Integrated vacuum cavity of optical film coating machine

Abstract

The utility model discloses an integrated vacuum cavity of an optical film coating machine, which comprises a vacuum coating bin, a sealing cover plate is arranged on the surface of the upper end of the vacuum coating bin, a vacuum pumping notch is arranged on the surface of the sealing cover plate, a vacuum detection meter is arranged on the outer side surface wall of the vacuum coating bin, and a vacuum pump is arranged on the outer side surface wall of the vacuum coating bin. A first auxiliary suction pipe and a second auxiliary suction pipe are installed on the surface of the bottom end of the vacuum coating bin, the first auxiliary suction pipe and the second auxiliary suction pipe are connected through a three-way pipe and a vacuum turbine pump box arranged below the vacuum coating bin, and a dust removal pump is installed below the vacuum coating bin. And one end of the dust removal pump is hermetically communicated with the interior of the vacuum coating bin through a dust collection pipeline. According to the utility model, the film coating bin in the optical film coating machine is subjected to convenient vacuumizing design protection, and a plurality of vacuumizing pipelines are matched with the dust collection pipeline structure, so that air and dust in the film coating bin can be quickly pumped out, the advantages of high vacuumizing efficiency and high vacuumizing speed are achieved, and the problem of film coating pollution is prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of optical thin film coating machines, specifically an integrated vacuum chamber of an optical thin film coating machine. Background Technique

[0002] An optical thin film coating machine is a device used to prepare thin films on the surface of optical elements. These thin films can change the optical properties of the elements, such as transmittance, reflectance, and absorbance. Optical thin film coating machines are widely used in various high-tech fields, including digital cameras, smartphones, glasses, projectors, optical pickups, optical communication, LEDs, electronic products, decorative products, solar cells, and displays. An optical coating machine usually consists of a vacuum system, an evaporation system, a cooling system, and an electrical system. The vacuum system includes a vacuum chamber and an exhaust system. The evaporation system contains various film-forming devices, such as resistance heating, electron gun evaporation, magnetron sputtering, radio frequency sputtering, and ion plating.

[0003] The Chinese authorized patent document with the publication number CN213388868U discloses an infrared optical thin film coating machine. An industrial turntable is arranged at the upper part inside the vacuum chamber; a plasma source is arranged at the center of the lower part, and the first and second electron guns are arranged on the left and right sides of the plasma source; the first and second correction plates are arranged in the middle and are respectively fixed on the mounting rods of the first and second driving units, and the first and second driving units are arranged outside the vacuum chamber; a gas distribution pipeline is also arranged at the lower part and is connected to the outside through a gas distribution system; a film thickness gauge is installed outside the vacuum chamber, and the probe extends into the industrial turntable; a vacuum gauge is installed on the side wall of the vacuum chamber; the electron guns, the plasma source, the driving units, the gas distribution system, the vacuum gauge, and the film thickness gauge are all connected to the control unit. This structure does not require heating, the number of designed film layers can be reduced, the coating time is greatly shortened, the surface of the film layer is dense, scratch-resistant, corrosion-resistant, the cost is reduced, the production efficiency is improved, and the service life is extended. It can be applied to related electronic products such as infrared temperature measurement and detection.

[0004] The above-mentioned prior art cannot perform rapid and efficient vacuum pumping operations on the inside of the coating chamber, which easily causes problems of pollution to the coating operation by residual air and dust. Therefore, it is necessary to develop an integrated vacuum chamber for an optical thin film coating machine. Content of the Utility Model

[0005] The purpose of the utility model is to provide an integrated vacuum chamber of an optical thin film coating machine to solve the problem that the prior art cannot perform rapid and efficient vacuum pumping operations on the inside of the coating chamber, which easily causes pollution to the coating operation by residual air and dust as mentioned in the above background technique.

[0006] To achieve the above object, the present utility model provides the following technical solutions: an integrated vacuum chamber of an optical thin film coating machine, including a vacuum coating chamber. A sealing cover plate is provided on the upper surface of the vacuum coating chamber. A vacuum pumping notch is opened on the surface of the sealing cover plate. The vacuum pumping notch is hermetically connected to a vacuum pump through a first vacuum pumping pipeline and a second vacuum pumping pipeline. A vacuum detection gauge is installed on the outer wall of the vacuum coating chamber. A first auxiliary pumping pipe and a second auxiliary pumping pipe are respectively installed on the bottom surface of the vacuum coating chamber. The first auxiliary pumping pipe and the second auxiliary pumping pipe are connected to a vacuum turbo pump box arranged below the vacuum coating chamber through a three-way pipe. A dust removal pump is installed below the vacuum coating chamber. One end of the dust removal pump is hermetically communicated with the inside of the vacuum coating chamber through a dust suction pipeline.

[0007] Preferably, a dust discharge pipeline is installed at the other end of the dust removal pump, and a switch control valve is installed on the dust discharge pipeline.

[0008] Preferably, the dust suction pipeline is hermetically connected to a plurality of dust suction ports arranged inside the vacuum coating chamber through a pipeline.

[0009] Preferably, a driving cylinder is installed at the rear end of the vacuum coating chamber, and the output end of the driving cylinder is connected to the sealing cover plate through a fixed push rod.

[0010] Preferably, a support frame is installed at the lower end of the vacuum coating chamber. The support frame is fixed to the vacuum coating chamber by welding, and support pads are provided at the lower end of the support frame.

[0011] Preferably, an exhaust notch is provided at one end of the vacuum pump, and a fixed base is installed at the bottom of the vacuum pump.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] The present utility model protects the internal coating chamber of the optical thin film coating machine through a convenient vacuum pumping design. By providing a plurality of vacuum pumping notch structures at the sealing cover plate and the bottom surface position of the coating chamber, and using a plurality of vacuum pumping pipelines in cooperation with the dust suction pipeline structure, under the action of the vacuum turbo pump box, the vacuum pump and the dust removal pump, the air and dust inside the coating chamber can be quickly pumped out, achieving the advantages of high vacuum pumping efficiency and fast speed, and preventing the problem of coating pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the rear structure of the present utility model;

[0015] Figure 2 It is a schematic diagram of the front structure of the present utility model;

[0016] Figure 3 It is a side view of the present utility model;

[0017] Figure 4 This is the rear view of the present utility model.

[0018] In the figure: 1. Sealing cover plate; 2. First vacuum pumping pipeline; 3. Vacuum turbine pump box; 4. Exhaust slot; 5. Vacuum pump; 6. Second vacuum pumping pipeline; 7. Vacuum coating chamber; 8. Support frame; 9. First auxiliary pumping pipe; 10. Dust suction pipeline; 11. Dust removal pump; 12. Dust discharge pipeline; 13. Switch control valve; 14. Three-way pipe; 15. Second auxiliary pumping pipe; 16. Fixed push rod; 17. Driving cylinder; 18. Vacuum detection gauge. Specific embodiments

[0019] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments.

[0020] Please refer to Figures 1-4 , an embodiment provided by the present utility model: an integrated vacuum cavity of an optical thin film coating machine, including a vacuum coating chamber 7, a sealing cover plate 1 is arranged on the upper surface of the vacuum coating chamber 7, a vacuum pumping slot is arranged on the surface of the sealing cover plate 1, the vacuum pumping slot is hermetically connected to a vacuum pump 5 through a first vacuum pumping pipeline 2 and a second vacuum pumping pipeline 6, a vacuum detection gauge 18 is installed on the outer surface of the vacuum coating chamber 7, a first auxiliary pumping pipe 9 and a second auxiliary pumping pipe 15 are respectively installed on the bottom surface of the vacuum coating chamber 7, and the first auxiliary pumping pipe 9 and the second auxiliary pumping pipe 15 are connected to a vacuum turbine pump box 3 arranged below the vacuum coating chamber 7 through a three-way pipe 14, a dust removal pump 11 is installed below the vacuum coating chamber 7, and one end of the dust removal pump 11 is hermetically communicated with the inside of the vacuum coating chamber 7 through a dust suction pipeline 10.

[0021] Furthermore, a dust discharge pipeline 12 is installed at the other end of the dust removal pump 11, and a switch control valve 13 is installed on the dust discharge pipeline 12. By opening the switch control valve 13, it is convenient for the dust removal pump 11 to quickly discharge dust through the dust discharge pipeline 12.

[0022] Furthermore, the dust suction pipeline 10 is hermetically connected to a plurality of dust suction ports arranged inside the vacuum coating chamber 7 through a pipeline, which is convenient for quickly sucking dust inside the vacuum coating chamber 7.

[0023] Furthermore, a driving cylinder 17 is installed at the rear end of the vacuum coating chamber 7, and the output end of the driving cylinder 17 is connected to the sealing cover plate 1 through a fixed push rod 16. By starting the driving cylinder 17, the driving control fixed push rod 16 drives the sealing cover plate 1 to open, close and seal, which has the advantage of convenient operation and control of the opening and closing and sealing of the sealing cover plate 1.

[0024] Furthermore, a support frame 8 is installed at the lower end of the vacuum coating chamber 7. The support frame 8 is fixedly connected to the vacuum coating chamber 7 by welding, and support feet are provided at the lower end of the support frame 8 to facilitate stable support and protection of the bottom of the vacuum coating chamber 7.

[0025] Furthermore, an exhaust slot 4 is provided at one end of the vacuum pump 5 to facilitate exhausting the inside of the vacuum pump 5. A fixed base is installed at the bottom of the vacuum pump 5 to facilitate installation support and protection of the bottom of the vacuum pump 5.

[0026] Working principle: During use, a sealing cover plate 1 is provided on the upper surface of the vacuum coating chamber 7. Closing the sealing cover plate 1 can quickly seal the inside of the vacuum coating chamber 7. A vacuum pumping slot is provided on the surface of the sealing cover plate 1. The vacuum pumping slot is hermetically connected to a vacuum pump 5 through a first vacuum pumping pipeline 2 and a second vacuum pumping pipeline 6. By turning on the vacuum pump 5, the gas inside the vacuum coating chamber 7 can be quickly pumped out through the first vacuum pumping pipeline 2 and the second vacuum pumping pipeline 6. A first auxiliary pumping pipe 9 and a second auxiliary pumping pipe 15 are respectively installed on the bottom surface of the vacuum coating chamber 7. The first auxiliary pumping pipe 9 and the second auxiliary pumping pipe 15 are connected to a vacuum turbo pump box 3 provided below the vacuum coating chamber 7 through a three-way pipe 14. By turning on the vacuum turbo pump box 3, vacuum pumping operations can be performed on the inside of the vacuum coating chamber 7 through the first auxiliary pumping pipe 9 and the second auxiliary pumping pipe 15, so as to perform multi-point vacuum pumping treatment in different directions inside the vacuum coating chamber 7, improving the vacuum pumping efficiency inside the vacuum coating chamber 7. At the same time, a dust removal pump 11 is installed below the vacuum coating chamber 7. One end of the dust removal pump 11 is hermetically connected to the inside of the vacuum coating chamber 7 through a dust suction pipeline 10. The dust removal pump 11 can be turned on in cooperation with the dust suction pipeline 10. The dust suction pipeline 10 is hermetically connected to a plurality of dust suction ports provided inside the vacuum coating chamber 7 through pipelines, facilitating quick dust suction operations inside the vacuum coating chamber 7, and can also assist in pumping out the air inside the vacuum coating chamber 7 while sucking dust. By the mutual operation and cooperation of the three pump body components, the advantages of high vacuum pumping efficiency and fast speed are achieved, preventing coating pollution problems.

[0027] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "including", "comprising" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or elements inherent to such process, method, article or device.

[0028] The standard parts used in this application document can all be purchased from the market. The specific connection methods of each part are all connected by conventional means such as bolts, rivets, welding, etc. that are mature in the prior art. Moreover, the machinery, parts, and equipment all adopt conventional models in the prior art. Coupled with the circuit connection adopting the conventional connection method in the prior art, no specific description will be made here.

[0029] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. An integrated vacuum chamber of an optical thin film coating machine, comprising a vacuum coating chamber (7), characterized in that: The upper surface of the vacuum coating chamber (7) is provided with a sealing cover plate (1), the surface of the sealing cover plate (1) is provided with a vacuum exhaust slot, and the vacuum exhaust slot is sealed and connected to a vacuum pump (5) via a first vacuum exhaust pipeline (2) and a second vacuum exhaust pipeline (6). A vacuum detection gauge (18) is installed on the outer surface wall of the vacuum coating chamber (7), and a first auxiliary exhaust pipe (9) and a second auxiliary exhaust pipe (15) are installed on the bottom surface of the vacuum coating chamber (7), respectively. The first auxiliary exhaust pipe (9) and the second auxiliary exhaust pipe (15) are connected to a vacuum turbine pump box (3) arranged below the vacuum coating chamber (7) via a three-way pipe (14). A dust removal pump (11) is installed below the vacuum coating chamber (7), and one end of the dust removal pump (11) is sealed and connected to the inside of the vacuum coating chamber (7) via a dust suction pipeline (10).

2. The integrated vacuum chamber of the optical thin film coating machine according to claim 1, characterized in that: The other end of the dust removal pump (11) is provided with a dust exhaust pipe (12), and the dust exhaust pipe (12) is provided with a switch control valve (13).

3. The integrated vacuum chamber of the optical thin film coating machine according to claim 1, characterized in that: The dust suction pipeline (10) is sealedly connected to a plurality of dust suction ports arranged inside the vacuum coating chamber (7) through the pipeline.

4. The integrated vacuum chamber of the optical thin film coating machine according to claim 1, characterized in that: A driving cylinder (17) is installed at the rear end of the vacuum coating chamber (7), and an output end of the driving cylinder (17) is connected to the sealing cover plate (1) via a fixed push rod (16).

5. The integrated vacuum chamber of the optical thin film coating machine according to claim 1, characterized in that: A support frame (8) is installed at the lower end of the vacuum coating chamber (7); the support frame (8) and the vacuum coating chamber (7) are fixed by welding, and a support foot is provided at the lower end of the support frame (8).

6. The integrated vacuum chamber of the optical thin film coating machine according to claim 1, characterized in that: An exhaust notch (4) is provided at one end of the vacuum pump (5), and a fixed base is installed at the bottom of the vacuum pump (5).

Images