Feeding cache piece box moving mechanism of cleaning machine

Abstract

The utility model discloses a cleaning machine feeding buffering piece box moving mechanism which comprises a protection frame, a feeding water tank arranged in the protection frame, supporting frames arranged on the front side and the rear side in the feeding water tank and a piece box moving mechanism arranged on one sides of the supporting frames. The wafer box moving mechanism is fixedly installed on the protection frame, multiple sets of limiting supporting blocks are further arranged on the supporting frames on the front side and the rear side, the lower ends of the limiting supporting blocks are fixedly installed on the supporting frames, and limiting grooves are symmetrically formed in the left sides and the right sides of the limiting supporting blocks and used for limiting wafer boxes. The wafer box moving mechanism has the advantages that the wafer box can be well lifted and carried through the wafer box moving mechanism, and the wafer box moving mechanism is convenient to operate, good in using effect and convenient to popularize and use for enterprises.

Description

Technical Field

[0001] The utility model relates to the technical field of cassette movement, in particular to a cassette movement mechanism for loading and buffering on a cleaning machine. Background Technique

[0002] A wafer cleaning machine is a device that can remove contaminants generated during the process of continuously processing and polishing wafers due to contact with various organic substances, particles, and metals. It is an important process step in the wafer manufacturing process. Before cleaning, the cassette to be cleaned needs to be placed in the buffer area for subsequent cleaning, and it also plays a role in safety protection to prevent random placement, as the contaminants on it will pollute other substances. Currently, the cassette is placed in the loading water tank in the buffer area, and the movement of the cassette in the loading water tank is mainly operated manually, with relatively low efficiency and high danger, and the operation and use effect is not good, which cannot meet the long-term processing and use needs of enterprises.

[0003] In view of the above situation, it is necessary to improve the existing cassette movement method to make it adapt to the current needs of cassette loading. Content of the Utility Model

[0004] The purpose of the utility model is to solve the above problems and design a cassette movement mechanism for loading and buffering on a cleaning machine.

[0005] To achieve the above purpose, the technical solution of the utility model is a cassette movement mechanism for loading and buffering on a cleaning machine, including a protective frame, a loading water tank arranged inside the protective frame, support frames arranged on the front and rear sides inside the loading water tank, and a cassette movement mechanism arranged on one side of the support frames. The two ends of the support frames are fixedly installed on the inner side of the protective frame, the cassette movement mechanism is fixedly installed on the protective frame, and a plurality of groups of limit support blocks are also arranged on the front and rear support frames. The lower ends of the limit support blocks are fixedly installed on the support frames, and limit grooves are symmetrically arranged on the left and right sides of the limit support blocks for limiting the cassette.

[0006] As a further supplement to the above technical solution, baffles are also arranged on the left and right sides inside the protective frame, and the two ends of the baffles are fixedly connected to the front and rear ends of the inner surface of the protective frame.

[0007] As a further supplement to the above technical solution, the cassette movement mechanism includes an X-axis movement mechanism, a Z-axis movement mechanism connected to the X-axis movement mechanism, a moving frame connected to the Z-axis movement mechanism, an upright frame arranged on the moving frame, and a moving block arranged on the upright frame. The X-axis movement mechanism is fixedly installed on the protective frame, the moving frame is arranged inside the protective frame and below the support frames, one end of the upright frame is fixedly connected to the moving frame, the other end of the upright frame is fixedly connected to the lower surface of the moving block, and the moving block is arranged inside the support frames on both sides.

[0008] For further supplement to this technical solution, the cross-section of the moving block is concave-shaped.

[0009] For further supplement to this technical solution, the left and right sides of the moving block are symmetrically provided with relief grooves, and bumps are provided on the moving block and within the relief grooves.

[0010] For further supplement to this technical solution, the X-axis moving mechanism includes a fixed frame, a lead screw mechanism arranged on the fixed frame, and a limiting frame connected to the lead screw mechanism. The Z-axis moving mechanism is fixedly installed on the limiting frame, the lead screw mechanism is fixedly installed on the fixed frame, and the fixed frame is fixedly installed on the outer surface of the protective frame.

[0011] For further supplement to this technical solution, the upper and lower sides of one end of the limiting frame close to the fixed frame are symmetrically provided with first sliders, an X-direction slide rail is provided on the fixed frame, and the first sliders are slidably installed on the X-direction slide rail.

[0012] For further supplement to this technical solution, the Z-axis moving mechanism includes a lifting cylinder arranged on the limiting frame and a moving plate connected to the lifting cylinder. The moving frame is fixedly installed on the moving plate, and the lifting cylinder is fixedly installed on the limiting frame.

[0013] For further supplement to this technical solution, the left and right sides of one end of the moving plate close to the limiting frame are symmetrically provided with second sliders, Z-direction slide rails are provided on the limiting frame at positions corresponding to the second sliders, the second sliders are slidably installed on the Z-direction slide rails, and the Z-direction slide rails are fixedly installed on the limiting frame.

[0014] Its beneficial effects are as follows: Through the film cassette moving mechanism, the film cassette can be well lifted and transported, the operation is convenient, the use effect is good, and it is convenient for enterprises to promote and use. Brief Description of the Drawings

[0015] Figure 1 is the overall structural schematic diagram of the present utility model;

[0016] Figure 2 is the partial structural schematic diagram of the first angle of the present utility model;

[0017] Figure 3 is the partial structural schematic diagram of the second angle of the present utility model;

[0018] In the figure, 1 is a protective frame; 2 is a feeding water tank; 3 is a support frame; 4 is a cassette moving mechanism; 41 is an X-axis moving mechanism; 411 is a fixed frame; 412 is a lead screw mechanism; 413 is a limiting frame; 414 is a first slider; 415 is an X-direction sliding rail; 42 is a Z-axis moving mechanism; 421 is a lifting cylinder; 422 is a moving plate; 423 is a second slider; 424 is a Z-direction sliding rail; 43 is a moving frame; 44 is a vertical frame; 45 is a moving block; 451 is a relief groove; 452 is a convex block; 5 is a limiting support block; 6 is a limiting groove; 7 is a baffle plate. Detailed implementation mode

[0019] For the convenience of those skilled in the art to understand this technical solution more clearly, the following will combine the attached Figures 1-3 Elaborate on the technical solution of the present utility model in detail:

[0020] A cassette moving mechanism 4 for a loading buffer of a cleaning machine includes a protective frame 1, a feeding water tank 2 arranged inside the protective frame 1, support frames 3 arranged on the front and rear sides inside the feeding water tank 2, and a cassette moving mechanism 4 arranged on one side of the support frame 3. The two ends of the support frame 3 are fixedly installed on the inner side of the protective frame 1, and the cassette moving mechanism 4 is fixedly installed on the protective frame 1. A plurality of groups of limiting support blocks 5 are also arranged on the front and rear support frames 3. The lower ends of the limiting support blocks 5 are fixedly installed on the support frames 3. Limiting grooves 6 are symmetrically arranged on the left and right sides of the limiting support blocks 5 for limiting the cassette. The multiple groups of support blocks form multiple cassette placement stations, which can support the cassette. The support frame 3 can support the limiting support blocks 5. The cassette moving mechanism 4 acts on the cassette and can control the lifting of the cassette and complete its handling.

[0021] Among them, baffle plates 7 are also arranged on the left and right sides inside the protective frame 1, and the two ends of the baffle plates 7 are fixedly connected to the front and rear ends of the inner surface of the protective frame 1.

[0022] The structure of the cassette moving mechanism 4 will be described in detail below. The cassette moving mechanism 4 includes an X-axis moving mechanism 41, a Z-axis moving mechanism 42 connected to the X-axis moving mechanism 41, a moving frame 43 connected to the Z-axis moving mechanism 42, a vertical frame 44 provided on the moving frame 43, and a moving block 45 provided on the vertical frame 44. The X-axis moving mechanism 41 is fixedly installed on the protective frame 1. The moving frame 43 is arranged inside the protective frame 1 and below the support frame 3. One end of the vertical frame 44 is fixedly connected to the moving frame 43, and the other end of the vertical frame 44 is fixedly connected to the lower surface of the moving block 45. The moving block 45 is arranged inside the two support frames 3 and can contact the cassette. By using the X-axis moving mechanism 41 and the Z-axis moving mechanism 42 in cooperation, the lifting and handling operations of the cassette can be completed, and the use effect is good. Specifically, the cross-section of the moving block 45 is concave. Further, relief grooves 451 are symmetrically provided on the left and right sides of the moving block 45. Protrusions 452 are provided on the moving block 45 and inside the relief grooves 451. The protrusions 452 can divide the relief grooves 451 into two parts and can play a role in limiting the bottom of the cassette. Among them, the X-axis moving mechanism 41 includes a fixed frame 411, a lead screw mechanism 412 provided on the fixed frame 411, and a limiting frame 413 connected to the lead screw mechanism 412. The Z-axis moving mechanism 42 is fixedly installed on the limiting frame 413. The lead screw mechanism 412 is fixedly installed on the fixed frame 411. The fixed frame 411 is fixedly installed on the outer surface of the protective frame 1. The lead screw mechanism 412 can control the position of the limiting frame in the X-axis moving mechanism, thereby driving the Z-axis moving mechanism 42, the moving frame 43, the vertical frame 44, and the moving block 45 to move, so as to complete the handling operation of the cassette. The Z-axis moving mechanism 42 can complete the lifting operation of the cassette. Among them, first sliders 414 are symmetrically provided on the upper and lower sides of one end of the limiting frame 413 close to the fixed frame 411. An X-direction slide rail 415 is provided on the fixed frame 411. The first sliders 414 are slidably installed on the X-direction slide rail 415. The first sliders 414 and the X-direction slide rail 415 can limit the movement of the limiting frame 413. The Z-axis moving mechanism 42 includes a lifting cylinder 421 provided on the limiting frame 413 and a moving plate 422 connected to the lifting cylinder 421. The moving frame 43 is fixedly installed on the moving plate 422. The lifting cylinder 421 is fixedly installed on the limiting frame 413. The lifting cylinder 421 can control the Z-direction movement of the moving plate 422. The movement of the moving plate 422 can drive the moving frame 43 to move, thereby realizing the lifting or lowering operation of the cassette. Preferably, second sliders 423 are symmetrically provided on the left and right sides of one end of the moving plate 422 close to the limiting frame 413. A Z-direction slide rail 424 is provided on the limiting frame 413 at the position corresponding to the second sliders 423. The second sliders 423 are slidably installed on the Z-direction slide rail 424. The Z-direction slide rail 424 is fixedly installed on the limiting frame 413 and can limit the movement of the moving plate 422.

[0023] The above technical solutions only reflect the preferred technical solutions of the technical solutions of the present utility model. Some changes that those skilled in the art of the present technology may make to some parts thereof all reflect the principles of the present utility model and fall within the protection scope of the present utility model.

Claims

1. A feeding buffer cassette moving mechanism for a cleaning machine, characterized in that, It includes a protective frame (1), a feeding water tank (2) arranged inside the protective frame (1), support frames (3) arranged on the front and rear sides inside the feeding water tank (2), and a film cassette moving mechanism (4) arranged on one side of the support frames (3). Both ends of the support frames (3) are fixedly installed on the inner side of the protective frame (1), and the film cassette moving mechanism (4) is fixedly installed on the protective frame (1). A plurality of groups of limit support blocks (5) are also arranged on the support frames (3) on the front and rear sides. The lower ends of the limit support blocks (5) are fixedly installed on the support frames (3), and limit grooves (6) are symmetrically arranged on the left and right sides of the limit support blocks (5) for limiting the film cassette.

2. The feeding buffer cassette moving mechanism of a cleaning machine according to claim 1, characterized in that, Baffles (7) are also arranged on the left and right sides inside the protective frame (1), and both ends of the baffles (7) are fixedly connected to the front and rear ends of the inner surface of the protective frame (1).

3. The moving mechanism of the loading buffer cassette of the cleaning machine according to claim 2, characterized in that, The film cassette moving mechanism (4) includes an X-axis moving mechanism (41), a Z-axis moving mechanism (42) connected to the X-axis moving mechanism (41), a moving frame (43) connected to the Z-axis moving mechanism (42), a vertical frame (44) arranged on the moving frame (43), and a moving block (45) arranged on the vertical frame (44). The X-axis moving mechanism (41) is fixedly installed on the protective frame (1). The moving frame (43) is arranged inside the protective frame (1) and below the support frames (3). One end of the vertical frame (44) is fixedly connected to the moving frame (43), and the other end of the vertical frame (44) is fixedly connected to the lower surface of the moving block (45). The moving block (45) is arranged inside the support frames (3) on both sides.

4. The mobile mechanism of the loading buffer cassette of a cleaning machine according to claim 3, characterized in that, The cross-section of the moving block (45) is concave.

5. The moving mechanism of the loading buffer cassette of a cleaning machine according to claim 4, characterized in that Yielding grooves (451) are symmetrically arranged on the left and right sides of the moving block (45), and convex blocks (452) are arranged on the moving block (45) and inside the yielding grooves (451).

6. The moving mechanism of the loading buffer cassette of a cleaning machine according to claim 5, characterized in that The X-axis moving mechanism (41) includes a fixed frame (411), a lead screw mechanism (412) arranged on the fixed frame (411), and a limiting frame (413) connected to the lead screw mechanism (412). The Z-axis moving mechanism (42) is fixedly installed on the limiting frame (413). The lead screw mechanism (412) is fixedly installed on the fixed frame (411), and the fixed frame (411) is fixedly installed on the outer surface of the protective frame (1).

7. The moving mechanism of the loading buffer cassette of the cleaning machine according to claim 6, characterized in that, First sliders (414) are symmetrically arranged on the upper and lower sides of one end of the limiting frame (413) close to the fixed frame (411). An X-direction sliding rail (415) is arranged on the fixed frame (411), and the first sliders (414) are slidably installed on the X-direction sliding rail (415).

8. The feeding buffer cassette moving mechanism of a cleaning machine according to claim 7, characterized in that, The Z-axis moving mechanism (42) includes a lifting cylinder (421) arranged on the limiting frame (413) and a moving plate (422) connected to the lifting cylinder (421). The moving frame (43) is fixedly installed on the moving plate (422), and the lifting cylinder (421) is fixedly installed on the limiting frame (413).

9. The moving mechanism of the loading buffer cassette of the cleaning machine according to claim 8, characterized in that, On both left and right sides of one end of the movable plate (422) close to the limiting frame (413), second sliders (423) are symmetrically arranged. At positions corresponding to the second sliders (423) on the limiting frame (413), Z-direction slide rails (424) are provided. The second sliders (423) are slidably mounted on the Z-direction slide rails (424), and the Z-direction slide rails (424) are fixedly mounted on the limiting frame (413).

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