Temperature adjusting system

Abstract

The utility model provides a temperature adjusting system. The temperature adjusting system comprises a temperature sensor, a decoder and a signal anti-translation device, the temperature sensor collects the temperature of a target object to obtain a temperature signal, converts the temperature signal into an analog signal and then provides the analog signal to the signal anti-translation device, the decoder is added to digitally process the temperature of the temperature sensor to obtain a digital signal, and the digital signal is transmitted to the signal anti-translation device. The signal anti-translation device performs anti-translation processing on the analog signal and the digital signal to obtain an analog signal anti-translation temperature value and a digital signal anti-translation temperature value; an operator can judge whether the condition of analog signal distortion caused by working voltage declination of the temperature sensor is generated or not based on comparison of the temperature value of analog signal detranslation and the temperature value of digital signal detranslation, and the temperature control function failure of the temperature adjusting system is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of temperature control, and particularly relates to a temperature regulation system. Background Art

[0002] An optic fiber temperature sensor is a new type of sensor. It is not affected by radio frequency and can be used for temperature monitoring applications in extreme environments with electromagnetic field and microwave interference. It has high precision and stability and is widely used in semiconductor process equipment. Its application at key positions of the equipment has gradually replaced low-order temperature sensors such as thermocouples and thermal resistors.

[0003] In the temperature control application in the semiconductor field, the optic fiber temperature sensor transmits the detected temperature value to the sensor signal board of the equipment in the form of a current signal for conversion. However, the transmitted current signal will be distorted with the change of the working voltage of the optic fiber temperature sensor, resulting in the process reacting under incorrect temperature conditions and abnormal process results.

[0004] Specifically, an optic fiber temperature sensor generally only needs a 12V DC power supply to be normally driven, but its 4-20mA analog signal for DAC output requires a very precise 24V DC power supply as the working voltage. When the working voltage decays, this will cause the analog signal output by the optic fiber temperature sensor to deviate, misleading the operator to think that the optic fiber temperature sensor is still operating normally, but in fact the temperature control has failed. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a temperature regulation system to solve the problem that when the working voltage of the existing optic fiber temperature sensor decays, the analog signal of the output temperature value is distorted, resulting in the temperature control failure of the machine system.

[0006] To solve the above technical problems, the utility model provides a temperature regulation system, which includes:

[0007] A temperature sensor for outputting a communication signal, where the communication signal includes a temperature signal obtained by monitoring the temperature of a target object, and the temperature sensor can convert the temperature signal into an analog signal;

[0008] A decoder connected to the temperature sensor for converting the communication signal into a digital signal;

[0009] A signal translation device connected to the temperature sensor and the decoder, which receives the analog signal and the digital signal and obtains the temperature value translated from the analog signal and the temperature value translated from the digital signal.

[0010] Optionally, when the absolute value of the difference between the temperature value translated from the analog signal and the temperature value translated from the digital signal is greater than a preset value, the signal translation device generates a warning prompt.

[0011] Optionally, the temperature regulation system further includes a temperature regulation device connected to the signal translation device, and the signal translation device drives the temperature regulation device to adjust the temperature of the target object according to the temperature value translated from the analog signal.

[0012] Optionally, the temperature regulation device includes a refrigerator and a heater.

[0013] Optionally, the temperature regulation system further includes a calibration instrument. When the absolute value of the difference between the temperature value translated from the analog signal and the temperature value translated from the digital signal is greater than a preset value, the calibration instrument calibrates the temperature sensor and the decoder.

[0014] Optionally, the preset value is greater than or equal to 0.25 °C and less than or equal to 0.35 °C. Preferably, the preset value is 0.3 °C.

[0015] Optionally, the communication signal further includes the status signal of the temperature sensor, and the signal translation device obtains the status parameter value translated from the digital signal.

[0016] Optionally, the signal translation device includes a controller connected to the temperature regulation device, a server connected to the controller, and a sensor signal board connected to the controller. The server is connected to the decoder, and the sensor signal board is connected to the temperature sensor.

[0017] Optionally, the temperature regulation system further includes a power supply unit connected to the temperature sensor, and the power supply unit is used to supply power to the temperature sensor.

[0018] Optionally, the communication method between the decoder and the temperature sensor is serial communication.

[0019] Optionally, the communication methods between the decoder and the temperature sensor include RS232 serial communication and RS485 serial communication.

[0020] Optionally, the temperature sensor includes an optical fiber temperature sensor.

[0021] Optionally, the optical fiber temperature sensor includes a light source component, an optical fiber, a detector, and a probe. The light emitted by the light source component is transmitted through the optical fiber to the probe and then irradiated onto the target object, and the light reflected by the target object is transmitted through the optical fiber to the detector.

[0022] Optionally, the light source component includes a photodiode.

[0023] For the temperature regulation system as above, the temperature sensor collects the temperature of the target object to obtain a temperature signal, and itself converts the temperature signal into an analog signal and provides it to the signal translation device. Additionally, a decoder digitizes the temperature of the temperature sensor to obtain a digital signal. The signal translation device performs translation processing on the analog signal and the digital signal respectively to obtain the temperature value translated from the analog signal and the temperature value translated from the digital signal. The operator can judge whether the working voltage of the temperature sensor decays and causes distortion of the analog signal based on the comparison between the temperature value translated from the analog signal and the temperature value translated from the digital signal, thus avoiding the failure of the temperature control function of the temperature regulation system. Description of the Drawings

[0024] Those of ordinary skill in the art should understand that the provided drawings are used to better understand the present utility model and do not constitute any limitation to the scope of the present utility model. Among them:

[0025] Figure 1 is the temperature regulation system of an embodiment of the present utility model.

[0026] In the drawings:

[0027] 10 - Temperature sensor; 11 - Light source component; 12 - Optical fiber; 13 - Probe;

[0028] 20 - Decoder;

[0029] 30 - Signal translation device; 31 - Controller; 32 - Server; 33 - Sensor signal board;

[0030] 40 - Temperature regulation device; 41 - Refrigerator; 42 - Heater;

[0031] 50 - Power supply unit;

[0032] 60 - Target object. Detailed Description of the Embodiment

[0033] To make the objectives, advantages, and features of the present utility model clearer, the following further describes the present utility model in detail with reference to the drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and not drawn to scale, only for conveniently and clearly assisting in explaining the objectives of the embodiments of the present utility model. In addition, the structures shown in the drawings are often a part of the actual structures. In particular, the focus that each drawing needs to show is different, and sometimes different scales are used.

[0034] As used in the present utility model, the singular forms "a", "an" and "the" include plural referents, the term "or" is generally used in the sense of including "and / or", the term "several" is generally used in the sense of including "at least one", the term "at least two" is generally used in the sense of including "two or more", in addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first", "second", "third" may explicitly or implicitly include one or at least two of such features. "One end" and "the other end" as well as "proximal end" and "distal end" generally refer to two corresponding parts, which include not only the endpoints. The terms "mounted", "connected", "coupled" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and may be the communication inside two elements or the interaction relationship between two elements. In addition, as used in the present utility model, one element being disposed on another element generally only means that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the two elements may be directly or indirectly connected, coupled, cooperated or transmitted through an intermediate element, and cannot be construed as indicating or implying the spatial position relationship between the two elements, that is, one element may be inside, outside, above, below or on one side of the other element, etc. in any orientation, unless otherwise explicitly specified in the content. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model may be understood according to specific circumstances.

[0035] Figure 1 is a schematic diagram of a temperature regulation system according to an embodiment of the present utility model. Refer to Figure 1, an embodiment of the present utility model schematically provides a temperature regulation system. The temperature regulation system includes a temperature sensor 10, a decoder 20 connected to the temperature sensor 10, and a signal reverse translation device 30 connected to both the temperature sensor 10 and the decoder 20. The temperature sensor 10 is used to output a communication signal, and the communication signal includes a temperature signal obtained by monitoring the temperature of the target object 60. The temperature sensor 10 can convert the temperature signal into an analog signal (a current signal reflecting the temperature). It should be noted that the DC power supply driving the temperature sensor 10 is less than the DC power supply for the DAC output of the temperature sensor 10. For example, the temperature sensor 10 can be driven by a 12V DC power supply, and the analog signal for the DAC output of the temperature sensor 10 requires a 24V DC power supply as the working voltage. In one embodiment, the temperature sensor 10 is an optical fiber temperature sensor. The decoder 20 is used to convert the communication signal into a digital signal, and naturally can convert the temperature signal originally collected by the temperature sensor 10 into a digital signal. The signal reverse translation device 30 receives the analog signal and the digital signal, and after reverse translating these two signals, obtains the temperature value of the reverse translated analog signal and the temperature value of the reverse translated digital signal.

[0036] Thus, the present utility model collects the temperature of the target object 60 through the temperature sensor 10 to obtain a temperature signal, and itself converts the temperature signal into an analog signal and then provides it to the signal reverse translation device 30. The decoder 20 is added to digitally process the temperature of the temperature sensor 10 to obtain a digital signal. The signal reverse translation device 30 performs reverse translation processing on the analog signal and the digital signal respectively to obtain the temperature value of the reverse translated analog signal and the temperature value of the reverse translated digital signal. The operator can judge whether the situation of the analog signal distortion caused by the decline of the working voltage of the temperature sensor 10 occurs based on the comparison of the temperature value of the reverse translated analog signal and the temperature value of the reverse translated digital signal, so as to avoid the failure of the temperature control function of the temperature regulation system. Exemplarily, when the difference between the temperature value of the reverse translated analog signal and the temperature value of the reverse translated digital signal is greater than a preset value, it is determined that the working voltage of the temperature sensor 10 has declined, resulting in the distortion of the output analog signal, or it is considered that there is a deviation in the digital signal output by the decoder 20. At this time, the temperature sensor 10 and the decoder 20 can be calibrated by a calibration instrument, so as to detect whether the analog signal of the temperature sensor 10 is distorted or the digital signal of the decoder 20 has a deviation, and then repair or replace the corresponding device. Further, the preset value is greater than or equal to 0.25 °C and less than or equal to 0.35 °C. In one embodiment, the preset value is 0.3 °C.

[0037] Further, when the absolute value of the difference between the temperature value obtained by reverse-translating the analog signal and the temperature value obtained by reverse-translating the digital signal is greater than a preset value, the signal reverse-translation device generates a warning prompt to alert the operator, and the operator can stop the system from working. Of course, while generating the warning prompt, the signal reverse-translation device can also send a command to the temperature adjustment device 40 to automatically stop the temperature adjustment work of the system.

[0038] Further, the temperature adjustment system further includes a power supply unit 50 connected to the temperature sensor 10. The power supply unit 50 is used to supply power to the temperature sensor 10 so that the temperature sensor 10 can be driven to work and can perform DAC output of analog signals.

[0039] Further, the communication method between the decoder 20 and the temperature sensor 10 is serial communication. For example, it can be RS232 serial communication and RS485 serial communication.

[0040] In an embodiment, the temperature sensor 10 is an optical fiber temperature sensor. As can be understood by those skilled in the art, the working principle of the optical fiber temperature sensor is that the surface of an object changes with temperature, and the temperature is a function of the time of light reflection by the light source. When a pulsed light source irradiates the target object, the received reflected light parameters can be converted into temperature values. The optical fiber temperature sensor includes a light source component 11, an optical fiber 12, a detector, and a probe 13. The light (pulsed light source) emitted by the light source component 11 is transmitted through the optical fiber 12 to the probe 13 and then irradiates the target object 60 (such as the surface of an object). The light reflected by the target object 60 is transmitted through the optical fiber 12 to the detector, so as to analyze and obtain a temperature signal about the temperature value, and the temperature signal is output as an analog signal by DAC and transmitted to the signal reverse-translation device 30. The light source component 11 can include a photodiode.

[0041] Further, the signal reverse-translation device 30 includes a controller 31 connected to the temperature adjustment device 40, a server 32 connected to the controller 31, and a sensor signal board 33 connected to the controller 31. The server 32 is connected to the decoder 20, and the sensor signal board 33 is connected to the temperature sensor 10. The decoder 20 outputs a digital signal to the server 32. After receiving the digital signal, the server 32 obtains the temperature value obtained by reverse-translating the digital signal and transmits it to the controller 31. The temperature sensor 10 outputs an analog signal to the sensor signal board 33. After the sensor signal board 33 performs reverse-translation operation on the analog signal, it obtains the temperature value obtained by reverse-translating the analog signal and transmits it to the controller 31.

[0042] Further, the temperature regulation system further includes a temperature regulation device 40. The temperature regulation device 40 is connected to the signal translation device 30 (specifically connected to the controller 31). The signal translation device 30 drives the temperature regulation device 40 to regulate the temperature of the target object 60 through the temperature value translated from the analog signal, so that the temperature of the target object 60 is maintained within the range required in the actual process. In one embodiment, the temperature regulation device 40 includes a refrigerator 41 and a heater 42. The refrigerator 41 cools the target object 60, and the heater 42 heats the target object 60. Moreover, when the absolute value of the difference between the temperature value translated from the analog signal and the temperature value translated from the digital signal exceeds a preset value, the controller 31 will drive the temperature regulation device 40 to stop working, so as to avoid heating the target object 60 when the temperature monitoring of the target object 60 fails.

[0043] Preferably, the communication signal output by the temperature sensor 10 further includes the status signal of the temperature sensor 10. The signal translation device 30 can obtain the status parameter value translated from the digital signal, specifically referring to the status parameter value obtained after the decoder 20 translates the digital signal and outputs it to the server 32. Thus, the performance of the temperature sensor 10 can be monitored in real time according to the status parameter value, and the service life can be predicted. Furthermore, when paired with replacement during equipment maintenance, the production loss caused by equipment downtime and the cost loss of early replacement of parts can be reduced. The status signal of the temperature sensor 10 here can be, for example, the current signal and power signal of the light source component 11 of the temperature sensor 10. For example, the temperature sensor 10 will cyclically send multiple communication codes to the decoder 20, respectively representing the temperature collected by the temperature sensor 10, the current of the light source component 11, and the power of the light source component 11. The decoder 20 decodes the communication code representing the temperature collected by the temperature sensor 10 to obtain the digital signal of the temperature. The decoder 20 decodes the communication codes representing the current and power of the light source component 11 to obtain the performance parameters of the light source component 11 and outputs them to the server 32.

[0044] Although the present utility model is disclosed above with preferred embodiments, the above embodiments are not intended to limit the present utility model. For any person skilled in the art, without departing from the scope of the technical solution of the present utility model, many possible changes and modifications can be made to the technical solution of the present utility model by using the technical content disclosed above, or modified into equivalent embodiments with equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present utility model without departing from the content of the technical solution of the present utility model still belong to the scope of protection of the technical solution of the present utility model.

Claims

1. A temperature control system, characterized in that: include: A temperature sensor, wherein the temperature sensor comprises an optical fiber temperature sensor, the temperature sensor is used to output a communication signal, the communication signal comprises a temperature signal obtained by monitoring the temperature of a target object, and the temperature sensor can convert the temperature signal into an analog signal; A decoder connected to the temperature sensor, the decoder being used to convert the communication signal into a digital signal; A signal translation device connected to the temperature sensor and the decoder receives the analog signal and the digital signal and obtains a temperature value translated from the analog signal and a temperature value translated from the digital signal.

2. The temperature control system according to claim 1, characterized in that: When the absolute value of the difference between the temperature value translated from the analog signal and the temperature value translated from the digital signal is greater than a preset value, the signal translation device generates an early warning prompt.

3. The temperature control system according to claim 1, characterized in that: The temperature control system further comprises a temperature control device connected to the signal translation device, and the signal translation device drives the temperature control device to adjust the temperature of the target object through the temperature value translated from the analog signal.

4. The temperature control system according to claim 3, characterized in that: The temperature regulating device comprises a refrigerator and a heater.

5. The temperature control system according to claim 1, characterized in that: The temperature control system further comprises a calibration instrument, which calibrates the temperature sensor and the decoder when the absolute value of the difference between the temperature value translated from the analog signal and the temperature value translated from the digital signal is greater than a preset value.

6. The temperature control system according to claim 1, characterized in that: The communication signal also includes a state signal of the temperature sensor, and the signal inversion device obtains a state parameter value of the digital signal inversion.

7. The temperature control system according to claim 1, characterized in that: The signal reverse translation device comprises a controller, a server connected to the controller, and a sensor signal board connected to the controller, wherein the server is connected to the decoder, and the sensor signal board is connected to the temperature sensor.

8. The temperature control system according to claim 1, characterized in that: The temperature adjustment system further comprises a power supply unit connected to the temperature sensor, wherein the power supply unit is used to supply power to the temperature sensor.

9. The temperature control system according to claim 1, characterized in that: The communication mode between the decoder and the temperature sensor is serial communication.

10. The temperature adjustment system according to claim 1, characterized in that: The temperature sensor includes a light source component, an optical fiber, a detector and a probe. The light emitted by the light source component is transmitted to the probe through the optical fiber and then irradiates the target object. The light reflected by the target object is transmitted to the detector through the optical fiber.

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