Rapid cooling device of chemical vapor deposition furnace

Abstract

The utility model discloses a rapid cooling device of a chemical vapor deposition furnace, belongs to the technical field of chemical vapor deposition furnaces, and aims to solve the problems that in the prior art, the contact position of an externally-surrounded spiral circulating pipe and a material storage pipe is fixed, the cooling range is limited, and the heat dissipation efficiency of the material storage pipe is not high. Comprising a cooling box, a cold air box and a supporting mechanism, the cooling box is arranged above the cooling box, and a conveying pipe is arranged between the cooling box and the cold air box; a door plate is installed at the front end of the cooling box and provided with an observation window. Conveying rollers are installed at the bottom end of the interior of the cooling box and distributed at intervals, a supporting mechanism is arranged between the conveying rollers, movable air spraying pipes are arranged on the inner side wall of the cooling box, and multiple sets of air spraying pipes are horizontally distributed at intervals. According to the rapid cooling device of the chemical vapor deposition furnace, the material storage pipe is independently located in the cooling box, the cooling quality is higher, the conveying rollers for conveying the material storage pipe are arranged in the cooling box, and material receiving and feeding of the material storage pipe are facilitated.

Description

Technical Field

[0001] The utility model belongs to the technical field of chemical vapor deposition furnaces, and particularly relates to a rapid cooling device for a chemical vapor deposition furnace. Background Technique

[0002] The basic working principle of a chemical vapor deposition furnace is mainly based on gas-phase reactions and mass transfer. During the deposition process, the high-temperature environment inside the furnace enables the raw material gas molecules or atoms to obtain sufficient energy, undergo chemical reactions such as decomposition and combination, and generate the required gas-phase products. These gas-phase products are transported to the substrate surface inside the furnace through diffusion, convection, etc. When the gas-phase products come into contact with the substrate surface, processes such as adsorption, reaction, and diffusion will occur, and finally a dense thin film will be formed on the substrate surface. A chemical vapor deposition furnace with improved heat dissipation effect is disclosed in the prior art, application number: CN202222085668.3. In order to dissipate heat, only the stock pipe is exposed to the air, and natural cooling has a poor heat dissipation effect on the stock pipe. At the same time, it does not have a protective structure. If a worker accidentally touches the stock pipe, it will affect the life and health of the worker. By setting a spiral circulation pipe, it is possible to prevent the worker from touching the storage cylinder and ensure the safety and health of the worker. And when the circulation pump is turned on, the coolant will flow in the spiral circulation pipe, cooling the air around the spiral circulation pipe. However, the contact position between the externally surrounded spiral circulation pipe and the stock pipe is fixed, the cooling range is limited, and the heat dissipation efficiency of the stock pipe is not high. Therefore, the inventor proposes a rapid cooling device for a chemical vapor deposition furnace. Content of the Utility Model

[0003] (1) Technical Problems to be Solved

[0004] Aiming at the deficiencies of the prior art, the purpose of the utility model is to provide a rapid cooling device for a chemical vapor deposition furnace, aiming to solve the problems that the contact position between the externally surrounded spiral circulation pipe and the stock pipe in the prior art is fixed, the cooling range is limited, and the heat dissipation efficiency of the stock pipe is not high.

[0005] (2) Technical Solutions

[0006] To solve the above technical problems, the present utility model provides a rapid cooling device for a chemical vapor deposition furnace, which includes a cooling box, a cold air box and a support mechanism. The cooling box is arranged above the cooling tank, and a transmission pipe is provided between the cooling box and the cold air box; a door panel is installed at the front end of the cooling box, and an observation window is provided on the door panel; a conveying roller is installed at the inner bottom end of the cooling box, the conveying rollers are distributed at intervals, and a support mechanism is provided between them. Movable jet pipes are provided on the inner side wall of the cooling box. Multiple groups of jet pipes are horizontally distributed at intervals, and a connecting piece is provided between the multiple groups of jet pipes. The connecting piece connects the multiple groups of jet pipes in series, and one end of the connecting piece away from the jet pipe is fixedly connected with a second electric push rod, and the second electric push rod is arranged vertically. Thanks to the setting of the cooling box, the storage pipe is independently located inside the cooling box, and the cooling quality is higher. Moreover, there are conveying rollers for conveying the storage pipe inside the cooling box, which is convenient for receiving and feeding the storage pipe.

[0007] Preferably, a fixing frame is fixedly installed on the outer wall of the second electric push rod, and a jet plate is connected to the outer wall of the fixing frame.

[0008] Preferably, the jet plate is a cuboid hollow plate-like structure, and the jet pipes are distributed at intervals along the length direction of the jet plate.

[0009] Preferably, a connecting hose is installed between the jet pipe and the jet plate, and the jet plate and the paint spraying pipe are communicated.

[0010] Preferably, the surface of the jet plate away from the jet pipe is communicated with the transmission pipe.

[0011] Preferably, the support mechanism includes a bearing rod, a connecting frame and a first electric push rod. The connecting frame is in a U-shaped structure, and bearing rods are respectively installed on the upper surfaces of both ends. The upper surface of the bearing rod is arc-shaped.

[0012] Preferably, the connecting frame is embedded in the bottom end of the cooling box, and the bottom end surface of the connecting frame is fixedly connected with a vertically arranged first electric push rod.

[0013] (3) Beneficial effects

[0014] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0015] Benefiting from the setting of the cooling box, the storage pipe is independently located inside the cooling box, with higher cooling quality. Moreover, there are conveying rollers for conveying the storage pipe inside the cooling box, which facilitates the feeding and discharging of the storage pipe. When cooling, the cooling air inside the cooling box is pumped out through the transmission pipe and introduced into the jet plate. The bearing rod rises between the conveying rollers to support the storage pipe, enabling the storage pipe to be suspended. As a result, the spraying range of the cooling air on the storage pipe is wider. During the jetting process of the jet pipe, the jet pipe has a swinging effect, which can increase the contact range between the cooling air and the outer wall of the storage pipe when jetting on the outer wall of the storage pipe, with good cooling effect and can be widely promoted. Description of the Drawings

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0017] Figure 1 Structural schematic diagram of the present utility model;

[0018] Figure 2 Structural schematic diagram of the door panel in the unfolded state;

[0019] Figure 3 Structural schematic diagram of the support mechanism;

[0020] Figure 4 Structural schematic diagram of the connection between the transmission pipe and the jet pipe.

[0021] The reference signs in the drawings are: 1, cold air box; 2, transmission pipe; 3, observation window; 4, door panel; 5, conveying roller; 6, cooling box; 7, support mechanism; 9, bearing rod; 10, connecting frame; 11, first electric push rod; 12, second electric push rod; 13, fixing frame; 14, connecting piece; 15, jet pipe; 16, connecting hose; 17, jet plate. Detailed Description of the Invention

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0023] This specific embodiment is a rapid cooling device for a chemical vapor deposition furnace, and its structural schematic diagram is as Figure 1 、Figure 2 As shown in the figure, it includes a cooling box 6, a cold air box 1 and a support mechanism 7. The cooling box 6 is arranged above the cooling box, and a transmission pipe 2 is provided between the cooling box 6 and the cold air box 1; a door panel 4 is installed at the front end of the cooling box 6, and an observation window 3 is provided on the door panel 4; a conveying roller 5 is installed at the inner bottom end of the cooling box 6. The conveying rollers 5 are distributed at intervals, and a support mechanism 7 is provided between them. Movable air spray pipes 15 are provided on the inner side wall of the cooling box 6. Multiple groups of air spray pipes 15 are horizontally distributed at intervals, and a connecting piece 14 is provided between the multiple groups of air spray pipes 15. The connecting piece 14 connects the multiple groups of air spray pipes 15 in series. One end of the connecting piece 14 away from the air spray pipe 15 is fixedly connected to a second electric push rod 12, and the second electric push rod 12 is arranged vertically.

[0024] Refer to Figure 3 , the support mechanism 7 includes a bearing rod 9, a connecting frame 10 and a first electric push rod 11. The connecting frame 10 is of a U-shaped structure, and bearing rods 9 are respectively installed on the upper surfaces of both ends. The upper surface of the bearing rod 9 is arc-shaped. The connecting frame 10 is embedded in the bottom end of the cooling box 6, and the bottom end surface of the connecting frame 10 is fixedly connected to a vertically arranged first electric push rod 11.

[0025] Refer to Figure 2 , Figure 4 , a fixing frame 13 is fixedly installed on the outer wall of the second electric push rod 12, and a jet plate 17 is connected to the outer wall of the fixing frame 13. The jet plate 17 is of a cuboid hollow plate-like structure, and the air spray pipes 15 are distributed at intervals along the length direction of the jet plate 17. A connecting hose 16 is installed between the air spray pipe 15 and the jet plate 17, and the jet plate 17 and the paint spray pipe are communicated. One side of the jet plate 17 away from the air spray pipe 15 is communicated with the transmission pipe 2.

[0026] Working principle:

[0027] When in use, firstly dock the cooling box 6 with the deposition furnace. When the storage tube in the deposition furnace is moved out, it is first received by the cooling box 6. The cooling box 6 has a plurality of conveying rollers 5 inside. The conveying rollers 5 are driven by a motor (not shown in the figure) to rotate and receive the storage tube. When the storage tube enters the cooling box 6, the connection between the cooling box 6 and the deposition furnace is closed. The storage tube is independently located inside the cooling box 6. At this time, the cooling cold air inside the cooling box is drawn toward the inside of the jet plate 17 through the transmission pipe 2. After the cold air enters the connecting hose 16, it is discharged by the jet pipe 15. The jet pipe 15 is located on both sides of the storage tube, and then cooling begins. During the cooling process, the first electric push rod 11 rises to press the connecting frame 10. Lifting, after the connecting frame 10 is lifted, the bearing rod 9 rises from between the conveying rollers 5 to prop up the storage tube, so that the storage tube can be suspended in the air, and then the cold air has a wider spray range to the storage tube. In the process of the jetting pipe 15 spraying, the second electric push rod 12 is extended and retracted to drive the connecting piece 14 to move up and down, so that the jetting pipe 15 has a swinging effect. When the outer wall of the storage tube is sprayed, the contact range between the cold air and the outer wall of the storage tube can be increased. The closed cooling method has a higher cooling efficiency for the storage tube and can quickly dissipate heat from the storage tube. After the cooling is completed, the door panel 4 can be opened, the bearing rod 9 is lowered, the outer wall of the storage tube contacts the conveying roller 5, and the conveying roller 5 rotates to move the storage tube out, and the worker receives the cooled storage tube.

[0028] A refrigerator is installed inside the cold air box 1 to cool the air and then discharge it toward the interior of the cooling box 6. The working principle is the existing technology.

[0029] Finally, it should be noted that the above is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A rapid cooling device for a chemical vapor deposition furnace, comprising a cooling box (6), a cold air box (1) and a support mechanism (7), characterized in that, The temperature reduction box (6) is arranged above the cooling box, and a transmission pipe (2) is provided between the temperature reduction box (6) and the cold air box (1); A door panel (4) is installed at the front end of the temperature reduction box (6), and an observation window (3) is provided on the door panel (4); A conveying roller (5) is installed at the inner bottom end of the temperature reduction box (6). The conveying rollers (5) are distributed at intervals, and a support mechanism (7) is provided therebetween. Movable air spraying pipes (15) are provided on the inner side wall of the temperature reduction box (6). Multiple groups of the air spraying pipes (15) are horizontally distributed at intervals, and a connecting member (14) is provided between the multiple groups of air spraying pipes (15). The connecting member (14) connects the multiple groups of air spraying pipes (15) in series. One end of the connecting member (14) away from the air spraying pipe (15) is fixedly connected to a second electric push rod (12), and the second electric push rod (12) is vertically arranged.

2. The rapid cooling device of a chemical vapor deposition furnace according to claim 1, characterized in that, A fixing frame (13) is fixedly installed on the outer wall of the second electric push rod (12), and an air spraying plate (17) is connected to the outer wall of the fixing frame (13).

3. The rapid cooling device of a chemical vapor deposition furnace according to claim 2, characterized in that, The air spraying plate (17) is of a cuboid hollow plate-like structure, and the air spraying pipes (15) are distributed at intervals along the length direction of the air spraying plate (17).

4. The rapid cooling device of a chemical vapor deposition furnace according to claim 3, characterized in that A connecting hose (16) is installed between the air spraying pipe (15) and the air spraying plate (17), and the air spraying plate (17) and the paint spraying pipe are communicated with each other.

5. The rapid cooling device of a chemical vapor deposition furnace according to claim 4, characterized in that, One side of the air spraying plate (17) away from the air spraying pipe (15) is communicated with the transmission pipe (2).

6. The rapid cooling device of a chemical vapor deposition furnace according to claim 1, characterized in that, The support mechanism (7) includes a bearing rod (9), a connecting frame (10), and a first electric push rod (11). The connecting frame (10) is of a U-shaped structure, and bearing rods (9) are respectively installed on the upper surfaces of both ends. The upper surface of the bearing rod (9) is arc-shaped.

7. The rapid cooling device of a chemical vapor deposition furnace according to claim 6, characterized in that, The connecting frame (10) is embedded in the bottom end of the temperature reduction box (6), and the bottom end surface of the connecting frame (10) is fixedly connected to a vertically arranged first electric push rod (11).

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