Cache lifting and storing mechanism for silicon wafer sorting machine

Abstract

The utility model relates to a caching, extracting and storing mechanism for a silicon wafer sorting machine, which comprises a conveying mechanism comprising a platform and used for conveying silicon wafers towards the front end; the lifting mechanism is arranged between the ground and the platform and comprises a sliding block; the storage assembly comprises a half-frame-shaped frame body which is symmetrically connected to the left side and the right side of the sliding block, and an opening of the frame body faces the platform; the tooth parts are arranged in the frame body at intervals and are parallel to the silicon wafers; wherein the lifting mechanism drives the sliding block to ascend and descend, the sliding block drives the frame body to ascend and descend, the interval between the adjacent tooth parts is larger than the thickness of the silicon wafer, the interval between the inner sides of the two frame bodies is larger than the width of the silicon wafer, and the interval between the two opposite tooth parts is smaller than the width of the silicon wafer. According to the caching, lifting and storing mechanism for the silicon wafer sorting machine, the silicon wafers can be cached, lifted and stored according to different working conditions, the wafer feeding interruption time is shortened, and the silicon wafer production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production equipment, in particular to a buffer storage mechanism for a silicon wafer sorter. Background Art

[0002] When the sorter conveys silicon wafers, if the feeding mechanism fails or the wafers are broken, etc., resulting in the interruption of wafer loading, the wafers cannot be conveyed and packaged in batches, reducing the production efficiency of silicon wafers.

[0003] It should be noted that the information disclosed in the above background art section is only used to enhance the understanding of the background of the present disclosure, and thus may include information that does not constitute the prior art known to those of ordinary skill in the art. Summary of the Utility Model

[0004] In view of the deficiencies of the prior art, the embodiments of the present utility model disclose a buffer storage mechanism for a silicon wafer sorter to solve the problem that the interruption of wafer loading caused by the feeding failure of the sorter reduces the production efficiency of silicon wafers.

[0005] The technical solution adopted by the present utility model is as follows:

[0006] The buffer storage mechanism for a silicon wafer sorter includes: a conveying mechanism including a platform, and the conveying mechanism conveys silicon wafers towards the front end; a lifting mechanism disposed between the ground and the platform and including a slider; a storage assembly including: a frame body which is semi-frame-shaped and symmetrically connected to the left and right sides of the slider, with the opening facing the platform; tooth portions spaced inside the frame body and parallel to the silicon wafers; wherein, the lifting mechanism drives the slider to lift, the slider drives the frame body to lift, the interval between adjacent tooth portions is greater than the thickness of the silicon wafer, the distance between the inner sides of the two frame bodies is greater than the width of the silicon wafer, and the distance between two opposite tooth portions is less than the width of the silicon wafer.

[0007] Further, the conveying mechanism includes: a first motor disposed inside the platform; at least two first rotating shafts rotatably passing through the platform, and one of them is connected to the output ends on both sides of the first motor; belt pulleys fixed to both sides of the first rotating shafts; and a conveyor belt sleeved outside the belt pulleys on the same side.

[0008] Further, the lifting mechanism includes: a fixed seat disposed on the ground; a guide rail with the lower end fixed to the fixed seat; a second motor disposed at the lower end of the guide rail and inside the fixed seat; a lead screw rotatably disposed inside the guide rail, with the lower end connected to the output end of the second motor; and a slider slidably disposed inside the guide rail and threadedly connected to the lead screw.

[0009] A further technical solution is that the buffer storage mechanism further includes a flipping mechanism, and the flipping mechanism includes: a connecting frame symmetrically connected to both sides of the slider; a third motor fixed to the side surface of the connecting frame; a second rotating shaft rotatably arranged inside the connecting frame, with one end connected to the output end of the third motor; and a rotating block fixed to the second rotating shaft, with the upper end connected to the frame body.

[0010] A further technical solution is that the frame body includes two parallel first horizontal parts and second horizontal parts, and a vertical part vertically connecting between the first horizontal part and the second horizontal part. The end surface of the first horizontal part extends to the position corresponding to the conveyor belt, and the end surface of the second horizontal part is flush with the tooth part.

[0011] A further technical solution is that the storage assembly includes: a second sensor arranged at the lower end of the first horizontal part, corresponding to the conveyor belt in position; and a third sensor arranged on the end surface of the second horizontal part.

[0012] A further technical solution is that the platform includes: a first sensor arranged at the rear end of the upper surface of the platform.

[0013] A further technical solution is that a bracket is arranged at the lower end of the platform, and the bracket is erected on the ground.

[0014] The beneficial effects of the embodiments of the present utility model are as follows:

[0015] (1) The buffer storage mechanism for the silicon wafer sorting machine of the present utility model includes a conveying mechanism, a lifting mechanism and a storage assembly. The conveying mechanism conveys silicon wafers forward. When the silicon wafers pass between the tooth parts of the storage assembly, the lifting mechanism drives the slider to rise, the slider drives the frame body to rise, the frame body drives the tooth parts to rise, and the tooth parts drive the silicon wafers to rise away from the conveying mechanism to realize the buffering of the silicon wafers. When the wafer loading is interrupted, the conveying mechanism keeps rotating, the lifting mechanism drives the slider to descend, the slider drives the frame body to descend, the frame body drives the tooth parts to descend, and the tooth parts drive the silicon wafers to descend to contact the conveying mechanism and be conveyed, realizing the buffering of the silicon wafers. The buffer storage mechanism for the silicon wafer sorting machine of the present utility model can buffer and store silicon wafers according to different working conditions, reduce the wafer loading interruption time, and improve the silicon wafer production efficiency.

[0016] (2) Further, the buffer storage mechanism further includes a flipping mechanism, which includes a connecting frame, a third motor, a second rotating shaft and a rotating block. When it is necessary to disassemble, replace or maintain the buffer storage mechanism, start the third motor. The output end of the third motor drives the rotating block to rotate, and the rotating block drives the frame body to rotate around the second rotating shaft and unfold the frame body in the direction away from the platform, which is convenient for the disassembly, replacement or maintenance of the buffer storage mechanism and does not affect the conveying of silicon wafers, ensuring the silicon wafer production efficiency. Description of the Drawings

[0017] Figure 1 This is the front view structural schematic diagram of the buffer and storage mechanism for the silicon wafer sorting machine of the present utility model.

[0018] Figure 2 This is the top view structural schematic diagram of the buffer and storage mechanism for the silicon wafer sorting machine of the present utility model.

[0019] Figure 3 This is the top view structural schematic diagram of the flipping mechanism in the buffer and storage mechanism for the silicon wafer sorting machine of the present utility model.

[0020] In the figure: 1. Conveying mechanism; 11. Platform; 12. First motor; 13. Belt pulley; 14. First rotating shaft; 15. Conveyor belt; 16. First sensor; 2. Lifting mechanism; 21. Fixed seat; 22. Guide rail; 23. Slide block; 24. Lead screw; 25. Second motor; 3. Flipping mechanism; 31. Connecting frame; 311. Plate body; 312. Reinforcing plate; 32. Third motor; 33. Second rotating shaft; 34. Rotating block; 4. Storage assembly; 41. Frame body; 411. First horizontal part; 412. Second horizontal part; 413. Vertical part; 414. Second sensor; 415. Third sensor; 42. Tooth part; 5. Silicon wafer. Detailed implementation manners

[0021] The following combines with the attached drawings to illustrate the detailed implementation manners of the present utility model.

[0022] In order to make the purpose, technical solutions and advantages of the present utility model clearer, the device proposed by the present utility model will be further described in detail below in combination with the attached drawings and specific implementation manners. According to the following description, the advantages and features of the present utility model will be clearer. It should be noted that the attached drawings adopt a very simplified form and all use non-precise scales, only for the purpose of conveniently and clearly assisting in explaining the implementation manners of the present utility model. In order to make the purpose, features and advantages of the present utility model more obvious and understandable, please refer to the attached drawings. It should be noted that the structures, scales, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those who are familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present utility model. Therefore, they do not have technical essence significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effects that the present utility model can produce and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed by the present utility model.

[0023] First embodiment:

[0024] The buffer and storage mechanism for the silicon wafer sorting machine includes a conveying mechanism 1, a lifting mechanism 2 and a storage assembly 4.

[0025] The conveying mechanism 1 includes a platform 11, and the conveying mechanism 1 conveys the silicon wafers 5 towards the front end. Exemplarily, the conveying mechanism 1 includes a first motor 12, a first rotating shaft 14, a belt pulley 13, and a conveyor belt 15. The first motor 12 is arranged at one end inside the platform 11. There are two first rotating shafts 14, which are respectively located at both ends of the platform 11 and rotatably pass through the platform 11, and one of them is connected to the output ends on both sides of the first motor 12. The belt pulleys 13 are fixed on both sides of the first rotating shaft 14, and the conveyor belt 15 is sleeved on the outer sides of the two belt pulleys 13 on the same side. A bracket (not shown in the figure) is arranged at the lower end of the platform 11, and the bracket is erected on the ground. In other embodiments of the present invention, the lower end of the platform 11 can also be connected to a guide rail 22, and the platform 11 is supported by the guide rail 22, and the present invention does not make further limitations on this.

[0026] The lifting mechanism 2 is arranged between the ground and the platform 11. Exemplarily, the lifting mechanism 2 includes a fixed seat 21, a guide rail 22, a second motor 25, a lead screw 24, and a slider 23. The fixed seat 21 is arranged on the ground. The guide rail 22 is arranged vertically, and the lower end is fixed on the fixed seat 21. The second motor 25 is arranged at the lower end of the guide rail 22 and is hidden inside the fixed seat 21. The lead screw 24 is rotatably arranged inside the guide rail 22, and the lower end is connected to the output end of the second motor 25. The slider 23 is slidably arranged inside the guide rail 22 and is threadedly connected to the lead screw 24.

[0027] The storage component 4 includes a frame body 41 and a tooth part 42. The frame body 41 is semi-frame-shaped and symmetrically connected to the left and right sides of the slider 23, and the opening faces the platform 11. The tooth parts 42 are arranged at intervals inside the frame body 41 and are parallel to the silicon wafers 5. Exemplarily, the frame body 41 includes two parallel first horizontal parts 411 and second horizontal parts 412, and a vertical part 413 vertically connected between the first horizontal part 411 and the second horizontal part 412. The end face of the first horizontal part 411 extends to correspond to the conveyor belt 15, and the end face of the second horizontal part 412 is flush with the tooth part 42. The interval between adjacent tooth parts 42 is greater than the thickness of the silicon wafer 5, the distance between the inner sides of the two frame bodies 41 is greater than the width of the silicon wafer 5, and the distance between two opposite tooth parts 42 is less than the width of the silicon wafer 5, ensuring that the silicon wafer 5 can be between the frame bodies 41 during conveying and can be lifted and cached or put down and stored by the tooth part 42. Preferably, the first horizontal part 411 includes a second sensor 414, and the second sensor 414 is arranged at the lower end of the first horizontal part 411, corresponding to the conveyor belt 15. The second sensor 414 detects the distance between the lower end of the first horizontal part 411 and the conveyor belt 15 to prevent the storage component 4 from descending excessively, resulting in equipment damage or crushing of the silicon wafer 5.

[0028] Further, the platform 11 includes a first sensor 16, and the first sensor 16 is arranged at the rear end of the upper surface of the platform 11. When the first sensor 16 detects that the silicon wafer 5 passes by, it delays and controls the lifting mechanism 2 to drive the slider 23 to rise.

[0029] In this embodiment, the conveying mechanism 1 conveys the silicon wafer 5 forward. When the silicon wafer 5 passes between the tooth parts 42 of the storage component 4, the lifting mechanism 2 drives the slider 23 to rise. The slider 23 drives the frame body 41 to rise. The frame body 41 drives the tooth parts 42 to rise. The tooth parts 42 drive the silicon wafer 5 to rise and separate from the conveying mechanism 1 to realize the buffering of the silicon wafer 5. When the wafer loading is interrupted, the conveying mechanism 1 keeps rotating. The lifting mechanism 2 drives the slider 23 to descend. The slider 23 drives the frame body 41 to descend. The frame body 41 drives the tooth parts 42 to descend. The tooth parts 42 drive the silicon wafer 5 to descend until it contacts the conveying mechanism 1 and is conveyed, realizing the buffering of the silicon wafer 5. The buffering and lifting mechanism for the silicon wafer sorter of the present utility model can buffer and lift the silicon wafer 5 according to different working conditions, reduce the wafer loading interruption time, and improve the production efficiency of the silicon wafer 5.

[0030] Second Embodiment:

[0031] The buffering and lifting mechanism further includes a flipping mechanism 3. The flipping mechanism 3 includes a connecting frame 31, a third motor 32, a second rotating shaft 33, and a rotating block 34. The connecting frame 31 is symmetrically connected to both sides of the slider 23. The third motor 32 is fixed to the side of the connecting frame 31 away from the guide rail 22. The second rotating shaft 33 is rotatably arranged inside the connecting frame 31, and one end is connected to the output end of the third motor 32. The rotating block 34 is fixed on the second rotating shaft 33, and the upper end is connected to the frame body 41. Exemplarily, the connecting frame 31 includes two parallel plate bodies 311 and a reinforcing plate 312 connected between the two plate bodies 311. The plate bodies 311 respectively enclose openings on both sides of the reinforcing plate 312. The plate body 311 on the side close to the guide rail 22 is connected to the slider 23, and the third motor 32 is fixed to the side of the plate body 311 away from the guide rail 22.

[0032] Further, the horizontal part includes a third sensor 415. The third sensor 415 is arranged on the end face of the second horizontal part 412. The third sensor 415 detects the distance from the end face of the second horizontal part 412 to the surface of the guide rail 22. According to the fact that the distance from the third sensor 415 to the guide rail 22 is constant after the flipping mechanism 3 flips in place, it is judged whether the buffering and lifting mechanism flips in place and rises in place.

[0033] In this embodiment, when it is necessary to disassemble, replace, or maintain the buffering and lifting mechanism, the third motor 32 is started. The output end of the third motor 32 drives the rotating block 34 to rotate. The rotating block 34 drives the frame body 41 to rotate around the second rotating shaft 33 and unfold the frame body 41 in a direction away from the platform 11, which is convenient for the disassembly, replacement, or maintenance of the buffering and lifting mechanism and does not affect the conveying of the silicon wafer 5, ensuring the production efficiency of the silicon wafer 5.

[0034] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0035] The above-described embodiments only express several implementation manners of the present utility model, and the description thereof is relatively specific and detailed, but it should not be understood as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several deformations and improvements can still be made, and these all belong to the protection scope of the present utility model. Therefore, the protection scope of the utility model patent shall be subject to the appended claims.

Claims

1. Buffer and storage mechanism for silicon wafer sorting machine, characterized in that Comprising: A conveying mechanism, including a platform, and the conveying mechanism conveys silicon wafers towards the front end. A lifting mechanism, arranged between the ground and the platform, and including a slider. A storage assembly, including: A frame body, being semi-frame-shaped, symmetrically connected to the left and right sides of the slider, and the opening faces the platform. Tooth parts, arranged at intervals inside the frame body and parallel to the silicon wafers. Wherein, the lifting mechanism drives the slider to lift and lower, the slider drives the frame body to lift and lower, the interval between adjacent tooth parts is greater than the thickness of the silicon wafer, the distance between the inner sides of the two frame bodies is greater than the width of the silicon wafer, and the distance between two opposite tooth parts is less than the width of the silicon wafer. The lifting mechanism includes: A fixed seat, arranged on the ground. A guide rail, the lower end of which is fixed to the fixed seat. A second motor, arranged at the lower end of the guide rail and located inside the fixed seat. A lead screw, rotatably arranged inside the guide rail, and the lower end is connected to the output end of the second motor. A slider, slidably arranged inside the guide rail and threadedly connected to the lead screw. The buffer and retention mechanism further includes a flipping mechanism, and the flipping mechanism includes: A connecting frame, symmetrically connected to both sides of the slider. A third motor, fixed to the side surface of the connecting frame. A second rotating shaft, rotatably arranged inside the connecting frame, and one end is connected to the output end of the third motor. A rotating block, fixed to the second rotating shaft, and the upper end is connected to the frame body.

2. The buffer and storage mechanism for the silicon wafer sorting machine according to claim 1, wherein, The conveying mechanism includes: A first motor, arranged inside the platform. At least two first rotating shafts, rotatably passing through the platform, and one of them is connected to the output ends on both sides of the first motor. Pulley wheels, fixed to both sides of the first rotating shaft. A conveyor belt, sleeved outside the pulley wheels on the same side.

3. The buffer and storage mechanism for the silicon wafer sorting machine according to claim 2, characterized in that: The frame body includes two parallel first horizontal parts and second horizontal parts, and a vertical part vertically connecting between the first horizontal part and the second horizontal part. The end surface of the first horizontal part extends to the position corresponding to the conveyor belt, and the end surface of the second horizontal part is flush with the tooth parts.

4. The buffer and storage mechanism for the silicon wafer sorting machine according to claim 3, characterized in that, The storage assembly includes: A second sensor, arranged at the lower end of the first horizontal part and corresponding to the conveyor belt in position. A third sensor, arranged on the end surface of the second horizontal part.

5. The buffer and storage mechanism for the silicon wafer sorting machine according to claim 1, wherein The platform includes: A first sensor, arranged at the rear end of the upper surface of the platform.

6. The buffer and storage mechanism for a silicon wafer sorting machine according to claim 1, characterized in that: A bracket is arranged at the lower end of the platform, and the bracket is erected on the ground.

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