Fork-shaped light beam scaling device and fork-shaped light beam scaler

Abstract

The utility model belongs to the technical field of optical transmission, and particularly provides a fork-shaped light beam zooming device which comprises a waveguide assembly. The waveguide assembly comprises a second light guide part and a plurality of third light guide parts; the second light guide part is of a structure with the width gradually increased in the light guide direction. The third light guide part is of a structure with the width gradually reduced in the light guide direction. The third light guide parts are connected to the wide side of the second light guide part at intervals in the width direction, and the wide ends of the third light guide parts are connected with the second light guide part. The light guide piece and the third light guide piece of the fork-shaped light beam zooming device jointly form a fork-shaped combined waveguide structure, the light beam amplification function is achieved, and the coupling efficiency of an optical fiber and a laser is improved. Based on the fork-shaped light beam zooming device, the utility model further provides a fork-shaped light beam zooming device, the complexity is low, the fork-shaped light beam zooming device is completely compatible with a mainstream process, the amplification function of a light field is achieved, the coupling efficiency of an optical fiber and a laser is improved, meanwhile, a substrate does not need to be hollowed out, and the fork-shaped light beam zooming device has good mechanical stability and reliability.

Description

Technical Field

[0001] The utility model belongs to the technical field of optical transmission, and particularly relates to a fork-shaped beam scaling device and a fork-shaped beam scaler. Background Art

[0002] With the continuous popularization of fiber optic access networks and the continuous deployment of 5G services, applications such as high-definition video services, Internet of Everything, autonomous driving, VR, and AR will gradually enter our lives in the future, and the growth of data traffic will continue. There has also been an explosive growth in the number of mobile phone users and Internet users, which poses a very severe challenge to the current communication network. Further breakthroughs in capacity require research and efforts in various multiplexing and photonic integration. Among many integration platforms, the silicon-based photonic integration platform has received great attention mainly because it has the strong potential to monolithically integrate electronic chips and photonic chips and can also utilize the current mature low-cost and large-scale CMOS integrated circuit manufacturing process.

[0003] However, one of the technical difficulties of silicon-based photonic devices lies in optical coupling packaging. To realize the practical application of silicon-based photonic devices, it is necessary to break through the coupling packaging technology from silicon optical waveguides to single-mode fibers. Since the silicon waveguide is on the sub-micron scale, usually only 220nm high and 500nm wide, while the optical field size of a single-mode fiber is about 9um, there is a very large mismatch between the mode fields of the two. Summary of the Utility Model

[0004] The purpose of the utility model is to overcome the problems of low coupling efficiency and reliability from silicon optical waveguides to single-mode fibers in the prior art.

[0005] To this end, the utility model provides a fork-shaped beam scaling device, which includes a waveguide assembly; the waveguide assembly includes a second light guiding member and a plurality of third light guiding members; the second light guiding member is a structure with a gradually decreasing width along the light guiding direction; the third light guiding member is a structure with a gradually decreasing width along the light guiding direction; a plurality of the third light guiding members are connected at intervals in the width direction to the side with a larger width of the second light guiding member, and the end with a larger width of the third light guiding member is connected to the second light guiding member.

[0006] Specifically, the above-mentioned waveguide assembly further includes a first light guiding member; the first light guiding member is connected to the end of the second light guiding member facing away from the third light guiding member.

[0007] Specifically, the above-mentioned waveguide assembly is an integrally formed structure.

[0008] The utility model also provides a fork-shaped beam scaler, which includes the above-mentioned fork-shaped beam scaling device.

[0009] Specifically, the above-mentioned fork-shaped beam scaler further includes a cladding layer; the waveguide assembly is wrapped in the cladding layer.

[0010] Specifically, the above-mentioned fork-shaped beam expander further includes a lower cladding; the cladding is disposed on the lower cladding.

[0011] Specifically, the above-mentioned cladding is an oxygen-silicon cladding; the lower cladding is an oxygen-silicon lower cladding.

[0012] Specifically, the above-mentioned fork-shaped beam expander further includes a substrate; the lower cladding is disposed on the substrate.

[0013] Specifically, the above-mentioned substrate is a silicon substrate.

[0014] Compared with the prior art, the present utility model has the following advantages and beneficial effects:

[0015] For the light guiding member of the fork-shaped beam expansion device provided by the present utility model, the width gradually increases from left to right, and for the third light guiding member, the width gradually decreases from left to right. The side with the larger width of the light guiding member is connected to the side with the larger width of the plurality of third light guiding members. The light guiding member and the plurality of third light guiding members together form a fork-shaped combined waveguide structure, realizing the function of beam amplification, improving the coupling efficiency with the optical fiber and the laser, and at the same time ensuring the high reliability of the structure.

[0016] The fork-shaped beam expander provided by the present utility model has a lower complexity. There is no need to perform a hollowing-out process on the substrate, and it has good mechanical stability and reliability. It realizes the function of light field amplification, improves the coupling efficiency with the optical fiber and the laser, and at the same time ensures the high reliability of the structure. This fork-shaped beam expander is fully compatible with the current mainstream processes, can realize large-scale mass production of devices, helps to promote the wide application of photonic integrated devices, and has a wide application prospect in research fields such as beam shaping, unmanned driving, and biosensing.

[0017] The following will further describe the present utility model in detail with reference to the accompanying drawings. Description of the Drawings

[0018] Figure 1 is a schematic diagram of the fork-shaped beam expansion device provided by the present utility model.

[0019] Figure 2 is a top view of the fork-shaped beam expander provided by the present utility model,

[0020] Figure 3 is Figure 2 a cross-sectional view taken along the line A-A in

[0021] Description of the reference numerals: 1. waveguide assembly; 101. first light guiding member; 102. second light guiding member; 103. third light guiding member; 2. cladding; 3. lower cladding; 4. substrate. Detailed Embodiments

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] In the description of the present invention, it should be understood that the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0024] Reference Figure 1 The utility model provides a fork beam zoom device, comprising a waveguide component 1; the waveguide component 1 comprises a second light guide 102 and a plurality of third light guides 103; the second light guide 102 is a structure with a gradually narrowing width along the light guiding direction; the third light guide 103 is a structure with a gradually narrowing width along the light guiding direction; the plurality of third light guides 103 are connected at intervals along the width direction on the side with a larger width of the second light guide 102, and the side with a larger width of the third light guide 103 is connected to the second light guide 102. The signal light is first transmitted to the side with a narrower width of the second light guide 102. As the width of the second light guide 102 gradually increases, the light field is gradually enlarged. The light passing through the second light guide 102 is transmitted to the wider side of the third light guide 103. As the third light guide 103 is an inverted trapezoidal structure with a gradually decreasing width, its restriction on the light field is gradually weakened, so that the light field slowly diverges and the light field is further enlarged. The second light guide member 102 and the third light guide member 103 may be trapezoidal plate light guide structures.

[0025] Furthermore, the waveguide assembly 1 further comprises a first light guide 101; the first light guide 101 is connected to the end of the second light guide 102 away from the third light guide 103. The signal light is transmitted to the second light guide 102 and the third light guide 103 in sequence through the first light guide 101.

[0026] Optionally, the waveguide assembly 1 is an integrated structure, that is, the output light guide array composed of a plurality of third light guides 103 and the first light guide 101 and the second light guide 102 are made of silicon material or silicon nitride material or thin-film lithium niobate material to form a whole.

[0027] As Figures 2-3 shown, the present utility model further provides a fork-shaped beam expander, which includes the above-mentioned fork-shaped beam expansion device. The light field is adjusted by the fork-shaped beam expansion device.

[0028] Specifically, the fork-shaped beam expander further includes a cladding layer 2; the waveguide assembly 1 is wrapped in the cladding layer 2. The confinement of the third light guiding member 103 to the light field gradually weakens, so that the light field slowly diverges into the cladding layer 2. Since the cross-sectional area of the cladding layer 2 is large and has basically no constraint on the light field, the light field can be further enlarged.

[0029] Furthermore, the fork-shaped beam expander further includes a lower cladding layer 3; the cladding layer 2 is disposed on the lower cladding layer 3. Since the waveguide assembly 1 is wrapped with the cladding layer 2, there is a spacing between the waveguide assembly 1 and the upper surface of the lower cladding layer 3. Both the cladding layer 2 and the lower cladding layer 3 can be made of oxy-silicon materials.

[0030] In a refined embodiment, the fork-shaped beam expander further includes a substrate 4, preferably a silicon substrate 4 made of silicon material; the lower cladding layer 3 is disposed on the substrate 4. The fork-shaped beam expander does not need to perform a hollowing process on the substrate 4, and has good mechanical stability and reliability.

[0031] Embodiment 1:

[0032] This embodiment provides a fork-shaped beam expander, which includes a waveguide assembly 1, a cladding layer 2, a lower cladding layer 3, and a substrate 4.

[0033] The waveguide assembly 1 includes a first light guiding member 101, a trapezoidal second light guiding member 102, and a plurality of third light guiding members 103 that are sequentially connected from left to right; the second light guiding member 102 is a trapezoidal structure with a gradually increasing width from left to right; the first light guiding member 101 is a rectangular structure with a width equal to the width of the narrow left side of the second light guiding member 102; the third light guiding member 103 is a trapezoidal structure with a gradually increasing width from left to right; a plurality of third light guiding members 103 are equidistantly spaced and connected to the right side of the second light guiding member 102 along the width direction to form an output light guiding array; the first light guiding member 101, the second light guiding member 102, and the third light guiding member 103 are all made of silicon material and have a thickness of 400 nm, so that the waveguide assembly 1 forms a waveguide layer with a uniform thickness. The length of the first light guiding member 101 is 10 μm, the length of the second light guiding member 102 is 200 μm, and the length of the third light guiding member 103 is 50 μm;

[0034] The cladding layer 2 is made of an oxygen-silicon material and wraps the waveguide component 1 to form a cladding layer 2 with a thickness of 6 μm; the lower cladding layer 3 is made of an oxygen-silicon material with a thickness of 3 μm; the substrate 4 is made of silicon material; the cladding layer 2 is disposed on the upper surface of the lower cladding layer 3, and the distance between the lower surface of the waveguide layer and the upper surface of the lower cladding layer 3 is 400 nm; the lower cladding layer 3 is disposed on the upper surface of the substrate 4.

[0035] The working principle of this fork-shaped beam expander is as follows: The signal light first enters from the left side of the first light guide member 101 and is transmitted from left to right to the left side of the second light guide member 102. Since the width of the second light guide member 102 gradually increases from left to right, the light field is gradually amplified. After the light field passes through the second light guide member 102 from left to right, the light is transmitted to the left side of the output light guide array on the right side of the second light guide member 102. The width of each third light guide member 103 in the output light guide array gradually decreases from left to right, resulting in a gradually weakened restriction on the light field, so that the light field slowly diverges into the cladding layer 2. Since the cross-sectional area of the cladding layer 2 is very large and has basically no constraint on the light field, the light field can be further amplified.

[0036] In summary, for the fork-shaped beam expander provided by the present invention, the width of the second light guide member 102 gradually increases from left to right, the width of the third light guide member 103 gradually decreases from left to right, the wider side of the second light guide member 102 is connected to the wider sides of the plurality of third light guide members 103, and the second light guide member 102 and the plurality of third light guide members 103 together form a fork-shaped combined waveguide structure, realizing the function of beam amplification, improving the coupling efficiency with optical fibers and lasers, and at the same time ensuring the high reliability of the structure. The fork-shaped beam expander provided by the present invention has a low complexity, the substrate 4 does not need to be hollowed out, has good mechanical stability and reliability, realizes the function of light field amplification, improves the coupling efficiency with optical fibers and lasers, and at the same time ensures the high reliability of the structure. This fork-shaped beam expander is fully compatible with the current mainstream processes, can realize the large-scale mass production of devices, helps to promote the wide application of photonic integrated devices, and has a wide application prospect in research fields such as beam shaping, unmanned driving, and biosensing.

[0037] The above examples are only illustrative of the present invention and do not constitute a limitation on the protection scope of the present invention. Any design identical or similar to the present invention falls within the protection scope of the present invention.

Claims

1. A fork-shaped beam scaling device, characterized in that: Comprising a waveguide assembly (1); the waveguide assembly (1) includes a second light guide member (102) and a plurality of third light guide members (103); the second light guide member (102) has a structure with a gradually increasing width along the light guiding direction; the third light guide members (103) have a structure with a gradually decreasing width along the light guiding direction; a plurality of the third light guide members (103) are connected at intervals in the width direction to the side with a larger width of the second light guide member (102), and the side with a larger width of the third light guide member (103) is connected to the second light guide member (102).

2. The fork-shaped beam scaling device according to claim 1, wherein: The waveguide assembly (1) further includes a first light guide member (101); the first light guide member (101) is connected to one end of the second light guide member (102) facing away from the third light guide members (103).

3. The forked beam scaling device according to claim 1, wherein: The waveguide assembly (1) is an integrally formed structure.

4. A fork-shaped beam expander, characterized in that: Comprising the fork-shaped beam scaling device according to any one of claims 1-3.

5. The fork-shaped beam expander according to claim 4, characterized in that: Further comprising a cladding layer (2); the waveguide assembly (1) is wrapped within the cladding layer (2).

6. The fork-shaped beam expander according to claim 5, wherein: Further comprising a lower cladding layer (3); the cladding layer (2) is disposed on the lower cladding layer (3).

7. The forked beam expander according to claim 6, characterized in that: The cladding layer (2) is a silicon oxide cladding layer (2); the lower cladding layer (3) is a silicon oxide lower cladding layer (3).

8. The fork-shaped beam expander according to claim 6, wherein: Further comprising a substrate (4); the lower cladding layer (3) is disposed on the substrate (4).

9. The fork-shaped beam expander according to claim 8, wherein: The substrate (4) is a silicon substrate (4).

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