Tool for cleaning and etching semiconductor thimble accessories

Abstract

The utility model relates to a tool for cleaning and etching semiconductor thimble accessories, which comprises a flower basket base, a flower basket sliding cover and a connecting rod, the top of the flower basket base is open and is sunken downwards to form a cleaning cavity, a first cleaning groove is formed on the flower basket base, and a connecting end is arranged on the flower basket base. The flower basket sliding cover is in sliding connection with the top of the flower basket base, and a clamping groove and a second cleaning groove are formed in the flower basket sliding cover; the ejector pin accessories can be placed in the cleaning cavity, the tool is placed in the cleaning tank, the cleaning cavity and the cleaning tank can be conveniently communicated through the first cleaning tank and the second cleaning tank, so that the cleaning function is achieved, the bottom end of the connecting rod can be connected with the connecting end, the whole tool can be moved by controlling the connecting rod, meanwhile, the bottom end of the connecting rod penetrates through the clamping groove, and the clamping groove is clamped in the clamping groove. In order to open the flower basket sliding cover conveniently, the bottom end of the connecting rod is separated from the connecting end and abuts against the clamping groove, the flower basket sliding cover can be controlled to slide through the connecting rod, and use is convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a tool for cleaning and etching semiconductor thimble accessories. Background Art

[0002] As one of the important components of semiconductor equipment, the thimble is made of high-cost and brittle material, which is prone to breakage during the cleaning process, and its surface cleaning requirements are extremely harsh.

[0003] To facilitate the cleaning of thimble accessories, a cleaning machine for semiconductor products proposed in the utility model patent with the application number CN201822077955.3 can be used. Among them, the hanging basket mechanism includes a hanging basket, a placement net, hanging rings and handles. The placement net is welded below the hanging basket; two hanging rings are used and welded on the left and right sides above the hanging basket; two handles are used and welded on the front and back sides above the hanging basket.

[0004] However, it is not easy to take and place the hanging basket, and tools need to be used to place it in the cleaning tank, which is inconvenient to use. Summary of the Utility Model

[0005] In view of this, it is necessary to provide a tool for cleaning and etching semiconductor thimble accessories to solve the problem that it is not easy to take and place the hanging basket, and tools need to be used to place it in the cleaning tank, which is inconvenient to use.

[0006] The utility model provides a tool for cleaning and etching semiconductor thimble accessories, which includes a flower basket base, a flower basket sliding cover and a connecting rod. The top of the flower basket base is open and recessed downward to form a cleaning cavity. A first cleaning tank communicating the cleaning cavity with the outside is formed on the flower basket base. A connecting end is arranged on the flower basket base. The flower basket sliding cover is slidably connected to the top of the flower basket base to open and close the opening. A card slot and a second cleaning tank are formed on the flower basket sliding cover. When the flower basket sliding cover slides to the position of closing the opening, the card slot is arranged opposite to the connecting end. The bottom end of the connecting rod passes through the card slot and is detachably connected to the connecting end to connect the flower basket base and limit the sliding of the flower basket sliding cover.

[0007] Further, the connecting end is a threaded hole formed at the center of the bottom of the flower basket base, and the bottom end of the connecting rod is connected to the threaded hole.

[0008] Further, the card slot is a strip-shaped groove extending along the sliding direction perpendicular to the flower basket sliding cover, and the width of the strip-shaped groove is adapted to the diameter of the connecting rod.

[0009] Further, both the first cleaning tank and the second cleaning tank are strip-shaped grooves.

[0010] Further, the extending directions of the first cleaning tank and the second cleaning tank are perpendicular to the sliding direction of the flower basket sliding cover.

[0011] Further, the numbers of the first cleaning tank and the second cleaning tank are both multiple and in one-to-one correspondence. The first cleaning tank and the second cleaning tank are arranged in sequence along the sliding direction of the flower basket sliding cover. When the flower basket sliding cover slides to the position of closing the opening, the first cleaning tank is arranged directly opposite to the corresponding second cleaning tank in the vertical direction.

[0012] Further, it further includes two sliding grooves formed at the inner walls on both sides of the flower basket base, and both sides of the flower basket sliding cover are respectively slidably connected to the two sliding grooves.

[0013] Further, it further includes a plurality of first partitions arranged in parallel. The plurality of first partitions are built in the flower basket base and are used to divide the cleaning cavity into a plurality of cleaning unit spaces.

[0014] Further, it further includes a second partition perpendicular to the first partition and is used to divide the plurality of cleaning unit spaces.

[0015] Further, it further includes a support rod. The support rod is horizontally arranged, and its middle position is connected to the top end of the connecting rod.

[0016] Compared with the prior art, thimble-like accessories can be placed in the cleaning cavity, and this tooling can be placed in the cleaning tank. The first cleaning tank and the second cleaning tank are convenient for connecting the cleaning cavity and the cleaning tank, so as to realize the cleaning function. Among them, the bottom end of the connecting rod can be connected to the connecting end, and the entire tooling can be moved by manipulating the connecting rod. At the same time, the bottom end of the connecting rod passes through the card slot, which can limit the sliding of the flower basket sliding cover. For the convenience of opening the flower basket sliding cover, the bottom end of the connecting rod is separated from the connecting end and abuts against the card slot, and the flower basket sliding cover can be manipulated to slide through the connecting rod, which is convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic structural diagram of the overall tooling for cleaning and etching semiconductor thimble-like accessories provided by an embodiment of the present invention;

[0018] Figure 2 It is a schematic structural diagram of the flower basket base of the tooling for cleaning and etching semiconductor thimble-like accessories provided by an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The following will specifically describe the preferred embodiments of the present invention in conjunction with the drawings. Among them, the drawings form a part of this application and are used together with the embodiments of the present invention to explain the principle of the present invention, and are not used to limit the scope of the present invention.

[0020] As Figure 1-2 shown, a tool for cleaning and etching semiconductor thimble - type accessories provided by the utility model includes a flower - basket base 100, a flower - basket sliding cover 200 and a connecting rod 300. The top of the flower - basket base 100 is open and recessed downward to form a cleaning cavity. A first cleaning groove 120 communicating the cleaning cavity with the outside is formed on the flower - basket base 100. A connecting end 110 is arranged on the flower - basket base 100. The flower - basket sliding cover 200 is slidably connected to the top of the flower - basket base 100 for opening and closing the opening. A clamping groove 210 and a second cleaning groove 220 are formed on the flower - basket sliding cover 200. When the flower - basket sliding cover 200 slides to the position of closing the opening, the clamping groove 210 is arranged directly opposite to the connecting end 110. The bottom end of the connecting rod 300 passes through the clamping groove 210 and is detachably connected to the connecting end 110 for connecting the flower - basket base 100 and limiting the sliding of the flower - basket sliding cover 200.

[0021] During implementation, thimble - type accessories can be placed in the cleaning cavity, and the tool can be placed in the cleaning tank. The first cleaning groove 120 and the second cleaning groove 220 facilitate the connection between the cleaning cavity and the cleaning tank, thereby realizing the cleaning function. Among them, the bottom end of the connecting rod 300 can be connected to the connecting end 110. By manipulating the connecting rod 300, the entire tool can be moved. At the same time, the bottom end of the connecting rod 300 passes through the clamping groove 210, which can limit the sliding of the flower - basket sliding cover 200. To facilitate opening the flower - basket sliding cover 200, the bottom end of the connecting rod 300 is separated from the connecting end 110 and abuts against the clamping groove 210, and the flower - basket sliding cover 200 can be manipulated to slide through the connecting rod 300, which is convenient to use.

[0022] The flower - basket base 100 in this implementation scheme is used to hold thimble - type accessories to be cleaned, and a flower - basket sliding cover 200 is arranged at its upper opening. The opening can be opened and closed by the sliding of the flower - basket sliding cover 200. To facilitate the taking and placing of accessories, a connecting rod 300 is now arranged to cooperate with the flower - basket base 100 and / or the flower - basket sliding cover 200, and the following is a more detailed elaboration and description.

[0023] Case 1: When the connecting rod 300 is connected to the connecting end 110 of the flower - basket base 100, it is convenient to move the flower - basket base 100. The top end of the connecting rod 300 can extend above the cleaning tank, and the tool can be moved without the aid of tools. At the same time, the connecting rod 300 is connected with the clamping groove 210 in a matching manner, which can limit the sliding of the flower - basket sliding cover 200, avoiding the use of structures such as screws to limit the sliding of the flower - basket sliding cover 200.

[0024] Case 2: When the connecting rod 300 is separated from the connecting end 110 of the flower - basket base 100 and the bottom end of the connecting rod 300 passes through the clamping groove 210, the flower - basket base 100 can be manipulated to move through the connecting rod 300.

[0025] Therefore, by arranging the connecting rod 300, it is beneficial to the taking and placing of accessories and improves production efficiency.

[0026] In one embodiment, the connection end 110 is a threaded hole formed at the bottom center of the flower basket base 100 , and the bottom end of the connection rod 300 is connected to the threaded hole.

[0027] In other embodiments, L-shaped sliding buckles and magnetic components may be used to realize a detachable connection between the flower basket base 100 and the connecting rod 300, so as to facilitate assembly and disassembly and provide a stable connection.

[0028] In one embodiment, the slot 210 is a strip-shaped slot extending perpendicular to the sliding direction of the basket slide cover 200, and the width of the strip-shaped slot is adapted to the diameter of the connecting rod 300. Of course, the slot 210 may also be circular or other shapes, which is not limited thereto.

[0029] In this embodiment, the first cleaning tank 120 and the second cleaning tank 220 are tank structures that connect the cleaning pool and the cleaning cavity. In order to increase the water flow exchange rate between the cleaning tank and the cleaning cavity, the first cleaning tank 120 and the second cleaning tank 220 should be set larger while preventing accessories from falling.

[0030] In one embodiment, the first cleaning groove 120 and the second cleaning groove 220 are both strip-shaped grooves. The extension direction of the first cleaning groove 120 and the second cleaning groove 220 is arranged perpendicular to the sliding direction of the flower basket slide 200. The number of the first cleaning groove 120 and the second cleaning groove 220 is multiple and one-to-one corresponding. The first cleaning groove 120 and the second cleaning groove 220 are arranged in sequence along the sliding direction of the flower basket slide 200. When the flower basket slide 200 slides to the position of closing the opening, the first cleaning groove 120 is arranged in the vertical direction directly opposite to the corresponding second cleaning groove 220.

[0031] To facilitate the sliding connection between the flower basket base 100 and the flower basket slide cover 200 , the present embodiment further includes two slide grooves 130 formed on the inner walls on both sides of the flower basket base 100 , and both sides of the flower basket slide cover 200 are respectively slidably connected to the two slide grooves 130 .

[0032] In order to adapt to the sizes of different accessories, in one embodiment, the tooling further includes a plurality of first partitions 140 arranged in parallel, and the plurality of first partitions 140 are built into the flower basket base 100 to divide the cleaning chamber into a plurality of cleaning unit spaces. The size of the cleaning unit space should be determined according to the size of the accessories.

[0033] In a further embodiment, the tool further includes a second partition 150 perpendicular to the first partition 140 to separate a plurality of cleaning unit spaces.

[0034] To facilitate hanging the tooling in the cleaning tank, a support rod 310 is further included in this implementation. The support rod 310 is horizontally arranged and connected to the top end of the connecting rod 300 at its middle position. Both ends of the support rod 310 are placed on both sides of the cleaning pool.

[0035] It can be understood that the connection method between the support rod 310 and the connecting rod 300 is not limited. At the same time, the setting of the above support rod 310 also facilitates driving the connecting rod 300 to rotate, saving time and effort.

[0036] Compared with the prior art: Thimble-like accessories can be placed in the cleaning cavity, and the tooling can be placed in the cleaning tank. The first cleaning tank 120 and the second cleaning tank 220 facilitate connecting the cleaning cavity and the cleaning tank, thereby realizing the cleaning function. Among them, the bottom end of the connecting rod 300 can be connected to the connecting end 110. By manipulating the connecting rod 300, the entire tooling can be moved. At the same time, the bottom end of the connecting rod 300 passes through the card slot 210, which can limit the sliding of the flower basket sliding cover 200. To facilitate opening the flower basket sliding cover 200, the bottom end of the connecting rod 300 is separated from the connecting end 110 and abuts against the card slot 210. The flower basket sliding cover 200 can be manipulated to slide by the connecting rod 300, which is convenient to use.

[0037] The above is only the preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention should be covered by the protection scope of the present invention.

Claims

1. A tooling for cleaning and etching semiconductor thimble - like accessories, characterized in that, Comprising: A flower basket base, with an open top and a cleaning cavity formed by a downward depression at the top. A first cleaning groove communicating the cleaning cavity with the outside is formed on the flower basket base, and a connection end is provided on the flower basket base. A flower basket sliding cover, which is slidably connected to the top of the flower basket base for opening and closing the opening. A clamping groove and a second cleaning groove are formed on the flower basket sliding cover. When the flower basket sliding cover slides to the position of closing the opening, the clamping groove is arranged directly opposite to the connection end. A connecting rod, the bottom end of which passes through the clamping groove and is detachably connected to the connection end for connecting the flower basket base and limiting the sliding of the flower basket sliding cover.

2. The semiconductor thimble - type accessory cleaning and etching tooling according to claim 1, characterized in that, The connection end is a threaded hole formed at the center position of the bottom of the flower basket base, and the bottom end of the connecting rod is connected to the threaded hole.

3. The tooling for cleaning and etching semiconductor thimble - type accessories according to claim 1, characterized in that, The clamping groove is a strip-shaped groove extending along the direction perpendicular to the sliding direction of the flower basket sliding cover, and the width of the strip-shaped groove is adapted to the diameter of the connecting rod.

4. The tooling for cleaning and etching semiconductor thimble accessories according to claim 1, characterized in that, Both the first cleaning groove and the second cleaning groove are strip-shaped grooves.

5. The semiconductor thimble-like accessory cleaning and etching tooling according to claim 4, characterized in that The extending directions of the first cleaning groove and the second cleaning groove are arranged perpendicular to the sliding direction of the flower basket sliding cover.

6. The semiconductor thimble-like accessory cleaning and etching tooling according to claim 5, wherein The numbers of both the first cleaning groove and the second cleaning groove are multiple and correspond one by one. The first cleaning groove and the second cleaning groove are both arranged in sequence along the sliding direction of the flower basket sliding cover. When the flower basket sliding cover slides to the position of closing the opening, the first cleaning groove is arranged directly opposite to the corresponding second cleaning groove in the vertical direction.

7. The tooling for cleaning and etching semiconductor thimble accessories according to claim 1, wherein, It further includes two sliding grooves formed at the inner walls on both sides of the flower basket base, and both sides of the flower basket sliding cover are slidably connected to the two sliding grooves respectively.

8. The semiconductor thimble - type accessory cleaning and etching tooling according to claim 1, characterized in that, It further includes a plurality of first partitions arranged in parallel. The plurality of first partitions are built in the flower basket base for dividing the cleaning cavity into a plurality of cleaning unit spaces.

9. The semiconductor thimble-like accessory cleaning and etching tooling according to claim 8, characterized in that, It further includes a second partition perpendicular to the first partition for dividing the plurality of cleaning unit spaces.

10. The semiconductor thimble - type accessory cleaning and etching tooling according to claim 1, characterized in that, It further includes a support rod, which is horizontally arranged and the middle position of which is connected to the top end of the connecting rod.

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