Passivation equipment and passivation production line

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to passivation equipment and a passivation production line, and solves the problem of low passivation efficiency of the passivation equipment. The passivation equipment comprises a plurality of reaction furnaces, a plurality of boat pushing devices, a plurality of temporary storage devices and a boat carrying device, the reaction furnaces are configured to carry out a passivation process on products borne by boat structures, the boat pushing devices are arranged in one-to-one correspondence with the reaction furnaces, and the boat pushing devices are configured to send the boat structures into the reaction furnaces or transport the boat structures out of the reaction furnaces. The plurality of temporary storage devices are arranged adjacent to the boat pushing device and configured to be of a temporary storage boat structure, and the boat carrying device is arranged above the temporary storage devices and the boat pushing device and configured to carry the boat structure between the temporary storage devices and the boat pushing device. According to the passivation equipment, the multiple reaction furnaces, the multiple boat pushing devices, the multiple temporary storage devices and the boat carrying device are integrated together, so that the circulation time of the boat structure is shortened, unprocessed products are provided for the reaction furnaces in time, and therefore the passivation efficiency of the passivation equipment is improved.

Description

Technical Field

[0001] This application relates to the technical fields of photovoltaics and semiconductors, and in particular, to a passivation device and a passivation production line. Background Art

[0002] Currently, in the photovoltaics and semiconductor industries, transportation devices are provided at both the front end and the rear end of the passivation device. The transportation devices are used to transport the products before the process to the passivation device or transport the products after the process out of the passivation device. The transportation efficiency of the products is low, resulting in low passivation efficiency of the passivation device. Summary of the Utility Model

[0003] In view of this, embodiments of this application provide a passivation device and a passivation production line, which solve the problem of low passivation efficiency of the passivation device.

[0004] In a first aspect, an embodiment of this application provides a passivation device, including: a plurality of reaction furnaces, each configured to perform a passivation process on a product carried by a boat structure; a plurality of boat pushing devices, respectively corresponding to the plurality of reaction furnaces one by one, configured to send the boat structure into the reaction furnace or transport the boat structure out of the reaction furnace; a plurality of buffer devices, arranged adjacent to the boat pushing devices, configured to buffer the boat structure; and a boat handling device, arranged above the buffer devices and the boat pushing devices, configured to transport the boat structure from the buffer device to the boat pushing device, or transport the boat structure from the boat pushing device to the buffer device.

[0005] In some embodiments, the plurality of reaction furnaces are arranged in a first direction and arranged in at least one layer in the vertical direction, and the plurality of boat pushing devices are arranged in the first direction; the boat pushing devices and the reaction furnaces are arranged in a second direction, and the second direction intersects with the first direction; wherein, when the plurality of reaction furnaces are arranged in the first direction and arranged in at least two layers in the vertical direction, the boat pushing device can be lifted, so that the boat pushing device can send the boat structure into any layer of the reaction furnace or transport the boat structure out of any layer of the reaction furnace.

[0006] In some embodiments, the plurality of buffer devices are arranged in the first direction, and the buffer devices and the boat pushing devices are arranged in the second direction.

[0007] In some embodiments, the second direction is perpendicular to the first direction, and both the second direction and the first direction are horizontal directions.

[0008] In some embodiments, the boat transfer device includes: a first linear motion mechanism configured to be able to move along the second direction; a second linear motion mechanism connected to the first linear motion mechanism and configured to be able to move along the first direction, wherein the second linear motion mechanism can also move along the second direction under the drive of the first linear motion mechanism; a boat gripping mechanism connected to the second linear motion mechanism and configured to grip the boat structure, wherein the boat gripping mechanism can move along the first direction and the second direction under the drive of the second linear motion mechanism.

[0009] In some embodiments, the passivation equipment further includes: at least two conveying devices spaced apart in the vertical direction, wherein one of the conveying devices is configured to convey a carrier without loading the product, and the other conveying device is configured to convey the carrier loaded with the processed product, wherein the boat structure is configured to carry the product through the carrier; wherein a buffer station and a box loading station are arranged on one side of the conveying device, the buffer station is configured to accommodate the boat structure, and the boat transfer device is further configured to transfer the boat structure carrying the carrier loaded with the processed product from the buffer device to the buffer station; wherein the passivation equipment further includes: a blanking device adjacent to the buffer station and the conveying device and configured to transfer the carrier loaded with the processed product carried by the boat structure on the buffer station to the conveying device; a box unloading device adjacent to the conveying device and the box loading station and configured to transfer the carrier without loading the product from the conveying device to the box loading station; a product loading device adjacent to the box unloading device and configured to load the unprocessed product onto the carrier at the box loading station; a feeding device adjacent to the buffer station and the conveying device and configured to transfer the carrier loaded with the unprocessed product from the box loading station to the boat structure at the buffer station.

[0010] In some embodiments, the number of the buffer devices is greater than the number of the boat pushing devices, and the number of the boat pushing devices is greater than the number of the boat transfer devices; and / or, the number of the buffer devices is greater than or equal to four, and the number of the boat pushing devices is greater than or equal to three.

[0011] In some embodiments, the reaction furnace includes: a first furnace body having a first reaction chamber; an in-furnace track arranged in the first reaction chamber and configured to carry the boat structure; the boat pushing device includes: an out-of-furnace track docked with the in-furnace track and configured to carry the boat structure; a first boat pushing drive configured to drive the boat structure to slide along the out-of-furnace track and the in-furnace track so as to send the boat structure into the reaction furnace or transport the boat structure out of the reaction furnace.

[0012] In some embodiments, the reaction furnace includes: a second furnace body having a second reaction chamber; a support structure disposed in the second reaction chamber and configured to carry the boat structure; wherein the boat pushing device includes: a paddle configured to carry the boat structure; and a second boat pushing drive connected to the paddle to drive the paddle to transport the boat structure onto the support structure and to drive the paddle out of the second reaction chamber.

[0013] In a second aspect, an embodiment of the present application provides a passivation production line, including: at least one passivation device as described in the first aspect; wherein, when the passivation production line includes a plurality of the passivation devices, the plurality of passivation devices are arranged in a matrix in a horizontal plane, and / or the plurality of passivation devices are arranged in a matrix in a vertical plane.

[0014] The passivation device provided by the embodiment of the present application integrates a plurality of reaction furnaces, a plurality of boat pushing devices, a plurality of buffer devices, and a boat transfer device to reduce the transfer time of the boat structure and timely provide unprocessed products for the reaction furnace, thereby improving the passivation efficiency of the passivation device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other objects, features, and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation to the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1 Shown is a schematic structural diagram of a passivation device and a boat structure provided by an embodiment of the present application.

[0017] Figure 2 Shown is a schematic structural diagram of a boat structure and a product provided by an embodiment of the present application.

[0018] Figure 3 Shown is a side view of a passivation device and a boat structure provided by an embodiment of the present application.

[0019] Figure 4 Shown is a top view of a boat transfer device provided by an embodiment of the present application.

[0020] Figure 5 Shown is a side view of a boat transfer device provided by an embodiment of the present application.

[0021] Figure 6 Shown is a schematic structural diagram of a passivation device provided by another embodiment of the present application.

[0022] Figure 7 The figure shows a schematic structural diagram of a reaction furnace, a boat pushing device, and a boat structure provided by an embodiment of the present application.

[0023] Figure 8 The figure shows a schematic structural diagram of a passivation production line provided by an embodiment of the present application.

[0024] Reference numerals:

[0025] 1, passivation production line; 10, passivation equipment; 100, reaction furnace; 110, first furnace body; 1101, first reaction chamber; 120, in-furnace track; 130, second furnace body; 1301, second reaction chamber; 140, support structure; 200, boat pushing device; 210, out-of-furnace track; 220, first boat pushing drive; 230, paddle; 240, second boat pushing drive; 300, buffer device; 400, boat handling device; 410, first linear motion mechanism; 420, second linear motion mechanism; 430, boat gripping mechanism; 440, support frame; 500, conveying device; 600, blanking device; 700, lower box device; 800, product loading device; 900, loading device; 1000, vacuum pumping device; X1, first direction; X2, second direction; 101, buffer station; 102, buffer station; 103, unloading station, 2, boat structure; 3, product; 4, carrier. Detailed implementation manners

[0026] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0027] Next, the specific structure of the passivation equipment will be described in conjunction with the embodiments.

[0028] Figure 1 The figure shows a schematic structural diagram of a passivation equipment and a boat structure provided by an embodiment of the present application. Figure 2 The figure shows a schematic structural diagram of a boat structure and a product provided by an embodiment of the present application. As Figure 1 and Figure 2As shown, the passivation device 10 includes: a plurality of reaction furnaces 100, a plurality of boat pushing devices 200, a plurality of buffer devices 300, and a boat handling device 400. The plurality of reaction furnaces 100 are respectively configured to perform a passivation process on the products 3 carried by the boat structure 2. The plurality of boat pushing devices 200 are respectively arranged in one-to-one correspondence with the plurality of reaction furnaces 100, and are configured to send the boat structure 2 into the reaction furnace 100 or transport the boat structure 2 out of the reaction furnace 100. The plurality of buffer devices 300 are arranged adjacent to the boat pushing devices 200 and are configured to buffer the boat structure 2. The boat handling device 400 is arranged above the buffer devices 300 and the boat pushing devices 200, and is configured to transport the boat structure 2 from the buffer devices 300 to the boat pushing devices 200, or transport the boat structure 2 from the boat pushing devices 200 to the buffer devices 300.

[0029] By integrating the plurality of reaction furnaces 100, the plurality of boat pushing devices 200, the plurality of buffer devices 300, and the boat handling device 400, the passivation device 10 reduces the transfer time of the boat structure 2 and timely provides the reaction furnace 100 with the unprocessed products 3, thereby improving the passivation efficiency of the passivation device 10.

[0030] In addition, by arranging the boat handling device 400 above the buffer devices 300 and the boat pushing devices 200, the space above the buffer devices 300 and the boat pushing devices 200 can be reasonably utilized, the distance between the buffer devices 300 and the boat pushing devices 200 can be shortened, and the transfer time of the boat structure 2 between the buffer devices 300 and the boat pushing devices 200 can be reduced, thereby further improving the passivation efficiency of the passivation device 10.

[0031] Exemplarily, the buffer device 300 is formed by connecting a plurality of brackets. The boat handling device 400 transports the boat structure 2 carrying the processed products 3 from the boat pushing device 200 to the buffer device 300, and the buffer device 300 buffers the boat structure 2 carrying the processed products 3. At the same time, the processed products 3 carried by the boat structure 2 are cooled to a low temperature or normal temperature state on the buffer device 300, so that the processed products 3 can be taken out of the boat structure 2.

[0032] Exemplarily, the boat handling device 400 may include a robotic arm, a linear module, or other structures capable of providing driving force.

[0033] Exemplarily, the product 3 may be a silicon wafer, a solar panel, a glass substrate, etc. Exemplarily, the product 3 may be a silicon wafer with a cross-section, and the cross-section of the silicon wafer with a cross-section is the surface that needs to be passivated.

[0034] In some embodiments, such as Figure 1As shown, multiple reaction furnaces 100 are arranged along the first direction X1 and are arranged in a single layer in the vertical direction. Multiple boat pushing devices 200 are arranged along the first direction X1. The boat pushing devices 200 and the reaction furnaces 100 are arranged along the second direction X2, and the second direction X2 intersects with the first direction X1.

[0035] In some embodiments, multiple reaction furnaces 100 are arranged along the first direction X1 and are arranged in at least two layers in the vertical direction. Multiple boat pushing devices 200 are arranged along the first direction X1. The boat pushing devices 200 and the reaction furnaces 100 are arranged along the second direction X2, and the second direction X2 intersects with the first direction X1. The boat pushing devices 200 can be lifted and lowered so that the boat pushing devices 200 can send the boat structure 2 into any layer of the reaction furnace 100 or transport the boat structure 2 out of any layer of the reaction furnace 100.

[0036] The reaction furnaces 100 and the boat pushing devices 200 are regularly arranged to make more reasonable use of the space, thereby improving the passivation efficiency of the passivation device 10 in a limited space.

[0037] In some embodiments, as Figure 1 shown, multiple buffer devices 300 are arranged along the first direction X1. The buffer devices 300 and the boat pushing devices 200 are arranged along the second direction X2.

[0038] The buffer devices 300 are regularly arranged to make more reasonable use of the space, thereby improving the passivation efficiency of the passivation device 10 in a limited space.

[0039] In some embodiments, the second direction X2 is perpendicular to the first direction X1, and both the second direction X2 and the first direction X1 are horizontal directions, so that the arrangement of each device of the passivation device 10 is more regular, thereby making more reasonable use of the space and further improving the passivation efficiency of the passivation device 10 in a limited space.

[0040] In some embodiments, as Figure 4 and Figure 5 shown, the boat handling device 400 includes a first linear motion mechanism 410, a second linear motion mechanism 420, and a boat grasping mechanism 430. The first linear motion mechanism 410 is configured to be able to move along the second direction X2. The second linear motion mechanism 420 is connected to the first linear motion mechanism 410 and is configured to be able to move along the first direction X1. Driven by the first linear motion mechanism 410, the second linear motion mechanism 420 can also move along the second direction X2. The boat grasping mechanism 430 is connected to the second linear motion mechanism 420 and is configured to grasp the boat structure 2. Driven by the second linear motion mechanism 420, the boat grasping mechanism 430 can move along the first direction X1 and the second direction X2.

[0041] The second linear motion mechanism 420 of the above-mentioned boat transfer device 400 can move along the first direction X1, and driven by the first linear motion mechanism 410, the second linear motion mechanism 420 can also move along the second direction X2, so as to realize the bidirectional movement of the second linear motion mechanism 420, thereby enabling the boat grasping mechanism 430 to grasp the boat structures 2 on the buffer device 300 and the boat pushing device 200 at different positions. The structure of the boat transfer device 400 is simple, and the driving method is simple, which can further simplify the structure of the passivation equipment 10.

[0042] Exemplarily, the boat transfer device 400 further includes a support frame 440. The support frame 440 is connected to the first linear motion mechanism 410 and is configured to support the first linear motion mechanism 410. Exemplarily, the support frame 440 can be placed on the ground or hoisted on the roof of the factory building.

[0043] In some embodiments, as Figure 1 and Figure 6 shown, the passivation equipment 10 further includes at least two conveying devices 500. The at least two conveying devices 500 are arranged at intervals in the vertical direction. Among them, one conveying device 500 is configured to convey the carrier 4 without the loaded product 3, and the other conveying device 500 is configured to convey the carrier 4 loaded with the processed product 3. The boat structure 2 is configured to carry the product 3 through the carrier 4. Wherein, a buffer station 101 and a boxing station 102 are arranged on one side of the conveying device 500. The buffer station 101 is configured to accommodate the boat structure 2, and the boat transfer device 400 is further configured to transfer the boat structure 2 carrying the carrier 4 loaded with the processed product 3 from the buffer device 300 to the buffer station 101.

[0044] The passivation equipment 10 further includes a blanking device 600, a box unloading device 700, a product loading device 800 and a feeding device 900. The blanking device 600 is arranged adjacent to the buffer station 101 and the conveying device 500, and is configured to transfer the carrier 4 loaded with the processed product 3 carried by the boat structure 2 on the buffer station 101 to the conveying device 500. The box unloading device 700 is arranged adjacent to the conveying device 500 and the boxing station 102, and is configured to transfer the carrier 4 without the loaded product 3 from the conveying device 500 to the boxing station 102. The product loading device 800 is arranged adjacent to the box unloading device 700 and is configured to load the unprocessed product 3 into the carrier 4 at the boxing station 102. The feeding device 900 is arranged adjacent to the buffer station 101 and the conveying device 500, and is configured to transfer the carrier 4 loaded with the unprocessed product 3 from the boxing station 102 to the boat structure 2 at the buffer station 101.

[0045] Exemplarily, the passivation device 10 further includes two conveying devices 500, which are arranged at intervals in the vertical direction. The two conveying devices 500 are used to convey the carrier 4 without the product 3 and the carrier 4 loaded with the processed product 3 respectively.

[0046] By cooperating the lower box device 700 with one of the conveying devices 500, the carrier 4 without the product 3 is transported from the conveying device 500 to the box loading station 102. The unprocessed product 3 is loaded onto the carrier 4 at the box loading station 102 by the product loading device 800, and the carrier 4 loaded with the unprocessed product 3 is transported from the box loading station 102 to the boat structure 2 at the buffer station 101 by the feeding device 900, so as to realize the feeding process of the unprocessed product 3 in the boat structure 2.

[0047] One unloading device 600 is used to transport the carrier 4 loaded with the processed product 3 carried by the boat structure 2 at the buffer station 101 to the other conveying device 500, so as to realize the unloading of the processed product 3 in the boat structure 2.

[0048] The above-mentioned devices of the passivation device 10 cooperate with each other, and can realize the automatic synchronization of the loading and unloading processes of the product 3 in the boat structure 2, thereby further improving the passivation efficiency of the passivation device 10.

[0049] Exemplarily, the unloading device 600 may include a robotic arm, a linear module or other driving force structures that can be provided. The product loading device 800 may include a robotic arm, a linear module or other driving force structures that can be provided. The lower box device 700 may include a conveyor belt transfer line. The feeding device 900 may include a robotic arm, a linear module or other driving force structures that can be provided.

[0050] Exemplarily, the unloading device 600 and the feeding device 900 can be combined into one loading and unloading device. The loading and unloading device may include a manipulator, and the working area of the manipulator is large enough. The manipulator can transport the carrier 4 loaded with the unprocessed product 3 from the box loading station 102 to the boat structure 2 at the buffer station 101; the manipulator can also transport the carrier 4 loaded with the processed product 3 carried by the boat structure 2 at the buffer station 101 to the other conveying device 500. The above setting method can further simplify the structure of the passivation device 10.

[0051] Exemplarily, the number of buffer stations 101 is two to accommodate as many boat structures 2 as possible.

[0052] Exemplarily, the number of box loading stations 102 is multiple, so as to realize the simultaneous loading of the unprocessed product 3 onto multiple carriers 4 without the product 3, thereby further improving the efficiency of transporting the carrier 4 loaded with the unprocessed product 3 to the boat structure 2.

[0053] Exemplarily, two conveying devices 500 are arranged on the same side of the buffer station 101 and the boxing station 102 to further reduce the occupied space of the conveying devices 500, make more reasonable use of the space, and thus improve the passivation efficiency of the passivation device 10 in a limited space. Exemplarily, the conveying device 500 includes a conveyor belt transfer line, and the conveying device 500 extends along the second direction X2.

[0054] In some embodiments, the number of buffer devices 300 is greater than the number of boat pushing devices 200, and the number of boat pushing devices 200 is greater than the number of boat handling devices 400.

[0055] In some embodiments, the number of buffer devices 300 is greater than or equal to four, and the number of boat pushing devices 200 is greater than or equal to three.

[0056] By reasonably setting the number of each device, enough boat structures 2 loaded with unprocessed products are provided for the reaction furnace 100 to avoid the reaction furnace 100 waiting for unprocessed products 3.

[0057] In other words, the boat handling efficiency of the boat handling device 400 is very high and the number can be relatively small. The boat pushing device 200 needs to correspond to each reaction furnace 100 one by one, so the number of boat pushing devices 200 is more than that of the boat handling device 400. The buffer device 300 needs to buffer as many boat structures 2 as possible to provide enough boat structures 2 for the boat pushing device 200, so the number of buffer devices 300 is more than that of the boat pushing devices 200.

[0058] In some embodiments, as Figure 7 shown, the reaction furnace 100 includes a first furnace body 110 and an in-furnace track 120. The first furnace body has a first reaction chamber 1101. The in-furnace track 120 is arranged in the first reaction chamber 1101 and is configured to carry the boat structure 2. The boat pushing device 200 includes an out-of-furnace track 210 and a first boat pushing drive 220. The out-of-furnace track 210 is docked with the in-furnace track 120 and is configured to carry the boat structure 2. The first boat pushing drive 220 is configured to drive the boat structure 2 to slide along the out-of-furnace track 210 and the in-furnace track 120 to send the boat structure 2 into the reaction furnace 100 or transport the boat structure 2 out of the reaction furnace 100. The boat pushing speed is increased by the way of pushing the boat along the track.

[0059] In the related art, the boat pushing device includes an oar and a boat pushing drive. The oar can carry the boat structure and the furnace door. The boat pushing drive is connected to the oar and drives the oar to move, so as to send the boat structure into the reaction furnace, and at the same time the furnace door closes the furnace opening of the reaction furnace; or to open the furnace opening of the reaction furnace by the furnace door, and at the same time transport the boat structure out of the reaction furnace. After the oar in the related art sends the boat structure into the reaction furnace, it continues to be a carrying tool for the boat structure and the furnace door, and the oar does not withdraw from the reaction furnace. When the reaction furnace processes the product, the process gas is likely to erode the oar, resulting in a short service life of the oar.

[0060] In some embodiments, as Figure 3 shown, the reaction furnace 100 includes a second furnace body 130 and a support structure 140. The second furnace body 130 has a second reaction chamber 1301. The support structure 140 is disposed in the second reaction chamber 1301 and is configured to carry the boat structure 2. The boat pushing device 200 includes an oar 230 and a second boat pushing drive 240. The oar 230 is configured to carry the boat structure 2. The second boat pushing drive 240 is connected to the oar 230 to drive the oar 230 to transport the boat structure 2 to the support structure 140 and drive the oar 230 to withdraw from the second reaction chamber 1301. When the reaction furnace 100 processes the product 3, the oar 230 withdraws from the second reaction chamber 1301, which can avoid the process gas from eroding the oar 230, thereby increasing the service life of the oar 230.

[0061] In some embodiments, as Figure 1 shown, the passivation equipment 10 further includes a plurality of vacuum pumping devices 1000. The plurality of vacuum pumping devices 1000 are respectively arranged in one-to-one correspondence with the plurality of reaction furnaces 100 and are configured to extract the gas in the internal space of the reaction furnace 100 so that the pressure in the internal space of the reaction furnace 100 meets the process production requirements. Exemplarily, the vacuum pumping device 1000 is disposed on a side of the reaction furnace 100 away from the boat pushing device 200. The plurality of vacuum pumping devices 1000 are arranged along the first direction X1, and the vacuum pumping device 1000 and the reaction furnace 100 are arranged along the second direction X2.

[0062] Exemplarily, as Figure 1 shown, one side of the conveying device 500 adjacent to the vacuum pumping device 1000 has a unloading station 103, and the unloading station 103 is configured to accommodate the carrier 4 loaded with the processed product 3 conveyed by one conveying device 500. At the unloading station 103, the processed product 3 loaded on the carrier 4 is taken out, and the processed product 3 is conveyed to the next process equipment for the next process. The carrier 4 not loaded with the product 3 is conveyed by another conveying device 500 to a side close to the buffer device 300.

[0063] Figure 8 shown is a schematic structural diagram of a passivation production line provided by an embodiment of the present application. As Figure 8As shown, the passivation production line 1 includes at least one passivation device 10 as mentioned in the above embodiments. Among them, when the passivation production line 1 includes a plurality of passivation devices 10, the plurality of passivation devices 10 are arranged in a matrix in the horizontal plane, or the plurality of passivation devices 10 are arranged in a matrix in the vertical plane, or the plurality of passivation devices 10 are arranged in a matrix in both the horizontal plane and the vertical plane.

[0064] Since the passivation production line 1 includes the passivation device 10, all the technical features and technical effects of the passivation device 10 are included in the passivation production line 1, and will not be elaborated here.

[0065] In each embodiment of the present disclosure, if not clearly defined, the connection form can be a detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the form of detachable cooperation, an irreversible connection can be made by means of welding, bonding, etc.

[0066] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, benefits, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, benefits, effects, etc. are essential for each embodiment of the present application. In addition, the above disclosed specific details are only for the purpose of illustration and easy understanding, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.

[0067] In the present application, the block diagrams of the devices, apparatuses, equipment, and systems involved are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any way. Words such as "including", "comprising", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with each other. The words "or" and "and" used here refer to the word "and / or", and can be used interchangeably with each other, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to", and can be used interchangeably with each other.

[0068] It should also be noted that in the devices, equipment, and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present application.

[0069] The foregoing description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Thus, the present application is not intended to be limited to the aspects shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0070] The foregoing description has been presented for purposes of illustration and description. Furthermore, the description is not intended to limit embodiments of the present application to the form disclosed herein. Although several example aspects and embodiments have been discussed above, those skilled in the art will recognize some variations, modifications, alterations, additions, and subcombinations thereof.

Claims

1. A passivation device, characterized in that: include: A plurality of reaction furnaces, each configured to perform a passivation process on a product carried by the boat structure; A plurality of boat pushing devices are respectively arranged corresponding to the plurality of reaction furnaces, and are configured to send the boat structure into the reaction furnace or to transport the boat structure out of the reaction furnace; a plurality of buffer devices, disposed adjacent to the boat pushing device and configured to buffer the boat structure; The boat moving device is disposed above the buffer device and the boat pushing device, and is configured to move the boat structure from the buffer device to the boat pushing device, or move the boat structure from the boat pushing device to the buffer device.

2. The passivation device according to claim 1, characterized in that The plurality of reaction furnaces are arranged along a first direction and are arranged in at least one layer along a vertical direction, and the plurality of boat pushing devices are arranged along the first direction; The boat pusher device and the reaction furnace are arranged along a second direction, and the second direction intersects with the first direction; Among them, when multiple reaction furnaces are arranged along the first direction and arranged into at least two layers in the vertical direction, the boat pushing device can be raised and lowered so that the boat pushing device can send the boat structure into the reaction furnace on any layer or transport the boat structure out of the reaction furnace on any layer.

3. The passivation device according to claim 2, characterized in that: The plurality of cache devices are arranged along the first direction, and the cache devices and the boat pusher device are arranged along the second direction.

4. The passivation device according to claim 3, characterized in that The second direction is perpendicular to the first direction, and the second direction and the first direction are both horizontal directions.

5. The passivation device according to claim 3, characterized in that: The boat moving device comprises: A first linear motion mechanism, configured to be movable along the second direction; a second linear motion mechanism connected to the first linear motion mechanism and configured to be able to move along the first direction, wherein the second linear motion mechanism is driven by the first linear motion mechanism and can also move along the second direction; The boat grabbing mechanism is connected to the second linear motion mechanism and is configured to grab the boat structure, wherein the boat grabbing mechanism is driven by the second linear motion mechanism to move along the first direction and the second direction.

6. The passivation device according to any one of claims 1 to 5, characterized in that: Also includes: at least two conveying devices arranged at intervals in the vertical direction, wherein one of the conveying devices is configured to convey a carrier without the product, and the other conveying device is configured to convey the carrier loaded with the processed product, wherein the boat structure is configured to carry the product through the carrier; Wherein, a buffer station and a boxing station are provided on one side of the conveying device, the buffer station is configured to accommodate the boat structure, and the boat moving device is further configured to move the boat structure carrying the carrier loaded with the processed product from the buffer device to the buffer station; Wherein, the passivation equipment also includes: a material unloading device, disposed adjacent to the buffer station and the conveying device, and configured to carry the carrier loaded with the processed product carried by the boat structure on the buffer station to the conveying device; a cartoning device, disposed adjacent to the conveying device and the cartoning station, and configured to carry the carrier without the product loaded thereon from the conveying device to the cartoning station; A product loading device, disposed adjacent to the unpacking device, configured to load the unprocessed product onto the carrier on the packing station; A loading device is disposed adjacent to the buffer station and the conveying device, and is configured to transport the carrier loaded with the unprocessed product from the boxing station to the boat structure of the buffer station.

7. The passivation device according to any one of claims 1 to 5, characterized in that: The number of the buffer devices is greater than the number of the boat pushing devices, and the number of the boat pushing devices is greater than the number of the boat moving devices; And / or, the number of the cache devices is greater than or equal to four, and the number of the boat pushing devices is greater than or equal to three.

8. The passivation device according to any one of claims 1 to 5, characterized in that: The reactor comprises: A first furnace body having a first reaction chamber; An in-furnace track, disposed in the first reaction chamber and configured to carry the boat structure; The boat pushing device comprises: An outer furnace rail, docked with the inner furnace rail, configured to carry the boat structure; The first boat pusher is configured to drive the boat structure to slide along the outer rail and the inner rail to send the boat structure into the reaction furnace or to transport the boat structure out of the reaction furnace.

9. The passivation device according to any one of claims 1 to 5, characterized in that: The reactor comprises: A second furnace body having a second reaction chamber; a support structure, disposed in the second reaction chamber and configured to support the boat structure; Wherein, the boat pushing device comprises: a paddle configured to carry the boat structure; The second boat pusher is connected to the paddle to drive the paddle to transport the boat structure to the support structure, and drives the paddle to exit the second reaction chamber.

10. A passivation production line, characterized in that: include: At least one passivation device according to any one of claims 1 to 9; Wherein, when the passivation production line includes a plurality of the passivation devices, the plurality of the passivation devices are arranged in a matrix in a horizontal plane, and / or the plurality of the passivation devices are arranged in a matrix in a vertical plane.

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