Photomask box

Abstract

The utility model discloses a photomask box, which belongs to the technical field of semiconductor processing, and comprises a box body with an opening at the top and an upper cover for controlling the opening to be opened and closed, at least two limiting blocks are arranged on the inner bottom surface of the box body to limit a photomask, an elastic piece and a pressing block are arranged on the upper cover, and when the opening of the box body is closed by the upper cover, the pressing block is pressed by the elastic piece. The pressing block abuts against the top face of the photomask, and meanwhile the elastic piece applies elastic force to the pressing block so that the pressing block can abut against the photomask. According to the scheme, by arranging the elastic piece, a distance protection effect is achieved, if the situation that the photomask is uneven when being placed on the limiting block or foreign matter exists on the limiting block exists, the pressing block can abut against the top face of the photomask, the photomask is kept in a stress balance state, and damage to the photomask caused by large-force extrusion is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing, and particularly relates to a photomask box. Background Art

[0002] In the semiconductor industry, photomasks play a very important role in the manufacturing process. A photomask, also known as a mask plate, is a special light-transmitting material engraved with specific patterns. A photomask box is a box used for transporting, moving, and storing wafer mask plates, usually a yellowish-brown plastic transparent box.

[0003] The utility model patent with the application number CN202023298885.8 discloses a high-performance photomask box, which includes a photomask box and a support platform. A support platform is fixedly connected to the middle position at the bottom end inside the photomask box. A connecting shaft is fixedly connected to one side of the top of the photomask box, and an upper cover body is fixedly connected to the surface of the connecting shaft. A first limiting block is fixedly installed on the inner wall of the photomask box near the connecting shaft. A slider is slidably connected to one side inside the photomask box. Through the settings of the first limiting block, the clamping block, and the clamping protrusion, the damage, collision, and friction caused by the photomask box to the photomask are reduced.

[0004] The photomask box disclosed in the prior art uses a relatively conventional method to fix the photomask, that is, the clamping protrusion on the upper cover body is used to press and fix the photomask in the Z-axis direction of space. However, in the actual use process, affected by operations and the environment, if the photomask is limited by the limiting block and the clamping block in an inclined manner, or there is a foreign object under the photomask causing the photomask to warp, when the clamping protrusion on the upper cover presses the photomask again in this case, it is easy to cause damage to the photomask due to force. Summary of the Utility Model

[0005] The purpose of the present utility model is to provide a photomask box to solve the problems raised in the above background art.

[0006] To achieve the above purpose, a technical solution adopted by the present utility model is: a photomask box, including a box body with an open top and an upper cover for controlling the opening and closing of the opening. At least two limiting blocks are arranged on the inner bottom surface of the box body to limit the photomask. An elastic member and a pressing block are arranged on the upper cover. When the upper cover closes the opening of the box body, the pressing block abuts against the top surface of the photomask, and at the same time, the elastic member applies an elastic force to the pressing block to make it press tightly against the photomask.

[0007] Preferably, the pressing block includes a long strip-shaped block body hinged on the upper cover. One end of the elastic member is fixed on the upper cover, and the other end of the elastic member is fixed on the pressing block. A control member is also arranged on the pressing block to counteract the elastic force of the elastic member so that the pressing block moves away from the top surface of the photomask.

[0008] Preferably, an outlet for removing the light shield is provided on the side wall of the box body, and a wall door for controlling the opening and closing of the outlet is hinged on the upper cover. The control member is a rope body or a rod body, one end of the control member is connected to the pressure block, and the other end of the control member is connected to the wall door. When the pressure block is pressed against the light shield, the wall door is in a closed state. When the wall door is opened, the control member pulls the pressure block to separate it from the light shield.

[0009] Preferably, the photomask is overlapped on the limit block to achieve limitation in the horizontal X-axis and horizontal Y-axis directions, and a protective block is also provided on the bottom surface of the box body, and the protective block is placed below the contact point between the pressing block and the photomask. After the photomask is smoothly overlapped on the limit block, the distance between the top surface of the protective block and the photomask is less than 0.5 mm.

[0010] Preferably, the upper cover and the box body are hinged to each other, and the hinge axes between the upper cover and the box body, the pressing block and the upper cover, and the upper cover and the wall door are parallel to each other.

[0011] Preferably, a clamping assembly is provided on the outer side wall of the box body, and the clamping assembly applies a force from the spatial Z-axis direction to the upper cover to make it close to the box body.

[0012] Preferably, the clamping assembly includes a bottom shell and a clamping piece hinged on the bottom shell, the clamping piece includes an inverted L-shaped buckling portion and a locking portion, and a snap-fitting protrusion is provided on the bottom shell. When the clamping piece buckles the upper cover, the locking portion is subjected to a force applied by the snap-fitting protrusion to prevent the buckling portion from detaching from the upper cover.

[0013] Preferably, the pressing block includes an abutment portion, a connecting portion and a connecting axis, the connecting axis is a hinge axis, the abutment portion is placed above the top surface of the light mask, there is a horizontal distance between the connecting portion and the edge of the top surface of the light mask, and the elastic member and the control member are both connected to the connecting portion.

[0014] Beneficial effects of the utility model: the elastic member in the present solution plays a role of distance protection. If the photomask is not flat when placed on the limit block or there is a foreign object on the limit block, the pressing block will contact the top surface of the photomask and keep the photomask in a force balance state, and the photomask will not be damaged due to strong squeezing.

[0015] Among them, by setting the protection block, if the photomask is deformed under the action of the pressure block, reasonable parameter settings can make the photomask collide with the top surface of the protection block, thereby achieving force balance and avoiding further deformation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the utility model;

[0017] Figure 2Schematic diagram of the internal structure of the box body in the present utility model Figure 1 ;

[0018] Figure 3 Schematic diagram of the internal structure of the box body in the present utility model Figure 2 ;

[0019] Figure 4 Schematic diagram of the structure of the pressing assembly in the present utility model;

[0020] Figure 5 Schematic diagram of the structure of the upper cover in the present utility model;

[0021] Figure 6 Schematic diagram of the connection structure between the upper cover and other components thereon in the present utility model;

[0022] In the figure: 1. Box body; 2. Upper cover; 3. Limit block; 4. Pressing block; 41. Contact portion; 42. Connecting portion; 5. Elastic member; 6. Control member; 7. Wall door; 8. Pressing assembly; 81. Bottom shell; 82. Buckling portion; 83. Locking portion; 84. Clamping protrusion; 9. Protection block. Specific embodiments

[0023] The following elaborates on the preferred embodiments of the present utility model in conjunction with the accompanying drawings, so that the advantages and features of the present utility model can be more easily understood by those skilled in the art, thereby making the protection scope of the present utility model more clearly defined.

[0024] Embodiment:

[0025] Refer to Figure 1 , Figure 3 , Figure 5 , A photomask box includes a box body 1 with an open top and an upper cover 2 for controlling the opening and closing of the opening. At least two limit blocks 3 are provided on the inner bottom surface of the box body 1 to limit the photomask. An elastic member 5 and a pressing block 4 are provided on the upper cover 2. When the upper cover 2 closes the opening of the box body 1, the pressing block 4 abuts against the top surface of the photomask. At the same time, the elastic member 5 applies an elastic force to the pressing block 4 to make it press tightly against the photomask. In addition, the photomask is lapped on the limit blocks 3 to achieve limitation in the horizontal X-axis and horizontal Y-axis directions. A protection block 9 is also provided on the inner bottom surface of the box body 1. The protection block 9 is placed below the contact point between the pressing block 4 and the photomask. After the photomask is flatly lapped on the limit blocks 3, the distance between the top surface of the protection block 9 and the photomask is less than 0.5 mm.

[0026] Among them, refer to Figure 5 , Figure 6, the pressing block 4 is hinged to the upper cover 2. The pressing block 4 includes a contact portion 41, a connecting portion 42 and a connecting shaft, and the connecting shaft is the hinge shaft. The contact portion 41 is a long strip-shaped block, and the contact portion 41 is placed above the top surface of the photomask. There is a horizontal distance between the connecting portion 42 and the edge of the top surface of the photomask. A control member 6 is further provided on the pressing block 4 to counteract the elastic force of the elastic member 5 so that the pressing block 4 is away from the top surface of the photomask. One end of the elastic member 5 is fixed to the upper cover 2, and the other end of the elastic member 5 is fixed to the connecting portion 42.

[0027] Among them, referring to Figure 5 , Figure 6 , an outlet for the photomask to be removed is provided on the side wall of the box body 1. A wall door 7 for controlling the opening and closing of the outlet is hinged to the upper cover 2. The control member 6 is a rope or a rod. One end of the control member 6 is connected to the connecting portion 42, and the other end of the control member 6 is connected to the wall door 7. When the pressing block 4 presses against the photomask, the wall door 7 is in a closed state. When the wall door 7 is opened, the control member 6 pulls the pressing block 4 to separate it from the photomask. Among them, the upper cover 2 and the box body 1 are hinged to each other, and the hinge axes between the upper cover 2 and the box body 1, the pressing block 4 and the upper cover 2, and the upper cover 2 and the wall door 7 are parallel to each other.

[0028] Among them, referring to Figure 2 , Figure 4 , a pressing component 8 is provided on the outer side wall of the box body 1. The pressing component 8 applies a force to the upper cover 2 in the Z-axis direction of the space to make it close to the box body 1. In this embodiment, the pressing component 8 includes a bottom shell 81 and a pressing member hinged to the bottom shell 81. The pressing member includes an inverted L-shaped buckling portion 82 and a locking portion 83. A clamping protrusion 84 is provided on the bottom shell 81. When the pressing member clamps the upper cover 2, the locking portion 83 is subjected to the force of the clamping protrusion 84 that hinders the buckling portion 82 from separating from the upper cover 2.

[0029] Working principle and process:

[0030] When using the photomask box in this solution to transport the photomask, the upper cover 2 hinged to the box body 1 is opened, and then the photomask is placed on the limiting block 3 in the box body 1 for fixing in the horizontal direction and the vertical single direction. Then, the upper cover 2 is closed. Under the action of the elastic member 5, the pressing block 4 is in contact with the top surface of the photomask, realizing the fixing of the photomask in the Z-axis direction of the space. Among them, when the upper cover 2 is closed, the locking portion 83 on the locking member is toggled to cross the clamping protrusion 84 so that the buckling portion 82 tightly fits the upper cover 2 and the box body 1. When the photomask needs to be taken out, the wall door 7 is opened. At this time, the force for opening the wall door 7 is greater than the elastic force applied by the elastic member 5 to the pressing block 4, so that the control member 6 pulls the pressing block 4 away from the top surface of the photomask. At this time, the photomask can be taken out by other related equipment.

[0031] The above are only the embodiments of the present utility model, and thus do not limit the patent scope of the present utility model. Any equivalent structural transformation made by using the content of the specification and drawings of the present utility model, or directly or indirectly applied in other related technical fields, shall be similarly included in the patent protection scope of the present utility model.

Claims

1. A photomask cassette, characterized in that: It includes a box body (1) with an opening at the top and an upper cover (2) for controlling the opening and closing of the opening. At least two limiting blocks (3) are provided on the inner bottom surface of the box body (1) to limit the photomask. An elastic member (5) and a pressing block (4) are provided on the upper cover (2). When the upper cover (2) closes the opening of the box body (1), the pressing block (4) abuts against the top surface of the photomask. At the same time, the elastic member (5) applies an elastic force to the pressing block (4) to make it press tightly against the photomask.

2. The reticle box according to claim 1, wherein: The pressing block (4) includes a long strip-shaped block body hinged on the upper cover (2). One end of the elastic member (5) is fixed on the upper cover (2), and the other end of the elastic member (5) is fixed on the pressing block (4). A control member (6) capable of counteracting the elastic force of the elastic member (5) to make the pressing block (4) away from the top surface of the photomask is also provided on the pressing block (4).

3. The mask box according to claim 2, characterized in that: An outlet for the photomask to move out is provided on the side wall of the box body (1). A wall door (7) for controlling the opening and closing of the outlet is hinged on the upper cover (2). The control member (6) is a rope or a rod. One end of the control member (6) is connected to the pressing block (4), and the other end of the control member (6) is connected to the wall door (7). When the pressing block (4) presses tightly against the photomask, the wall door (7) is in a closed state. When the wall door (7) is opened, the control member (6) pulls the pressing block (4) to separate it from the photomask.

4. A photomask cassette according to claim 1, characterized in that: The photomask is lapped on the limiting blocks (3) to achieve limiting in the horizontal X-axis and horizontal Y-axis directions. A protection block (9) is also provided on the inner bottom surface of the box body (1). The protection block (9) is placed below the contact point between the pressing block (4) and the photomask. After the photomask is flatly lapped on the limiting blocks (3), the distance between the top surface of the protection block (9) and the photomask is less than 0.5 mm.

5. A photomask cassette according to claim 3, wherein: The upper cover (2) and the box body (1) are hinged to each other. The hinge axes between the upper cover (2) and the box body (1), between the pressing block (4) and the upper cover (2), and between the upper cover (2) and the wall door (7) are parallel to each other.

6. The reticle box according to claim 5, wherein: A pressing component (8) is provided on the outer side wall of the box body (1). The pressing component (8) applies a force to the upper cover (2) in the space Z-axis direction to make it close to the box body (1).

7. The mask box according to claim 6, wherein: The pressing component (8) includes a bottom shell (81) and a pressing member hinged on the bottom shell (81). The pressing member includes an inverted L-shaped buckling part (82) and a locking part (83). A clamping protrusion (84) is provided on the bottom shell (81). When the pressing member clamps the upper cover (2), the locking part (83) receives the force from the clamping protrusion (84) to prevent the buckling part (82) from detaching from the upper cover (2).

8. The reticle box according to claim 3, wherein: The pressing block (4) includes an abutting part (41), a connecting part (42) and a connecting shaft. The connecting shaft is the hinge shaft. The abutting part (41) is placed above the top surface of the photomask. There is a horizontal distance between the connecting part (42) and the edge of the top surface of the photomask. Both the elastic member (5) and the control member (6) are connected to the connecting part (42).

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