Control circuit for driving motor of semiconductor device and driving motor
By designing the control circuit of the semiconductor device driving motor, the problem of not being able to open the process chamber during the shutdown state is solved, safe chamber operation and equipment maintenance are achieved, and the working efficiency of the equipment is improved.
Patent Information
- Application Number
- CN202421481267.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-26
- Publication Date
- 2025-07-04
- Estimated Expiration
- 2034-06-26
AI Technical Summary
In the prior art, semiconductor equipment cannot open the process chamber in a shutdown state, resulting in difficulty in maintenance and maintenance, and operation in a shutdown state may cause harm to the equipment and personnel.
A control circuit for driving a motor of a semiconductor device is designed, including a first circuit part and a second circuit part, and selectively conducts the first control sub-circuit or the second control sub-circuit through a switch sub-circuit, providing different control signals to control the action of the driving motor, and realizing the opening and closing of the process chamber.
The process chamber can be safely opened when the equipment is shut down, which improves the convenience of maintenance and maintenance and improves the working efficiency of the equipment.
Smart Images
Figure CN223067026U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of industrial control, and particularly to a control circuit for a drive motor of a process chamber of a semiconductor device, and a drive motor having the control circuit. Background Art
[0002] For many semiconductor devices used in the semiconductor manufacturing field, when it is necessary to debug, repair, and maintain their process chambers, the process chambers need to be opened. However, in an existing situation, some process chambers are closed when the equipment is shut down. This has caused certain obstacles. And performing the above operations when the equipment is powered on may cause harm to the equipment and personnel due to misoperation. In addition, when the equipment fails and shuts down, the process chamber cannot be opened for maintenance and repair. Summary of the Utility Model
[0003] The technical problem to be solved by the embodiments of this application is how to open the process chamber of a semiconductor device in a shutdown state.
[0004] To solve the above problems, this application discloses a control circuit for a drive motor of a semiconductor device. The control circuit may include: a first circuit part and a second circuit part disposed between a power supply and the drive motor; wherein, the first circuit part is used to provide a power input to the drive motor; the second circuit part includes a switch sub-circuit and a first control sub-circuit and a second control sub-circuit connected to the switch sub-circuit, and is used to provide a control signal to the drive motor; the switch sub-circuit can selectively conduct the first control sub-circuit or the second control sub-circuit; the first control sub-circuit provides a first control signal to the drive motor when it is conducted; the second control sub-circuit provides a second control signal to the drive motor when it is conducted.
[0005] According to some embodiments of this application, the first circuit part may include a first voltage conversion device, which is used to convert the supply voltage of the power supply into the operating voltage of the drive motor and output it.
[0006] According to some embodiments of this application, a first fuse may be disposed between the first voltage conversion device and the power supply.
[0007] According to some embodiments of this application, the switch sub-circuit may include a multi-contact control switch, and the first control sub-circuit or the second control sub-circuit can be conducted by switching the contact connection state.
[0008] According to some embodiments of the present application, the switching sub - circuit may further include a second voltage conversion device, which may be disposed between the power supply and the multi - contact control switch to convert the supply voltage of the power supply into the excitation voltage of the first control sub - circuit or the second control sub - circuit after conduction.
[0009] According to some embodiments of the present application, a second fuse may be provided between the second voltage conversion device and the power supply.
[0010] According to some embodiments of the present application, the first control sub - circuit may include a first relay, and the second sub - circuit includes a second relay. After conduction, the first relay or the second relay generates the first control signal or the second control signal based on the action of its own contacts.
[0011] According to some embodiments of the present application, the first control signal or the second control signal may include a start signal, a stop signal, a forward - reverse signal, and / or a rotation speed signal.
[0012] According to some embodiments of the present application, a capacitor is connected between the first circuit portion and the second circuit portion.
[0013] On the other hand, the present application provides a driving motor for a semiconductor device, and the driving motor may have the control circuit as described above. Description of the Drawings
[0014] The present application will be further described by way of exemplary embodiments, which will be described in detail through the drawings. These embodiments are not restrictive. In these embodiments, the same numbers represent the same structures, where:
[0015] Figure 1 is an exemplary structural schematic diagram of the control circuit shown in some embodiments of the present application;
[0016] Figure 2 is an exemplary structural composition diagram of the specific control components for implementing the control circuit shown in some embodiments of the present application. Detailed Description of the Embodiments
[0017] To make the above - mentioned objects, features, and advantages of the present application more obvious and understandable, the following will describe the specific embodiments of the present application in detail with reference to the drawings. Many specific details are set forth in the following description to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.
[0018] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by those skilled in the technical field to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in this application includes any and all combinations of one or more of the related listed items.
[0019] Some embodiments of this application will be described below. It should be noted that the following description is for illustrative purposes and is not intended to limit the protection scope of this application.
[0020] This application discloses a control circuit for driving a motor of a semiconductor device. The control circuit is separately connected to a power supply and a driving motor, and generates different control signals through a switching sub-circuit to control the driving motor to perform different actions, such as forward rotation or reverse rotation, so as to realize the opening and closing of a process chamber. The semiconductor device can be any device having a process chamber, including but not limited to lithography equipment such as a lithography machine, thin film deposition equipment such as chemical vapor deposition equipment, etching equipment such as a plasma etching machine / wet etching equipment, ion implantation equipment, diffusion and annealing equipment, cleaning equipment, packaging equipment, chemical mechanical polishing equipment, oxidation and oxynitridation equipment, etc.
[0021] Reference Figure 1 , Figure 1 is a schematic structural diagram of an exemplary control circuit shown in some embodiments of this application. As Figure 1 shown, the control circuit 100 may include a first circuit portion 110 and a second circuit portion 120.
[0022] The first circuit portion 110 may be disposed between the power supply P and the driving motor M for providing a power input to the driving motor. In a feasible embodiment, the first circuit portion 110 may include a first voltage conversion device T1 for converting the supply voltage of the power supply P into the operating voltage of the driving motor M. As Figure 1 shown in the example, if the power supply P is an AC power supply such as 220VAC and the operating voltage of the driving motor M is 110VAC, then the first voltage conversion device T1 may be a transformer for converting 220VAC into 110VAC to supply power to the driving motor M. Among them, the input end of the first voltage conversion device T1 may be connected to the phase line (L) and the neutral line (N) of the power supply P to achieve power input, and the output end may be connected to the driving motor M through a terminal block TB1. For example, the output end of the first voltage conversion device T1 may be connected to terminals 1 and 2 of the terminal block TB1, and then to the power terminals of the driving motor (such as Figure 1is marked as H and N) are connected to supply 110VAC power to the drive motor M. Of course, Figure 1 Regarding the first voltage conversion device T1 in [text] is only exemplary. If the power supply P is a DC power supply, the first voltage conversion device T1 can be an inverter for converting the DC power supply into the AC power supply required for the operation of the drive motor M.
[0023] A fuse (such as Figure 1 the fuse F1 and fuse F2 shown in [text]) can also be connected between the first voltage conversion device T1 and the power supply P. The fuse can achieve a protection function by melting in case of overload or short circuit to cut off the circuit, thereby protecting the electrical equipment and lines from overcurrent damage.
[0024] The second circuit part 120 can include a switch sub-circuit and a first control sub-circuit and a second control sub-circuit connected to the switch sub-circuit. The switch sub-circuit can include a multi-contact control switch K1, which can achieve conduction with the first control sub-circuit or conduction with the second control sub-circuit by switching the contact connection state. In a feasible embodiment, the multi-contact control switch K1 can include a first contact connected to the first control sub-circuit and a second contact connected to the second control sub-circuit respectively. The states of the first contact and the second contact can be normally open states. The multi-contact control switch K1 can be a mechanical knob switch, and the contact state can be changed by rotating the knob with an external force. Only as an example, the knob switch can be rotated leftward or rightward. After the knob is rotated leftward from the starting position, the state of the first contact can change from open to closed, so that the first control sub-circuit will be conducted. After the knob is rotated rightward from the starting position, the state of the second contact can change from open to closed, so that the second control sub-circuit will be conducted. Of course, the above knob switch is only exemplary, and the multi-contact control switch K1 can also be a push-button type. For example, a spring conductive gasket is arranged below the button, and the conductive gasket is pressed by pressing the button to connect with the subsequent circuit. For example, two buttons are set. Pressing button 1 can conduct the first control sub-circuit, and pressing button 2 can conduct the second control sub-circuit. Various deformations and adjustments such as the above are within the protection scope of this application.
[0025] The first control sub-circuit may include a first relay K2, and the second control sub-circuit may include a second relay K3. After the multi-contact control switch K1 conducts the circuit, the first relay K2 or the second relay K3 can output an electrical signal generated due to contact action (for example, the open contact changes from the open state to the closed state, or the normally closed contact changes from the closed state to the open state) by receiving an input signal (or referred to as an excitation signal, which may be an excitation voltage in this application). This electrical signal can be input to the drive motor M to achieve the specific actions of the drive motor M. In some examples, the electrical signal may include a first control signal (for example, output by the first relay K2) and a second control signal (for example, output by the second relay K3), and may include one or more of a start signal for controlling the start of the drive motor M, a stop signal for controlling the stop of the drive motor M, a forward and reverse signal for controlling the forward or reverse rotation of the drive motor M, a rotation speed signal for controlling the rotation speed of the drive motor M, etc. Similarly, the first control sub-circuit and the second control sub-circuit can also be connected to the drive motor M through a terminal block TB1. As Figure 1 shown, the output terminals of the first control sub-circuit and the second control sub-circuit can be connected to terminals 3 and 4 of the terminal block TB1, and then connected to the auxiliary terminals of the drive motor M (such as Figure 1 marked as H-(N) and N-(H) in
[0026] to output the above control signals to the drive motor M.
[0027] Similarly, a fuse may also be connected between the second voltage conversion device T2 and the power supply P (such as Figure 1The fuse F3 and fuse F4 shown in [figure]. Similar to the fuses provided in the first voltage conversion device T1 and the power supply P, the fuses F3 and F4 can also protect the second circuit portion 120 from overcurrent damage.
[0028] The control circuit 100 may further include a capacitor C, which can be connected between the first circuit portion 110 and the second circuit portion 120. In a feasible embodiment, the capacitor C may be a starting capacitor for providing additional torque when the driving motor M starts. It can be understood that the function of the driving motor M is to drive the chamber door of the process chamber of the semiconductor device to change its position, thereby realizing the opening and closing of the process chamber. Generally, the chamber door of the process chamber is relatively heavy, and the driving motor M requires a large torque to start normally. Therefore, setting the capacitor C can increase the starting torque and help the driving motor M start smoothly.
[0029] The driving motor M may also be connected to the ground wire G, for example, through terminal 5 of the terminal block TB, to ensure the safe grounding of the driving motor M and the control circuit 100.
[0030] The semiconductor device driving motor control circuit disclosed in this application can open the process chamber in the state of the semiconductor device being shut down, realizing the overhaul and maintenance of the process chamber, and improving the working efficiency of the semiconductor device.
[0031] This application also discloses a control device, which is built based on the circuit structure of the control circuit described above. Refer to Figure 2 , the control device 200 may include a housing 1. The interior of the housing 1 is hollow and can be used to accommodate other components and achieve functions such as waterproofing and dustproofing. Metal or plastic or a combination of both can be used to prepare the housing 1. For example, the housing 1 can be an aluminum alloy housing or an ABS plastic housing. A gland (including gland 7 and another gland provided on the right side of the housing 1) can be used for the entry and exit of wires. In one example, the power input line of the control circuit (for example, led out from the power supply P) can enter the interior of the housing 1 through the gland provided on the right side wall of the housing 1, be divided into two paths, respectively connected to the fuse 8 (also called a fuse) and then connected to the voltage converter 2. The voltage converter 2 can be a two-in-one transformer, which can achieve an output of converting 220VAC to 110VAC and an output of converting 220VAC to 24VDC. The output line of 24VDC will be connected to the knob switch 9 and then connected to two rows of relays 6. The two rows of relays 6 can achieve the functions of the first relay K2 and the second relay K3 as described above. A capacitor 10 can also be connected between the two rows of relays 6 and the 110VAC output line. As Figure 2As shown in the figure, two rows of relays 6 can be installed on the relay base 5. At the same time, the relay base 5 can be arranged on the guide rail 3 and can slide on the guide rail 3 to adjust the position to achieve a reasonable and compact arrangement of the components inside the housing 1. Additionally, the guide rail 3 can be omitted and the position of the relay base 5 can also be fixed. Different situations can be adjusted according to the size of the housing 1. Two lines led from the two rows of relays 6 and the 110VAC output line can be connected to different terminals on the terminal block 4 and then led out uniformly from the cable gland 7 to be connected to the drive motor.
[0032] Some embodiments of the present application also disclose a drive motor for a process chamber of a semiconductor device. The drive motor can have the control circuit as described above. The control circuit can independently control the operation of the drive motor when the entire semiconductor device is in a shutdown state, thereby opening or closing the process chamber.
[0033] The basic concepts of the present application have been described. Obviously, for those skilled in the art, the above detailed disclosure is only an example and does not constitute a limitation to this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements, and corrections to this specification. Such modifications, improvements, and corrections are proposed in this specification, so such modifications, improvements, and corrections still fall within the spirit and scope of the exemplary embodiments of this specification.
[0034] It should be understood that the embodiments described in this specification are only used to illustrate the principles of the embodiments of this specification. Other variations may also fall within the scope of this specification. Therefore, by way of example and not limitation, alternative configurations of the embodiments of this specification can be considered to be in line with the teachings of this specification. Accordingly, the embodiments of this specification are not limited to the embodiments explicitly introduced and described in this specification.
[0035] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered to be within the scope described in this specification.
[0036] The above-described embodiments only represent several implementation manners of the present invention. Their descriptions are relatively specific and detailed, but they should not be construed as limitations to the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the invention patent should be subject to the appended claims.
Claims
1. A control circuit for driving a motor of a semiconductor device, characterized in that, The control circuit includes: a first circuit part and a second circuit part arranged between the power supply and the drive motor; wherein, the first circuit part is used to provide power input to the drive motor; the second circuit part includes a switch sub-circuit and a first control sub-circuit and a second control sub-circuit connected to the switch sub-circuit, and is used to provide a control signal to the drive motor; the switch sub-circuit can selectively conduct the first control sub-circuit or the second control sub-circuit; the first control sub-circuit provides a first control signal to the drive motor when conducted; the second control sub-circuit provides a second control signal to the drive motor when conducted.
2. The control circuit according to claim 1, wherein The first circuit part includes a first voltage conversion device, which is used to convert the supply voltage of the power supply into the operating voltage of the drive motor and output it.
3. The control circuit according to claim 2, wherein A first fuse is arranged between the first voltage conversion device and the power supply.
4. The control circuit according to claim 1, characterized in that The switch sub-circuit includes a multi-contact control switch, and realizes the conduction of the first control sub-circuit or the second control sub-circuit by switching the contact connection state.
5. The control circuit according to claim 4, wherein The switch sub-circuit further includes a second voltage conversion device, and the second voltage conversion device is arranged between the power supply and the multi-contact control switch to convert the supply voltage of the power supply into the excitation voltage of the first control sub-circuit or the second control sub-circuit after conduction.
6. The control circuit according to claim 5, characterized in that, A second fuse is arranged between the second voltage conversion device and the power supply.
7. The control circuit according to claim 4, wherein The first control sub-circuit includes a first relay, the second control sub-circuit includes a second relay, and the first relay or the second relay generates the first control signal or the second control signal based on the action of its own contacts after conduction.
8. The control circuit according to claim 1, wherein The first control signal or the second control signal includes a start signal, a stop signal, a forward and reverse signal, and / or a rotation speed signal.
9. The control circuit according to claim 1, characterized in that, A capacitor is connected between the first circuit part and the second circuit part.
10. A driving motor for a semiconductor device, characterized in that, The drive motor has the control circuit according to any one of claims 1-9.