Rod stabilizing mechanism

Abstract

A rod stabilizing mechanism comprises a rod sliding rail, a suction cup assembly and a floating supporting assembly. The rod body sliding rail is provided with a cutting tool withdrawal groove, the floating supporting assembly comprises at least two supporting parts, and the supporting parts are arranged on the two sides of the cutting tool withdrawal groove respectively. Each supporting part is provided with an independent first driving part, and the first driving parts are used for controlling the supporting parts to do lifting motion; the suction cup assembly is used for positioning the rod body arranged on the rod body sliding rail. According to the utility model, the cutting tool withdrawal groove arranged on the rod body slide rail is taken as a reference, the supporting parts are arranged on the two sides, and the supporting parts of the floating supporting assembly are used for stably supporting the two sides of the cutting area of the rod body respectively, so that the abnormities such as edge breakage or inclined cutting in the cutting process are prevented; and meanwhile, the two supporting parts of the floating supporting assembly are provided with opposite driving parts, the rods are sequentially jacked when being supported, the situation that the rods are derailed due to the fact that the rods are excessively impacted by simultaneous jacking is prevented, and the operation stability of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of hard and brittle material cutting, and particularly relates to a rod body stabilizing mechanism. Background Art

[0002] In the processing of single crystal silicon rods, the cutting process is a crucial step. To obtain high-quality single crystal silicon wafers, the cutting process must have high precision and high stability. However, in actual operation, since the silicon rod after crystal pulling cannot guarantee that the rod body is a cylinder with a uniform size everywhere, and the rod body may also displace or vibrate during the cutting process, ultimately resulting in a decline in cutting quality, problems such as chipping and cutting skew occur. This not only affects the product quality but also may lead to material waste and reduced production efficiency.

[0003] In the prior art, since the position of the rod body needs to be frequently adjusted during the cutting process, it is difficult for traditional fixed support structures (such as roller racks, etc.) to achieve rapid and precise positioning, further increasing the complexity of the operation and the possibility of errors. During the cutting process, especially when cutting a long or heavy single crystal silicon rod, without an effective support structure, the rod body is prone to displacement or vibration during cutting, resulting in a decline in cutting accuracy and even possible damage to the equipment. Summary of the Utility Model

[0004] The technical problem to be solved by the utility model is: to provide a rod body stabilizing mechanism to solve the problem of insufficient stability during the cutting process of single crystal silicon rods.

[0005] To solve the above technical problem, the technical solution adopted by the utility model is:

[0006] A rod body stabilizing mechanism includes a rod body slide rail, a suction cup assembly, and a floating support assembly;

[0007] The rod body slide rail is provided with a cutting retraction groove, the floating support assembly includes at least two support parts, and the support parts are respectively arranged on both sides of the cutting retraction groove; each support part is provided with an independent first driving part, and the first driving part is used to control the lifting movement of the support part;

[0008] The suction cup assembly is used to position the rod body placed on the rod body slide rail.

[0009] Further, the number of the suction cup assemblies is two, and the suction cup assemblies are respectively arranged at both ends of the rod body slide rail.

[0010] Further, the suction cup assembly includes a suction cup part and a second driving part, the second driving part is in transmission connection with the suction cup part, and the second driving part is used to drive the suction cup part to move axially along the rod body slide rail.

[0011] Further, the suction cup portion includes a positioning suction cup, a pressing ring plate, and a driving cylinder; the positioning suction cup passes through the pressing ring plate, the driving cylinder is in transmission connection with the positioning suction cup, and the driving cylinder is used to drive the positioning suction cup to move axially along the rod body slide rail.

[0012] Further, the suction cup portion further includes a ranging sensor, and the ranging sensor is used to calculate the distance between the suction cup portion and the rod body.

[0013] Further, the suction cup portion further includes at least four sheet-taking suction cups, and the sheet-taking suction cups are evenly distributed with the positioning suction cup as the center; the sheet-taking suction cups are in transmission connection with the driving cylinder.

[0014] Further, the suction cup portion further includes a locking cylinder, and the locking cylinder is used to lock the positions of the positioning suction cup and the sheet-taking suction cups.

[0015] Further, the suction cup portion further includes a contact sensor, the position of the sensing point of the contact sensor matches the adsorption position of the suction cup portion, and the contact sensor is used to confirm that the suction cup portion contacts the surface of the silicon rod.

[0016] Further, the number of the support portions is an even number, and the support portions are symmetrically arranged on both sides of the cutting retraction groove.

[0017] Further, the support portion includes a support table and symmetrically arranged support plates, the support plates are arranged on the support table, and the first driving portion is used to control the support table to perform lifting movement.

[0018] The beneficial effects of the present utility model are as follows: a rod body stabilizing mechanism is provided. Taking the cutting retraction groove provided on the rod body slide rail as a reference, support portions are arranged on both sides. When cutting a single crystal silicon rod, after positioning the rod body to be cut by using the suction cup assembly, the support portions of the floating support assembly are operated to respectively provide stable support for both sides of the cutting area of the rod body, preventing abnormal conditions such as chipping or skewed cutting during the cutting process; at the same time, the two support portions of the floating support assembly are provided with driving portions that oppose each other and are jacked up in sequence when providing support for the rod body, preventing excessive impact on the rod body caused by simultaneous jacking and resulting in derailment of the rod body, and improving the operating stability of the device. Description of the Drawings

[0019] Figure 1 is a schematic application diagram of a rod body stabilizing assembly in an embodiment of the present utility model;

[0020] Figure 2 is a schematic position relationship diagram of a rod body slide rail and a floating support assembly in an embodiment of the present utility model;

[0021] Figure 3 is Figure 2Local enlarged view A in;

[0022] Figure 4 Schematic diagram of the cooperation relationship between the suction cup assembly and the floating support assembly in the embodiment of the present utility model;

[0023] Figure 5 is Figure 4 Local enlarged view B in;

[0024] Figure 6 Schematic diagram of the operation of the pick-up suction cup in the embodiment of the present utility model;

[0025] Figure 7 is Figure 4 Local enlarged view C in;

[0026] Figure 8 Schematic diagram of the structure of the suction cup assembly in the embodiment of the present utility model;

[0027] Figure 9 Schematic diagram of the structure of the suction cup part in the embodiment of the present utility model;

[0028] Figure 10 Schematic diagram of the positional relationship of the sensor in the suction cup part in the embodiment of the present utility model;

[0029] Figure 11 Schematic diagram of the overall structure of the floating support assembly in the embodiment of the present utility model;

[0030] Figure 12 Schematic diagram of the internal structure of the floating support assembly in the embodiment of the present utility model;

[0031] Label description:

[0032] 1. Rod body slide rail; 11. Cutting retraction groove; 2. Suction cup assembly; 21. Suction cup part; 211. Positioning suction cup; 212. Pressing ring plate; 213. Driving cylinder; 214. Distance measuring sensor; 215. Pick-up suction cup; 216. Locking cylinder; 22. Second driving part; 3. Floating support assembly; 31. Support part; 311. Support table; 312. Support plate; 32. First driving part; 4. Rod body. Specific implementation manner

[0033] To describe in detail the technical content, achieved purpose and effects of the present utility model, the following is described in conjunction with the implementation manners and with reference to the accompanying drawings.

[0034] Please refer to Figures 1 to 7 , a rod body stabilizing mechanism, including a rod body slide rail 1, a suction cup assembly 2 and a floating support assembly 3;

[0035] The rod slide rail 1 is provided with a cutting retraction groove 11. The floating support assembly 3 includes at least two support parts 31, and the support parts 31 are respectively arranged on both sides of the cutting retraction groove 11. Each of the support parts 31 is provided with an independent first driving part 32, and the first driving part 32 is used to control the lifting movement of the support part 31.

[0036] The suction cup assembly 2 is used to position the rod placed on the rod slide rail 1.

[0037] As can be seen from the above description, the beneficial effect of the present utility model is as follows: A rod stability mechanism is provided. Taking the cutting retraction groove 11 provided on the rod slide rail 1 as a reference, support parts 31 are arranged on both sides. When cutting a single crystal silicon rod, after positioning the rod to be cut by using the suction cup assembly 2, the support parts 31 of the floating support assembly 3 are used to provide stable support on both sides of the cutting area of the rod, preventing abnormal conditions such as chipping or skewed cutting during the cutting process. At the same time, the two support parts 31 of the floating support assembly 3 are provided with driving parts that oppose each other, and are jacked up in sequence when providing support to the rod, preventing excessive impact on the rod caused by simultaneous jacking, resulting in derailment of the rod, and improving the stability of the operation of the device.

[0038] Further, the number of the suction cup assemblies 2 is two, and the suction cup assemblies 2 are respectively arranged at both ends of the rod slide rail 1.

[0039] As can be seen from the above description, it is proposed that the number of the suction cup assemblies 2 is two, and they are respectively arranged at both ends of the rod slide rail 1, which can provide uniform positioning and support at both ends of the rod, making the rod more stable during the entire cutting process, further reducing the possible deviation during the cutting process, and improving the processing accuracy.

[0040] Please refer to Figure 8 Furthermore, the suction cup assembly 2 includes a suction cup part 21 and a second driving part 22. The second driving part 22 is in transmission connection with the suction cup part 21, and the second driving part 22 is used to drive the suction cup part 21 to move along the axial direction of the rod slide rail 1.

[0041] As can be seen from the above description, the second driving part 22 is used to drive the suction cup part 21 to move along the axial direction of the rod slide rail 1. Through this design, the suction cup assembly 2 can be driven to move from both ends of the rod slide rail 1, adjusted according to the length and specific position of the rod, realizing adaptive positioning of rods with different lengths, and improving the versatility and flexibility of the device.

[0042] Please refer to Figures 9 to 10, Further, the suction cup part 21 includes a positioning suction cup 211, a pressing ring plate 212, and a driving cylinder 213; the suction cup part 21 includes a positioning suction cup 211, a pressing ring plate 212, and a driving cylinder 213; the positioning suction cup 211 passes through the pressing ring plate 212, the driving cylinder 213 is in transmission connection with the positioning suction cup 211, and the driving cylinder 213 is used to drive the positioning suction cup 211 to move axially along the rod body slide rail 1.

[0043] As can be seen from the above description, the pressing ring plate 212 and the positioning suction cup 211 are provided on the suction cup part 21. After the pressing ring plate 212 contacts the end face of the rod body, the positioning suction cup 211 is used for adsorption, so that the positioning suction cup 211 can more stably adsorb the end face of the rod body and ensure the stability of the cutting process. Specifically, since the pressing ring plate 212 is a rigid structure, compared with only adsorbing through the suction cup assembly 2, the rigid structure makes the position detection of the end face of the rod stock more accurate and has a better effect of stabilizing the rod stock than the flexible suction cup.

[0044] Further, the suction cup part 21 further includes a distance measuring sensor 214, and the distance measuring sensor 214 is used to calculate the distance between the suction cup part 21 and the rod body.

[0045] As can be seen from the above description, the distance measuring sensor 214 is used to calculate the distance between the suction cup part 21 and the rod body. According to the obtained distance, the movement speed and position of the suction cup part 21 can be monitored and adjusted in real time, improving the positioning accuracy and stability and further ensuring the cutting quality. Specifically, the distance measuring sensor 214 is an optoelectronic sensor. When the action sensor senses a preset distance from the end face of the rod body, it controls the suction cup to extend for the adsorption action. When the limit position sensor is triggered, it controls the suction cup to complete the adsorption action and report to the control center.

[0046] Please refer to Figures 6 to 10 , Further, the suction cup part 21 further includes at least four sheet-taking suction cups 215, and the sheet-taking suction cups 215 are evenly distributed around the positioning suction cup 211; the sheet-taking suction cups 215 are in transmission connection with the driving cylinder 213.

[0047] As can be seen from the above description, the suction cup part 21 further includes at least four sheet-taking suction cups 215, which are evenly distributed around the positioning suction cup 211. When slicing the rod body, the sheet-taking suction cups 215 are used to adsorb and support the slices at multiple points, improving the stability and support effect of the suction cup assembly 2.

[0048] Further, the suction cup part 21 further includes a locking cylinder 216, and the locking cylinder 216 is used to lock the positions of the positioning suction cup 211 and the sheet-taking suction cups 215 respectively.

[0049] As can be seen from the above description, the locking cylinder 216 is used to lock the positions of the positioning suction cup 211 and the wafer picking suction cup 215 respectively. After positioning and supporting the rod body, the positions of the suction cups are firmly locked to prevent the positions of the suction cups from moving due to external forces during the cutting process, improving the reliability and safety of the overall device.

[0050] Preferably, the suction cup part 21 further includes a contact sensor 217. The position of the sensing point of the contact sensor 217 matches the suction position of the suction cup. The contact sensor is used to confirm that the sensing point has contacted the surface of the silicon rod. Specifically, the contact sensor 217 is a mechanical sensor. A spring is provided inside the component where the sensing point is located. When the sensing point is triggered, it is confirmed that the above-mentioned pressing ring plate has contacted the surface of the silicon rod, and the cutting program is started.

[0051] Furthermore, the second driving part 22 is also provided with a speed sensor, and the speed sensor is used to control the driving speed of the second driving part 22.

[0052] As can be seen from the above description, the second driving part 22 is also provided with a speed sensor for controlling its driving speed, which can precisely control the movement speed of the suction cup part 21. When approaching the end face of the rod body, the second driving part 22 is controlled to decelerate and approach, leaving an operating space for the suction cup part 21, avoiding affecting the positioning and cutting accuracy due to too fast or too slow speed, and further improving the operation efficiency and quality of the device.

[0053] Please refer to Figures 11 to 12 , furthermore, the number of the support parts 31 is an even number, and the support parts 31 are symmetrically arranged on both sides of the cutting relief groove 11.

[0054] As can be seen from the above description, being symmetrically arranged on both sides of the cutting relief groove 11 and evenly distributing the supporting force, the rod body is more evenly stressed during the cutting process, avoiding the rod body from tilting or breaking due to excessive unilateral force, and improving the stability and safety of cutting.

[0055] Furthermore, the support part 31 includes a support platform 311 and symmetrically arranged support plates 312. The support plates 312 are arranged on the support platform 311, and the first driving part 32 is used to control the lifting movement of the support platform 311.

[0056] As can be seen from the above description, it is proposed that the support part 31 includes a support platform 311 and symmetrically arranged support plates 312. The support plates 312 are arranged on the support platform 311, and the first driving part 32 is used to control the lifting movement of the support platform 311, flexibly adjusting the height and position of the support plates 312 to adapt to rod bodies of different sizes and shapes, ensuring stable support during the cutting process, preventing the rod body from moving, and improving the processing accuracy and stability.

[0057] The utility model provides a rod body stabilizing mechanism, which is mainly applied to the positioning process of the single crystal silicon rod cutting process. The following is a specific description in combination with the embodiments.

[0058] Please refer to Figures 1 to 7 , Embodiment 1 of the present utility model is as follows:

[0059] A rod body stabilizing mechanism includes a rod body slide rail 1, a suction cup assembly 2 and a floating support assembly 3; the rod body slide rail 1 is provided with a cutting retraction groove 11, the floating support assembly 3 includes at least two support parts 31, and the support parts 31 are respectively arranged on both sides of the cutting retraction groove 11; each support part 31 is provided with an independent first driving part 32, and the first driving part 32 is used to control the lifting movement of the support part 31; the suction cup assembly 2 is used to position the rod body arranged on the rod body slide rail 1.

[0060] That is, in this embodiment, taking the cutting retraction groove 11 provided on the rod body slide rail 1 as a reference, the support parts 31 are arranged on both sides. When cutting the single crystal silicon rod, please refer to Figure 5 , after positioning the rod body to be cut by using the suction cup assembly 2, then use the support parts 31 of the floating support assembly 3 to operate to respectively provide stable support for both sides of the cutting area of the rod body, preventing abnormal conditions such as chipping or skewed cutting during the cutting process; at the same time, the two support parts 31 of the floating support assembly 3 are provided with driving parts that oppose each other, and are sequentially lifted when providing support for the rod body, preventing excessive impact on the rod body caused by simultaneous lifting, resulting in the derailment of the rod body, and improving the operating stability of the device.

[0061] Please refer to Figures 6 to 10 , Embodiment 2 of the present utility model is as follows:

[0062] On the basis of Embodiment 1, the number of the suction cup assemblies 2 is two, and the suction cup assemblies 2 are respectively arranged at both ends of the rod body slide rail 1. The suction cup assembly 2 includes a suction cup part 21 and a second driving part 22, and the second driving part 22 is used to drive the suction cup part 21 to move along the axial direction of the rod body slide rail 1. The second driving part 22 is used to drive the suction cup part 21 to move along the axial direction of the rod body slide rail 1, drive the suction cup assembly 2 to move from both ends of the rod body slide rail 1, and adjust according to the length and specific position of the rod body to achieve adaptive positioning of rods with different lengths, improving the versatility and flexibility of the device.

[0063] Specifically, please refer to Figures 9 to 10, the suction cup part 21 includes a positioning suction cup 211, a pressing ring plate 212, and a driving cylinder 213; the positioning suction cup 211 passes through the pressing ring plate 212, and the driving cylinder 213 is used to drive the positioning suction cup 211 to move along the axial direction of the rod body slide rail 1. The pressing ring plate 212 and the positioning suction cup 211 are provided on the suction cup part 21. After the pressing ring plate 212 contacts the end face of the rod body, the positioning suction cup 211 is used for adsorption, so that the positioning suction cup 211 can more stably adsorb the end face of the rod body, ensuring the stability of the cutting process. At the same time, the suction cup part 21 further includes six sheet-taking suction cups 215, and the sheet-taking suction cups 215 are evenly distributed around the positioning suction cup 211. When slicing the rod body, the sheet-taking suction cups 215 are used to perform multi-point adsorption and support on the slices, improving the stability and support effect of the suction cup assembly 2. In addition, the positioning suction cup 211 and the sheet-taking suction cups 215 are both equipped with locking cylinders 216 to lock the cylinders driving the suction cups when the adsorption is completed.

[0064] The suction cup part 21 further includes a distance measuring sensor 214, and the distance measuring sensor 214 is used to calculate the distance between the suction cup part 21 and the rod body. The distance measuring sensor 214 includes an action sensor and a limit position sensor. When the action sensor senses a preset distance from the end face of the rod body, it controls the suction cup to extend for adsorption action. When the limit position sensor is triggered, it controls the suction cup to complete the adsorption action and report to the control center. It can be understood that the control center is used to receive and process the detection data of all sensors in the entire device, and control the corresponding components to act according to the preset process.

[0065] Please refer to Figures 11 to 12 , Embodiment 3 of the present invention is as follows:

[0066] On the basis of Embodiment 1, the number of the support parts 31 is an even number, and the support parts 31 are symmetrically arranged on both sides of the cutting retraction groove 11, so that the rod body is more evenly stressed during the cutting process, avoiding the rod body from tilting or breaking due to excessive unilateral force, and improving the stability and safety of the cutting. The support part 31 includes a support table 311 and symmetrically arranged support plates 312, the support plates 312 are arranged on the support table 311, and the first driving part 32 is used to control the support table 311 to perform lifting movement.

[0067] In summary, the rod body stabilizing mechanism of the present invention can provide accurate positioning and stable support through the coordinated action of the suction cup assembly 2 and the floating support assembly 3 during the process of cutting a single crystal silicon rod, prevent abnormal situations such as chipping and cutting skew during the cutting process, improve the cutting quality and the operating stability of the device, and has high practical value and application prospects.

[0068] The above are only embodiments of the present utility model, and thus do not limit the patent scope of the present utility model. Any equivalent transformation made by using the content of the specification and drawings of the present utility model, or directly or indirectly applied in the relevant technical fields, shall be similarly included within the patent protection scope of the present utility model.

Claims

1. A rod stabilizing mechanism, characterized in that: It includes a rod body slide rail, a suction cup assembly and a floating support assembly; The rod slide rail is provided with a cutting back groove, and the floating support assembly includes at least two support parts, which are respectively arranged on both sides of the cutting back groove; each of the support parts is provided with an independent first driving part, and the first driving part is used to control the support part to perform lifting movement; The suction cup assembly is used to position the rod body placed on the rod body slide rail.

2. A rod stabilizing mechanism according to claim 1, characterized in that: The number of the suction cup assemblies is two, and the suction cup assemblies are respectively arranged at two ends of the rod body slide rail.

3. A rod stabilizing mechanism according to claim 2, characterized in that: The suction cup assembly comprises a suction cup portion and a second driving portion, the second driving portion is in transmission connection with the suction cup portion, and the second driving portion is used for driving the suction cup portion to move axially along the rod body slide rail.

4. A rod stabilizing mechanism according to claim 3, characterized in that: The suction cup part includes a positioning suction cup, a pressure ring plate and a driving cylinder; the positioning suction cup is penetrated by the pressure ring plate, the driving cylinder is transmission-connected to the positioning suction cup, and the driving cylinder is used to drive the positioning suction cup to move axially along the rod slide rail.

5. The rod stabilizing mechanism according to claim 3, characterized in that: The suction cup part also includes a distance measuring sensor, and the distance measuring sensor is used to calculate the distance between the suction cup part and the rod body.

6. A rod stabilizing mechanism according to claim 4, characterized in that: The suction cup part also includes at least four film-taking suction cups, which are evenly distributed with the positioning suction cup as the center; the film-taking suction cups are drivingly connected to the driving cylinder.

7. A rod stabilizing mechanism according to claim 6, characterized in that: The suction cup part also includes a locking cylinder, and the locking cylinder is used to lock the positions of the positioning suction cup and the film taking suction cup.

8. The rod stabilizing mechanism according to claim 3, characterized in that: The suction cup part further includes a contact sensor, the position of the sensing point of the contact sensor matches the adsorption position of the suction cup part, and the contact sensor is used to confirm that the suction cup part contacts the surface of the silicon rod.

9. The rod stabilizing mechanism according to claim 1, characterized in that: The number of the support parts is an even number, and the support parts are symmetrically arranged on both sides of the cutting back groove.

10. The rod stabilizing mechanism according to claim 1, characterized in that: The support part includes a support platform and a symmetrically arranged support plate, the support plate is arranged on the support platform, and the first driving part is used to control the support platform to perform lifting movement.

Images