Substrate loading apparatus

Abstract

There is provided a substrate loading apparatus including: a first frame and a second frame facing each other; a support frame disposed between the first frame and the second frame, the support frame extending in a first direction and including a front surface adjacent to a substrate and a rear surface opposite to the front surface; and a support bar coupled with the support frame, the support bar extending in the second direction and supporting the substrate. The support bar includes an extension member and a coupling member configured to couple the extension member and the support frame to each other, the coupling member including a first surface protruding toward the support frame and being a curved surface having a first curvature. The support frame includes a second surface facing the first surface and being a curved surface having a first curvature of the first surface. The first surface and the second surface may be in surface contact with each other.

Description

[0001] Cross - Reference to Related Applications

[0002] This patent application claims the priority of Korean Patent Application No. 10-2023-0094674, filed on July 20, 2023, the entire content of which is incorporated herein by reference. Technical Field

[0003] In the present disclosure, a substrate loading device is provided, and more particularly, a substrate loading device having a frame including a curved surface is provided. Background Art

[0004] Generally, a display device includes a display panel in which a plurality of elements are disposed. When manufacturing a display panel, a metal thin film, an inorganic layer, etc. for forming these elements are formed on a substrate.

[0005] A substrate processing system is used to form a metal thin film, an inorganic layer, etc. on a substrate of a display panel. The substrate processing system includes a cassette configured to accommodate a substrate, a transfer device configured to transfer the substrate from the cassette, and a substrate processing device configured to receive the substrate from the transfer device and perform a substrate processing process to form a metal thin film and an inorganic layer.

[0006] Before performing the next process, a cleaning process is performed to remove contaminants formed on the surface of the substrate in the previous process. The cleaning process is performed by coupling the substrate to a fixing member of a substrate loading unit. Summary of the Utility Model

[0007] The present disclosure provides a substrate loading device that prevents a support rod for supporting a substrate from sagging and allows adjustment of the support rod.

[0008] Embodiments of the present disclosure provide a substrate loading device including: a first frame and a second frame facing each other; a support frame disposed between the first frame and the second frame, the support frame extending in a first direction and including a front surface adjacent to the substrate and a rear surface opposite to the front surface; and a support rod coupled to the support frame, the support rod extending in a second direction intersecting the first direction and supporting the substrate. The support rod includes an extension member extending in the second direction and a coupling member configured to couple the extension member and the support frame to each other. The coupling member includes a first surface protruding toward the support frame and being a curved surface having a first curvature. The support frame includes a second surface facing the first surface and being a curved surface having the first curvature of the first surface. The first surface and the second surface may be in surface contact (or face contact) with each other.

[0009] In an embodiment, the first surface and the second surface may be spherical surfaces.

[0010] In an embodiment, the support frame may have a first through hole defined in the support frame, overlapping with the second surface, extending in the second direction, and passing through the support frame. The coupling member may have a second through hole defined in the coupling member, overlapping with the first surface, extending in the second direction, and passing through the coupling member.

[0011] In an embodiment of the present disclosure, the substrate loading device may further include: a bolt passing through the first through hole and the second through hole; and a nut screwed onto the bolt. The coupling member and the support frame may be coupled to each other by the bolt and the nut.

[0012] In an embodiment, the nut may include a third surface that contacts the coupling member and is a curved surface having a second curvature. The coupling member may include a fourth surface that is in surface contact with the third surface and is a curved surface having the second curvature of the third surface.

[0013] In an embodiment, the head of the bolt may contact the surface of the support frame.

[0014] In an embodiment, the first curvature and the second curvature may be the same as each other.

[0015] In an embodiment, the third surface and the fourth surface may be spherical surfaces.

[0016] In an embodiment, the bolt may be spaced apart from the inner surface of the support frame defining the first through hole and the inner surface of the coupling member defining the second through hole by a predetermined distance.

[0017] In an embodiment, the second through hole may be provided as a plurality of second through holes, and the plurality of second through holes may include a 2-1 through hole and a 2-2 through hole arranged in the first direction, and the extension member is between the 2-1 through hole and the 2-2 through hole. The first through hole may be provided as a plurality of first through holes, and the plurality of first through holes may include a 1-1 through hole and a 1-2 through hole provided at positions corresponding to the positions of the 2-1 through hole and the 2-2 through hole, respectively.

[0018] In an embodiment, the second through hole may be provided as a plurality of second through holes, and the plurality of second through holes may include a 2-3 through hole and a 2-4 through hole arranged in a third direction intersecting the first direction and the second direction, and the extension member is between the 2-3 through hole and the 2-4 through hole. The first through hole may be provided as a plurality of first through holes, and the plurality of first through holes may include a 1-3 through hole and a 1-4 through hole provided at positions corresponding to the positions of the 2-3 through hole and the 2-4 through hole, respectively.

[0019] In an embodiment, the second surface may be a part of the front surface.

[0020] In an embodiment, a third through hole through which the extension member passes may be defined in the support frame, and the second surface may be a part of the rear surface.

[0021] In an embodiment, the first surface may be capable of moving along the second surface.

[0022] In an embodiment of the present disclosure, a substrate loading device includes: a support frame extending in a first direction, and the support frame includes a front surface adjacent to the substrate and a rear surface opposite to the front surface, and a support rod coupled to the support frame, the support rod extending in a second direction intersecting the first direction and supporting the substrate. The support rod includes an extension member extending in the second direction and a coupling member coupling the extension member and the support frame to each other. The coupling member may include a protruding surface, and the protruding surface is a spherical surface protruding toward the support frame. A seat groove may be defined in the support frame, and the protruding surface is seated in the seat groove. A surface of the protruding surface and the support frame defining the seat groove may be in surface contact with each other.

[0023] In an embodiment, a first through hole may be defined in the support frame, the first through hole overlapping with the seat groove, extending in the second direction, and passing through the support frame. A second through hole may be defined in the coupling member, the second through hole overlapping with the protruding surface, extending in the second direction, and passing through the coupling member.

[0024] In an embodiment, the substrate loading device may further include: a bolt passing through the first through hole and the second through hole; and a nut screwed onto the bolt. One surface of the nut may be a first curved surface, and a contact surface of the coupling member in contact with the one surface may be a second curved surface corresponding to the first curved surface.

[0025] In an embodiment, the head of the bolt may be in surface contact with the support frame surface.

[0026] In an embodiment, the first through hole may be provided as a plurality of first through holes, and the plurality of first through holes may include a first - 3 through hole and a first - 4 through hole provided in a third direction intersecting the first direction and the second direction, and the extension member is between the first - 3 through hole and the first - 4 through hole. The second through hole may be provided as a plurality of second through holes, and the plurality of second through holes may include a second - 3 through hole and a second - 4 through hole provided at positions corresponding to the positions of the first - 3 through hole and the first - 4 through hole, respectively.

[0027] In an embodiment, a third through hole through which the extension member passes is defined in the support frame, and the seat groove is defined on the rear surface. Description of the Drawings

[0028] The accompanying drawings are included to provide a further understanding of the present disclosure, and the drawings are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the present disclosure and, together with the description, are used to explain the principles of the present disclosure.

[0029] Figure 1 is a perspective view of a substrate loading device according to an embodiment of the present disclosure.

[0030] Figure 2 is a front view of a substrate loading device according to an embodiment of the present disclosure.

[0031] Figure 3 is a side view of a substrate loading device according to an embodiment of the present disclosure.

[0032] Figure 4 is a perspective view of a support rod and a support frame according to an embodiment of the present disclosure.

[0033] Figure 5 is a cross-sectional view before coupling the support rod and the support frame to each other according to an embodiment of the present disclosure.

[0034] Figure 6 is a cross-sectional view after coupling the support rod and the support frame to each other according to an embodiment of the present disclosure.

[0035] Figure 7A and Figure 7B is a cross-sectional view showing differences in the extension directions of support rods according to an embodiment of the present disclosure.

[0036] Figure 8 is a cross-sectional view after coupling the support rod and the support frame to each other according to an embodiment of the present disclosure.

[0037] Figure 9 is a perspective view of a support rod and a support frame according to an embodiment of the present disclosure. Detailed Description

[0038] In this specification, it will be understood that when an element (or region, layer, part, etc.) is referred to as being "on" another element, "connected to" or "coupled to" another element, the element may be directly on, connected to, or coupled to the other element, or intervening elements may be present.

[0039] Like reference numerals always refer to like elements. Further, in the drawings, for the effective description of the technical content, the thickness, ratio, and dimensions of the elements are exaggerated. As used herein, the term "and / or" includes any combination and all combinations that the associated configuration can define.

[0040] It will be understood that although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, without departing from the scope of the present disclosure, the first element may be referred to as the second element. Similarly, the second element may also be referred to as the first element. Unless otherwise specified, singular terms include plural forms.

[0041] For ease of description, as shown in the drawings, terms such as "below", "under", "above", and "on" are used herein to describe the relationship of one element to another (or elements). The above terms are relative concepts and are described based on the directions indicated in the drawings.

[0042] It will be understood that when used in this specification, the terms "comprising" and / or "having" specify the presence of the stated features, integers, steps, operations, elements, components, and / or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0043] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this disclosure belongs. It will also be understood that terms (such as those defined in a general dictionary) should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0044] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings.

[0045] Figure 1 is a perspective view of a substrate loading device LD according to an embodiment of the present disclosure.

[0046] Reference Figure 1 , the substrate loading device LD is a device for simultaneously loading a plurality of substrates SU. A plurality of slots SLU may be formed in the substrate loading device LD, and the substrates SU may be accommodated in each of the plurality of slots SLU. The plurality of substrates SU may be arranged in a third direction DR3. The plurality of substrates SU may be parallel to the plane defined by the first direction DR1 and the second direction DR2. The plurality of substrates SU may be arranged parallel to the plane defined by the first direction DR1 and the second direction DR2.

[0047] Here, the first direction DR1 and the second direction DR2 are orthogonal to each other, and the third direction DR3 may be a direction perpendicular to the plane defined by the first direction DR1 and the second direction DR2. The first direction DR1, the second direction DR2, and the third direction DR3 described in this specification are relative concepts and can be converted to other directions.

[0048] The substrate SU may be an element for a display device. For example, the substrate SU may be an ultra-thin glass (UTG) substrate having a relatively small thickness. The thickness of each of the plurality of substrates SU loaded in the substrate loading device LD according to an embodiment of the present disclosure may be about 100 μm or less.

[0049] The substrate loading device LD may include a first frame FR1, a second frame FR2, side frames SF, a support frame BF, side slit bars SP, and support bars SB. The first frame FR1 and the second frame FR2 may face each other in the third direction DR3. The first frame FR1 may form the upper side of the substrate loading device LD, and the second frame FR2 may form the lower side of the substrate loading device LD. The first frame FR1 and the second frame FR2 may be parallel to the plane defined by the first direction DR1 and the second direction DR2. The first frame FR1 and the second frame FR2 may be spaced apart from each other in the third direction DR3 and face each other.

[0050] The first frame FR1 and the second frame FR2 may include a heat-resistant material that does not deform at high temperatures. For example, the first frame FR1 and the second frame FR2 may include a metal material or a carbon composite material that does not deform even at a temperature of about 400 degrees, and the present disclosure is not limited to any one embodiment.

[0051] The side frames SF may be provided between the first frame FR1 and the second frame FR2 and extend in the third direction DR3. The side frames SF may constitute the left and right sides of the substrate loading device LD and connect the first frame FR1 and the second frame FR2 to each other. The side frames SF may be provided in plurality, and the plurality of side frames SF may be arranged along the first direction DR1. The plurality of side frames SF may be provided to be spaced apart from each other at regular intervals. The side frames SF may include a heat-resistant material that does not deform at high temperatures.

[0052] The side slit bars SP may be coupled to the inner surface of the side frames SF to support the substrate SU accommodated inside the substrate loading device LD. The side slit bars SP may be provided in plurality, and the side slit bars SP may be arranged to be spaced apart from each other at equal intervals in the third direction DR3 (the extending direction of the side frames SF). The minimum distance between two of the side slit bars SP that are closest to each other among the plurality of side slit bars SP may be greater than the thickness of the substrate SU. The side slit bars SP may include a heat-resistant material that does not deform at high temperatures.

[0053] A support frame BF (or rear frame) can be provided between a first frame FR1 and a second frame FR2 and extend along a third direction DR3. The support frame BF can form the rear side of the substrate loading device LD and connect the first frame FR1 and the second frame FR2 to each other. Since the support frame BF is not provided at the front side of the substrate loading device LD, the substrate SU can be able to enter and exit from the front of the substrate loading device LD. The support frame BF can be provided in plurality, and the plurality of support frames BF can be arranged along a second direction DR2. The support frames BF can be provided to be spaced apart from each other at regular intervals. The support frame BF can include a heat-resistant material that does not deform at high temperatures.

[0054] A support bar SB can be coupled to the support frame BF and extend in a first direction DR1. One end of the support bar SB can be coupled to the support frame BF, and the other end of the support bar SB can be a free end. The support bar SB can support the substrate SU loaded inside the substrate loading device LD. The support bar SB can be provided in plurality, and the plurality of support bars SB can be arranged along the third direction DR3. The plurality of support bars SB can be provided to be spaced apart from each other at equal intervals along the third direction DR3. The minimum distance between two support bars SB that are closest to each other among the plurality of support bars SB can be greater than the thickness of the substrate SU. The support bar SB can include a heat-resistant material that does not deform at high temperatures.

[0055] Figure 2 is a front view of a substrate loading device LD according to an embodiment of the present disclosure. Figure 3 is a side view of a substrate loading device LD according to an embodiment of the present disclosure. More specifically, Figure 2 is a front view of the Figure 1 substrate loading device LD viewed from direction A, and Figure 3 is a side view of the Figure 1 substrate loading device LD viewed from direction B.

[0056] Refer to Figure 2 and Figure 3 , the first frame FR1 and the second frame FR2 can respectively form the upper side and the lower side of the substrate loading device LD. The support frame BF can form the rear side of the substrate loading device LD, and the side frame SF can form the side surface of the substrate loading device LD. Since the front side of the substrate loading device LD is open, it is possible for the substrate SU to enter and exit from the front side of the substrate loading device LD.

[0057] The support bar SB can form, together with the side slit bar SP, a plurality of slits SLU in which the substrate SU is received. The plurality of slits SLU can be formed between adjacent support bars SB in the third direction DR3. The plurality of slits SLU can be formed between adjacent side slit bars SP in the third direction DR3. A substrate SU can be loaded in each of the plurality of slits SLU. The support bar SB and the side slit bar SP can support the lower surface of the substrate SU loaded in the slit SLU.

[0058] The support bar SB disposed adjacent to the central portion of each of the plurality of substrates SU in the second direction DR2 can prevent the central portion of the substrate SU from sagging. The side slit bar SP disposed adjacent to the side portion of each of the plurality of substrates SU in the second direction DR2 can prevent the side portion of the substrate SU from sagging. Figure 2 Two support bars SB supporting the center of the substrate SU are shown, but the arrangement and number of the support bars SB can be changed in consideration of the degree of sagging of the substrate SU and the stiffness required for the support bar SB to support the substrate SU.

[0059] The support frame BF can include a front surface FS adjacent to the substrate SU and a back surface BS facing away from the front surface FS. The support bar SB extending in the first direction DR1 can be coupled to the front surface FS of the support frame BF.

[0060] The support bar SB can include an extension member LC and a coupling member BC. The extension member LC can be coupled to the support frame BF and extend in the first direction DR1. The coupling member BC can be coupled to the front surface FS of the support frame BF and couple the extension member LC and the support frame BF to each other. The coupling member BC can be disposed between the front surface FS of the support frame BF and one end of the extension member LC.

[0061] Figure 4 is a perspective view of the support bar SB and the support frame BF according to an embodiment of the present disclosure.

[0062] Reference Figure 4 , the coupling member BC of the support bar SB can include a first surface CU1 (or protruding surface) protruding in a direction opposite to the first direction DR1. The first surface CU1 can protrude toward the front surface FS of the support frame BF. The first surface CU1 can have a first curvature and can be a protruding curved surface. The first curvature of the first surface CU1 can be the same as the curvature of the second surface CU2 defining the seat groove CG. The first surface CU1 can be a spherical surface protruding toward the support frame BF.

[0063] The second through hole HO2 may be defined in the coupling member BC, overlap with the first surface CU1, extend along the first direction DR1, and pass through the coupling member BC. The second through hole HO2 may be disposed at a position corresponding to the position of the first through hole HO1 to be described later. The second through hole HO2 may include a 2-1 through hole HO2-1 and a 2-2 through hole HO2-2. The 2-1 through hole HO2-1 may be disposed at a position corresponding to the position of the 1-1 through hole HO1-1. The 2-2 through hole HO2-2 may be disposed at a position corresponding to the position of the 1-2 through hole HO1-2.

[0064] The 2-1 through hole HO2-1 and the 2-2 through hole HO2-2 may be disposed to be spaced apart from each other along the third direction DR3, and the extension member LC is interposed between the 2-1 through hole HO2-1 and the 2-2 through hole HO2-2. The 2-1 through hole HO2-1 may be disposed above the extension member LC, and the 2-2 through hole HO2-2 may be disposed below the extension member LC.

[0065] A seat groove CG on which the first surface CU1 of the coupling member BC is seated may be defined in the support frame BF. The support frame BF may define the seat groove CG and include a second surface CU2, which is a curved surface facing the first surface CU1 and has the same first curvature as the first curvature of the first surface CU1 (i.e., has the first curvature of the first surface CU1). The second surface CU2 may be a part of the front surface FS of the support frame BF. The second surface CU2 may be a curved surface recessed toward the rear surface BS of the support frame BF. The second surface CU2 may be a spherical surface.

[0066] The first through hole HO1 (which overlaps with the second surface CU2, extends along the first direction DR1, and passes through the support frame BF) may be defined in the support frame BF. The position of the first through hole HO1 may correspond to the position of the second through hole HO2. The first through hole HO1 may include a 1-1 through hole HO1-1 and a 1-2 through hole HO1-2. The 1-1 through hole HO1-1 may be disposed at the upper part of the seat groove CG, and the 1-2 through hole HO1-2 may be disposed at the lower part of the seat groove CG.

[0067] Figure 5 is a cross-sectional view before coupling the support rod SB and the support frame BF according to an embodiment of the present disclosure. Figure 6 is a cross-sectional view after coupling the support rod SB and the support frame BF according to an embodiment of the present disclosure. More specifically, Figure 5 and Figure 6 show the support rod SB and the support frame BF corresponding to the region AA of Figure 3

[0068] Reference Figure 5 and Figure 6 The first surface CU1 and the second surface CU2 that form the seat groove CG can be curved surfaces having the same curvature as each other in cross-section. When the support rod SB and the support frame BF are coupled to each other, the first surface CU1 and the second surface CU2 can be in surface contact with each other. Therefore, the support rod SB and the support frame BF can be coupled to each other more firmly compared to when the first surface CU1 and the second surface CU2 are in point contact with each other. For example, when the second surface CU2 is flat and the first surface CU1 is curved, the first surface CU1 and the second surface CU2 are in point contact with each other, and it may be difficult for the bolt BO and the nut NU to be firmly fastened to each other. In addition, the combination of the bolt BO and the nut NU may become loose due to the impact and vibration caused by the repeated loading and transportation of the base SU (see Figure 1 ). This may cause the support rod SB to sag. This limitation can be solved by bringing the first surface CU1 and the second surface CU2 into surface contact with each other.

[0069] The coupling member BC of the support rod SB and the support frame BF can be coupled to each other by a bolt BO passing through the first through-hole HO1 and the second through-hole HO2 and a nut NU screwed onto the bolt BO. In cross-section, the main body portion of the bolt BO disposed above can pass through the second portion HO1b of the 1-1 through-hole HO1-1 and the 2-1 through-hole HO2-1. In cross-section, the head BH of the bolt BO disposed above can sit inside the first portion HO1a of the 1-1 through-hole HO1-1. The first portion HO1a of the first through-hole HO1 can be defined on the rear surface BS of the support frame BF. In cross-section, the head BH of the bolt BO can be in surface contact with a part of the rear surface BS of the support frame BF that defines the first portion HO1a. Threads can be defined at the end of the main body portion of the bolt BO disposed above in cross-section, and the nut NU can be coupled to the threads. In cross-section, when the support rod SB and the support frame BF are coupled to each other, the first center line CL1 of the support rod SB can be parallel to the first direction DR1.

[0070] In cross-section, the main body portion of the bolt BO disposed below can pass through the second portion HO2b of the 1-2 through-hole HO1-2 and the 2-2 through-hole HO2-2. In cross-section, the head BH of the bolt BO disposed below can sit inside the first portion HO2a of the 1-2 through-hole HO1-2. The first portion HO2a of the 1-2 through-hole HO1-2 can be defined on the rear surface BS of the support frame BF. In cross-section, the head BH of the bolt BO disposed below can be in surface contact with a part of the rear surface BS of the support frame BF that defines the first portion HO2a. Threads can be defined at the end of the main body portion of the bolt BO disposed below in cross-section, and the nut NU can be coupled to the threads.

[0071] The nut NU may include a third surface CU3 that contacts the coupling member BC and is a curved surface having a second curvature. The coupling member BC may include a fourth surface CU4 that contacts the third surface CU3 and is a curved surface having the same second curvature as the third surface CU3. The fourth surface CU4 may have a shape corresponding to the shape of the third surface CU3 of the nut NU. The third surface CU3 and the fourth surface CU4 may be part of a spherical surface. The fourth surface CU4 may be defined on one surface (hereinafter referred to as the front surface of the coupling member BC) adjacent to the extension member LC among the plurality of surfaces of the coupling member BC. As part of the front surface of the coupling member BC, the fourth surface CU4 may have a concave shape corresponding to the protruding shape of the third surface CU3. The third surface CU3 and the fourth surface CU4 may be in surface contact with each other so that the bolt BO and the nut NU can be stably coupled to each other.

[0072] The diameter of the bolt BO may be smaller than the diameters of the first through-hole HO1 and the second through-hole HO2. The bolt BO may be arranged to be spaced apart from the inner surface of the support frame BF defining the first through-hole HO1 and the inner surface of the coupling member BC defining the second through-hole HO2 by a predetermined distance. Accordingly, the coupling member BC may move partially when coupled to the support frame BF. This will be described later with reference to Figure 7A and Figure 7B This will be described later with reference to

[0073] Figure 7A and Figure 7B are cross-sectional views showing differences in the extension direction of the support bar SB according to an embodiment of the present disclosure. More specifically, Figure 7A is a cross-sectional view when the extension direction of the support bar SB is upward from the first direction DR1, and Figure 7B is a cross-sectional view when the extension direction of the support bar SB is downward from the first direction DR1.

[0074] Referring to Figure 7A and Figure 6 compared with the support bar SB in Figure 6 the support bar SB may rotate clockwise. The first surface CU1 may move along the second surface CU2 on the second surface CU2. The first surface CU1 may move clockwise along the second surface CU2 on the second surface CU2. Accordingly, compared with the first center line CL1 of the support bar SB in Figure 7A the second center line CL2 of the support bar SB in

[0075] Thus, even when the support rod SB rotates clockwise, the head BH of the bolt BO can contact a part of the rear surface BS of the support frame BF. Since the contact surface between the nut NU and the coupling member BC is a curved surface, the movement of the head BH of the bolt BO can be reduced while the support rod SB rotates.

[0076] For example, when the contact surface between the nut NU and the coupling member BC is linear in cross-section and the support rod SB rotates clockwise, the head BH of the bolt BO can move significantly. Thus, the head BH of the bolt BO makes point contact with the support frame BF, and the stress applied to the bolt BO can be concentrated in the contact area. Thus, an impact may be applied to the bolt BO and the nut NU, and the combination of the bolt BO and the nut NU may become loose. By making the contact surface between the nut NU and the coupling member BC a curved surface, the above limitations can be solved. In addition, by making the second curvature of the third surface CU3 and the fourth surface CU4 equal to the first curvature of the first surface CU1 and the second surface CU2, the movement of the head BH of the bolt BO can be minimized.

[0077] The bolt BO can be set to be spaced apart from the inner surface of the support frame BF defining the first through-hole HO1 and the inner surface of the coupling member BC defining the second through-hole HO2 by a predetermined distance. That is, since the diameter of each of the first through-hole HO1 and the second through-hole HO2 is larger than the diameter of the bolt BO, the bolt BO can pass through the first through-hole HO1 and the second through-hole HO2 even when the support rod SB rotates. That is, although the extending direction of the 1-1 through-hole HO1-1 and the extending direction of the 2-1 through-hole HO2-1 are not parallel to each other, the bolt BO can pass through the 1-1 through-hole HO1-1 and the 2-1 through-hole HO2-1. Although the extending direction of the 1-2 through-hole HO1-2 and the extending direction of the 2-2 through-hole HO2-2 are not parallel to each other, the bolt BO can pass through the 1-2 through-hole HO1-2 and the 2-2 through-hole HO2-2.

[0078] Reference Figure 7B , compared with Figure 6 's support rod SB, the support rod SB can rotate counterclockwise. The first surface CU1 can move counterclockwise along the second surface CU2 on the second surface CU2. Thus, compared with Figure 6 's first center line CL1 of the support rod SB, Figure 7B 's third center line CL3 of the support rod SB can extend downward. In this case, the bolt BO and the nut NU provided below can be coupled to each other more firmly than the bolt BO and the nut NU provided above.

[0079] Thus, even when the support rod SB rotates counterclockwise, the head BH of the bolt BO can make surface contact with a part of the rear surface BS of the support frame BF. Since the contact surface between the nut NU and the coupling member BC is a curved surface, the movement of the head BH of the bolt BO can be reduced while the support rod SB rotates. The second curvature of the third surface CU3 and the fourth surface CU4 can be the same as the first curvature of the first surface CU1 and the second surface CU2.

[0080] Figure 8 is a cross-sectional view of the support rod SB and the support frame BF coupled to each other according to an embodiment of the present disclosure. Except for the positions of the third through-hole HO3, the first surface CU1, the second surface CU2, the position of the coupling member BC, and the positions of the 1-1 through-hole HO1-1 and the 1-2 through-hole HO1-2, Figure 8 the support rod SB and the support frame BF shown in Figure 6 are the same as the support rod SB and the support frame BF shown in Figure 6 Therefore, the description of the components identical to the components of

[0081] Referring to Figure 8 , a third through-hole HO3 extending in the first direction DR1 can be defined in the center of the support frame BF. The extension member LC can pass through the third through-hole HO3. The coupling member BC can be coupled to one end of the extension member LC that has passed through the third through-hole HO3. The extension member LC of the support rod SB can be provided on the front surface FS, and the coupling member BC of the support rod SB can be provided on the rear surface BS.

[0082] The coupling member BC can include a first surface CU1 (projecting surface) projecting in the first direction DR1. The first surface CU1 can project toward the rear surface BS of the support frame BF. Except for the features of the first surface CU1 described above, the other features of the first surface CU1 are the same as the features of the first surface CU1 described in Figure 6 .

[0083] The support frame BF can define a seat groove CG and include a second surface CU2, which is a curved surface facing the first surface CU1 and having the same first curvature as the first surface CU1. The second surface CU2 can be a part of the rear surface BS of the support frame BF. The second surface CU2 can be a curved surface recessed toward the front surface FS of the support frame BF. The second surface CU2 can be a spherical surface. Except for the features of the second surface CU2 described above, the other features of the second surface CU2 are the same as the features of the second surface CU2 described in Figure 6 .

[0084] The first part HO1a of the first through-hole HO1-1 can be defined on the front surface FS of the support frame BF. The first part HO2a of the first through-hole HO1-2 can be provided on the front surface FS of the support frame BF. The head BH of the bolt BO received inside the first part HO1a or HO2a can be arranged adjacent to the front surface FS of the support frame BF, and the nut NU can be arranged adjacent to the rear surface BS of the support frame BF.

[0085] As Figure 8 shown, since the coupling member BC is provided on the rear surface BS of the support frame BF, the width of the slit SLU (see Figure 3 ) in the first direction DR1 can be widened.

[0086] Figure 9 is a perspective view of the support bar SB and the support frame BF according to an embodiment of the present disclosure.

[0087] Since the support bar SB and the support frame BF, except for the number of the first through-holes HO1 and the second through-holes HO2, Figure 9 are the same as the support bar SB and the support frame BF described in the reference Figure 4 , the description of the same components will be omitted.

[0088] Reference Figure 9 , the first through-hole HO1 can include the first through-hole HO1-1, the first through-hole HO1-2, the first through-hole HO1-3, and the first through-hole HO1-4. The first through-hole HO1-1 and the first through-hole HO1-2 can be arranged along the third direction DR3, and the first through-hole HO1-3 and the first through-hole HO1-4 can be arranged along the second direction DR2. The first through-hole HO1-1, the first through-hole HO1-2, the first through-hole HO1-3, and the first through-hole HO1-4 can be arranged at positions corresponding to the positions of the second through-hole HO2-1, the second through-hole HO2-2, the second through-hole HO2-3, and the second through-hole HO2-4, respectively.

[0089] The second through-hole HO2 can include the second through-hole HO2-1, the second through-hole HO2-2, the second through-hole HO2-3, and the second through-hole HO2-4. The second through-hole HO2-1 and the second through-hole HO2-2 can be arranged along the third direction DR3, and the extension member LC is interposed between the second through-hole HO2-1 and the second through-hole HO2-2. The second through-hole HO2-3 and the second through-hole HO2-4 can be arranged along the second direction DR2, and the extension member LC is interposed between the second through-hole HO2-3 and the second through-hole HO2-4.

[0090] By adjusting the tightening degree of the bolts passing through the second first through-hole HO2-1 and the second second through-hole HO2-2 and the nuts coupled to the bolts, the extending direction of the extending member LC can be adjusted to an upward direction or a downward direction. By adjusting the tightening degree of the bolts passing through the second third through-hole HO2-3 and the second fourth through-hole HO2-4 and the nuts coupled to the bolts, the extending direction of the extending member LC can be adjusted to a leftward direction or a rightward direction.

[0091] Since the substrate loading device according to an embodiment of the present disclosure is provided with a support frame having a seat groove defined in the substrate loading device and having a curved surface corresponding to the curved surface of the support rod, it is possible to firmly couple the support rod and the support frame to each other.

[0092] In addition, the extending direction of the support rod can be adjusted by adjusting the combination of the bolts and the nuts.

[0093] Although the above has been described with reference to embodiments of the present disclosure, those skilled in the art or those of ordinary skill in the art will understand that various modifications and changes can be made to the present disclosure without departing from the spirit of the present disclosure described in the claims and the scope of the technical field. Therefore, the technical scope of the present disclosure should not be limited to the content described in the detailed description of the specification, but should be determined by the claims.

Claims

1. A substrate loading device, characterized in that, The substrate loading device includes: A first frame and a second frame facing each other; A support frame disposed between the first frame and the second frame, the support frame extending in a first direction and including a front surface adjacent to the substrate and a rear surface opposite to the front surface; and A support rod coupled to the support frame, the support rod extending in a second direction intersecting the first direction and supporting the substrate, Wherein the support rod includes an extension member extending in the second direction and a coupling member coupling the extension member and the support frame to each other, Wherein the coupling member includes a first surface protruding toward the support frame and being a curved surface having a first curvature, Wherein the support frame includes a second surface facing the first surface and being a curved surface having the first curvature of the first surface, and Wherein the first surface and the second surface are in surface contact with each other.

2. The substrate loading device according to claim 1, wherein, The first surface and the second surface are spherical surfaces.

3. The substrate loading device according to claim 1, wherein: The support frame has a first through hole defined in the support frame, overlapping with the second surface, extending in the second direction, and passing through the support frame; and And The coupling member has a second through hole defined in the coupling member, overlapping with the first surface, extending in the second direction, and passing through the coupling member.

4. The substrate loading device according to claim 3, characterized in that, The substrate loading device further includes: A bolt passing through the first through hole and the second through hole; and A nut screwed onto the bolt, Wherein the coupling member and the support frame are coupled to each other by the bolt and the nut.

5. The substrate loading device according to claim 4, wherein: The nut includes a third surface contacting the coupling member and being a curved surface having a second curvature; and The coupling member includes a fourth surface in surface contact with the third surface and being a curved surface having the second curvature of the third surface.

6. The substrate loading device according to claim 4, characterized in that, The head of the bolt is in surface contact with the support frame.

7. The substrate loading device according to claim 5, characterized in that, The first curvature and the second curvature are the same as each other.

8. The substrate loading device according to claim 5, characterized in that, The third surface and the fourth surface are spherical surfaces.

9. The substrate loading device according to claim 4, characterized in that, The bolt is spaced apart from the inner surface of the support frame defining the first through hole and the inner surface of the coupling member defining the second through hole by a predetermined distance.

10. The substrate loading device according to claim 3, wherein: The second through hole is provided as a plurality of second through holes, and the plurality of second through holes include a 2-1 through hole and a 2-2 through hole arranged in the first direction, and the extension member is between the 2-1 through hole and the 2-2 through hole; and The first through hole is provided as a plurality of first through holes, and the plurality of first through holes include a 1-1 through hole and a 1-2 through hole arranged at positions corresponding to the positions of the 2-1 through hole and the 2-2 through hole respectively.

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