Crucible and evaporation coating device
By setting a narrow opening defined by the baffle in the crucible of the evaporation coating device, the problem of limited spraying range of the evaporation material is solved, and more efficient and uniform coating effect and equipment stability are achieved.
Patent Information
- Application Number
- CN202422357522.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-26
- Publication Date
- 2025-07-04
- Estimated Expiration
- 2034-09-26
AI Technical Summary
In the existing evaporation coating devices, the spray range of the evaporated material is limited, resulting in coating unevenness and nozzle clogging problems, affecting the coating effect and efficiency.
Set a baffle in the main body of the crucible, define a narrow opening to guide the spraying of the evaporated material, improve the injection range and uniformity, and use high-temperature resistant materials such as graphite or silicon nitride to make the baffle to ensure uniform heat transfer and stable material evaporation.
It improves coating efficiency and uniformity, reduces the risk of nozzle clogging, enhances the utilization rate of evaporated materials and coating quality, and extends the service life of the equipment.
Smart Images
Figure CN223061060U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of evaporation coating devices, and particularly relates to a crucible and an evaporation coating device. Background Art
[0002] Evaporation coating, also known as vacuum evaporation coating, is a process method in which, under vacuum conditions, an evaporation coating material (or film material) is evaporated by heating and vaporized, and then the particles fly to the surface of the substrate and condense into a film.
[0003] The current evaporation coating devices generally heat the evaporation coating material by heating a crucible to melt it and vaporize it, and finally form a film; in the prior art, a crucible cover is usually arranged on the crucible, and a hole-shaped nozzle is arranged on the crucible cover. The ejection direction and angle of the evaporation coating material are controlled through the hole-shaped nozzle. Due to the limited spraying range of the hole-shaped nozzle, there are still problems with the combination of the evaporation coating material and the surface of the substrate.
[0004] Therefore, the prior art still needs to be improved and enhanced. Summary of the Utility Model
[0005] In view of the deficiencies of the above-mentioned prior art, the purpose of the present utility model is to provide a crucible and an evaporation coating device.
[0006] In order to achieve the above purpose, the present utility model adopts the following technical solutions:
[0007] A crucible, comprising
[0008] A crucible body having a hollow cavity for containing an evaporation coating material;
[0009] A baffle arranged on the inner wall of the crucible body, the baffle defining a long and narrow opening in the hollow cavity, the long and narrow opening communicating the hollow cavity below the baffle with the external space of the crucible body.
[0010] The ratio of the length to the width of the long and narrow opening is greater than 1 and less than or equal to 5.
[0011] The length of the long and narrow opening is 30 mm - 100 mm, and the width of the long and narrow opening is 20 mm - 50 mm.
[0012] The distance between the connection of the baffle and the crucible body and the upper end face of the crucible body is greater than 0 cm and less than 4 cm; the thickness of the baffle is 10 mm - 50 mm.
[0013] The shape of the baffle is adapted to the shape of the horizontal cross-section of the hollow cavity, the periphery of the baffle is connected to the inner wall of the crucible body, and the long and narrow opening is located on the baffle.
[0014] The crucible body is a hollow cylinder, the inner diameter of the crucible body is 100 mm - 120 mm, and the outer diameter of the crucible body is 120 mm - 140 mm.
[0015] There are two baffles, the two baffles are arranged at the same height, and the baffle is a plane formed by the intersection of an arc edge and a straight edge; the arc edges of the two baffles are connected to the inner wall of the crucible body, and the straight edges of the two baffles define the long and narrow opening with the inner wall of the crucible body.
[0016] The horizontal cross-section of the hollow cavity is a quadrilateral, there are four baffles, the outer sides of the four baffles are connected to the inner wall of the crucible body, and the inner sides of the four baffles define the long and narrow opening.
[0017] The baffle is inclined on the inner wall of the crucible body.
[0018] An evaporation coating device includes a vacuum cavity, a winding module and the crucible are arranged in the vacuum cavity, the winding module includes a unwinding roller and a winding roller, a front main roller is arranged below the unwinding roller and the winding roller, a film roll is installed on the unwinding roller, the film is released from the unwinding roller, passes through the front main roller below the unwinding roller, and is wound by the winding roller, the crucible is arranged below the front main roller, and the crucible evaporates and coats the film passing through the front main roller.
[0019] Compared with the prior art, a crucible and an evaporation coating device provided by the present utility model, the crucible includes a crucible body, the crucible body has a hollow cavity for containing evaporation coating materials; a baffle, the baffle is arranged on the inner wall of the crucible body, the baffle defines a long and narrow opening in the hollow cavity, and the long and narrow opening communicates the hollow cavity below the baffle with the external space of the crucible body. In this application, a baffle is arranged in the hollow cavity of the crucible body, and a long and narrow opening is defined by the baffle to guide the evaporation coating materials to spray out from the long and narrow opening; the setting of the long and narrow opening enables the spraying range of the evaporation coating materials to be larger, a coating can be formed in a larger area, the coating efficiency is improved, and the problem that the evaporation coating materials are concentrated and accumulated in a certain area of the substrate, affecting the uniformity of the evaporation coating effect, is avoided. Description of the Drawings
[0020] Figure 1 It is a schematic cross-sectional view in the horizontal direction of the hollow cavity of the crucible provided by the present utility model, where the horizontal cross-section is circular and there is one baffle.
[0021] Figure 2 It is a schematic cross-sectional view in the horizontal direction of the hollow cavity of the crucible provided by the present utility model, where the horizontal cross-section is quadrilateral and there is one baffle.
[0022] Figure 3Schematic cross-sectional view in the horizontal direction of the hollow cavity of the crucible provided by the present utility model, where the horizontal cross-section is circular and provided with two horizontal baffles.
[0023] Figure 4 For Figure 3 Schematic cross-sectional view in the vertical direction of the crucible body shown.
[0024] Figure 5 Schematic cross-sectional view in the vertical direction of the hollow cavity of the crucible provided by the present utility model, where the horizontal cross-section is circular and provided with two inclined baffles.
[0025] Figure 6 Schematic cross-sectional view in the horizontal direction of the hollow cavity of the crucible provided by the present utility model, where the horizontal cross-section is quadrilateral and provided with four interconnected horizontal baffles.
[0026] Figure 7 Schematic cross-sectional view in the horizontal direction of the hollow cavity of the crucible provided by the present utility model, where the horizontal cross-section is quadrilateral and provided with four unconnected horizontal baffles
[0027] Figure 8 Schematic structural view of the evaporation coating device provided by the present utility model.
[0028] Reference numerals in the drawings
[0029] Crucible body 1, hollow cavity 11, baffle 12, narrow opening 13, compensation opening 14, unwinding roller 21, winding roller 22, front main roller 23, rear main roller 24, front roller group 25, front bending roller 26, front rubber roller 27, swing roller 28, rear bending roller 29, rear rubber roller 30, tension roller 31, rear roller group 32. Detailed implementation manners
[0030] To make the purpose, technical solutions and effects of the present utility model clearer and more definite, the following further elaborates on the present utility model with reference to the accompanying drawings and by way of examples. It should be understood that the specific examples described herein are only used to explain the present utility model and are not used to limit the present utility model.
[0031] It should be noted that when a component is referred to as being "mounted on", "fixed to" or "disposed on" another component, it can be directly on the other component or there may be an intermediate component present at the same time. When a component is referred to as being "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present at the same time.
[0032] It should also be noted that the terms of orientation such as left, right, up, and down in the embodiments of the present utility model are only relative concepts to each other or are referenced based on the normal use state of the product, and should not be considered restrictive.
[0033] Evaporation coating, also known as vacuum evaporation coating, is a process method in which the coating material (or film material) is evaporated by heating under vacuum conditions and vaporized, and then the particles fly to the surface of the substrate and condense into a film. The current evaporation coating device generally heats the evaporation material by heating the crucible to melt it and vaporize it to finally form a film.
[0034] In the existing evaporation coating devices, a crucible cover is usually provided on the crucible, and a nozzle with holes is provided on the crucible cover. The spraying direction and angle of the evaporation material are controlled through the nozzle with holes to ensure that the evaporation material can reach the surface of the substrate according to a predetermined path and distribution pattern. At the same time, the design of the nozzle can also optimize the evaporation rate of the evaporation material to ensure that the evaporation material evaporates and sprays out quickly at an appropriate temperature. However, in the products obtained by current evaporation coating, there are still problems with the bonding between the evaporation material and the surface of the substrate. It should be noted that the substrate in this application is the film for making the composite current collector.
[0035] In the prior art, since the nozzle sprays the evaporation material in the form of a single hole, in this way, when coating, multiple crucibles need to be arranged side by side, which will cause the area between two nozzles to be unable to spray the material to be coated, and then the corresponding area above the crucible cannot be coated with the evaporation material, affecting the uniformity of coating; at the same time, the nozzle with holes may generate a relatively concentrated spraying point when spraying, and a large amount of evaporation material is coated on a small area on the surface of the substrate. Due to the large heat impact in this area, the substrate may be burned to form holes, resulting in poor evaporation coating effect; even if heat does not burn holes on the substrate, a large amount of heat is mainly concentrated on a point on the surface of the substrate, and the heat in other parts is lower or there is no heat, which will make the main heat-receiving area of the substrate brittle or bent, resulting in unqualified composite current collectors produced. In addition, since there is usually a small gap between the crucible cover and the crucible, when the evaporation material evaporates and approaches the crucible cover, it may condense or accumulate on the crucible cover, making it difficult to clean the crucible cover. Therefore, the prior art still needs to be improved.
[0036] This application provides a crucible. Please refer to Figures 1-7, including a crucible body 1 having a hollow cavity 11 for containing evaporation materials; a baffle 12 disposed on the inner wall of the crucible body 1, the baffle 12 defining a long and narrow opening 13 in the hollow cavity 11, and the long and narrow opening 13 communicating the hollow cavity 11 below the baffle 12 with the external space of the crucible body 1. In this application, the baffle 12 is provided in the hollow cavity 11 of the crucible body 1, and a long and narrow opening 13 is defined by the baffle 12 to guide the evaporation materials to spray out from the long and narrow opening 13; the setting of the long and narrow opening 13 enables a larger spraying range of the evaporation materials, and a coating can be formed in a larger area, improving the coating efficiency and avoiding the problem that the evaporation materials accumulate concentratedly in a certain area of the substrate, which affects the uniformity of the evaporation effect. In the evaporation coating device, the crucible body 1 is placed in a vacuum chamber, and the external space of the crucible body 1 is the space in the vacuum chamber and outside the crucible body 1 where the substrate is placed. The drawings in this application only illustrate the structure and do not limit the parameters and the proportional sizes of each component.
[0037] In the prior art, the crucible cover itself has no heating function, and the heat conduction ability of the hole-shaped nozzle is also poor. Therefore, the temperature at the top of the nozzle is usually lower than that at the bottom, resulting in the evaporation materials being prone to condense and accumulate in the nozzle, blocking the nozzle and affecting the product performance and evaporation production capacity. At the same time, there is usually a gap when the crucible cover is matched with the crucible, and the evaporation materials are prone to condense at the bottom of the crucible cover, making it difficult to clean the crucible cover. Compared with the solution of setting a crucible cover on the crucible and a hole-shaped nozzle on the crucible cover, in this application, the baffle 12 is fixed on the inner wall of the crucible body 1, and the evaporation materials will evaporate evenly and stably without condensing on the lower end surface of the baffle 12, improving the utilization rate of the evaporation materials. The long and narrow opening 13 defined by the baffle 12 is located in the hollow cavity 11 of the crucible body 1. The long and narrow opening 13 can transfer the heat in the crucible body to the spray outlet more smoothly. Since the area of the long and narrow opening 13 is larger than that of the existing hole-shaped nozzle, the heat distribution is more uniform, making the temperature at the spray outlet higher and stable, which is conducive to the uniform spraying of the evaporation materials from the spray outlet. This design reduces the risk of blockage at the spray outlet and improves the continuity and stability of evaporation; the long and narrow opening 13 can form a relatively stable and concentrated evaporation gas flow, which is conducive to the uniform deposition of the evaporation materials on the target surface, while the hole-shaped opening may cause uneven evaporation gas flow velocity, affecting the uniformity and quality of the evaporation coating layer.
[0038] In this application, the baffle 12 can be made of graphite. Graphite is heat-resistant and can withstand high temperatures up to 1500 °C, and can be used on the crucible body 1 for a long time, improving the service life of the baffle 12. Of course, the baffle 12 can also be made of a material with properties similar to those of graphite. The crucible body 1 can be made of heat-resistant materials such as silicon nitride and silicon carbide.
[0039] The ratio of the length to the width of the narrow opening is greater than 1 and less than or equal to 5. The length of the narrow opening 13 is 30 mm - 100 mm, and the width of the narrow opening 13 is 20 mm - 50 mm. Limiting the size of the narrow opening 13 within this range can improve the evaporation efficiency. The narrow opening 13 can be a waist-shaped hole, a rectangular hole, a hole formed by connecting two opposite inferior arcs and two parallel straight lines, etc. Under high temperature and high pressure environments, compared with the crucible body 1 without the baffle 12, the setting of the baffle 12 makes the pressure inside the crucible body 1 relatively large, and the evaporation material all sprays out from the narrow opening 13. The narrow opening 13 is beneficial to enhancing the bonding force between the evaporation material and the surface of the substrate, ensuring that the evaporation material is evenly evaporated on the substrate.
[0040] The connection between the baffle 12 and the crucible body 1 is more than 0 cm and less than 4 cm away from the upper end face of the crucible body 1.
[0041] In this application, the baffle 12 is arranged close to the upper end of the crucible body 1, which is beneficial to leaving enough evaporation space for the evaporation material inside the crucible body 1 to ensure that the evaporation material is evenly heated; it can effectively limit the flow path of the evaporation material. When the evaporation material vaporizes and rises, due to the blockage of the baffle 12, it will spray out along the set narrow opening 13, reducing the disordered diffusion of the evaporation material in the hollow cavity 11 and improving the evaporation efficiency and uniformity; the evaporation material is guided to the narrow opening 13 at a position close to the upper end face of the crucible body 1, reducing the heat loss caused by the long-term stay of the evaporation material in the hollow cavity 11, helping to maintain the high temperature of the vapor, enabling it to better deposit on the surface of the substrate to form a high-quality evaporation layer, and at the same time reducing the condensation of the evaporation material on the inner wall of the crucible body 1 above the baffle 12 and improving the utilization rate of the evaporation material.
[0042] The thickness of the baffle 12 is 10 mm - 50 mm. Such a thickness, on the one hand, can provide better structural strength, which is beneficial to improving the connection stability between the baffle 12 and the inner wall of the crucible body 1, ensuring that it can withstand high temperature, high pressure and possible mechanical stress during the evaporation process and extending the service life. On the other hand, in a high temperature and high pressure evaporation environment, a thinner baffle 12 is prone to deformation, affecting the evaporation effect, while a thicker baffle 12 can better resist deformation and maintain the shape and size stability of the spray outlet (i.e., the narrow opening). In addition, the thickness of the baffle 12 determines the time for the evaporation material to pass through the narrow opening 13. A thicker baffle 12 helps the evaporation material to form a stable evaporation flow, ensuring that the evaporation material stably sprays out from the narrow opening 13, enabling the evaporation material to be evenly sprayed onto the surface of the substrate and improving the uniformity and quality of the evaporation layer.
[0043] The shape of the baffle 12 is adapted to the shape of the horizontal cross-section of the hollow cavity 11. The peripheral side of the baffle 12 is connected to the inner wall of the crucible body 1, and the long and narrow opening 13 is located on the baffle 12.
[0044] For the first embodiment of the present application, please refer to Figure 1 and Figure 2 , the external contour shape of the crucible body 1 is not limited. The horizontal cross-section of the hollow cavity 11 can be circular, rectangular, polygonal, etc. At this time, there is one baffle 12, and the main shape of the baffle 12 is adapted to the shape of the horizontal cross-section of the hollow cavity 11 (that is, if the shape of the horizontal cross-section of the hollow cavity 11 is circular, the shape of the baffle 12 is circular). The size of the baffle 12 is adapted to the size of the horizontal cross-section of the hollow cavity 11. The baffle 12 is horizontally arranged in the crucible body 1, and the peripheral side of the baffle 12 is connected to the inner wall of the crucible body 1. The long and narrow opening 13 is located in the middle of the baffle 12, reducing the edge effect, making the evaporation material cover the substrate surface more evenly, reducing the influence of the temperature gradient on the evaporation process, and also facilitating the cleaning of impurities at the long and narrow opening.
[0045] The crucible body 1 is a hollow cylinder. The inner diameter of the crucible body 1 is 100 mm - 120 mm, and the outer diameter of the crucible body 1 is 120 mm - 140 mm. In the present application, the inner diameter of the crucible body 1 is larger than that of a traditional crucible with an inner diameter of dozens of millimeters. The larger inner diameter means that the evaporation material has a larger space for diffusion and mixing during the evaporation process, which helps to reduce the formation of impurities and pores and improve the quality of the evaporation layer. In addition, the larger inner diameter reduces the possibility of the evaporation material splashing onto the inner wall of the main body during the heating process, reduces potential safety hazards, improves the service life of the crucible, and also enables the crucible to adapt to the needs of various evaporation materials. Whether it is a high-melting-point or low-melting-point evaporation material, the evaporation process can be ensured to proceed smoothly. Compared with the outer diameter of a traditional smaller crucible, the outer diameter of the crucible body 1 in the present application is larger, enabling the crucible to be stably installed in the evaporation coating device and reducing equipment damage or safety accidents caused by vibration or impact. In the embodiment of the present application, the difference between the inner diameter and the outer diameter of the crucible body 1 is 20 mm. For example, the inner diameter of the crucible body 1 is 110 mm, and the outer diameter of the crucible body 1 is 130 mm; the wall thickness of 20 mm of the crucible body 1 helps to maintain the stability inside the crucible body 1 during the evaporation process, reduce heat dissipation, and at the same time, the relatively thick wall of the crucible body 1 helps to achieve uniform temperature distribution during the evaporation process and reduce uneven evaporation layers or other quality problems caused by temperature gradients.
[0046] Please refer to Figures 3-5, there are two baffle plates 12, and the two baffle plates 12 are arranged at the same height. The baffle plate 12 is a plane formed by the intersection of an arc edge and a straight edge; the arc edges of the two baffle plates 12 are connected to the inner wall of the crucible body 1, and the straight edges of the two baffle plates 12 and the inner wall of the crucible body 1 define the long and narrow opening 13. Figure 3 and Figure 4 are respectively schematic diagrams of two mutually perpendicular cross-sections.
[0047] Please refer to Figure 3 and Figure 4 , in the second embodiment of the present application, the horizontal cross-section of the hollow cavity 11 is circular, and the baffle plate 12 is a planar member formed by the intersection of a minor arc and a straight line. The two baffle plates 12 are horizontally and oppositely arranged in the hollow cavity 11. The arc edges of the two baffle plates 12 are connected to the inner wall of the crucible body 1, and the long and narrow opening 13 defined by the two baffle plates 12 and the crucible body 1 has two parallel straight lines as its long sides and a minor arc corresponding to the inner wall of the crucible body 1 as its short side. Preferably, the two baffle plates 12 are arranged at the same height, which is beneficial to improving the stability and uniformity of the ejection of the evaporation material.
[0048] Furthermore, please refer to Figure 5 , in the third embodiment of the present application, on the basis of the second embodiment, the baffle plate 12 can also be inclinedly arranged on the inner wall of the hollow cavity 11, that is, the two baffle plates 12 are in a positive V shape or an inverted V shape. When the two baffle plates 12 are in a positive V shape, the side walls of the baffle plates 12 play a guiding role in the ejection process of the evaporation material rising, making the evaporation material more smooth during the ejection process, reducing the phenomena of eddy current and turbulence, thereby improving the uniformity and stability of evaporation; at the same time, the two baffle plates 12 in a positive V shape can optimize the ejection angle and speed of the evaporation material, further improving the uniformity of the evaporation layer; it can also return the evaporation material on the baffle plate 12 to the crucible, making full use of the evaporation material.
[0049] Please refer to Figure 6 and Figure 7 , the horizontal cross-section of the hollow cavity 11 is quadrilateral, there are four baffle plates 12, the outer sides of the four baffle plates 12 are connected to the inner wall of the crucible body 1, and the inner sides of the four baffle plates 12 define the long and narrow opening 13.
[0050] Please refer to Figure 6 , in the fourth embodiment of the present application, the horizontal cross-section of the hollow cavity 11 is rectangular, and the four baffle plates 12 are respectively connected to the four inner walls of the crucible body 1 to be fixed in the hollow cavity 11. The four baffle plates 12 define a long and narrow opening 13 at the center of the hollow cavity 11, and four compensation openings 14 are defined between the inner walls of the crucible body 1 and two adjacent baffle plates among the four baffle plates 12. In this embodiment, the adjacent baffle plates 12 among the four baffle plates 12 can be connected to each other, that is, from the horizontal plane, the long and narrow opening 13 is an enclosed opening; please refer toFigure 7 , of course, adjacent baffles 12 among the four baffles 12 may not be connected either. That is, from the horizontal plane, the long and narrow opening 13 is not a completely enclosed opening around its perimeter, and there are small gaps between adjacent baffles 12. The unenclosed long and narrow opening 13 located between the four baffles 12 can also serve as the ejection port for the evaporation material. In addition, the four baffles 12 can be rectangular, trapezoidal, or other shapes. In this application, the direction in which the evaporation material is ejected is vertical, and the direction perpendicular to the vertical direction is horizontal.
[0051] Furthermore, in the fifth embodiment of this application, based on the third embodiment, the four baffles 12 can also be inclinedly arranged on the inner wall of the hollow cavity 11, and the inclination directions of the four baffles 12 are unified, that is, they are all inclined upward or all inclined downward. When the four baffles 12 are all inclined upward, the effect and principle are the same as those of the positive octagonal arrangement of the two baffles 12 based on the second embodiment, and will not be elaborated here.
[0052] The baffle 12 is inclinedly arranged. The inclined baffle 12 plays a guiding role during the process of the evaporation material rising and ejecting from the bottom of the hollow cavity 11, increasing the ejection pressure of the evaporation material, which is beneficial to improving the bonding force between the evaporation material and the surface of the substrate.
[0053] This utility model also correspondingly provides an evaporation coating device. Please refer to Figure 8 , which includes a vacuum cavity (not shown in the figure). A winding module (not labeled in the figure) and the above-mentioned crucible are arranged in the vacuum cavity. The winding module includes an unwinding roller 21 and a winding roller 22. A front main roller 23 is arranged below the unwinding roller 21 and the winding roller 22. A film roll is installed on the unwinding roller 21. The film is unwound from the unwinding roller 21, passes through the front main roller 23 below the unwinding roller 21, and is wound by the winding roller 22. The crucible is arranged below the front main roller 23, and the crucible evaporates and coats the film passing through the front main roller 23. In this application, the substrate in the evaporation coating device is the film for manufacturing the composite current collector, that is, the evaporation material is deposited on the film. By using the evaporation coating device in this application, the bonding force between the evaporation material and the film can be effectively improved, and the problem of evaporation material splashing will not occur during the coating process.
[0054] A rear main roller 24 is also arranged below the unwinding roller 21 and the winding roller 22. The film is unwound from the unwinding roller 21, passes through the front main roller 23 and the rear main roller 24 below the unwinding roller 21 in sequence, and then is wound by the winding roller 22. The front main roller 23 is located below the unwinding roller 21, and the rear roller is located below the winding roller 22. A front roller group 25 composed of multiple guide rollers is arranged on the film running path between the unwinding roller 21 and the front main roller 23. A crucible is also arranged below the rear main roller 24 to perform secondary evaporation coating on the film passing through the rear main roller 24.
[0055] A front bending roller 26 is provided on the film running path of the front roller group 25. On the one hand, the front bending roller 26 can flatten the film to facilitate coating, and on the other hand, it can also provide a certain tension to the film, so that the film has a greater adhesion force with the front main roller 23 during coating. Preferably, the surface roughness of the front bending roller 26 is greater than that of other passing rollers, which is beneficial to ensuring the adhesion force between the film and the main roller, and at the same time can prevent the film from being scratched when moving on the passing roller. The front main roller 23 is a cooling roller and can be used to cool the film. A crucible is provided below the front main roller 23. Generally, there are multiple crucibles, which are arranged in two columns. The specific number of crucibles can be set according to the size of the film, and the present application does not limit this here.
[0056] A front rubber roller 27 and a rear bending roller 29 are provided on the film running path of the front main roller 23 and the rear main roller 24. The front rubber roller 27 can also be a roller with roughness, which can prevent the film from slipping after coating, and at the same time can also increase the wrap angle between the film and the front main roller 23. A swinging roller 28 is further provided on the film running path between the front rubber roller 27 and the rear bending roller 29, and the swinging roller 28 can play a role in maintaining a constant tension between the two main rollers. A rear rubber roller 30 is further provided on the film running path between the rear main roller 24 and the winding roller 22. The rear rubber roller 30 is a cooling roller and can also be used to cool the film. A crucible is also provided below the rear main roller 24 for secondary evaporation coating. The roughness of the rear rubber roller 30 can also be greater than that of other passing rollers, which helps the film not to slip and can also make the film fit more closely with the main roller.
[0057] A tension roller 31 and a rear roller group 32 are further provided on the film running path between the rear rubber roller 30 and the winding roller 22. A film surface temperature sensor (not shown in the figure) is provided above the front rubber roller 27 and the tension roller 31, and the film surface temperature sensor can realize real-time detection of the temperature of the film surface just after coating on the main roller. The rear roller group 32 is composed of multiple passing rollers. The tension roller 31 mainly controls the tension of the film. The film coming out of the tension roller 31 passes through multiple passing rollers and finally reaches the winding roller 22.
[0058] In summary, a crucible and an evaporation coating device provided by the present utility model. The crucible includes a crucible body having a hollow cavity for containing evaporation coating materials; and a baffle provided on the inner wall of the crucible body. The baffle defines a narrow opening in the hollow cavity, and the narrow opening communicates the hollow cavity below the baffle with the external space of the crucible body. In the present application, a baffle is provided in the hollow cavity of the crucible body, and a narrow opening is defined by the baffle to guide the evaporation coating materials to spray out from the narrow opening; the setting of the narrow opening enables the spraying range of the evaporation coating materials to be larger, and a coating can be formed in a larger area, improving the coating efficiency and avoiding the evaporation coating materials from concentrating and accumulating in a certain area of the substrate, which affects the uniformity of the evaporation coating effect.
[0059] It is understood that those of ordinary skill in the art can make equivalent substitutions or changes according to the technical solution and the inventive concept of the present utility model, and all such changes or substitutions should fall within the protection scope of the appended claims of the present utility model.
Claims
1. A crucible, characterized in that, including a crucible body having a hollow cavity for containing evaporation materials; a baffle disposed on the inner wall of the crucible body, the baffle defining a long and narrow opening in the hollow cavity, the long and narrow opening communicating the hollow cavity below the baffle with the external space of the crucible body.
2. The crucible according to claim 1, characterized in that, The ratio of the length to the width of the long and narrow opening is greater than 1 and less than or equal to 5.
3. The crucible according to claim 2, wherein, The length of the long and narrow opening is 30 mm - 100 mm, and the width of the long and narrow opening is 20 mm - 50 mm.
4. The crucible according to claim 3, wherein The connection between the baffle and the crucible body is more than 0 cm and less than 4 cm away from the upper end face of the crucible body; the thickness of the baffle is 10 mm - 50 mm.
5. The crucible according to claim 4, characterized in that, The shape of the baffle is adapted to the shape of the horizontal cross-section of the hollow cavity, the peripheral side of the baffle is connected to the inner wall of the crucible body, and the long and narrow opening is located on the baffle.
6. The crucible according to claim 4, characterized in that, The crucible body is a hollow cylinder, the inner diameter of the crucible body is 100 mm - 120 mm, and the outer diameter of the crucible body is 120 mm - 140 mm.
7. The crucible according to claim 6, characterized in that, There are two baffles, the two baffles are arranged at the same height, and the baffle is a plane formed by the intersection of an arc edge and a straight edge; the arc edges of the two baffles are connected to the inner wall of the crucible body, and the straight edges of the two baffles define the long and narrow opening with the inner wall of the crucible body.
8. The crucible according to claim 4, characterized in that, The horizontal cross-section of the hollow cavity is a quadrilateral, there are four baffles, the outer sides of the four baffles are connected to the inner wall of the crucible body, and the inner sides of the four baffles define the long and narrow opening.
9. The crucible according to claim 7 or 8, characterized in that, The baffle is inclinedly disposed on the inner wall of the crucible body.
10. An evaporation coating device, comprising a vacuum chamber, characterized in that, A winding module and a crucible as claimed in any one of claims 1 - 9 are provided in the vacuum chamber. The winding module includes a unwind roller and a windup roller. A front main roller is provided below the unwind roller and the windup roller. A film roll is mounted on the unwind roller. The film is unwound from the unwind roller, passes through the front main roller below the unwind roller, and is wound by the windup roller. The crucible is provided below the front main roller, and the crucible evaporates the film passing through the front main roller.