection component includes a plurality of second detectors. The fields of view of the plurality of second detectors are arranged in a strip shape on the second surface, and the fields of view of adjacent second detectors partially overlap or are staggered; the first dark-field light source is a strip light source, and the first dark-field light source is arranged parallel to the arrangement direction of the detector fields of view; the second dark-field light source is a strip light source, and the second dark-field light source is arranged parallel to the arrangement direction of the detector fields of view.

[0017] In some embodiments, the detection device further includes: a processor configured to perform defect detection and defect classification based on images formed by different signal lights; the signal lights include at least one of the first signal light, the second signal light, the third signal light, the first dark-field signal, and the second dark-field signal light.

[0018] In some embodiments, the detection device further includes: a controller configured to control each light source to flash in sequence; and control the first detection component and the second detection component to simultaneously acquire images at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of each light source, and each light source includes the first light source, the second light source, and the dark-field light source component.

[0019] In some embodiments, the detection device further includes: a controller that controls the first dark-field light source and the second dark-field light source to be turned on simultaneously.

[0020] In some embodiments, the first surface is conjugate to the photosensitive surface of the first detection component, and the second surface is conjugate to the photosensitive surface of the second detection component.

[0021] In some embodiments, the first light is scattered by the first surface to form the first signal light; the first polarizer is configured to polarize the first light to generate the first polarized light, or, the detection device further includes a second light source configured to generate a second light, and the first polarizer polarizes the second light to form the first polarized light.

[0022] The technical solutions provided by the embodiments of the present application have at least the following advantages:

[0023] In the technical solution of the detection device provided by the embodiment of the present application, the detection device includes a first light source for providing first light to a first surface of a to-be-detected object. The first light forms first signal light after passing through the first surface; a first polarizer for generating first polarized light, and the first polarized light forms first transmitted signal light after passing through the to-be-detected object; a second polarizer, the polarization direction of the second polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light forms second signal light after passing through the second polarizer; a first detection component for receiving the first signal light; and a second detection component for receiving the second signal light. In the detection device provided by the embodiment of the present application, the first light emitted by the first light source can pass through the to-be-detected object to form first signal light and be received by the first detection component. Also, due to the presence of the first polarizer and the second polarizer, the light beam emitted by the first light source or the second light source can be converted into first polarized light, enabling the to-be-detected object to be detected under the first polarized light. That is, using this detection device can complete the detection of two types of defects, avoiding missed detection of defect types while improving the detection efficiency and enhancing the practicality of the detection device.

[0024] In addition, the detection device of the embodiment of the present application can complete the detection of two types of defects, enabling the detector to complete the defect detection of the to-be-detected object under different types of light without replacing the detection device, thereby improving the detection efficiency and enhancing the practicality of the detection device. Additionally, the defects of the to-be-detected object can be measured under the first light and the first polarized light. By comparing the manifestation forms of the defects under different types of light, more accurate defect classification can be achieved, which is beneficial to enhancing the practicality of the detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] One or more embodiments are illustrated by way of example in the accompanying drawings, and these exemplary illustrations do not limit the embodiments. Unless otherwise stated, the figures in the drawings do not constitute a scale limitation. To more clearly illustrate the technical solutions in the embodiments of the present application or in the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the following-described drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0026] Figure 1 Structural schematic diagram of the detection device provided by the first embodiment of the present application;

[0027] Figure 2 For Figure 1 Top view of the field of view of the first detector in the first detection component and the first dark field light source in

[0028] Figure 3 For Figure 1The perspective view of the first detector in the first detection component and the elevation view of the second dark field light source;

[0029] Figure 4 is Figure 1 The perspective view of the second detector in the second detection component and the top view of the first dark field light source;

[0030] Figure 5 is Figure 1 The perspective view of the second detector in the second detection component and the elevation view of the second dark field light source;

[0031] Figure 6 The structural schematic diagram of the detection device provided by the second embodiment of the present application;

[0032] Figure 7 The structural schematic diagram of the detection device provided by the third embodiment of the present application;

[0033] Figure 8 The structural schematic diagram of the detection device provided by the fourth embodiment of the present application;

[0034] Figure 9 The structural schematic diagram of the detection device provided by the fifth embodiment of the present application;

[0035] Figure 10 The structural schematic diagram of the detection device provided by the sixth embodiment of the present application. Detailed implementation manners

[0036] As can be seen from the background art, the practicality of the detection device in the related art is relatively low.

[0037] The embodiments of the present application provide a detection device. In the detection device provided by the embodiments of the present application, the first light emitted by the first light source can not only form the first signal light through the object to be measured and be received by the first detection component, but also, due to the existence of the first polarizer and the second polarizer, the light beam emitted by the first light source or the second light source can be converted into the first polarized light, so that the object to be measured can be detected under the first polarized light. That is, using this detection device, two types of defect detections can be completed, which can improve the detection efficiency while avoiding the missed detection of defect types and improve the practicality of the detection device. In addition, the detection device of the embodiments of the present application can complete two types of defect detections, enabling the detector to complete the defect detection of the object to be measured under different types of light without replacing the detection device, thereby improving the detection efficiency and the practicality of the detection device. Moreover, the defects of the object to be measured can be measured under the first light and the first polarized light. By comparing the manifestation forms of the defects under different types of light, more accurate defect classification can be realized, which is beneficial to improving the practicality of the detection device.

[0038] The embodiments of the present application will be described in detail below with reference to the accompanying drawings. However, those of ordinary skill in the art can understand that in the embodiments of the present application, many technical details are provided to help readers better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the present application can still be implemented.

[0039] Figure 1 It is a schematic structural diagram of the detection device provided by the first embodiment of the present application.

[0040] Referring to Figure 1 , the detection device includes: a first light source 100, a first polarizer 101, a second polarizer 102, a first detection component 103, and a second detection component 104. The first light source 100 is configured to provide a first light to the first surface 12 of the object to be measured 11, and the first light forms a first signal light after passing through the first surface 12; the first polarizer 101 is configured to convert the first light into a first polarized light, and the first polarized light forms a first transmitted signal light after passing through the object to be measured 11; the polarization direction of the second polarizer 102 is perpendicular to the polarization direction of the first polarizer 101, the first transmitted signal light forms a second signal light after passing through the second polarizer 102, the first detection component 103 is configured to receive the first signal light and generate a first image according to the first signal light; the second detection component 104 is configured to receive the second signal light and generate a second image according to the second signal light.

[0041] The detection device is used to detect defects of the object to be measured 11.

[0042] The material of the object to be measured 11 is a uniaxial crystal or a multiaxial crystal. Uniaxial crystals and biaxial crystals are two types of anisotropic materials. Due to their anisotropic properties, both uniaxial crystals and biaxial crystals exhibit polarization effects when light passes through them. The detection device provides a first polarized light to the object to be measured 11, and defects with polarization effects of the object to be measured 11 under polarized light can be detected. In other embodiments, the object to be measured 11 can also be a non-crystalline material.

[0043] Specifically, in this embodiment, the object to be measured 11 is a silicon carbide substrate. In other embodiments, the object to be measured 11 can be a transparent substrate such as a glass substrate or a plastic substrate, and the object to be measured 11 can also be a transparent wafer, such as a sapphire wafer or a diamond wafer.

[0044] The object to be measured 11 has opposite first and second surfaces 12 and 13. The first surface 12 is conjugate to the photosensitive surface of the first detection component 103, and the second surface 13 is conjugate to the photosensitive surface of the second detection component 104. With such an arrangement, it is beneficial for the first detection component 103 to better receive the signal light emitted by the object to be measured 11 and generate a clearer image, and it is beneficial for the second detection component 104 to better receive the signal light emitted by the object to be measured 11 and generate a clearer image, which is beneficial to improving the practicality of the detection device.

[0045] In this embodiment, the first light is reflected by the first surface 12 to form the first signal light, and the first polarizer 101 is used to polarize the first light to generate the first polarized light.

[0046] The first polarizer 101 is a polarizing plate or a Nicol prism, etc.

[0047] The polarization direction of the second polarizer 102 is perpendicular to the polarization direction of the first polarizer 101, so as to convert the first transmitted signal light formed by transmitting the first polarized light through the object to be measured 11 into the second signal light, so as to complete the polarization defect detection of the object to be measured 11.

[0048] The second polarizer 102 is a polarizing plate or a Nicol prism, etc.

[0049] The detection device further includes: a second light source 105. The second light source 105 is used to provide second light to the second surface 13 of the object to be measured 11. The second light is transmitted through the object to be measured 11 to form a third signal light. The first detection component 103 is further used to receive the third signal light and form a third image according to the third signal light.

[0050] Specifically, the second polarizer 102 is used to polarize the second light to form second polarized light. The second polarized light is transmitted through the object to be measured 11 to form a second transmitted signal light. The second transmitted signal light forms a third signal light through the first polarizer 101. With such an arrangement, the first polarizer 101 and the second polarizer 102 can be used to complete the polarization defect detection of the object to be measured 11 with the light emitted by the second light source 105.

[0051] In this embodiment, the second light is reflected by the second surface 13 to form a fourth signal light. The second detection component 104 is further used to receive the fourth signal light and form a fourth image according to the fourth signal light. With such an arrangement, the second light emitted by the second light source 105 can complete two types of defect detections of the object to be measured, which can improve the detection efficiency.

[0052] In this embodiment, both the first light source 100 and the second light source 105 are coaxial light sources. In other embodiments, the first light source 100 is a dark-field light source or other light sources such as a fluorescence light source, the second light source 105 is a coaxial light source, or the first light source 100 is a coaxial light source and the second light source 105 can also be a dark-field light source or other light sources such as a fluorescence light source, or both the first light source 100 and the second light source 105 are other light sources except coaxial light sources.

[0053] The first light emitted by the first light source 100 is reflected by the first surface 12 of the object 11 to form a first signal light, and the second light emitted by the second light source 105 is reflected by the second surface 13 of the object 11 to form a fourth signal light.

[0054] In this embodiment, the incident angle of the first light provided by the first light source 100 on the object 11 is the same as the angle at which the first detection component 103 receives the first signal light, and the incident angle of the second light provided by the second light source 105 on the object 11 is the same as the angle at which the second detection component 104 receives the fourth signal light. Moreover, the incident direction of the first light is perpendicular to the first surface 12, and the incident direction of the second light is perpendicular to the second surface 13.

[0055] The detection device further includes a first beam splitter 106 and a second beam splitter 107. The first beam splitter 106 is configured to reflect the first light to the object 11 and transmit the first signal light and the third signal light to the first detection component 103. The second beam splitter 107 is configured to reflect the second light to the object 11 and transmit the second signal light and the fourth signal light to the second detection component 104.

[0056] The first beam splitter 106 is a semi-transmissive and semi-reflective mirror. With such a setting, the first light can be reflected by the first beam splitter 106 to the object 11, and the first signal light and the third signal light can be transmitted through the first beam splitter 106 and received by the first detection component 103. The second beam splitter 107 is a semi-transmissive and semi-reflective mirror. With such a setting, the second light can be reflected by the second beam splitter 107 to the object 11, and the second signal light and the fourth signal light can be transmitted through the second beam splitter 107 and received by the second detection component 104.

[0057] The first polarizer 101 is located on the optical path between the first beam splitter 106 and the object to be measured 11, and the second polarizer 102 is located on the optical path between the second beam splitter 107 and the object to be measured 11. With such a setting, when the first light source 100 is turned on, the first polarizer 101 is located on the optical path between the first beam splitter 106 and the object to be measured 11. The first polarizer 101 can convert the first light into first polarized light. The first polarized light is transmitted through the object to be measured 11 to form a first transmitted signal light. The second polarizer 102 located on the optical path between the second beam splitter 107 and the object to be measured 11 can convert the first transmitted signal light into a second signal light. When the second light source 105 is turned on, the second polarizer 102 is located on the optical path between the second beam splitter 107 and the object to be measured 11. The second polarizer 102 can convert the second light into second polarized light. The second polarized light is transmitted through the object to be measured 11 to form a second transmitted signal light. The first polarizer 101 located on the optical path between the first beam splitter 106 and the object to be measured 11 can convert the second transmitted signal light into a third signal light. Thus, in the detection device of this embodiment, by using the two polarizers, i.e., the first polarizer 101 and the second polarizer 102, the polarization light defect detection of the first surface 12 and the second surface 13 of the object to be measured 11 can be completed. The number of polarizers is small, making the structure of the detection device more concise, which is beneficial to saving the manufacturing cost of the detection device.

[0058] In this embodiment, the detection device further includes a dark field light source assembly. The dark field light source assembly includes a first dark field light source 118 and a second dark field light source 128. The first dark field light source 118 is used to provide first dark field light to the object to be measured 11. The first dark field light is scattered by the first surface 12 of the object to be measured 11 to form a first dark field signal light. The second dark field light source 128 is used to provide second dark field light to the object to be measured 11. The second dark field light is scattered by the second surface 13 of the object to be measured 11 to form a second dark field signal light. Among them, the first detection component 103 is further used to receive the first dark field signal light and generate a first dark field image according to the first dark field signal light. The second detection component 104 is further used to receive the second dark field signal light and generate a second dark field image according to the second dark field signal light. The first beam splitter 106 is further used to transmit the first dark field signal light to the first detection component 103, and the second beam splitter 107 is further used to transmit the second dark field signal light to the second detection component 104. With such a setting, the detection device can not only detect the object to be measured 11 under the first light source 100 and the second light source 105, but also perform defect detection under the first dark field light source 118 and the second dark field light source 128, and can detect various types of defects of the object to be measured 11, thereby reducing the missed detection of defect types and improving the practicability of the detection device.

[0059] In other embodiments of the present application, the dark field light source assembly may also only include one of the first dark field light source and the second dark field light source, or the detection device may not include the first dark field light source and the second dark field light source.

[0060] In this embodiment, the first dark-field light is scattered and transmitted by the object under test 11 to form a third dark-field signal light. The second detection component 104 is further configured to receive the third dark-field signal light and generate a third dark-field image according to the third dark-field signal light.

[0061] It should be noted that when there are defects inside the object under test 11, the first dark-field light will be scattered only after passing through the inside of the object under test 11, and the scattered light is transmitted to form the third dark-field signal light. Therefore, in this embodiment, the first dark-field light is transmitted through the object under test 11 to form the third dark-field signal light, which is used to detect the defects inside the object under test 11 to improve the practicability of the detection device. When there are no defects inside the object under test 11, the first dark-field light passing through the object under test 11 will not form the third dark-field signal light. Therefore, in other embodiments of the present application, there may be no formation of the third dark-field signal light after the first dark-field light is scattered and transmitted by the object under test 11.

[0062] In this embodiment, the second dark-field light is scattered and transmitted by the object under test 11 to form a fourth dark-field signal light. The first detection component 103 is further configured to receive the fourth dark-field signal light and generate a fourth dark-field image according to the fourth dark-field signal light.

[0063] It should be noted that when there are defects inside the object under test 11, the second dark-field light will be scattered only after passing through the inside of the object under test 11, and the scattered light is transmitted to form the fourth dark-field signal light. Therefore, in this embodiment, the second dark-field light is transmitted through the object under test 11 to form the fourth dark-field signal light, which is used to detect the defects inside the object under test 11 to improve the practicability of the detection device. When there are no defects inside the object under test 11, the second dark-field light passing through the object under test 11 will not form the fourth dark-field signal light. Therefore, in other embodiments of the present application, there may be no formation of the fourth dark-field signal light after the second dark-field light is scattered and transmitted by the object under test 11.

[0064] The incident direction of the first dark-field light source 118 is asymmetric with respect to the optical axis direction of the first detection component 103 about the first surface 12. Specifically, there is a non-zero angle between the incident direction of the first dark-field light source 118 and the optical axis direction of the first detection component 103. The optical axis of the first detection component 103 is perpendicular to the first surface 12, and the incident direction of the first dark-field light source 118 has an acute angle with the normal line of the first surface 12.

[0065] The incident direction of the second dark-field light source 128 is asymmetric with respect to the optical axis direction of the second detection component 104 about the second surface 13. Specifically, there is a non-zero angle between the incident direction of the second dark-field light source 128 and the optical axis direction of the second detection component 104. The optical axis of the second detection component 104 is perpendicular to the second surface 13, and the incident direction of the second dark-field light source 128 has an acute angle with the normal line of the second surface 13.

[0066] In this embodiment, the first dark-field light source 118 is a strip light source, and the second dark-field light source 128 is a strip light source. In other embodiments of the present application, the first dark-field light source 118 may also be an annular light source, a surface light source, a bowl-shaped light source, etc. The second dark-field light source 128 may also be an annular light source, a surface light source, a bowl-shaped light source, etc.

[0067] The detection device further includes a rotating table (not shown) and a controller (not shown). The rotating table is used to relatively rotate the object to be measured 11 with respect to the dark-field light source assembly; the controller is used to control the dark-field light source assembly to perform multiple scans on the object to be measured 11, and rotate the rotating table by a preset angle between adjacent scans, so that the object to be measured 11 rotates by a preset angle with respect to the dark-field light source assembly. The setting of the rotating table enables the detection device to capture corresponding images of the signal light under the first dark-field light and the second dark-field light at multiple angles, thereby improving the practicality of the detection device.

[0068] In this embodiment, the light beam emitted by the first dark-field light source 118 is blue light; the light beam emitted by the second dark-field light source 128 is blue light. The blue light has a shorter wavelength, and the defects scatter the short-wavelength light more strongly, which is beneficial to the imaging of the first detection component 103 and the second detection component 104, thereby improving the practicality of the detection device. In addition, the blue light has a shorter wavelength, which is beneficial to detecting defects such as small particles and can improve the sensitivity of the detection device. In other embodiments of the present application, the light beam emitted by the first dark-field light source 118 may be white light, and the light beam emitted by the second dark-field light source 128 may also be white light.

[0069] Figure 2 For Figure 1 the top view of the field of view of the first detector in the first detection component and the first dark-field light source, Figure 3 For Figure 1 the bottom view of the field of view of the first detector in the first detection component and the second dark-field light source, Figure 4 For Figure 1 the top view of the field of view of the second detector in the second detection component and the first dark-field light source, Figure 5 For Figure 1 the bottom view of the field of view of the second detector in the second detection component and the second dark-field light source. It should be noted that Figures 2 to 5 in order to facilitate the illustration, only the fields of view 1031 of 3 first detectors and the fields of view 1041 of 3 second detectors are schematically shown. Actually, the number of the first detectors and the second detectors may be other values except 3, and the embodiments of the present application do not limit the number of the first detectors and the second detectors.

[0070] With reference to Figures 1 to 5, the first detection component 103 includes a plurality of first detectors. The fields of view 1031 of the plurality of first detectors are arranged in a strip shape, and the fields of view 1031 of adjacent first detectors partially overlap or are staggered; the second detection component 104 includes a plurality of second detectors. The fields of view 1041 of the plurality of second detectors are arranged in a strip shape, and the fields of view 1041 of adjacent second detectors partially overlap or are staggered; the first dark-field light source 118 is a strip light source, and the first dark-field light source 118 is arranged parallel to the arrangement direction of the fields of view 1031 of the first detectors; the second dark-field light source 128 is a strip light source, and the second dark-field light source 128 is arranged parallel to the arrangement direction of the fields of view 1041 of the second detectors. With such an arrangement, the first detection component 103 and the second detection component 104 have a larger field of view, thereby improving the practicality of the detection device.

[0071] Among them, the field of view 1031 of the first detector covers the object to be measured 11 in its length direction, and the field of view 1041 of the second detector covers the object to be measured 11 in its length direction.

[0072] The detection device further includes: a first objective lens 109 and a second objective lens 110. The first objective lens 109 is located in the optical path between the first surface 12 and the first detection component 103, and is used to collect the signal light emitted by the object to be measured 11 towards the first detection component 103. The second objective lens 110 is located in the optical path between the second surface 13 and the second detection component 104, and is used to collect the signal light emitted by the object to be measured 11 towards the second detection component 104. With such an arrangement, the imaging effects of the first detection component 103 and the second detection component 104 can be better, which is beneficial to improving the practicality of the detection device.

[0073] The detection device further includes: a processor, which is used to perform defect detection and defect classification based on the images formed by different signal lights; the signal light includes at least one of the first signal light, the second signal light, the third signal light, the first dark-field signal light, and the second dark-field signal light. By directly detecting and classifying the defects of the object to be measured 11 by the processor, it is beneficial to improve the practicality of the detection device.

[0074] The detection device further includes: a controller, which is used to control each light source to flash in sequence; and control the first detection component 103 and the second detection component 104 to collect images simultaneously at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of each light source, and each light source includes a first light source, a second light source, a first dark-field light source 118, and a second dark-field light source 128. With such a setting, it is possible to detect various types of defects of the object to be measured 11, thereby reducing the missed detection of defect types, improving the practicability of the detection device, and controlling each light source to flash in sequence. The detector can complete the defect detection of the object to be measured 11 under multiple light sources without replacing the detection device, thereby reducing the detection time and improving the practicability of the detection device. Some defects of the object to be measured 11 can be measured under multiple light sources. By comparing the manifestation forms of the defects under different light sources, more accurate defect classification can be achieved, which is beneficial to improving the practicability of the detection device. In addition, the preset frequency is greater than or equal to the flashing frequency of the light source, which can ensure that the signal light emitted by each object to be measured 11 under the flashing of the corresponding light source is collected by the first detection component 103 and the second detection component 104, and can improve the reliability of the detection device.

[0075] In other embodiments of the present application, the controller controls the first dark-field light source 118 and the second dark-field light source 128 to be turned on simultaneously. With such a setting, the detection efficiency of the detection device for the object to be measured 11 can be improved.

[0076] In this embodiment, the light beam emitted by the first light source can not only be reflected by the object to be measured to form the first signal light and be received by the first detection component, but also because of the existence of the first polarizer and the second polarizer, the first light emitted by the first light source can be converted into the first polarized light, so that the object to be measured can be detected under the first polarized light. That is, using one light source to complete the detection of two types of defects can improve the detection efficiency while avoiding the missed detection of defect types and improving the practicability of the detection device. In addition, the detection device of the embodiment of the present application can complete the detection of two types of defects, enabling the detector to complete the defect detection of the object to be measured under different types of light without replacing the detection device, thereby improving the detection efficiency and the practicability of the detection device. In addition, the defects of the object to be measured can be measured under the first light and the first polarized light. By comparing the manifestation forms of the defects under different types of light, more accurate defect classification can be achieved, which is beneficial to improving the practicability of the detection device.

[0077] The second embodiment of the present application further provides a detection device, which is substantially the same as the detection device provided in the first embodiment. The main difference between this detection device and the detection device provided in the first embodiment is that the positions of the first detection component and the first light source in the detection device provided in the second embodiment are different from those in the first embodiment. The following will describe this detection device in detail with reference to the accompanying drawings. It should be noted that the same or corresponding features as those in the first embodiment will not be described in detail below to avoid repetition. Without contradiction, the corresponding descriptions in the first embodiment also apply to the corresponding features in the second embodiment.

[0078] Figure 6 It is a schematic structural diagram of a detection device for detecting a to-be-detected object provided in the second embodiment of the present application.

[0079] Referring to Figure 6 , the detection device includes: a first light source 200, a first polarizer 201, a second polarizer 202, a first detection component 203, and a second detection component 204. The first light source 200 is used to provide first light to the first surface 12 of the to-be-detected object 11, and the first light forms first signal light after passing through the first surface 12; the first polarizer 201 is used to convert the first light into first polarized light, and the first polarized light forms first transmitted signal light after passing through the to-be-detected object 11 by transmission; the polarization direction of the second polarizer 202 is perpendicular to the polarization direction of the first polarizer 201, and the first transmitted signal light forms second signal light after passing through the second polarizer 202; the first detection component 203 is used to receive the first signal light and generate a first image according to the first signal light; the second detection component 204 is used to receive the second signal light and generate a second image according to the second signal light.

[0080] It should be noted that the second light source 205, the dark-field light source assembly, the first dark-field light source 218, the second dark-field light source 228, the first objective lens 209, and the second objective lens 210 in this embodiment can refer to the corresponding descriptions of the second light source 105, the dark-field light source assembly, the first dark-field light source 118, the second dark-field light source 128, the first objective lens 109, and the second objective lens 110 in the first embodiment, and will not be elaborated here.

[0081] In this embodiment, the detection device further includes a first beam splitter 206 and a second beam splitter 207. The first beam splitter 206 is used to transmit the first light to the to-be-detected object 11, and is used to reflect the first signal light and the third signal light to the first detection component 203. The second beam splitter 207 is used to reflect the second light to the to-be-detected object 11, and is used to transmit the fourth signal light and the second signal light to the second detection component 204.

[0082] The first beam splitter 206 is a semi-transmissive and semi-reflective mirror. With such a setting, the first light can pass through the first beam splitter 206 and be transmitted to the object to be measured 11, and the first signal light and the third signal light can be reflected by the first beam splitter 206 and received by the first detection component 203. The second beam splitter 207 is a semi-transmissive and semi-reflective mirror. With such a setting, the second light can be reflected by the second beam splitter 207 and transmitted to the object to be measured 11, and the second signal light and the fourth signal light can be transmitted through the second beam splitter 207 and received by the second detection component 204.

[0083] The third embodiment of the present application also provides a detection device. This detection device is substantially the same as the detection device provided in the first embodiment. The main difference is that the positions of the second detection component and the second light source in the detection device provided in the third embodiment are different from those in the first embodiment. The following will describe this detection device in detail with reference to the accompanying drawings. It should be noted that for the same or corresponding features as those in the first embodiment, to avoid repetition, they will not be described in detail below. Without contradiction, the corresponding descriptions in the first embodiment also apply to the corresponding features in the third embodiment.

[0084] Figure 7 It is a schematic structural diagram of the detection device for detecting the object to be measured provided in the third embodiment of the present application.

[0085] Reference Figure 7 , the detection device includes: a first light source 300, a first polarizer 301, a second polarizer 302, a first detection component 303, and a second detection component 304. The first light source 300 is used to provide first light to the first surface 12 of the object to be measured 11, and the first light forms first signal light after passing through the first surface 12; the first polarizer 301 is used to convert the first light into first polarized light, and the first polarized light forms first transmitted signal light after passing through the object to be measured 11; the polarization direction of the second polarizer 302 is perpendicular to the polarization direction of the first polarizer 301, and the first transmitted signal light forms second signal light after passing through the second polarizer 302; the first detection component 303 is used to receive the first signal light and generate a first image according to the first signal light; the second detection component 304 is used to receive the second signal light and generate a second image according to the second signal light.

[0086] It should be noted that for the second light source 305, the dark field light source assembly, the first dark field light source 318, the second dark field light source 328, the first objective lens 309, and the second objective lens 310 in this embodiment, reference can be made to the corresponding descriptions of the second light source 105, the dark field light source assembly, the first dark field light source 118, the second dark field light source 128, the first objective lens 109, and the second objective lens 110 in the first embodiment, and details will not be repeated here.

[0087] In this embodiment, the detection device further includes a first beam splitter 306 and a second beam splitter 307. The first beam splitter 306 is configured to reflect the first light to the object to be measured 11 and transmit the first signal light and the third signal light to the first detection component 303. The second beam splitter 307 is configured to transmit the second light to the object to be measured 11 and reflect the fourth signal light and the second signal light to the second detection component 304.

[0088] The first beam splitter 306 is a semi-transmissive and semi-reflective mirror. With such a setting, the first light can be reflected by the first beam splitter 306 to the object to be measured 11, and the first signal light and the third signal light can be transmitted through the first beam splitter 306 and received by the first detection component 303. The second beam splitter 307 is a semi-transmissive and semi-reflective mirror. With such a setting, the second light can be transmitted through the second beam splitter 307 to the object to be measured 11, and the second signal light and the fourth signal light can be reflected by the second beam splitter 307 and received by the second detection component 304.

[0089] The fourth embodiment of the present application further provides a detection device. This detection device is substantially the same as the detection device provided in the first embodiment. The main difference is that the detection device provided in the fourth embodiment further includes a third polarizer and a fourth polarizer. In the first embodiment, the first light forms a first polarized light through the first polarizer, the second light forms a second polarized light through the second polarizer, the first transmitted signal light forms a second signal light through the second polarizer, and the second transmitted signal light forms a third signal light through the first polarizer. In this embodiment, the first light forms a first polarized light through the first polarizer, the second light forms a second polarized light through the third polarizer, the first transmitted signal light forms a second signal light through the second polarizer, and the second transmitted signal light forms a third signal light through the fourth polarizer. The following will describe this detection device in detail with reference to the accompanying drawings. It should be noted that the same or corresponding features as those in the first embodiment will not be described in detail below to avoid repetition. Without contradiction, the corresponding descriptions in the first embodiment also apply to the corresponding features in the fourth embodiment.

[0090] Figure 8 It is a schematic structural diagram of the detection device for detecting the object to be measured provided in the fourth embodiment of the present application.

[0091] Reference Figure 8, the detection device includes: a first light source 400, a first polarizer 401, a second polarizer 402, a first detection component 403, and a second detection component 404. The first light source 400 is configured to provide a first light to a first surface 12 of the object 11 to be measured, and the first light forms a first signal light after passing through the first surface 12; the first polarizer 401 is configured to convert the first light into a first polarized light, and the first polarized light forms a first transmitted signal light after passing through the object 11 to be measured; the polarization direction of the second polarizer 402 is perpendicular to the polarization direction of the first polarizer 401, and the first transmitted signal light forms a second signal light after passing through the second polarizer 402; the first detection component 403 is configured to receive the first signal light and generate a first image based on the first signal light; the second detection component 404 is configured to receive the second signal light and generate a second image based on the second signal light.

[0092] It should be noted that the first light source 400, the first detection component 403, the second detection component 404, the second light source 405, the first beam splitter 406, the second beam splitter 407, the dark field light source assembly, the first dark field light source 418, the second dark field light source 428, the first objective lens 409, and the second objective lens 410 in this embodiment can refer to the corresponding descriptions of the first light source 100, the first detection component 103, the second detection component 104, the second light source 105, the first beam splitter 106, the second beam splitter 107, the dark field light source assembly, the first dark field light source 118, the second dark field light source 128, the first objective lens 109, and the second objective lens 110 in the first embodiment, and will not be elaborated here.

[0093] The detection device further includes: a third polarizer 411 and a fourth polarizer 412. The third polarizer 411 is configured to convert the second light into a second polarized light, and the second polarized light forms a second transmitted signal light after passing through the object 11 to be measured. The polarization direction of the third polarizer 411 is not perpendicular to the polarization direction of the second polarizer 402; the polarization direction of the fourth polarizer 412 is perpendicular to the polarization direction of the third polarizer 411, and the second transmitted signal light forms a third signal light after passing through the fourth polarizer 412. The polarization direction of the fourth polarizer 412 is not perpendicular to the polarization direction of the first polarizer 401; wherein, the first detection component 403 is further configured to receive the third signal light and form a third image based on the third signal light.

[0094] In this embodiment, the first polarizer 401 is located on the optical path between the first beam splitter 406 and the first light source 400, the second polarizer 402 is located on the optical path between the second beam splitter 407 and the second detection component 404, the third polarizer 411 is located on the optical path between the second beam splitter 407 and the second light source 405, and the fourth polarizer 412 is located on the optical path between the first beam splitter 406 and the first detection component 403.

[0095] The first polarizer 401 is located on the optical path between the first beam splitter 406 and the first light source 400, and is used to convert the first light emitted by the first light source 400 into first polarized light. The second polarizer 402 is located on the optical path between the second beam splitter 407 and the second detection component 404, and the polarization direction of the second polarizer 402 is perpendicular to the polarization direction of the first polarizer 401. It is used to convert the first transmitted signal light formed by the first polarized light transmitted through the object to be measured 11 into second signal light.

[0096] The third polarizer 411 is located on the optical path between the second beam splitter 407 and the second light source 405, and is used to convert the second light emitted by the second light source 405 into second polarized light. The fourth polarizer 412 is located on the optical path between the first beam splitter 406 and the first detection component 403, and the polarization direction of the fourth polarizer 412 is perpendicular to the polarization direction of the third polarizer 411. It is used to convert the second transmitted signal light formed by the second polarized light transmitted through the object to be measured 11 into third signal light.

[0097] In this embodiment, the polarization direction of the third polarizer 411 is not perpendicular to the polarization direction of the second polarizer 402, so that the second detection component 404 can receive the fourth signal light, the third dark field signal light, and the second dark field signal light emitted by the object to be measured 11. In other embodiments, the polarization direction of the third polarizer 411 is perpendicular to the polarization direction of the second polarizer 402, and at least one of the third polarizer 411 and the second polarizer 402 can enter and exit the optical path.

[0098] In this embodiment, the polarization direction of the fourth polarizer 412 is not perpendicular to the polarization direction of the first polarizer 401, so that the first detection component 403 can receive the first signal light, the first dark field signal light, and the fourth dark field signal light emitted by the object to be measured 11. In other embodiments, the polarization direction of the fourth polarizer 412 is perpendicular to the polarization direction of the first polarizer 401, and at least one of the fourth polarizer 412 and the first polarizer 401 can enter and exit the optical path.

[0099] The detection device further includes: a driving member, which is connected to the first polarizer 401, the second polarizer 402, the third polarizer 411, and the fourth polarizer 412. If the first light source 400 is turned on, the driving member drives at least one of the first polarizer 401 and the fourth polarizer 412 away from the first preset position; if the second light source 405 is turned on, the driving member drives at least one of the second polarizer 402 and the third polarizer 411 away from the second preset position; wherein, the first preset position is located on the optical path between the first light source 400 and the first detection component 403, and the second preset position is located on the optical path between the second light source 405 and the second detection component 404.

[0100] At least one of the first polarizer 401 and the fourth polarizer 412 can enter and exit the optical path through a driving member, and at least one of the second polarizer 402 and the third polarizer 411 can enter and exit the optical path. When the first light source 400 is turned on and it is necessary to detect the first surface 12 of the object to be measured 11, the driving member can be used to move at least one of the first polarizer 401 and the third polarizer 411 away from the first preset position, that is, to make at least one of the first polarizer 401 and the third polarizer 411 leave the optical path. In this way, the light intensity of the first light can be increased, and thus the signal intensity of the first signal light can be increased, which is beneficial to the detection of defects. Similarly, when the second light source 405 is turned on and it is necessary to detect the second surface 13 of the object to be measured 11, the driving member can be used to move at least one of the second polarizer 402 and the third polarizer 411 away from the second preset position, that is, to make at least one of the second polarizer 402 and the third polarizer 411 leave the optical path. In this way, the light intensity of the second light can be increased, and thus the signal intensity of the second signal light can be increased, which is beneficial to the detection of defects.

[0101] Both the first preset position and the second preset position are positions in the optical path.

[0102] In other embodiments of the present application, the first polarizer 401 can be fixed in the optical path between the first light source 400 and the first detection component 403. The third polarizer 411 can be fixed in the optical path between the second light source 405 and the second detection component 404.

[0103] The fifth embodiment of the present application further provides a detection device. The detection device is substantially the same as the detection device provided in the first embodiment. The main difference between the detection device provided in the fifth embodiment and the detection device provided in the first embodiment is that the included angles between the incident directions of the first light source and the second light source and the surface of the object to be measured in the detection device provided in the fifth embodiment are different from the included angles between the incident directions of the first light source and the second light source and the surface of the object to be measured in the first embodiment. The following will describe this detection device in detail with reference to the accompanying drawings. It should be noted that for the same or corresponding features as those in the first embodiment, in order to avoid repetition, the following will not be described in detail. Without contradiction, the corresponding descriptions in the first embodiment also apply to the corresponding features in the fifth embodiment.

[0104] Figure 9 It is a schematic structural diagram of the detection device provided in the fifth embodiment of the present application.

[0105] Reference Figure 9, The detection device includes a first light source 500, a first polarizer 501, a second polarizer 502, a first detection component 503, and a second detection component 504. The first light source 500 is used to provide first light to the first surface 12 of the object to be measured 11, and the first light forms first signal light after passing through the first surface 12; the first polarizer 501 is used to convert the first light into first polarized light, and the first polarized light forms first transmitted signal light after passing through the object to be measured 11; the polarization direction of the second polarizer 502 is perpendicular to the polarization direction of the first polarizer 501, and the first transmitted signal light forms second signal light after passing through the second polarizer 502; the first detection component 503 is used to receive the first signal light and generate a first image according to the first signal light; the second detection component 504 is used to receive the second signal light and generate a second image according to the second signal light.

[0106] The detection device further includes: a second light source 505, the second light source 505 is used to provide second light to the second surface 13 of the object to be measured 11, the second light forms fourth signal light after being reflected by the second surface 13, and the second detection component 504 is further used to receive the fourth signal light and form a fourth image according to the fourth signal light. With this setting, the detection device can simultaneously detect the first surface 12 and the second surface 13 of the object to be measured 11 through the first light source 500 and the second light source 505, which is beneficial to improving the detection efficiency.

[0107] In this embodiment, the first light source 500 is a bright-field light source. In other embodiments, the first light source 500 can be a dark-field light source, a fluorescence light source, etc.

[0108] In this embodiment, the second light source 505 is a bright-field light source. In other embodiments, the second light source 505 can be a dark-field light source, a fluorescence light source, etc.

[0109] In this embodiment, the incident direction of the first light forms an acute angle with the first surface 12, and the exit directions of the first signal light and the third signal light form acute angles with the first surface 12. The incident direction of the second light forms an acute angle with the second surface 13, and the exit directions of the second signal light and the fourth signal light form acute angles with the second surface 13.

[0110] The sixth embodiment of the present application also provides a detection device, which is substantially the same as the detection device provided in the first embodiment. The main difference between this detection device and the detection device provided in the first embodiment is that the first light source in the detection device provided in the sixth embodiment is different from the first light source and the second light source in the first embodiment. In the first embodiment, the first light source is a coaxial light source, while in this embodiment, the first light source is a dark-field light source; in the first embodiment, the first polarizer converts the first light emitted by the first light source into first polarized light, while in this embodiment, the second polarizer is used to convert the second light emitted by the second light source into first polarized light. The following will describe this detection device in detail with reference to the accompanying drawings. It should be noted that the same or corresponding features as those in the first embodiment will not be described in detail below to avoid repetition. Without contradiction, the corresponding descriptions in the first embodiment also apply to the corresponding features in the sixth embodiment.

[0111] Figure 10 It is a schematic structural diagram of the detection device provided in the sixth embodiment of the present application.

[0112] Refer to Figure 10 , the detection device includes a first light source 600, a first polarizer 601, a second polarizer 602, a first detection component 603 and a second detection component 604. The first light source 600 is used to provide first light to the first surface 12 of the object to be measured 11, and the first light forms first signal light after passing through the first surface 12; the first polarizer 601 is used to generate first polarized light, and the first polarized light forms first transmitted signal light after passing through the object to be measured 11; the polarization direction of the second polarizer 602 is perpendicular to the polarization direction of the first polarizer 601, and the first transmitted signal light forms second signal light after passing through the second polarizer 602; the first detection component 603 is used to receive the first signal light and generate a first image according to the first signal light; the second detection component 604 is used to receive the second signal light and generate a second image according to the second signal light.

[0113] The first light is scattered by the first surface to form first signal light, and the formed first signal light is received by the first detection component 603.

[0114] The detection device further includes: a second light source 605, and the second light source is used to generate second light.

[0115] In this embodiment, the first polarizer 601 is located in the optical path between the second light source 605 and the object to be measured 11, and the first polarizer 601 polarizes the second light to form first polarized light. In other embodiments of the present application, the first polarizer may be located in the optical path between the first light source and the object to be measured, and the first polarizer is used to polarize the first light to form first polarized light.

[0116] In this embodiment, the first light source 600 is a dark-field light source. In other embodiments of the present application, the first light source may be a bright-field light source.

[0117] In this embodiment, the second light source 605 is a bright-field light source. In other embodiments of the present application, the second light source may be a dark-field light source.

[0118] In this embodiment, the first light source 600 and the second light source 605 are located on the same side of the object to be measured 11. In other embodiments of the present application, the first light source 600 and the second light source 605 may be located on opposite sides of the object to be measured 11.

[0119] In this embodiment, the second light source, the first polarizer, the second polarizer, and the second detection component may not be on the same straight line.

[0120] The detection device further includes a first beam splitter 606, a first objective lens 609, a second objective lens 610, and a third light source 628. Among them, the first beam splitter 606 is used to reflect the second light to the first polarizer 601, so that the second light can form first polarized light after passing through the first polarizer 601; the first beam splitter 606 is also used to transmit the first signal light to the first detection component 603.

[0121] The first objective lens 609 is used to focus the signal light emitted by the object to be measured 11 towards the first detection component 603, and the second objective lens 610 is used to focus the signal light emitted by the object to be measured 11 towards the second detection component 604.

[0122] The third light source 628 is used to provide second dark-field light to the object to be measured 11, and the second dark-field light is scattered by the second surface 13 of the object to be measured 11 to form second dark-field signal light. The second detection component 604 is also used to receive the second dark-field signal light and generate a second dark-field image based on the second dark-field signal light.

[0123] In this embodiment, the third light source 628 is a dark-field light source. In other embodiments of the present application, the third light source may also be a bright-field light source.

[0124] In other embodiments of the present application, the second light source, the first polarizer, the second polarizer, and the second detection component may be on the same straight line. Such a setting is for the second detection component to better receive the second signal light.

[0125] In this embodiment, the optical axis of the first detection component 603 is perpendicular to the first surface 12. In other embodiments of the present application, the included angle between the optical axis direction of the first detection component and the first surface may also be an acute angle.

[0126] In the detection device provided in the above embodiments, the light beam emitted by the first light source can not only be scattered by the object to be measured to form the first signal light and received by the first detection component, but also, due to the presence of the first polarizer and the second polarizer, the second light emitted by the second light source can be converted into the first polarized light, so that the object to be measured can be detected under the first polarized light. That is, by using this detection device to complete the detection of two types of defects, the missed detection of defect types can be avoided while improving the detection efficiency and enhancing the practicality of the detection device. In addition, the detection device according to the embodiment of the present application can complete the detection of two types of defects, enabling the detector to complete the defect detection of the object to be measured under different types of light without replacing the detection device, thereby improving the detection efficiency and enhancing the practicality of the detection device. Moreover, the defects of the object to be measured can be measured under the first light and the first polarized light. By comparing the manifestation forms of the defects under different types of light, more accurate defect classification can be achieved, which is beneficial to enhancing the practicality of the detection device.

[0127] Those of ordinary skill in the art can understand that the above embodiments are specific embodiments for implementing the present application. In actual applications, various changes can be made in form and details without departing from the spirit and scope of the present application. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application should be subject to the scope defined by the claims.

Claims

1. A detection device for detecting an object to be detected, wherein the object to be detected comprises a first surface and a second surface opposite to each other, characterized in that: include: A first light source, the first light source is used to provide a first light to the first surface of the object to be measured, the first light forms a first signal light through the first surface; A first polarizer, the first polarizer is used to generate a first polarized light, the first polarized light is transmitted through the object to be measured to form a first transmission signal light; a second polarizer, wherein the polarization direction of the second polarizer is perpendicular to the polarization direction of the first polarizer, and the first transmitted signal light is transformed into a second signal light through the second polarizer; a first detection component, the first detection component is used to receive the first signal light; A second detection component, wherein the second detection component is used to receive the second signal light.

2. The detection device according to claim 1, characterized in that: The first light is reflected by the first surface to form the first signal light, and the first polarizer is used to polarize the first light to generate the first polarized light, wherein the first detection component is also used to generate a first image based on the first signal light, and the second detection component is also used to generate a second image based on the second signal light.

3. The detection device according to claim 2, characterized in that: The detection device also includes: a second light source, which is used to provide second light to the second surface of the object to be detected, and the second light forms a third signal light after being transmitted through the object to be detected. The first detection component is also used to receive the third signal light and form a third image based on the third signal light.

4. The detection device according to claim 3, characterized in that: The second light is reflected by the second surface to form fourth signal light, and the second detection component is further used to receive the fourth signal light and form a fourth image according to the fourth signal light.

5. The detection device according to claim 3, characterized in that: The second polarizer is further used to polarize the second light to form second polarized light, the second polarized light is transmitted through the object to be measured to form second transmitted signal light, and the second transmitted signal light is transmitted through the first polarizer to form the third signal light.

6. The detection device according to claim 3 or 5, characterized in that: The detection device also includes: a first beam splitter, the first beam splitter is used to reflect the first light to the object under test, and to transmit the first signal light and the third signal light to the first detection component, or the first beam splitter is used to transmit the first light to the object under test, and to reflect the first signal light and the third signal light to the first detection component; a second beam splitter, the second beam splitter is used to reflect the second light to the object under test, and to transmit the second signal light to the second detection component, or the second beam splitter is used to transmit the second light to the object under test, and to reflect the second signal light to the second detection component.

7. The detection device according to claim 6, characterized in that: The first polarizer is located on the optical path between the first beam splitter and the object to be measured, and the second polarizer is located on the optical path between the second beam splitter and the object to be measured.

8. The detection device according to claim 6, characterized in that: The detection device also includes: a third polarizer located between the second beam splitter and the second light source, the third polarizer being used to convert the second light into a second polarized light, the second polarized light being transmitted through the object to be measured to form a second transmission signal light, and the polarization direction of the third polarizer is not perpendicular to the polarization direction of the second polarizer; a fourth polarizer located between the first detection assembly and the first beam splitter, the fourth polarizer being used to convert the second transmitted signal light into the third signal light, the polarization directions of the first polarizer and the fourth polarizer being not perpendicular, and the polarization direction of the fourth polarizer being perpendicular to the polarization direction of the third polarizer; The first polarizer is located on the optical path between the first light source and the first beam splitter, and the second polarizer is located on the optical path between the second beam splitter and the second detection component.

9. The detection device according to claim 8, characterized in that: The detection device also includes: a driving member, the driving member being connected to the first polarizer, the second polarizer, the third polarizer, and the fourth polarizer, and if the first light source is turned on, the driving member drives at least one of the first polarizer and the fourth polarizer away from a first preset position; if the second light source is turned on, the driving member drives at least one of the second polarizer and the third polarizer away from a second preset position; The first preset position is located in the light path between the first light source and the first detection component, and the second preset position is located in the light path between the second light source and the second detection component.

10. The detection device according to claim 6, characterized in that: The detection device further includes a dark field light source assembly, wherein the dark field light source assembly includes one or a combination of a first dark field light source and a second dark field light source; The first dark field light source is used to provide first dark field light to the object to be measured, and the first dark field light is scattered by the first surface of the object to be measured to form a first dark field signal light; The second dark field light source is used to provide second dark field light to the object to be measured, and the second dark field light is scattered by the second surface of the object to be measured to form second dark field signal light; Among them, the first detection component is also used to receive the first dark field signal light, and generate a first dark field image based on the first dark field signal light; the second detection component is also used to receive the second dark field signal light, and generate a second dark field image based on the second dark field signal light, the first beam splitter is also used to transmit or reflect the first dark field signal light to the first detection component, and the second beam splitter is also used to transmit or reflect the second dark field signal light to the second detection component.

11. The detection device according to claim 10, characterized in that: The first dark field light source is a bar light source, and / or the second dark field light source is a bar light source; the detection device also includes: a rotating table, which is used to make the object to be tested and the dark field light source assembly rotate relative to each other; a controller, which is used to control the dark field light source assembly to scan the object to be tested multiple times, and rotate the rotating table by a preset angle between adjacent scans; the dark field light source assembly includes the first dark field light source and the second dark field light source.

12. The detection device according to claim 10, characterized in that: The first detection assembly includes a plurality of first detectors, wherein the plurality of first detectors are arranged in a strip shape in the field of view of the first surface, and the fields of view of adjacent first detectors are partially overlapped or staggered; The second detection assembly includes a plurality of second detectors, wherein the plurality of second detectors are arranged in a strip shape in the field of view of the second surface, and the fields of view of adjacent second detectors are partially overlapped or staggered; The first dark field light source is a bar light source, and the first dark field light source is arranged in parallel with the arrangement direction of the detector field of view; the second dark field light source is a bar light source, and the second dark field light source is arranged in parallel with the arrangement direction of the detector field of view.

13. The detection device according to claim 10, characterized in that: The detection device also includes: a processor, which is used to perform defect detection and defect classification according to images formed by different signal lights; the signal light at least includes the first signal light, the second signal light, the third signal light and at least one of the first dark field signal and the second dark field signal light.

14. The detection device according to claim 10, characterized in that: The detection device also includes: A controller, the controller is used to control each light source to flash in sequence; and control the first detection component and the second detection component to simultaneously capture images at a preset frequency; the preset frequency is greater than or equal to the flashing frequency of each light source, and the light sources include the first light source, the second light source, and the dark field light source component.

15. The detection device according to claim 10, characterized in that: The detection device also includes: A controller is used to control the first dark-field light source and the second dark-field light source to be turned on simultaneously.

16. The detection device according to claim 1, characterized in that: The first surface is conjugate with the photosensitive surface of the first detection component, and the second surface is conjugate with the photosensitive surface of the second detection component.

17. The detection device according to claim 1, characterized in that: The first light is scattered by the first surface to form the first signal light; The first polarizer is used to polarize the first light to generate the first polarized light, or the detection device further includes a second light source, the second light source is used to generate a second light, and the first polarizer polarizes the second light to form the first polarized light.

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