Vacuum transmission double-gate valve driven by double pneumatics

Abstract

The utility model belongs to the technical field of transmission valves, and particularly discloses a double-pneumatic-drive vacuum transmission double-gate valve which comprises a valve body assembly, a first execution assembly and a second execution assembly, the first execution assembly and the second execution assembly are fixedly connected with the valve body assembly through screws, the valve body assembly is connected with the first execution assembly, and the first execution assembly is connected with the second execution assembly. The first execution assembly is connected with the second execution assembly; the valve body assembly comprises a valve body, a cover plate window and a valve body cover plate are installed at the top end of the valve body, the cover plate window is arranged at the upper end of the valve body cover plate, the valve body cover plate and the cover plate window are installed and connected to the valve body through screws, a sealing lining plate is further arranged at the right front end of the valve body, and the sealing lining plate is embedded in the valve body and does not protrude out of the outer surface of the valve body. A plurality of valve body sealing rings are arranged at an opening and closing port of the valve body; according to the utility model, the valve body is sealed by using the double pneumatic driving valve plate, so that the sealing safety can be continuously and stably ensured, and the operation, the installation and the maintenance are easy.

Description

Technical Field

[0001] The utility model relates to the technical field of transmission valves, in particular to a vacuum transmission double valve driven by double pneumatic. Background Technique

[0002] Vacuum transmission valves are applied in high-vacuum and ultra-high-vacuum semiconductor environments. Due to the high requirements and standards of their application environments, higher requirements for the vacuum degree of the transmission valves are imposed.

[0003] The current vacuum transmission double valves mainly consist of manual valves and pneumatic valves, and are mainly used for transmission between cavities or between a cavity and a Load Lock. When the valve is opened and closed, it is necessary to ensure the ultra-high vacuum and high-vacuum degrees of the cavity. Therefore, when the transmission valve is applied, it needs to have excellent sealing performance, the highest stability and the longest service life requirements. The domestic semiconductor industry is in its infancy, and the transmission valve plays a key role in the application of semiconductors, so the requirements for its sealing performance and service life are also very high. However, the current high-vacuum transmission double valves have the following problems: First, they cannot meet the requirements of the semiconductor industry for excellent sealing performance and the highest stability of the transmission valve; second, the operation of the manual valve is inconvenient. The manual valve needs to be pulled to the dead point to be sealed and is easy to injure the arm. Therefore, there is an urgent need to design a high-vacuum transmission valve that can achieve excellent sealing performance, high stability, simple operability and long service life requirements. Content of the Utility Model

[0004] The purpose of the utility model is to provide a vacuum transmission double valve driven by double pneumatic to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A vacuum transmission double valve driven by double pneumatic, including a valve body assembly, a first actuator assembly and a second actuator assembly. The first actuator assembly and the second actuator assembly are connected and fixed to the valve body assembly by screws. The valve body assembly is connected to the first actuator assembly, and the first actuator assembly is connected to the second actuator assembly;

[0006] The valve body assembly includes a valve body. A cover window and a valve body cover are installed at the top of the valve body. The cover window is arranged above the valve body cover. The valve body cover and the cover window are installed and connected to the valve body by screws. A sealing lining plate is also arranged at the front end of the valve body. The sealing lining plate is embedded in the valve body and does not protrude from the outer surface of the valve body. A plurality of valve body sealing rings are arranged at the opening and closing ports of the valve body, including a third sealing ring sleeved at the connection between the cover window and the valve body cover, a second sealing ring sleeved at the connection between the valve body cover and the valve body, and a first sealing ring arranged at the movable installation of the first valve plate and the second valve plate at both openings of the valve body. The first sealing ring is embedded in the outer circumference of the valve body opening;

[0007] The first execution component includes a first cylinder body and a second cylinder body. Four guide shafts are vertically installed at the four corner ends of the upper end of the second cylinder body. The first cylinder body is inserted along the guide shafts and arranged above the second cylinder body. A set of actuator support plates are symmetrically installed at the upper end of the first cylinder body. Through holes are provided on the actuator support plates and inserted on the guide shafts. Screws are provided at the upper ends of the actuator support plates to fix the four guide shafts and the cylinder body. A first piston is vertically inserted in the center of the first cylinder body. The first piston is installed on the execution shaft. An execution shaft connection block is sleeved on the middle section of the outer wall of the execution shaft. A welded bellows is provided at the upper end of the execution shaft connection block and is also sleeved on the outer periphery of the execution shaft. A second piston is movably installed in the second cylinder body. The second piston faces the front end. A second cylinder cover plate with a corresponding shape is provided on the side of the second cylinder body where the second piston is installed. A second execution shaft is fixed by screws at the end of the second piston facing the second cylinder cover plate. After fixation, the hole position at the end of the second execution shaft is horizontal. A first connecting shaft is horizontally installed through the hole position at the end of the second execution shaft. The center of the first connecting shaft is correspondingly fixed in the hole position at the end of the second execution shaft. A jack is also provided through the actuator support plate. A second connecting shaft passes through the jack on the actuator support plate and is installed on the execution shaft connection block. The side of the execution shaft connection block is inserted into the movable slot of the actuator support plate. The second connecting shaft moves up and down along with the execution shaft. A set of support columns are relatively installed on the left and right sides of the first cylinder body and the second cylinder body. An actuator bottom plate is installed at the upper end between the two support columns. A bottom cover plate is installed at the bottom ends of the two support columns. A first quick-insert air pipe joint is installed at the lower end of the bottom cover plate. One end of the first quick-insert air pipe joint is connected to a first integrated pilot check valve. A sensor mounting block is fixedly provided at the upper end of the bottom cover plate. A magnetic switch sensor is provided on the sensor mounting block and fixed to the left support column with screws. A set of fixing blocks are correspondingly provided on the adjacent side of the two support columns. The two opposite sides of the fixing blocks are connected to both ends of the first connecting shaft.

[0008] The second execution component includes an actuator body, a third connecting shaft is arranged at the center of the actuator body, a piston execution shaft is arranged inside the actuator body, an M-shaped rack is installed at the lower end of the piston execution shaft, two straight-shaped racks are oppositely installed inside the actuator body, and a gear is arranged between one side of the adjacent straight-shaped rack and one side of the M-shaped rack to be meshed. One end of a connecting plate is fixed on the gear, and the other end of the connecting plate is fixed at the bottom end of the third connecting shaft. A bottom plate is fixedly installed at the bottom end of the actuator body, a sensor installation sheet metal is fixedly arranged on the bottom plate, and a position sensor is fixed on the sensor installation sheet metal. A cover plate with a corresponding shape is fixed by screws at the opening at the front end of the actuator body. A second valve plate is installed at the upper end of the third connecting shaft, a PEEK cushion block is arranged on the second valve plate, a second quick-connect air pipe joint is arranged on one side of the actuator body, and one end of the second quick-connect air pipe joint is connected to a second integrated pilot check valve.

[0009] Preferably, a piston sealing ring is sleeved on the outer periphery of the first piston, the first piston is installed at the bottom end of the execution shaft, and a first valve plate is fixedly installed at the bottom end of the execution shaft. Similarly, rubber rings are sleeved on the outer peripheries of the second piston and the second execution shaft.

[0010] Preferably, the execution shaft connecting block is locked and connected to the welded bellows with a setscrew to prevent the welded bellows from loosening.

[0011] Preferably, a covering member is fixed on the outside of the first execution component by screws, and the covering members are oppositely arranged front and back between the left and right support columns.

[0012] Preferably, rotating pins are arranged on the opposite sides of the actuator support plate, and the rotating pins on both sides are respectively inserted into the left and right support columns.

[0013] Preferably, a sealing cover plate is arranged at the movable end of the piston execution shaft arranged inside the actuator body, and the piston execution shaft passes through the sealing cover plate.

[0014] Preferably, trigger gaskets are fixedly installed at the upper and lower ends of the M-shaped rack.

[0015] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0016] 1. In the form of double pneumatic drive, the opening and closing of the valve body can be remotely operated, reducing the danger caused by improper operation.

[0017] 2. The valve closing form of the first execution component: first rise linearly, then swing horizontally to seal the valve, reducing the scraping damage of the rubber ring at the valve seal and ensuring the sealing continuity.

[0018] 3. Gear transmission form in the second execution component: The straight rack is fixed, and the motion form between the M-shaped rack and the gear is converted, making the structure compact; the gear and the rack are provided with a guide ring and a guide groove to ensure the stability during the movement of the gear and the rack;

[0019] 4. The combination form of the connecting rod structure and the gear: It ensures the stability of the linear operation of the third connecting shaft and the smoothness of the conversion of the motion form. Brief Description of the Drawings

[0020] Figure 1 It is a schematic diagram of the overall structure of the present utility model;

[0021] Figure 2 It is a side view of the whole of the present utility model;

[0022] Figure 3 It is a schematic diagram of the structure of the valve body assembly of the present utility model;

[0023] Figure 4 It is an exploded view of the valve body assembly of the present utility model;

[0024] Figure 5 It is a schematic diagram of the structure of the upper movable part of the first execution component of the present utility model;

[0025] Figure 6 It is an assembly schematic diagram of the valve body assembly and the upper movable part of the first execution component of the present utility model;

[0026] Figure 7 It is an assembly schematic diagram of the main part of the first execution component of the present utility model;

[0027] Figure 8 It is an exploded view of the internal parts of the first execution component of the present utility model;

[0028] Figure 9 It is a schematic diagram of the overall structure of the second execution component of the present utility model;

[0029] Figure 10 It is a working principle diagram of the first execution component of the present utility model.

[0030] In the figure: 100, valve body assembly; 1, valve body; 2, valve body cover plate; 3, cover plate window; 4, sealing lining plate; 5, valve body sealing ring; 51, first sealing ring; 52, second sealing ring; 53, third sealing ring;

[0031] 200, First execution component; 6, First valve plate; 7, Welded bellows; 8, Execution shaft; 9, Shaft connection block; 10, First piston; 11, Piston sealing ring; 12, Actuator support plate; 121, Through hole; 122, Jack; 123, Activity slot; 124, Rotating pin; 13, First cylinder body; 14, Second cylinder body; 15, Second cylinder cover plate; 16, Second piston; 17, Second execution shaft; 18, First connecting shaft; 19, Fixed block; 20, Guide shaft; 21, Second connecting shaft; 22, Actuator bottom plate; 23, Support column; 24, Covering piece; 25, Sensor mounting block; 26, First quick-connect air pipe joint; 27, First integrated pilot check valve; 28, Bottom cover plate;

[0032] 300, Second execution component; 29, Second valve plate; 30, Actuator body; 31, Third connecting shaft; 32, Piston execution shaft; 33, Connecting plate; 34, M-shaped rack; 35, Gear; 36, One-shaped rack; 37, PEEK cushion block; 38, Bottom plate; 39, Sensor mounting sheet metal; 40, Second quick-connect air pipe joint; 41, Second integrated pilot check valve; 42, Cover plate; 43, Sealing cover plate; 44, Position sensor. Detailed implementation manners

[0033] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0034] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "vertical", "upper", "lower", "horizontal", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0035] In the description of the present invention, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] Please refer to Figure 1-7 , the present utility model provides a technical solution: a double pneumatic-driven vacuum transmission double valve, including a valve body assembly 100, a first actuator assembly 200 and a second actuator assembly 300. The first actuator assembly 200 and the second actuator assembly 300 are connected and fixed to the valve body assembly 100 by screws. The valve body assembly 100 is connected to the first actuator assembly 200, and the first actuator assembly 200 is connected to the second actuator assembly 300;

[0037] The valve body assembly 100 includes a valve body 1. A cover window 3 and a valve body cover 2 are installed at the top of the valve body 1. The cover window 3 is arranged above the valve body cover 2. The valve body cover 2 and the cover window 3 are installed and connected to the valve body 1 by screws. A sealing lining plate 4 is also arranged at the front end of the valve body 1. The sealing lining plate 4 is embedded in the valve body 1 and does not protrude from the outer surface of the valve body 1. A plurality of valve body sealing rings 5 are arranged at the opening and closing ports of the valve body 1, including a third sealing ring 53 sleeved at the connection between the cover window 3 and the valve body cover 2, a second sealing ring 52 sleeved at the connection between the valve body cover 2 and the valve body 1, and a first sealing ring 51 arranged at the movable installation positions of the first valve plate and the second valve plate at the two openings of the valve body 1. The first sealing ring 51 is embedded in the outer circumference of the opening of the valve body 1;

[0038] The first execution component 200 includes a first cylinder body 13 and a second cylinder body 14. Four guide shafts 20 are vertically installed at the four corner ends of the upper end of the second cylinder body 14. The first cylinder body 13 is inserted along the guide shafts 20 and arranged above the second cylinder body 14. A set of actuator support plates 12 which are symmetrical to each other are installed at the upper end of the first cylinder body 13. Through holes 121 are provided on the actuator support plates 12 and are inserted on the guide shafts 20. Screws are provided at the upper ends of the actuator support plates 12 to fix the four guide shafts 20 and the cylinder body. A first piston 10 is vertically inserted in the center of the first cylinder body 13. The first piston 10 is installed on an execution shaft 8. An execution shaft connecting block 9 is sleeved on the middle section of the outer wall of the execution shaft 8. A welded bellows 7 is provided at the upper end of the execution shaft connecting block 9. The welded bellows 7 is also sleeved on the outer circumference of the execution shaft 8. A second piston 16 is movably installed in the second cylinder body 14. The second piston 16 faces the front end. A second cylinder cover plate 15 with a corresponding shape is installed on one side of the second cylinder body 14 where the second piston 16 is installed. A second execution shaft 17 is fixed by screws at one end of the second piston 16 facing the second cylinder cover plate 15. After being fixed, the hole position at the end of the second execution shaft 17 is horizontal. A first connecting shaft 18 is horizontally penetrated and installed in the hole position at the end of the second execution shaft 17. The center of the first connecting shaft 18 is correspondingly fixed in the hole position at the end of the second execution shaft 17. A jack 122 is also penetrated and provided on the actuator support plate 12. A second connecting shaft 21 passes through the jack 122 on the actuator support plate 12 and is installed on the execution shaft connecting block 9. The side of the execution shaft connecting block 9 is inserted into the movable slot 123 of the actuator support plate 12. The second connecting shaft 21 moves up and down along with the execution shaft 8. A set of support columns 23 are oppositely installed on the left and right sides of the first cylinder body 13 and the second cylinder body 14. An actuator bottom plate 22 is installed at the upper ends between the two support columns 23. A bottom cover plate 28 is installed at the bottom ends of the two support columns 23. A first quick-connect air pipe joint 26 is installed at the lower end of the bottom cover plate 28. One end of the first quick-connect air pipe joint 26 is connected to a first integrated pilot check valve 27; A sensor mounting block 25 is fixedly provided at the upper end of the bottom cover plate 28. A magnetic switch sensor is provided on the sensor mounting block 25 and is fixed to the left support column 23 with screws. A set of fixing blocks 19 are correspondingly provided on one adjacent side of the two support columns 23. Both ends of the first connecting shaft 18 are connected to the adjacent side surfaces of the fixing blocks 19;

[0039] The second actuator assembly 300 includes an actuator body 30. A third connecting shaft 31 is provided at the center of the actuator body 30. A piston actuator shaft 32 is arranged inside the actuator body 30. An M-shaped rack 34 is installed at the lower end of the piston actuator shaft 32. Two straight racks 36 are oppositely installed inside the actuator body 30. A gear 35 is arranged between one side of the adjacent straight rack 36 and one side of the M-shaped rack 34 and is engaged therewith. One end of a connecting plate 33 is fixed on the gear 35, and the other end of the connecting plate 33 is fixed at the bottom end of the third connecting shaft 31. A bottom plate 38 is fixedly installed at the bottom end of the actuator body 30. A sensor mounting sheet metal 39 is fixedly arranged on the bottom plate 38, and a position sensor 44 is fixed on the sensor mounting sheet metal 39. A cover plate 42 with a corresponding shape is fixed by screws at the opening at the front end of the actuator body 30. A second valve plate 29 is installed at the upper end of the third connecting shaft 31. A PEEK spacer 37 is arranged on the second valve plate 29. A second quick-connect air pipe joint 40 is arranged on one side of the actuator body 30, and one end of the second quick-connect air pipe joint 40 is connected to a second integrated pilot check valve 41.

[0040] Further, a piston seal ring 11 is sleeved on the outer periphery of the first piston 10. The first piston 10 is installed at the bottom end of the actuator shaft 8. The first valve plate 6 is fixedly installed at the bottom end of the actuator shaft 8. Similarly, rubber rings are sleeved on the outer perimeters of the second piston 16 and the second actuator shaft 17.

[0041] Further, the actuator shaft connecting block 9 is locked and connected to the welded bellows 7 using a set screw to prevent the welded bellows 7 from loosening.

[0042] Further, a covering member 24 is fixed to the outside of the first actuator assembly 200 using screws. The covering member 24 is oppositely arranged front and back between the left and right support columns 23.

[0043] Further, rotating pins 124 are arranged on the opposite sides of the actuator support plate 12, and the two rotating pins 124 on both sides are respectively inserted into the left and right ends of the support columns 23.

[0044] Further, a sealing cover plate 43 is arranged at the movable end of the piston actuator shaft 32 inside the actuator body 30, and the piston actuator shaft 32 passes through the sealing cover plate 43.

[0045] Further, trigger gaskets are fixedly installed at the upper and lower ends of the M-shaped rack 34.

[0046] Working principle: The present utility model provides a vacuum transmission double gate valve with double pneumatic drive. During specific use, first assemble the device, and then connect the first integrated pilot check valve and the second integrated pilot check valve to the air source;

[0047] Refer to Figure 8When the first actuator 200 is running, the first integrated pilot check valve 27 is opened, and gas is filled into the first actuator 200. The gas flows into the first cylinder body 13 and the second cylinder body 14 respectively. When it reaches the first cylinder body 13, the actuator axis is lifted upward, and the first valve plate 6 seals the valve body. After the valve body is sealed, the gas flows to the second cylinder body 14, the first piston 10 is released, the gas circulates, and the cylinder moves to the bottom; the excess gas flows out to close, and the second piston 16 at the lower end of the first cylinder body 13 is still completely sealed, and the excess gas flows out from this and the check valve.

[0048] After the first actuator 200CLOSE is opened, the second cylinder body 14 is lifted, the first piston 10 works, and the excess gas in the second cylinder body 14 flows out from the one-way valve; at this moment, the second piston 16 is released, the gas flows out from it, the first cylinder body 13 returns to the bottom, and the excess gas is discharged.

[0049] Actual workflow:

[0050] After OPEN is opened, gas is filled into the first cylinder body 13, and the actuator shaft is lifted to the predetermined position with a vertical tilt of 1°, and at the same time, the left and right second connecting shafts 21 are driven to move upward. At this time, the connecting shaft moves upward to the upper side of the sealing ring matched with it, and the seal of the left second connecting shaft 21 is broken. After the gas flows into the second cylinder body 14, the piston 2 moves to the right and returns to the bottom end, and at the same time drives the left and right actuator support plates 12 to rotate along the rotating pin 124 thereon, and the valve plate is swung to press against the sealing surface of the valve body, and the valve body is sealed;

[0051] When CLOSE is opened, gas enters from the bottom end of the second cylinder body 14, is lifted to a predetermined position from the second piston 16, and the actuator shaft returns to a position of 1° in the vertical direction. The valve body seal is released, and at the same time, gas enters from the upper end of the actuator shaft, causing the actuator shaft to drop to the bottom end, and the first actuator assembly 200 returns to the CLOSE state.

[0052] Second execution component 300

[0053] When OPEN is opened, gas flows in, the piston actuator shaft 32 moves upward, driving the M-shaped rack 34 to move upward, and at the same time the gear 35 moves upward, the connecting plate 33 moves upward, the valve plate rises, and the valve is sealed;

[0054] When CLOSE is opened, gas flows in, the piston actuator shaft 32 moves downward, driving the M-shaped rack 34 to move downward, while the gear 35 moves downward, the connecting plate 33 moves downward, the valve plate falls, and the seal is released. The external integrated pilot check valve realizes the function of air cut-off self-locking.

[0055] Although embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A double-pneumatic-driven vacuum transmission double-valve, characterized in that: It includes a valve body assembly (100), a first actuator assembly (200) and a second actuator assembly (300). The first actuator assembly (200) and the second actuator assembly (300) are connected and fixed to the valve body assembly (100) by screws. The valve body assembly (100) is connected to the first actuator assembly (200), and the first actuator assembly (200) is connected to the second actuator assembly (300). The valve body assembly (100) includes a valve body (1). A cover window (3) and a valve body cover (2) are installed at the top of the valve body (1). The cover window (3) is arranged above the valve body cover (2). The valve body cover (2) and the cover window (3) are installed and connected to the valve body (1) by screws. A sealing lining plate (4) is further arranged at the front end of the valve body (1). The sealing lining plate (4) is embedded in the valve body (1) and does not protrude from the outer surface of the valve body (1). A plurality of valve body sealing rings (5) are arranged at the opening and closing ports of the valve body (1), including a third sealing ring (53) sleeved at the connection between the cover window (3) and the valve body cover (2), a second sealing ring (52) sleeved at the connection between the valve body cover (2) and the valve body (1), and a first sealing ring (51) arranged at the movable installation positions of the first valve plate and the second valve plate at both openings of the valve body (1). The first sealing ring (51) is embedded in the outer periphery of the opening of the valve body (1). The first execution component (200) includes a first cylinder body (13) and a second cylinder body (14). Four guide shafts (20) are vertically installed at the upper end around the corners of the second cylinder body (14). The first cylinder body (13) is inserted along the guide shafts (20) and arranged above the second cylinder body (14). A set of actuator support plates (12) are symmetrically installed at the upper end of the first cylinder body (13). Through holes (121) are provided on the actuator support plates (12) and inserted on the guide shafts (20). Screws are provided at the upper ends of the actuator support plates (12) to fix the four guide shafts (20) to the cylinder body. A first piston (10) is vertically inserted in the center of the first cylinder body (13). The first piston (10) is installed on the execution shaft (8). An execution shaft connection block (9) is sleeved on the middle section of the outer wall of the execution shaft (8). A welded bellows (7) is provided at the upper end of the execution shaft connection block (9). The welded bellows (7) is also sleeved on the outer periphery of the execution shaft (8). A second piston (16) is movably installed in the second cylinder body (14). The second piston (16) faces the front end. A second cylinder cover plate (15) with a corresponding shape is installed on one side of the second cylinder body (14) where the second piston (16) is installed. A second execution shaft (17) is fixed by screws at one end of the second piston (16) facing the second cylinder cover plate (15). After fixation, the end hole position of the second execution shaft (17) is horizontal. A first connecting shaft (18) is horizontally inserted through the end hole position of the second execution shaft (17). The center of the first connecting shaft (18) is correspondingly fixed in the end hole position of the second execution shaft (17). A jack (122) is also provided through the actuator support plate (12). A second connecting shaft (21) passes through the jack (122) on the actuator support plate (12) and is installed on the execution shaft connection block (9). The side of the execution shaft connection block (9) is inserted into the movable slot (123) of the actuator support plate (12). The second connecting shaft (21) moves up and down along with the execution shaft (8). A set of support columns (23) are relatively installed on the left and right sides of the first cylinder body (13) and the second cylinder body (14). An actuator bottom plate (22) is installed at the upper end between the two support columns (23). A bottom cover plate (28) is installed at the bottom ends of the two support columns (23). A first quick-connect air pipe joint (26) is installed at the lower end of the bottom cover plate (28). One end of the first quick-connect air pipe joint (26) is connected to a first integrated pilot check valve (27); A sensor mounting block (25) is fixedly provided at the upper end of the bottom cover plate (28). A magnetic switch sensor is provided on the sensor mounting block (25) and fixed to the left support column (23) with screws. A set of fixing blocks (19) are correspondingly provided on the adjacent side of the two support columns (23). The two opposite sides of the fixing block (19) are connected to both ends of the first connecting shaft (18); The second actuator assembly (300) includes an actuator body (30). A third connecting shaft (31) is provided at the center of the actuator body (30). A piston actuator shaft (32) is provided inside the actuator body (30). An M-shaped rack (34) is installed at the lower end of the piston actuator shaft (32). Two straight racks (36) are relatively installed inside the actuator body (30). A gear (35) is provided between one side of the adjacent straight rack (36) and one side of the M-shaped rack (34) and is engaged therewith. One end of a connecting plate (33) is fixed on the gear (35). The other end of the connecting plate (33) is fixed at the bottom end of the third connecting shaft (31). A bottom plate (38) is fixedly installed at the bottom end of the actuator body (30). A sensor mounting sheet metal (39) is fixedly provided on the bottom plate (38). A position sensor (44) is fixed on the sensor mounting sheet metal (39). A cover plate (42) with a corresponding shape is fixed to the opening at the front end of the actuator body (30) using screws. A second valve plate (29) is installed at the upper end of the third connecting shaft (31). A PEEK spacer (37) is provided on the second valve plate (29). A second quick-connect air pipe joint (40) is provided on one side of the actuator body (30). One end of the second quick-connect air pipe joint (40) is connected to a second integrated pilot check valve (41).

2. The double-pneumatic-driven vacuum transfer double valve according to claim 1, characterized in that: A piston seal ring (11) is sleeved on the outer periphery of the first piston (10). The first piston (10) is installed at the bottom end of the actuator shaft (8). A first valve plate (6) is fixedly installed at the bottom end of the actuator shaft (8). Similarly, rubber rings are sleeved on the outer peripheries of the second piston (16) and the second actuator shaft (17).

3. A double-pneumatic-driven vacuum transmission double-valve according to claim 1, characterized in that: The actuator shaft connecting block (9) uses a setscrew to lock and connect a welded bellows (7) to prevent the welded bellows (7) from loosening.

4. A double-pneumatic-driven vacuum transmission double valve according to claim 1, characterized in that: A covering member (24) is fixed to the outside of the first actuator assembly (200) using screws. The covering member (24) is disposed between the left and right support columns (23) in a front-to-back and opposite manner.

5. A double-pneumatic-driven vacuum transmission double-valve according to claim 1, characterized in that: Rotating pins (124) are provided on the opposite sides of the actuator support plate (12). The rotating pins (124) on both sides are respectively inserted into the left and right ends of the support columns (23).

6. A double pneumatic-driven vacuum transfer double valve according to claim 1, characterized in that: A sealing cover plate (43) is provided at the movable end of the piston actuator shaft (32) provided inside the actuator body (30). The piston actuator shaft (32) passes through the sealing cover plate (43).

7. A double-pneumatic-driven vacuum transfer double valve according to claim 1, characterized in that: Trigger gaskets are fixedly installed at the upper and lower ends of the M-shaped rack (34).

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