Integrated linear rotating motor

Abstract

The utility model relates to the technical field of linear motors, in particular to an integrated linear rotating motor. The interior of the shell is divided into four areas a, b, c and d, the area a is located on the upper left portion in the shell, the area b is located on the upper right portion in the shell, the area c is located on the lower left portion in the shell, the area d is located on the lower right portion in the shell, the area a is provided with a linear mechanism, the area b is provided with a driving plate, the area c is provided with a rotating mechanism, and the area d is provided with an air pipe. The end, penetrating through the shell, of the rotating motor shaft is an adsorption end, the other end of the rotating motor shaft is connected with an air pipe through a first air nozzle, and the other end of the air pipe is connected with a second air nozzle which is arranged outside the shell and connected with an external air source. One side of the adapter plate is fixedly connected with a linear motor rotor, and the other side is fixedly connected with a rotating motor shaft; the sensor collects displacement data of the adapter plate; the linear motor rotor, the sensor and the rotating motor are all connected with the driving plate. Wherein the driving plate, the linear mechanism and the rotating mechanism are integrated, so that external cable connection is greatly simplified, the equipment integration degree is improved, and the failure rate is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of linear motors, in particular to an integrated linear rotary motor. Background Technique

[0002] In some automated equipment, processes such as transfer and positioning are involved. For example, a wafer is transported from point A to point B, and the wafer is rotated by a specific angle at point B for positioning. In the prior art, the wafer is often transported by a linear motion mechanism, and then a rotating mechanism is used to position the wafer. Both the linear motion mechanism and the rotating mechanism need to be connected to the driving components through long and numerous cables for control. According to the above scheme, the wiring is complex, and the long and numerous cables will also increase the failure rate and reduce the anti-interference ability. Therefore, we need to reasonably optimize the layout to integrate the linear mechanism, the rotating mechanism, the driving mechanism, etc. into one, so that the linear mechanism and the rotating mechanism can cooperate. Content of the Utility Model

[0003] Problem to be Solved: To provide an integrated linear rotary motor, optimize the arrangement of each structure, so that the linear mechanism and the rotating mechanism can efficiently complete the transfer and positioning of special components.

[0004] To achieve the above object, the utility model provides the following technical scheme: an integrated linear rotary motor, including a housing and a cover plate on the housing. The housing is divided into four regions a, b, c, and d. Region a is located in the upper left part of the housing, region b is located in the upper right part of the housing, region c is located in the lower left part of the housing, and region d is located in the lower right part of the housing. A linear mechanism is provided in region a, a driving plate is provided in region b, a rotating mechanism is provided in region c, and an air pipe is provided in region d. The rotating mechanism includes a rotating motor, the rotating motor shaft of the rotating motor is hollow, one end of the rotating motor shaft passing through the housing is the adsorption end, the other end is connected to the air pipe through a nozzle 1, the other end of the air pipe is connected to a nozzle 2, and the nozzle 2 is arranged outside the housing and connected to an external air source. The linear mechanism includes a linear motor stator and a linear motor mover. A guide rail is arranged at an interval from the linear motor stator. The guide rail is connected to a transfer plate through a sliding seat. One side of the transfer plate is fixedly connected to the linear motor mover, and the other side is fixedly connected to the rotating motor shaft. A sensor is arranged in region b and collects the displacement data of the transfer plate. The linear motor mover, the sensor, and the rotating motor are all connected to the driving plate.

[0005] Preferably, a constant force spring mover is connected to a corner of the transfer plate. The constant force spring mover is sleeved outside the constant force spring stator and is in sliding fit with the constant force spring stator.

[0006] Preferably, an installation groove is provided on the side of the rotating motor shaft close to the adsorption end.

[0007] Preferably, the transfer plate is connected to the rotating motor shaft through a connecting plate.

[0008] Preferably, one side of the connecting plate is provided with a connecting hole, and the other side is provided with an L-shaped fixing bracket.

[0009] Preferably, one corner of the adapter plate is provided with a first bump, and the other corner is provided with a second bump. The first bump is connected to the sensor, and the second bump is connected to the moving element of the constant force spring.

[0010] Preferably, the air pipe is a telescopic spiral pipe.

[0011] Compared with the prior art, the present utility model provides an integrated linear rotary motor, which has the following beneficial effects: the integrated arrangement of the driving plate, the linear mechanism and the rotary mechanism greatly simplifies the connection of external cables, improves the equipment integration degree, and reduces the failure rate; the adapter plate connects the linear mechanism and the rotary mechanism, preferably optimizing the arrangement of the linear mechanism and the rotary mechanism, so that the rotary mechanism can move along with the linear mechanism without affecting the operation of the rotary motor, and at the same time meets the requirements of linear motion and rotary motion; the use of the constant force mechanism to cooperate with the movement of the linear mechanism simplifies the control program of the driving plate; Description of the Drawings

[0012] Figure 1 is a structural schematic diagram of the present utility model;

[0013] Figure 2 is an exploded schematic diagram of the present utility model;

[0014] Figure 3 is a schematic diagram of the adapter plate of the present utility model;

[0015] Figure 4 is a schematic diagram of the connecting plate of the present utility model;

[0016] Figure 5 is a schematic diagram of the distribution of the installation areas inside the housing of the present utility model;

[0017] Description of the reference numerals: 1, cover plate; 2, linear motor stator; 3, adapter plate; 31, connecting plate; 311, connecting hole; 312, L-shaped fixing bracket; 32, first bump; 33, second bump; 4, linear motor mover; 5, rotary motor; 6, rotary motor shaft; 61, adsorption end; 62, installation groove; 7, first air nozzle; 8, guide rail; 9, sliding seat; 10, housing; 11, second air nozzle; 12, constant force spring stator; 13, constant force spring mover; 14, driving plate; 15, air pipe; 16, sensor. Detailed Embodiments

[0018] The technical solutions in the embodiments of the present utility model will be described below with reference to the drawings in the embodiments of the present utility model:

[0019] As shown in the figure, in the integrated linear rotary motor of the present utility model, the driving plate 14, the linear mechanism and the rotary mechanism are all integrated in the housing 10. The housing 10 is provided with a cover plate 1. The rotary mechanism includes a rotary motor 5. The rotary motor shaft 6 of the rotary motor 5 is hollow, and air can flow through the axis of the rotary motor shaft 6. The rotary motor 5 can drive the rotary motor shaft 6 to rotate. One end of the rotary motor shaft 6 passing through the housing 10 is an adsorption end 61 for adsorbing components. The other end is connected to a trachea 15 through a nozzle 7. The other end of the trachea 15 is connected to a nozzle 11. The nozzle 11 is arranged outside the housing 10 and connected to an external air source. The rotary motor shaft 6, the nozzle 7, the trachea 15 and the nozzle 11 form an air passage. When the air passage is opened, the adsorption end 61 adsorbs the components by negative pressure. Corresponding jigs can be installed according to the shape and size of the components. An installation groove 62 is provided on the side of the adsorption end 61, and the installation groove 62 is responsible for connecting the jig. The linear mechanism is responsible for the displacement of the rotary motor shaft 6 in the X-axis direction, including a linear motor stator 2 and a linear motor mover 4. A guide rail 8 is arranged at an interval from the linear motor stator 2. The guide rail 8 is fixed in the housing 10. The guide rail 8 is connected to a transfer plate 3 through a slide block 9. One side of the transfer plate 3 is fixedly connected to the linear motor mover 4, and the other side is connected to the rotary motor shaft 6 through a connecting plate 31. A convex block 32 is provided at one corner of the transfer plate 3, and a convex block 33 is provided at the other corner. After the convex block 32 is connected to the sensor 16, the sensor 16 can collect the displacement data of the transfer plate 3. Since the linear motor mover 4, the sensor 16 and the rotary motor 5 are all connected to the driving plate 14, the driving plate 14 can drive the linear motor mover 4 to reciprocate, thereby driving the transfer plate 3 to reciprocate along the guide rail 8. The displacement data of the transfer plate 3 collected by the sensor 16 is given to the driving plate 14, and the driving plate 14 further adjusts the displacement amount of the transfer plate 3 in the X direction according to the data of the sensor 16. After the transfer plate 3 is displaced in place in the X direction, the air passage is opened and the adsorption end 61 adsorbs the components. After the motor reaches the specified position, the driving plate 14 controls the rotary motor 5 to rotate by a specified angle to complete the positioning of the components.

[0020] In order to streamline the control program of the driving plate 14, after the device transfer and positioning are completed, the transfer plate 3 is reset by a constant force mechanism, rather than being driven by the linear motor mover 4. The constant force mechanism includes a constant force spring mover 13 and a constant force spring stator 12. The constant force spring stator 12 is fixed in the housing 10. The constant force spring mover 13 is sleeved outside the constant force spring stator 12 and is slidably matched with the constant force spring stator 12. The constant force spring mover 13 is connected to the transfer plate 3 through a convex block 33, and the convex block 33 is located at one corner of the transfer plate 3.

[0021] One side of the connecting plate 31 is provided with a connecting hole 311, the connecting hole 311 is sleeved outside the rotating motor shaft 6 through the adsorption end 61, and the other side is provided with an L-shaped fixing bracket 312. One side of the L-shaped fixing bracket 312 is fixedly connected to the adapter plate 3 through a nut. The air pipe 15 is a telescopic spiral pipe, providing sufficient margin for the displacement of the rotating motor shaft 6 in the X direction.

[0022] However, how to reasonably arrange structures such as the linear mechanism, the rotating mechanism, the driving plate 14, and the air pipe 15 inside the housing 10 is very crucial. After the arrangement, it should neither affect the operation of the linear mechanism nor the operation of the rotating mechanism. As Figure 5 shown, the interior of the housing 10 is divided into four regions a, b, c, and d. Region a is located in the upper left part of the housing 10, region b is located in the upper right part of the housing 10, region c is located in the lower left part of the housing 10, and region d is located in the lower right part of the housing 10. The linear mechanism is placed in region a, the driving plate 14 is placed in region b, the sensor 16 is provided in region b and is located close to region a, the guide rail 8 is set on the demarcation line between regions a and c, the rotating mechanism is set in region c, and the air pipe 15 is located in region d. This arrangement method has a compact structure and is conducive to wiring, neither affecting the operation of the linear mechanism nor the operation of the rotating mechanism. Moreover, through the special structural design of the adapter plate 3, better cooperation is achieved among the linear mechanism, the rotating mechanism, the sensor 16, and the constant force spring mover.

[0023] During use, the device of the present utility model operates with the equipment to position A, making the rotating motor shaft 6 located directly above the component. The driving plate 14 controls the linear motor mover 4 to move in the X direction, thereby driving the adapter plate 3 to move in the X direction. Since the adapter plate 3 is connected to the rotating motor shaft 6 through the connecting plate 31, the rotating motor shaft 6 also moves in the X direction. After the adapter plate 3 reaches the set displacement, the air passage is opened, and the adsorption end 61 of the rotating motor shaft 6 adsorbs the component. The device of the present utility model adsorbs the component and moves to position B. The driving plate 14 controls the rotation of the rotating motor 5 by a certain angle to position the component. The air passage is closed and the adsorption end 61 releases the component. The constant force spring mover 13 drives the adapter plate 3 to reset, and the device of the present utility model operates to position A again.

[0024] By integrating the driving plate 14, the linear mechanism, and the rotating mechanism in an integrated manner, the present utility model greatly simplifies the external cable connection; at the same time, the key control signals are concentrated inside the device, increasing the reliability of the device. The adapter plate 3 establishes a connection between the linear mechanism and the rotating mechanism, enabling the rotating mechanism to move along with the linear mechanism without affecting the operation of the rotating motor 5. The present utility model is suitable for the transfer and positioning of components, especially for the transfer and positioning of wafers.

[0025] The above embodiments are only a part of the embodiments of the present invention, rather than all embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

Claims

1. An integrated linear rotary motor, characterized in that: The invention comprises a shell (10) and a cover plate (1) on the shell (10); the shell (10) is divided into four areas a, b, c and d; the area a is located at the upper left part of the shell (10); the area b is located at the upper right part of the shell (10); the area c is located at the lower left part of the shell (10); the area d is located at the lower right part of the shell (10); the area a is provided with a linear mechanism; the area b is provided with a driving plate (14); the area c is provided with a rotating mechanism; and the area d is provided with an air pipe (15); the rotating mechanism comprises a rotating motor (5); the rotating motor shaft (6) of the rotating motor (5) is hollow; one end of the rotating motor shaft (6) passing through the shell (10) is a suction end (61); the other end is connected to the air nozzle (71) ) is connected to an air pipe (15), the other end of the air pipe (15) is connected to an air nozzle (11), the air nozzle (11) is arranged outside the housing (10) and connected to an external air source; the linear mechanism comprises a linear motor stator (2) and a linear motor mover (4), a guide rail (8) is arranged at intervals from the linear motor stator (2), the guide rail (8) is connected to an adapter plate (3) through a slide seat (9), one side of the adapter plate (3) is fixedly connected to the linear motor mover (4), and the other side is fixedly connected to the rotary motor shaft (6); the sensor (16) is arranged in area b and collects displacement data of the adapter plate (3); the linear motor mover (4), the sensor (16) and the rotary motor (5) are all connected to the drive plate (14).

2. The integrated linear rotary motor according to claim 1, characterized in that: A constant force spring mover (13) is connected to one corner of the adapter plate (3); the constant force spring mover (13) is sleeved on the outside of the constant force spring stator (12) and is slidably matched with the constant force spring stator (12).

3. The integrated linear rotary motor according to claim 2, characterized in that: A mounting groove (62) is provided on the side of the rotating motor shaft (6) close to the adsorption end (61).

4. The integrated linear rotary motor according to claim 1, characterized in that: The adapter plate (3) is connected to the rotating motor shaft (6) via a connecting plate (31).

5. The integrated linear rotary motor according to claim 4, characterized in that: A connection hole (311) is provided on one side of the connection plate (31), and an L-shaped fixing frame (312) is provided on the other side.

6. The integrated linear rotary motor according to claim 1, characterized in that: A first protrusion (32) is provided at one corner of the adapter plate (3), and a second protrusion (33) is provided at the other corner; the first protrusion (32) is connected to the sensor (16), and the second protrusion (33) is connected to the constant force spring mover (13).

7. The integrated linear rotary motor according to claim 1, characterized in that: The trachea (15) is a retractable spiral tube.

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