Guide cylinder structure for single crystal furnace

Abstract

The guide cylinder structure for the single crystal furnace comprises an outer cylinder and an inner container, and the inner container is sleeved in the outer cylinder; the top of the inner container integrally extends to form a horizontal flange, a lifting inner ring layer is fixedly installed at the bottom of the horizontal flange, and the bottom structure of the lifting inner ring layer extends into a top inserting groove of the lifting outer ring layer in the vertical direction. The lifting outer ring layer and the outer cylinder are of an integrated connecting structure, a sealing layer is installed at the bottom of the outer cylinder, and the sealing layer is in sealing contact with the outer wall of the inner container. The utility model provides the guide cylinder structure for the single crystal furnace, which can change the number of holes of the guide cylinder and meet the drainage requirement. The structure that the number of exposed holes is adjusted through up-and-down driving is adopted, and the technical problems of hole number and drainage flow quantification of an existing fixed guide cylinder are solved. Compared with an inner container formed in a sectional mode, the integrated inner container structure is more stable in structure.

Description

Technical Field

[0001] The utility model belongs to the technical field of the deflector tube of a single crystal furnace, and particularly relates to a deflector tube structure for a single crystal furnace. Background Art

[0002] When pulling a single crystal silicon rod in a single crystal furnace, a quartz crucible containing raw materials such as polycrystalline silicon blocks is placed in a graphite crucible support located above a crucible support, heated and melted in a protective atmosphere. After adjusting to the process temperature, a seed crystal is inserted into the molten polycrystalline silicon liquid through a deflector tube, rotates in the opposite direction to the crucible and is lifted upward, so that the polycrystalline silicon liquid crystallizes and solidifies into a single crystal silicon rod according to the silicon atom arrangement order of the seed crystal.

[0003] The hole setting of the deflector tube of a single crystal furnace is a design process that needs to comprehensively consider various factors. Through the design of reasonable hole quantity, size, position and distribution, a stable and uniform gas flow state in the single crystal furnace can be realized, thereby improving the growth quality and shape of the single crystal.

[0004] For an ordinary deflector tube, the number of holes is fixed. Therefore, when producing single crystal products with different requirements, it is necessary to replace the deflector tube or replace the single crystal furnace with other size requirements. In view of this technical problem, the present application provides a deflector tube structure for a single crystal furnace that can change the number of holes in the deflector tube and the drainage requirements. The present application adopts a structure that drives up and down to adjust the number of exposed holes, and solves the technical problems of the fixed number of holes in the conventional deflector tube and the fixed drainage flow rate. The integral inner liner structure of the present application is more stable compared with the inner liner composed of segmented parts. Summary of the Invention

[0005] In order to achieve the above object, the technical solution of the utility model is as follows:

[0006] A deflector tube structure for a single crystal furnace, comprising an outer tube and an inner liner, the inner liner is sleeved inside the outer tube; a horizontal flange is integrally extended at the top of the inner liner, and a lifting inner ring layer is fixedly installed at the bottom of the horizontal flange, and the bottom structure of the lifting inner ring layer extends vertically into the top slot of the lifting outer ring layer;

[0007] The lifting outer ring layer is integrally connected with the outer tube, a sealing layer is installed at the bottom of the outer tube, and the sealing layer is in sealed contact with the outer wall of the inner liner.

[0008] Further, a balance ring plate is integrally connected to the outer circle of the horizontal flange of the inner liner, through holes are vertically opened on the body of the balance ring plate, and a guide post is inserted into the through holes in a guiding manner, and the guide post is vertically installed on the upper end surface of the support table.

[0009] Furthermore, a plurality of groups of air holes are opened in the middle section of the lifting inner ring layer;

[0010] The bottom of the lifting inner layer is integrally connected with a bottom ring, and the bottom ring is in sealed contact with the slot.

[0011] Furthermore, a partition layer is encapsulated along the bottom of the slot of the lifting outer layer.

[0012] Furthermore, the lowest horizontal plane of the inner container bottom is higher than the lowest horizontal plane of the outer cylinder.

[0013] The beneficial effects of the present utility model are as follows:

[0014] Compared with the prior art, the present utility model provides a structure of a deflector cylinder for a single crystal furnace that can change the number of holes in the deflector cylinder and the drainage requirements. The present application adopts a structure that drives up and down to adjust the number of exposed holes, solving the technical problems of the fixed number of holes in the deflector cylinder and the fixed drainage flow rate in the past. The integral inner container structure of the present application is more stable compared with the inner container composed of segmented parts. Description of the Drawings

[0015] Figure 1 It is a schematic structural diagram of a deflector cylinder structure for a single crystal furnace of the present utility model.

[0016] Figure 2 It is a schematic structural diagram of the lifting inner layer and the lifting outer layer of a deflector cylinder structure for a single crystal furnace of the present utility model.

[0017] List of Drawing Reference Signs:

[0018] 1 is a support platform, 2 is a balance ring plate, 3 is an inner container, 4 is a lifting inner layer, 5 is a guide post, 6 is a lifting outer layer, 7 is an outer cylinder, 8 is a sealing layer;

[0019] 4-1 is an air hole, 4-2 is a bottom ring, 6-1 is a slot. Detailed Embodiments

[0020] The following further clarifies the present utility model in conjunction with the drawings and specific embodiments. It should be understood that the following specific embodiments are only used to illustrate the present utility model and not to limit the scope of the present utility model.

[0021] As Figure 1 and Figure 2As shown in the figure, a deflector cylinder structure for a single crystal furnace includes an outer cylinder and an inner liner. The inner liner is sleeved inside the outer cylinder. A horizontal flange extends integrally from the top of the inner liner 3. A lifting inner layer 4 is fixedly installed at the bottom of the horizontal flange. The bottom structure of the lifting inner layer 4 extends vertically into the top slot 6-1 of the lifting outer layer 6. Among them, the flanging structure extending horizontally at the top of the inner liner 3 can cooperate with the balance ring plate 2 to complete the transmission and lifting process. During the lifting process, the holes on the lifting inner layer 4 outside the inner liner 3 can be exposed, and as the lifting height changes, the number of exposed holes will increase with the height. Therefore, when the exhaust requirement is met, it can be stopped immediately, and the height of the inner liner 3 can be maintained to complete the subsequent processing and production process. The outer cylinder 7 is fixedly installed.

[0022] The lifting outer layer 6 is integrally connected to the outer cylinder 7. A sealing layer 8 is installed at the bottom of the outer cylinder 7. The sealing layer 8 is in sealed contact with the outer wall of the inner liner 3. Among them, the sealing layer 8 has an inclined sealing end face and can maintain contact during the rising or falling process of the lifting inner layer 4.

[0023] As Figure 1 and Figure 2 shown in the figure, a balance ring plate 2 is integrally connected to the outer circle of the horizontal flange of the inner liner 3. Through holes are vertically opened on the body of the balance ring plate 2. A guide post 5 is inserted into the through holes in a guiding manner. The guide post 5 is vertically installed on the upper end face of the support platform 1. Among them, the balance ring plate 2 makes a vertical guiding movement with the guide post 5 through the guiding holes opened on itself, realizing the vertical balanced lifting movement of the inner liner 3 and avoiding structural inclination during the lifting or lowering process.

[0024] As Figure 1 and Figure 2 shown in the figure, several groups of air holes 4-1 are opened in the middle section of the lifting inner layer 4. Among them, the air holes 4-1 provide a drainage function.

[0025] A bottom ring 4-2 is integrally connected to the bottom of the lifting inner layer 4. The bottom ring 4-2 is in sealed contact with the slot 6-1. Among them, the inner wall of the slot 6-1 is in sealed contact with the bottom ring 4-2 to ensure the tightness of the overall structure and avoid affecting the drainage calculation during the lifting process of exposing the air holes.

[0026] As Figure 1 and Figure 2 shown in the figure, a partition layer is encapsulated along the bottom of the slot 6-1 of the lifting outer layer 6. Among them, the partition layer serves as a supporting and limiting structure to prevent the lifting inner layer 4 from falling off and sliding straight to the bottom of the structure.

[0027] As Figure 1 and Figure 2As shown, the lowest horizontal plane of the inner container 3 is higher than the lowest horizontal plane of the outer cylinder 7. Among them, the inner container 3 is convenient to prevent bumping due to the protruding part during transportation or installation.

[0028] It should be noted that the above content only illustrates the technical idea of the present utility model, and cannot be used to limit the protection scope of the present utility model. For those of ordinary skill in the art, without departing from the principle of the present utility model, several improvements and refinements can still be made, and these improvements and refinements all fall within the protection scope of the claims of the present utility model.

Claims

1. A deflector cylinder structure for a single crystal furnace, comprising an outer cylinder and an inner liner, wherein the inner liner is sleeved inside the outer cylinder; characterized in that: The top of the inner container (3) extends integrally with a horizontal flanging, and a lifting inner layer (4) is fixedly installed at the bottom of the horizontal flanging. The bottom structure of the lifting inner layer (4) extends vertically into the top slot (6-1) of the lifting outer layer (6); The lifting outer layer (6) and the outer cylinder (7) are of an integral connection structure. A sealing layer (8) is installed at the bottom of the outer cylinder (7), and the sealing layer (8) is in sealed contact with the outer wall of the inner container (3).

2. The structure of the deflector cylinder for a single crystal furnace according to claim 1, wherein: An outer ring of the horizontal flanging of the inner container (3) is integrally connected with a balance ring plate (2). Through holes are vertically formed in the body of the balance ring plate (2), and a guide post (5) is inserted into the through holes in a guiding manner. The guide post (5) is vertically installed on the upper end surface of the support platform (1).

3. The structure of the deflector tube for a single crystal furnace according to claim 1, characterized in that: A plurality of groups of air holes (4-1) are formed in the middle section of the lifting inner layer (4); The bottom of the lifting inner layer (4) is integrally connected with a bottom ring (4-2), and the bottom ring (4-2) is in sealed contact with the slot (6-1).

4. A deflector structure for a single crystal furnace according to claim 1, characterized in that: The lifting outer layer (6) is encapsulated with a partition layer along the bottom of the slot (6-1).

5. A structure of a deflector cylinder for a single crystal furnace according to claim 1, characterized in that: The lowest horizontal plane of the bottom of the inner container (3) is higher than the lowest horizontal plane of the outer cylinder (7).

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