Silicon nitride deposition furnace tube

Abstract

The utility model discloses a silicon nitride deposition furnace tube which comprises a base, one side of the base is fixedly connected with an inner tube, one side of the base is fixedly connected with an outer tube, the side wall of the outer tube is provided with a runner tube, one end, far away from the base, of the outer tube is fixedly connected with an end plate, and one side of the end plate is provided with a rotating tube in a penetrating manner. The end, located on the outer pipe, of the rotating pipe is fixedly connected with an inner plate, the side wall of the inner plate is provided with a communicating mechanism used for communicating with the rotating pipe, the side wall of the rotating pipe is provided with a mounting pipe, and the side wall of the mounting pipe is fixedly connected with a plurality of circumferentially-arranged connecting frames. Through the inner and outer tube structure, the inner wall attachment area of the furnace tube is increased, the problem that the property of silicon nitride is affected due to the fact that the deposition thickness of the tube wall is large is solved, meanwhile, the inner side and the outer side of the inner tube and the outer tube can be cleaned at the same time in cooperation with movement of the inner plate and the outer ring, cleaning efficiency is improved, and meanwhile use of the furnace tube cannot be affected and interfered.

Description

Technical Field

[0001] The utility model relates to the technical field of deposition tubes, in particular to a silicon nitride deposition furnace tube. Background Art

[0002] The silicon nitride deposition tube, an industrial component with excellent performance, is mainly made of silicon nitride material, which has good high-temperature tolerance and corrosion resistance.

[0003] However, when the silicon nitride deposition tube is in use, sediment accumulation and stacking will occur on its surface after long-term use. The accumulation and adhesion of sediments will affect its properties. Therefore, regular cleaning is required. The traditional cleaning method needs to remove the deposition furnace tube for cleaning, which not only has low cleaning efficiency but also affects the use of the deposition furnace tube. Summary of the Utility Model

[0004] The purpose of the utility model is to solve the defects existing in the prior art and propose a silicon nitride deposition furnace tube.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A silicon nitride deposition furnace tube includes a base. One side of the base is fixedly connected with an inner tube, and one side of the base is fixedly connected with an outer tube. A flow pipe is arranged on the side wall of the outer tube. One end of the outer tube far from the base is fixedly connected with an end plate. A rotating tube penetrates through one side of the end plate. One end of the rotating tube located in the outer tube is fixedly connected with an inner plate. A communication mechanism for communicating the rotating tube is arranged on the side wall of the inner plate. An installation pipe is arranged on the side wall of the rotating tube. A plurality of circumferentially arranged connecting frames are fixedly connected to the side wall of the installation pipe. One end of the plurality of connecting frames far from the installation pipe is fixedly connected with an outer ring. The outer ring is slidably connected in the outer tube. A guiding mechanism for guiding the connecting frames during movement is arranged on the opposite side walls of the rotating tube and the installation pipe.

[0007] Preferably, the communication mechanism includes a plurality of circumferentially arranged collection grooves opened on the side wall of the inner plate, and the plurality of collection grooves are all communicated with the rotating tube.

[0008] Preferably, the guiding mechanism includes a plurality of circumferentially arranged clamping grooves opened on the side wall of the rotating tube, and a plurality of circumferentially arranged clamping blocks are fixedly connected to the inner wall of the installation pipe. The clamping blocks are slidably connected in the clamping grooves.

[0009] Preferably, one end of the installation pipe far from the inner plate is rotatably connected with an adjusting nut, and the adjusting nut is threadedly connected to the rotating tube.

[0010] Preferably, a sealing gasket is slidably connected to the side wall of the connecting frame, and the sealing gasket is attached to the end plate.

[0011] Preferably, a fitting groove is provided on one side of the end plate close to the inner plate, the outer ring is matched with the fitting groove, a collecting groove is provided on the side wall of the outer ring, and the collecting groove corresponds to the communicating groove.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] 1. The present utility model is provided with structures such as an inner tube, an outer tube, an inner plate, and an outer ring. Through the inner and outer tube structures, the adhesion area of the inner wall of the furnace tube is increased, avoiding the problem that the deposition thickness of the tube wall is too thick and affects the properties of silicon nitride. At the same time, in cooperation with the movement of the inner plate and the outer ring, the inner and outer sides of the inner and outer tubes can be cleaned simultaneously, improving the cleaning efficiency without affecting and interfering with the use of the furnace tube.

[0014] 2. The present utility model is provided with structures such as a connecting frame, a mounting tube, a rotating tube, a collecting groove, and a communicating groove. By establishing communication between the rotating tube, the collecting groove, and the communicating groove, the attachments for cleaning treatment can be conveniently collected and discharged from the furnace tube, facilitating the collection and treatment process of the sediment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a schematic internal structure diagram of a silicon nitride deposition furnace tube proposed by the present utility model;

[0016] Figure 2 is a schematic connection frame installation structure diagram of a silicon nitride deposition furnace tube proposed by the present utility model;

[0017] Figure 3 is a schematic mounting tube installation structure diagram of a silicon nitride deposition furnace tube proposed by the present utility model;

[0018] Figure 4 is a schematic overall structure diagram of a mounting tube of a silicon nitride deposition furnace tube proposed by the present utility model.

[0019] In the figure: 1 base, 2 inner tube, 3 outer tube, 4 end plate, 5 rotating tube, 6 connecting frame, 7 fitting groove, 8 outer ring, 9 inner plate, 10 flow pipe, 11 mounting tube, 12 adjusting nut, 13 communicating groove, 14 collecting groove, 15 clamping groove, 16 sealing washer. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] In order to make the above - mentioned objects, features and advantages of the present utility model more obvious and understandable, the following will describe in detail the specific embodiments of the present utility model with reference to the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.

[0021] Referring to Figures 1-4 , a silicon nitride deposition furnace tube, comprising a base 1, one side of the base 1 is fixedly connected with an inner tube 2, one side of the base 1 is fixedly connected with an outer tube 3, a flow - through tube 10 is arranged on the side wall of the outer tube 3, one end of the outer tube 3 away from the base 1 is fixedly connected with an end plate 4, a rotating tube 5 penetrates through one side of the end plate 4, an inner plate 9 is fixedly connected to one end of the rotating tube 5 located in the outer tube 3, and a communicating mechanism for communicating with the rotating tube 5 is arranged on the side wall of the inner plate 9. The communicating mechanism includes a plurality of circumferentially arranged collecting grooves 14 opened on the side wall of the inner plate 9, and the plurality of collecting grooves 14 are all communicated with the rotating tube 5.

[0022] An installation tube 11 is arranged on the side wall of the rotating tube 5, one end of the installation tube 11 away from the inner plate 9 is rotatably connected with an adjusting nut 12, the adjusting nut 12 is threadedly connected to the rotating tube 5, a plurality of circumferentially arranged connecting frames 6 are fixedly connected to the side wall of the installation tube 11, a sealing gasket 16 is slidably connected to the side wall of the connecting frame 6, and the sealing gasket 16 is in contact with the end plate 4.

[0023] One end of the plurality of connecting frames 6 away from the installation tube 11 is fixedly connected with an outer ring 8, a fitting groove 7 is opened on one side of the end plate 4 close to the inner plate 9, the outer ring 8 is matched with the fitting groove 7, and a collecting groove 14 is opened on the side wall of the outer ring 8, and the collecting groove 14 corresponds to the communicating groove 13;

[0024] The outer ring 8 is slidably connected in the outer tube 3, and a guiding mechanism for guiding the connecting frame 6 during movement is arranged on the opposite side walls of the rotating tube 5 and the installation tube 11. The guiding mechanism includes a plurality of circumferentially arranged clamping grooves 15 opened on the side wall of the rotating tube 5, and a plurality of circumferentially arranged clamping blocks are fixedly connected to the inner wall of the installation tube 11, and the clamping blocks are slidably connected in the clamping grooves 15.

[0025] When the present utility model is used, as Figures 1-3As shown, when in use, first establish communication between the rotating pipe 5 and the communication groove 13 and the collection groove 14 respectively by rotation. At this time, rotate and press down the rotating pipe 5, which can drive the inner plate 9 and the outer ring 8 to slide in the inner pipe 2 and the outer pipe 3 respectively. The attachments on the inner and outer walls of the inner pipe 2 and the outer pipe 3 are cleaned by contact in a sliding manner. At the same time, negative pressure is added at the rotating pipe 5 to suck out the attachments cleaned by the inner plate 9 and the outer ring 8 by means of negative pressure, improving the cleaning efficiency of the attachments and avoiding the disassembly and cleaning process of the furnace tube. During this process, the rotating adjusting nut 12 drives the mounting pipe 11 to move. Under the sliding guiding action of the clamping groove 15 and the clamping block, the position of the mounting pipe 11 and the connecting frame 6 on its side wall is adjusted, and then the position of the outer ring 8 is adjusted, facilitating the cleaning and collection of the attachments in the furnace tube.

[0026] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and the inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered within the protection scope of the present invention.

Claims

1. A silicon nitride deposition furnace tube, comprising a base (1), characterized in that: The base (1) is fixedly connected to an inner tube (2) on one side, and an outer tube (3) is fixedly connected to one side of the base (1). A flow tube (10) is provided on the side wall of the outer tube (3). An end of the outer tube (3) away from the base (1) is fixedly connected to an end plate (4). A rotating tube (5) is penetrated through one side of the end plate (4). The rotating tube (5) is fixedly connected to an inner plate (9) at one end of the outer tube (3). A connecting mechanism for connecting the rotating tube (5) is provided on the side wall of the inner plate (9). A mounting tube (11) is provided on the side wall of the rotating tube (5). A plurality of circumferentially arranged connecting frames (6) are fixedly connected to the side wall of the mounting tube (11). An end of the plurality of connecting frames (6) away from the mounting tube (11) is fixedly connected to an outer ring (8). The outer ring (8) is slidably connected in the outer tube (3). The opposite side walls of the rotating tube (5) and the mounting tube (11) are provided with a guiding mechanism for guiding the connecting frames (6) during movement.

2. The silicon nitride deposition furnace tube according to claim 1, characterized in that: The connecting mechanism comprises a plurality of circumferentially arranged collecting grooves (14) opened on the side wall of the inner plate (9), and the plurality of collecting grooves (14) are all connected to the rotating tube (5).

3. The silicon nitride deposition furnace tube according to claim 2, characterized in that: The guide mechanism comprises a plurality of circumferentially arranged clamping grooves (15) opened on the side wall of the rotating tube (5); the inner wall of the mounting tube (11) is fixedly connected with a plurality of circumferentially arranged clamping blocks, and the clamping blocks are slidably connected in the clamping grooves (15).

4. The silicon nitride deposition furnace tube according to claim 3, characterized in that: An end of the mounting tube (11) away from the inner plate (9) is rotatably connected to an adjusting nut (12), and the adjusting nut (12) is threadedly connected to the rotating tube (5).

5. The silicon nitride deposition furnace tube according to claim 4, characterized in that: The side wall of the connecting frame (6) is slidably connected with a sealing gasket (16), and the sealing gasket (16) is in contact with the end plate (4).

6. The silicon nitride deposition furnace tube according to claim 5, characterized in that: A fitting groove (7) is provided on one side of the end plate (4) close to the inner plate (9), the outer ring (8) cooperates with the fitting groove (7), and a collecting groove (14) is provided on the side wall of the outer ring (8), and the collecting groove (14) corresponds to the connecting groove (13).

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