Diamond single crystal wafer detection device

Abstract

The utility model discloses a diamond single crystal wafer detection device, which particularly relates to the technical field of single crystal wafer processing and comprises a base, a shell is mounted at the right end of the top of the base, and a right clamping component is mounted in the shell; the clamping assembly comprises a supporting rod, a rotating plate is installed at the bottom end of the supporting rod, a plurality of first fixing rods are fixedly connected to the bottom end of the rotating plate, first moving rods are installed on the outer sides of the bottom ends of the first fixing rods, and second moving rods are fixedly connected to the tops of one ends of the first moving rods. Compared with the prior art, the clamping assembly is arranged, two hydraulic rods stretch out and draw back to drive a plurality of sliding blocks to slide in a sliding groove, then a plurality of movable plates are used for driving a fixing strip to clamp and fix a diamond single crystal wafer, it can be ensured that the diamond single crystal wafer cannot move or shake in the detection process, and the detection accuracy is improved. The accuracy of a detection result is ensured, the diamond single crystal wafers with different sizes and shapes can be adapted, and the detection flexibility is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single wafer processing, and more specifically, the utility model relates to a diamond single wafer detection device. Background Technique

[0002] The characteristics of single crystal diamond are hardness and wear resistance. Diamond is a crystal combined by covalent bonds with saturation and directionality. Therefore, it has extremely high hardness and wear resistance and is the hardest substance known in nature. For hard and brittle precious semiconductor materials such as silicon, germanium, gallium arsenide, etc., to make small semiconductor devices, cutting and grinding processes are required, and the most suitable method is to use diamond cutting saw blades for processing.

[0003] However, currently during quality inspection, it is necessary for staff to manually place the diamond single wafers to be inspected one by one into the tray for pressure testing. This is inefficient. Moreover, if the diamond single wafers break during the inspection process, it is not easy to remove them from the inside of the tray without leaving residues. At the same time, when removing the diamond single wafers, it is necessary to terminate the inspection of other single wafers, which delays time.

[0004] After retrieval, a Chinese patent with the publication number CN216771383U discloses a detection device for single wafer quality. By setting a sleeve, there is a certain space inside the sleeve, and the diamond single wafers to be inspected can be arranged from top to bottom inside the sleeve. When the tray rotates to correspond to the position of the sleeve, the diamond single wafers can automatically fall into the tray for subsequent monitoring.

[0005] When the above-mentioned detection device for single wafer quality is actually used, the diamond single wafers need to be accurately positioned during the inspection process. The traditional positioning fixture may have unstable clamping during clamping, resulting in deviation in the measurement results. At the same time, it may not be able to adapt to diamond single wafers of different sizes and shapes, reducing the flexibility of the inspection. Content of the Utility Model

[0006] In order to overcome the above-mentioned defects of the prior art, the utility model provides a diamond single wafer detection device to solve the problems raised in the above background technique.

[0007] To achieve the above purpose, the utility model provides the following technical solutions:

[0008] A diamond single wafer detection device includes a base, and a housing is installed at the right end of the top of the base, and a clamping assembly is installed inside the housing;

[0009] The clamping assembly includes a support rod, a rotating plate is installed at the bottom end of the support rod, a plurality of first fixing rods are fixedly connected to the bottom end of the rotating plate, a first moving rod is installed on the outer side of the bottom end of each of the plurality of first fixing rods, a second moving rod is fixedly connected to the top of one end of each of the plurality of first moving rods, a second fixing rod is fixedly connected to the inside of one end of each of the plurality of second moving rods, a sliding block is fixedly connected to the top end of each of the plurality of second fixing rods, a movable plate is fixedly connected to the top of each of the plurality of sliding blocks, a fixing strip is installed on the top of each of the plurality of movable plates, a third fixing rod is fixedly connected to the bottom end of the upper and lower sliding blocks, an insertion rod is installed at the bottom end of each of the two third fixing rods, and two hydraulic rods are installed on the outer side of each of the two insertion rods.

[0010] By adopting the above technical solutions: The support rod is inserted and fixed to the top end inside the housing, the middle part of the top end of the rotating plate is movably connected to the bottom end of the support rod, a plurality of first fixing rods are welded and fixed to the bottom end of the rotating plate, one end of each of the plurality of first moving rods is inserted and fixed to the bottom end of the first fixing rod, each of the plurality of second moving rods is inserted and fixed to the other end of the first moving rod, the other end of each of the plurality of second moving rods is inserted and fixed to the bottom end of the second fixing rod, a plurality of second fixing rods are welded and fixed to the bottom of the sliding block, the outer sides of a plurality of sliding blocks are slidably connected to the inside of the chute, a plurality of movable plates are fixedly connected to the top end of the sliding block, a plurality of fixing strips are fixedly connected to the top of the movable plate, two third fixing rods are fixedly connected to the bottom of the upper and lower sliding blocks, two insertion rods are inserted and fixed to the inside of the bottom end of the third fixing rod, and both ends of the two hydraulic rods are inserted and fixed to the outer side of the insertion rod.

[0011] As a further description of the above technical solution: A plurality of chutes are provided on the front side of the housing, and the plurality of chutes are distributed in an annular array on the front side of the housing.

[0012] By adopting the above technical solutions: A plurality of chutes are installed on the front side of the housing and are distributed in an annular array on the front side of the housing.

[0013] As a further description of the above technical solution: A first support frame is fixedly connected to the right side of the top of the base, a cylinder is installed on the top of the first support frame, and a detector body is installed at the output end of the cylinder.

[0014] By adopting the above technical solutions: The first support frame is welded and fixed to the right side of the top of the base, the cylinder is installed on the top of the first support frame, and the detector body is installed at the output end of the cylinder.

[0015] As a further description of the above technical solution: A motor is installed on the left side of the top of the base, a turntable is installed at the output end of the motor, and a plurality of placement grooves are provided on the top surface of the turntable.

[0016] By adopting the above technical solutions: The motor is installed on the left side of the top of the base, the turntable is installed at the output end of the motor, and a plurality of placement grooves are provided on the front side of the turntable.

[0017] As a further description of the above technical solution: A second support frame is fixedly connected to the left side of the top of the base, and two fixing rings are fixedly connected to the right side of the second support frame. A conveying pipe is installed inside each of the two fixing rings.

[0018] By adopting the above technical solution: The second support frame is fixedly welded to the left side of the top of the base, both fixing rings are fixedly connected to the right side of the second support frame, and the conveying pipe is installed inside the two fixing rings.

[0019] As a further description of the above technical solution: The bottom end of the support rod is movably connected to the inside of the rotating plate, and each of the plurality of sliding blocks is slidably connected to the inside of the sliding groove. One end of each of the plurality of first moving rods is fixedly inserted into the second moving rod.

[0020] By adopting the above technical solution: The middle part of the top end of the rotating plate is movably connected to the bottom end of the support rod, the outside of each of the plurality of sliding blocks is slidably connected to the inside of the sliding groove, and one end of each of the plurality of first moving rods is fixedly inserted into the second moving rod.

[0021] As a further description of the above technical solution: Both of the two fixing rings are fixedly welded to the right side of the second support frame, and a plurality of placement grooves are annularly arrayed on the front side of the turntable.

[0022] By adopting the above technical solution: The right side of the second support frame is fixedly welded to the two fixing rings, and a plurality of placement grooves are annularly arrayed on the front side of the turntable.

[0023] The technical effects and advantages of the present utility model:

[0024] 1. By setting the clamping assembly, compared with the prior art, the telescopic movement of two hydraulic rods drives a plurality of sliding blocks to slide inside the sliding grooves, and then a plurality of movable plates drive the fixing strips to clamp and fix the single crystal diamond wafer, which can ensure that the single crystal diamond wafer will not move or shake during the detection process, guarantee the accuracy of the detection result, can adapt to single crystal diamond wafers of different sizes and shapes, and improve the flexibility of the detection;

[0025] 2. By setting the turntable, the conveying pipe and the placement grooves, compared with the prior art, the conveying pipe can be used to convey the single crystal diamond to the inside of the placement grooves, and then the turntable drives a plurality of placement grooves to rotate, which is convenient for the conveying pipe to continuously convey the single crystal diamond wafers to the placement grooves, convenient for the staff to take the single crystal diamond wafers for detection, and at the same time ensure the continuity of the detection, which is beneficial to improving the detection efficiency. Description of the Drawings

[0026] Figure 1 It is a schematic diagram of the overall structure of the present utility model.

[0027] Figure 2Schematic diagram of the delivery pipe structure of the present utility model.

[0028] Figure 3 Schematic diagram of the placement groove structure of the present utility model.

[0029] Figure 4 Schematic diagram of the third fixing rod structure of the present utility model.

[0030] Figure 5 Schematic diagram of the sliding groove structure of the present utility model.

[0031] Figure 6 Schematic diagram of the sliding block structure of the present utility model.

[0032] Figure 7 Schematic diagram of the movable plate structure of the present utility model.

[0033] Reference numerals are: 1, base; 2, outer shell; 3, support rod; 4, rotating plate; 5, first fixing rod; 6, first moving rod; 7, second moving rod; 8, second fixing rod; 9, sliding block; 10, movable plate; 11, fixing strip; 12, third fixing rod; 13, insertion rod; 14, hydraulic rod; 15, sliding groove; 16, first support frame; 17, cylinder; 18, detector body; 19, motor; 20, turntable; 21, second support frame; 22, fixing ring; 23, delivery pipe; 24, placement groove. Detailed implementation manners

[0034] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0035] An embodiment of the present application discloses a diamond single crystal wafer detection device, including a base 1, and a housing 2 is installed at the right end of the top of the base 1, and a clamping assembly is installed inside the housing 2;

[0036] The clamping assembly includes a support rod 3. At the bottom end of the support rod 3, a rotating plate 4 is installed. At the bottom end of the rotating plate 4, a plurality of first fixing rods 5 are fixedly connected. On the outer sides of the bottom ends of the plurality of first fixing rods 5, first moving rods 6 are installed. At the tops of one ends of the plurality of first moving rods 6, second moving rods 7 are fixedly connected. Inside one ends of the plurality of second moving rods 7, second fixing rods 8 are fixedly connected. At the top ends of the plurality of second fixing rods 8, sliding blocks 9 are fixedly connected. On the tops of the plurality of sliding blocks 9, movable plates 10 are fixedly connected. On the tops of the plurality of movable plates 10, fixing strips 11 are installed. At the bottom ends of the upper and lower two sliding blocks 9, third fixing rods 12 are fixedly connected. At the bottom ends of the two third fixing rods 12, inserting rods 13 are installed. On the outer sides of the two inserting rods 13, two hydraulic rods 14 are installed. The bottom end of the support rod 3 is movably connected to the inside of the rotating plate 4. The plurality of sliding blocks 9 are all slidably connected to the inside of the sliding grooves 15. One ends of the plurality of first moving rods 6 are inserted and fixed to the second moving rods 7. By the telescoping of the two hydraulic rods 14, the upper and lower two sliding blocks 9 are driven to slide inside the sliding grooves 15 through the two third fixing rods 12. Since the plurality of second moving rods 7 are all inserted and fixed to one ends of the first moving rods 6, the upper and lower two sliding blocks 9 can drive the rotating plate 4 to rotate. The support rod 3 can provide a supporting force for the rotating plate 4, facilitating the rotation of the rotating plate 4 and driving the left and right two sliding blocks 9 to slide inside the sliding grooves 15. By the movement of the plurality of sliding blocks 9, the plurality of movable plates 10 are driven to contract towards the middle of the housing 2. The plurality of fixing strips 11 can be attached to the periphery of the diamond single crystal wafer, facilitating the clamping and fixing of the diamond single crystal wafer.

[0037] As shown in Figure 5 As shown, a plurality of sliding grooves 15 are formed on the front side of the housing 2. The plurality of sliding grooves 15 are distributed in an annular array on the front side of the housing 2. The plurality of sliding grooves 15 can support the sliding blocks 9 to move, facilitating the plurality of sliding blocks 9 to drive the plurality of movable plates 10 to contract, so that the plurality of movable plates 10 drive the fixing strips 11 to clamp and fix the diamond single crystal wafer, ensuring that the diamond single crystal wafer will not move or shake during the detection process.

[0038] As shown in Figure 1 As shown, on the right side of the top of the base 1, a first support frame 16 is fixedly connected. On the top of the first support frame 16, a cylinder 17 is installed. At the output end of the cylinder 17, a detector body 18 is installed. The first support frame 16 can provide a supporting force for the cylinder 17, facilitating the cylinder 17 to push for detecting the diamond single crystal wafer.

[0039] As shown in Figure 2As shown in the figure, a motor 19 is installed on the left side of the top of the base 1. The output end of the motor 19 is installed with a turntable 20. A plurality of placement grooves 24 are formed on the top surface of the turntable 20. The left side of the top of the base 1 is fixedly connected with a second support frame 21. Two fixing rings 22 are fixedly connected to the right side of the second support frame 21. A conveying pipe 23 is installed inside each of the two fixing rings 22. The single crystal diamond wafers can be conveyed into the placement grooves 24 through the conveying pipe 23. Subsequently, the turntable 20 can be used to drive the placement grooves 24 to rotate, so that the single crystal diamond wafers can be placed in a plurality of placement grooves 24, which is convenient for the staff to take the single crystal diamond wafers for detection and is beneficial to maintaining the continuity during the detection process.

[0040] The working principle of the present utility model: The present utility model designs a device for detecting single crystal diamond wafers. The specific structure is as shown in the attached Figure 1-6 figure. In this technical solution, through the mutual cooperation of each structure, first place the single crystal diamond wafers in the conveying pipe 23, and then start the motor 19. Use the motor 19 to drive the turntable 20 to rotate, so that the turntable 20 can drive a plurality of placement grooves 24 to rotate. Since the bottom end of the conveying pipe 23 is attached to the top of the turntable 20, the single crystal diamond wafers will not fall when the turntable 20 rotates. At the same time, when the placement groove 24 rotates to the bottom of the conveying pipe 23, the single crystal diamond wafers will fall into the placement groove 24, which is convenient for the staff to take the single crystal diamond wafers and place them on a plurality of movable plates 10. When it is necessary to detect the single crystal diamond wafers, start the two hydraulic rods 14. Use the telescopic movement of the two hydraulic rods 14 to drive the upper and lower sliding blocks 9 to slide in the chute 15 through the two third fixing rods 12. At the same time, one end of the second moving rod 7 is inserted and fixed with the first moving rod 6, so that the upper and lower sliding blocks 9 can drive the rotating plate 4 to rotate. The support rod 3 is movably connected to the inside of the rotating plate 4 and can support the rotation of the rotating plate 4. The rotation of the rotating plate 4 can drive the left and right sliding blocks 9 to slide in the chute 15, so that a plurality of sliding blocks 9 drive the movable plates 10 to contract towards the middle of the housing 2 to clamp and fix the single crystal diamond wafers. At the same time, a plurality of fixing strips 11 can better fit the four sides of the single crystal diamond wafers. Finally, start the cylinder 17, and use the cylinder 17 to drive the detector body 18 to move downward to detect the single crystal diamond wafers.

[0041] Among them, in the attached drawings of the disclosed embodiments of the present utility model, only the structures related to the disclosed embodiments of the present disclosure are involved. Other structures can refer to the general design. Without conflict, the same embodiment and different embodiments of the present utility model can be combined with each other;

[0042] Finally: The above is only the preferred embodiment of the present utility model and is not used to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A diamond single crystal wafer detection device, comprising a base (1), characterized in that: The right end of the top of the base (1) is provided with a housing (2), and a right clamping assembly is installed inside the housing (2). The clamping assembly includes a support rod (3). The bottom end of the support rod (3) is provided with a rotating plate (4). The bottom end of the rotating plate (4) is fixedly connected with a plurality of first fixing rods (5). The outer sides of the bottom ends of the plurality of first fixing rods (5) are all provided with first moving rods (6). The top ends of one ends of the plurality of first moving rods (6) are all fixedly connected with second moving rods (7). The inner parts of one ends of the plurality of second moving rods (7) are all fixedly connected with second fixing rods (8). The top ends of the plurality of second fixing rods (8) are all fixedly connected with sliding blocks (9). The top ends of the plurality of sliding blocks (9) are all fixedly connected with movable plates (10). The top ends of the plurality of movable plates (10) are all provided with fixing strips (11). The bottom ends of the upper and lower two sliding blocks (9) are both fixedly connected with third fixing rods (12). The bottom ends of the two third fixing rods (12) are both provided with inserting rods (13). Two hydraulic rods (14) are installed on the outer sides of the two inserting rods (13).

2. The diamond single crystal wafer detection device according to claim 1, wherein: A plurality of sliding grooves (15) are formed in the front side of the housing (2), and the plurality of sliding grooves (15) are distributed in an annular array on the front side of the housing (2).

3. The diamond single crystal wafer detection device according to claim 1, characterized in that: The right side of the top of the base (1) is fixedly connected with a first support frame (16), and a cylinder (17) is installed on the top of the first support frame (16). The output end of the cylinder (17) is provided with a detector body (18).

4. A diamond single crystal wafer detection device according to claim 1, characterized in that: A motor (19) is installed on the left side of the top of the base (1). The output end of the motor (19) is provided with a turntable (20). A plurality of placing grooves (24) are formed in the top surface of the turntable (20), and the plurality of placing grooves (24) are distributed in an annular array on the front side of the turntable (20).

5. The diamond single crystal wafer detection device according to claim 1, wherein: The left side of the top of the base (1) is fixedly connected with a second support frame (21), and two fixing rings (22) are fixedly connected to the right side of the second support frame (21). A conveying pipe (23) is installed inside each of the two fixing rings (22).

6. The diamond single crystal wafer detection device according to claim 1, wherein: The bottom end of the support rod (3) is movably connected to the inside of the rotating plate (4). The plurality of sliding blocks (9) are all slidably connected to the inside of the sliding grooves (15). One ends of the plurality of first moving rods (6) are inserted and fixed to the second moving rods (7).

7. The diamond single crystal wafer detection device according to claim 5, characterized in that: Both of the two fixing rings (22) are fixedly welded to the right side of the second support frame (21).

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